EP0260733B1 - Hochvakuumpumpe - Google Patents

Hochvakuumpumpe Download PDF

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Publication number
EP0260733B1
EP0260733B1 EP19870201531 EP87201531A EP0260733B1 EP 0260733 B1 EP0260733 B1 EP 0260733B1 EP 19870201531 EP19870201531 EP 19870201531 EP 87201531 A EP87201531 A EP 87201531A EP 0260733 B1 EP0260733 B1 EP 0260733B1
Authority
EP
European Patent Office
Prior art keywords
rotor
stator
pump
pipes
sleeves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Revoked
Application number
EP19870201531
Other languages
English (en)
French (fr)
Other versions
EP0260733A1 (de
Inventor
Jacobus Emmanuel Moonen Johannes
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ultra Centrifuge Nederland NV
Original Assignee
Ultra Centrifuge Nederland NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=19848399&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP0260733(B1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Ultra Centrifuge Nederland NV filed Critical Ultra Centrifuge Nederland NV
Publication of EP0260733A1 publication Critical patent/EP0260733A1/de
Application granted granted Critical
Publication of EP0260733B1 publication Critical patent/EP0260733B1/de
Anticipated expiration legal-status Critical
Revoked legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps

Definitions

  • the volume of the pump should be large, if at least a reasonable performance of the pump is required.
  • the pumping speed is not very high, and the compression ratio, that is to say, the ratio between the pre-vacuum pressure and the high-vacuum pressure (measured at the same moment) is relatively low.
  • a high rotary speed of the rotor should be maintained. Owing to the size of the rotor, this leads to a very high velocity of the outer surface of the rotor, and hence to substantial mechanical stresses.
  • a relatively low pre-pressure is required, which means that starting is only possible after the pressure in the entire system has, in one way or another, already been decreased to a given low value.
  • the object contemplated is achieved, according to the invention, with a pump according to the preamble of claim 1 and characterised in that the pipes or sleeves are cylindrical both on the inside and the outside and form together a labyrinth structure.
  • the pump according to the invention comprises at least three pairs of opposing surfaces, at least one of which is provided with a helical or spiral-shaped groove. For such a length of surfaces, the prior pump needs a larger height (about twice the length of the coaxial sleeve more).
  • the pump according to the invention can thus be constructed in more compact form.
  • the pump according to the invention is further much better optically blind than the prior pump (In the prior pump, a gas molecule present at the pre-vacuum side "sees" the high vacuum side _ in the pump accordig to the invention this is impossible).
  • back-leakage in particular of light gases, is prevented better than in the prior pump, which for light gases was found not to have a good pumping speed in practice, just because of the occurring back-leakage.
  • sleeve 17 Disposed coaxially within sleeve 14 is sleeve 17, which extends upwardly from the bottom of the stator casing.
  • Sleeve 17 is also provided on opposite sides with helical or spiral-shaped grooves 18, 19, respectively with decreasing depths in corresponding directions as with grooves 15, 16, respectively,in sleeve 14.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims (5)

1. Hochvakuumpumpe mit einem Rotor (1) für Rotationen mit hoher Geschwindigkeit um eine Längsachse und einem Stator (11), der koaxial zum Rotor angeordnet ist, wobei der Rotor und der Stator gegenüberliegende Oberflächen aufweisen, die in geringem Abstand entfernt liegen, wobei wenigstens ein Teilstück einer dieser Oberflächen eine schrauben- oder spiralförmige Ausnehmung (13) aufweist, und wobei Rotor und Stator jeweils so aufgebaut sind, daß sie über einen Teil ihrer Länge koaxiale und zylindrische Umhüllungen (8, 9, 14, 17) oder Leitungen mit verschiedenen Durchmessern und einem freien Ende aufweisen, wobei die Systeme der Rotorleitungen und Statorumhüllungen gegenseitig gegenüberliegend ausgerichtet und passend ineinander angeordnet sind, so daß eine Leitung des Systems der Rotorleitungen zwischen zwei Leitungen oder zwischen einer Leitung und der Wand (12) des Systems der Statorumhüllungen angeordnet ist, und wenigstens eine von jedem Paar von in geringem Abstand gegenüberliegenden Oberflächen der Statorleitung oder -wand und der Rotorleitung oder -wand bestückt ist mit einer schrauben- oder spiralförmigen Ausnehmung, dadurch gekennzeichnet, daß die Leitungen oder Umhüllungen sowohl innen als auch außen zylindrisch sind und zusammen eine Labyrinthstruktur bilden.
2. Hochvakuumpumpe nach Anspruch 1, dadurch gekennzeichnet, daß die Ausnehmungen in den jeweiligen Oberflächen so bemessen sind, daß die Tiefe der Ausnehmungen abnimmt von der Seite des Hochvakuums in der Pumpe zur Seite mit höherem Druck.
3. Hochvakuumpumpe nach den Ansprüchen 1 bis 2, dadurch gekennzeichnet, daß die radiale Abmessung des Rotationsspaltes abnimmt von der Seite des Hochvakuums in der Pumpe zur Seite mit höherem Druck.
4. Hochvakuumpumpe nach den Ansprüchen 1 bis 3, dadurch gekennzeichnet, daß eine Auslaßleitung im Stator vorgesehen ist zwischen einem oder mehreren Paaren aufeinanderfolgender Umhüllungen und/oder zwischen einer Umhüllung und einer angrenzenden Wand, wobei die Leitung ein Rückschlagventil aufweist, und die Leitung oder die Leitungen mit dem umgebenden Raum oder einer Vor-Vakuumpumpe in Verbindung stehen.
5. Hochvakuumpumpe nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, daß die letzte Druckstufe auf der Vor-Vakuumseite als Luftlager ausgebildet ist.
EP19870201531 1986-08-12 1987-08-12 Hochvakuumpumpe Revoked EP0260733B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL8602052A NL8602052A (nl) 1986-08-12 1986-08-12 Hoogvacuumpomp.
NL8602052 1986-08-12

