EP0238529A1 - Verfahren zur optischen kontrolle von gegenständen, wie zum beispiel integrierten schaltungen - Google Patents
Verfahren zur optischen kontrolle von gegenständen, wie zum beispiel integrierten schaltungenInfo
- Publication number
- EP0238529A1 EP0238529A1 EP19860905320 EP86905320A EP0238529A1 EP 0238529 A1 EP0238529 A1 EP 0238529A1 EP 19860905320 EP19860905320 EP 19860905320 EP 86905320 A EP86905320 A EP 86905320A EP 0238529 A1 EP0238529 A1 EP 0238529A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- image
- recorded
- station
- images
- binary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000000034 method Methods 0.000 title claims description 33
- 230000003287 optical effect Effects 0.000 title claims description 30
- 230000007547 defect Effects 0.000 claims abstract description 23
- 235000012431 wafers Nutrition 0.000 claims description 26
- 230000015654 memory Effects 0.000 claims description 14
- 230000002950 deficient Effects 0.000 claims description 9
- 238000000605 extraction Methods 0.000 claims description 7
- 230000001427 coherent effect Effects 0.000 claims description 3
- 239000000428 dust Substances 0.000 claims description 3
- 238000005286 illumination Methods 0.000 claims description 3
- 238000001454 recorded image Methods 0.000 claims description 2
- 235000002566 Capsicum Nutrition 0.000 claims 1
- 239000006002 Pepper Substances 0.000 claims 1
- 235000016761 Piper aduncum Nutrition 0.000 claims 1
- 235000017804 Piper guineense Nutrition 0.000 claims 1
- 244000203593 Piper nigrum Species 0.000 claims 1
- 235000008184 Piper nigrum Nutrition 0.000 claims 1
- 230000010339 dilation Effects 0.000 claims 1
- 238000002073 fluorescence micrograph Methods 0.000 claims 1
- 239000002184 metal Substances 0.000 description 17
- 238000001514 detection method Methods 0.000 description 10
- 238000012545 processing Methods 0.000 description 10
- 238000007689 inspection Methods 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 9
- 238000005520 cutting process Methods 0.000 description 8
- 238000012546 transfer Methods 0.000 description 8
- 238000006073 displacement reaction Methods 0.000 description 7
- 238000009434 installation Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 239000012528 membrane Substances 0.000 description 5
- 238000013519 translation Methods 0.000 description 5
- 238000004364 calculation method Methods 0.000 description 4
- 239000003086 colorant Substances 0.000 description 4
- 238000003384 imaging method Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000002161 passivation Methods 0.000 description 3
- 210000000707 wrist Anatomy 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 238000004873 anchoring Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000004737 colorimetric analysis Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000004069 differentiation Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010191 image analysis Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 239000012788 optical film Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 230000011664 signaling Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
- 238000012800 visualization Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
- G06T7/001—Industrial image inspection using an image reference approach
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/10—Image acquisition modality
- G06T2207/10056—Microscopic image
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/30—Subject of image; Context of image processing
- G06T2207/30108—Industrial image inspection
- G06T2207/30148—Semiconductor; IC; Wafer
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8513678 | 1985-09-16 | ||
| FR8513678A FR2587489B1 (fr) | 1985-09-16 | 1985-09-16 | Procede de controle optique automatique d'objets tels que des circuits integres |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| EP0238529A1 true EP0238529A1 (de) | 1987-09-30 |
Family
ID=9322932
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP19860905320 Withdrawn EP0238529A1 (de) | 1985-09-16 | 1986-09-15 | Verfahren zur optischen kontrolle von gegenständen, wie zum beispiel integrierten schaltungen |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP0238529A1 (de) |
| JP (1) | JPS63500976A (de) |
| FR (1) | FR2587489B1 (de) |
| WO (1) | WO1987001806A1 (de) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2626074B1 (fr) * | 1988-01-18 | 1990-05-04 | Commissariat Energie Atomique | Procede d'optimisation du contraste dans une image d'un echantillon |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0054596B1 (de) * | 1980-12-18 | 1985-05-29 | International Business Machines Corporation | Verfahren für die Inspektion und die automatische Sortierung von Objekten, die Konfigurationen mit dimensionellen Toleranzen aufweisen und platzabhängige Kriterien für die Verwerfung, Anlage und Schaltung dafür |
| EP0124113B1 (de) * | 1983-04-28 | 