Publications (2)

Publication Number Publication Date
EP0260733A1 EP0260733A1 (de) 1988-03-23
EP0260733B1 true EP0260733B1 (de) 1991-03-13

Family

ID=19848399

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19870201531 Revoked EP0260733B1 (de) 1986-08-12 1987-08-12 Hochvakuumpumpe

Country Status (3)

Country Link
EP (1) EP0260733B1 (de)
DE (1) DE3768593D1 (de)
NL (1) NL8602052A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7134835B2 (en) 2003-06-05 2006-11-14 Varian S.P.A. Process for manufacturing a stator for vacuum pump and stator obtained thereby

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0617036Y2 (ja) * 1988-02-17 1994-05-02 株式会社島津製作所 ターボ分子ポンプ
GB2226081A (en) * 1988-12-14 1990-06-20 Rolls Royce Plc Fluid friction pump or turbine
JPH03222895A (ja) * 1990-01-26 1991-10-01 Hitachi Koki Co Ltd ねじ溝真空ポンプ
GB9525337D0 (en) * 1995-12-12 1996-02-14 Boc Group Plc Improvements in vacuum pumps
GB9609281D0 (en) * 1996-05-03 1996-07-10 Boc Group Plc Improved vacuum pumps
DE19632375A1 (de) * 1996-08-10 1998-02-19 Pfeiffer Vacuum Gmbh Gasreibungspumpe
DE19756837C2 (de) * 1997-12-19 1999-09-30 K Busch Gmbh Druck & Vakuum Dr Molekular- und Viskositätspumpe
GB9927493D0 (en) * 1999-11-19 2000-01-19 Boc Group Plc Improved vacuum pumps
DE10149366A1 (de) * 2001-10-06 2003-04-17 Leybold Vakuum Gmbh Axial fördernde Reibungsvakuumpumpe
JP2003172291A (ja) * 2001-12-04 2003-06-20 Boc Edwards Technologies Ltd 真空ポンプ
JP3961273B2 (ja) * 2001-12-04 2007-08-22 Ｂｏｃエドワーズ株式会社 真空ポンプ
DE102005008643A1 (de) * 2005-02-25 2006-08-31 Leybold Vacuum Gmbh Holweck-Vakuumpumpe
DE102013214662A1 (de) * 2013-07-26 2015-01-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP3657021B1 (de) * 2018-11-21 2020-11-11 Pfeiffer Vacuum Gmbh Vakuumpumpe
GB2601313A (en) * 2020-11-25 2022-06-01 Edwards Ltd Drag pumping mechanism for a turbomolecular pump

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL75723C (de) * 1900-01-01
US2730297A (en) * 1950-04-12 1956-01-10 Hartford Nat Bank & Trust Co High-vacuum molecular pump
DE1010235B (de) * 1955-04-22 1957-06-13 Arthur Pfeiffer Fa Molekularpumpe

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7134835B2 (en) 2003-06-05 2006-11-14 Varian S.P.A. Process for manufacturing a stator for vacuum pump and stator obtained thereby

Also Published As

Publication number Publication date
NL8602052A (nl) 1988-03-01
DE3768593D1 (de) 1991-04-18
EP0260733A1 (de) 1988-03-23

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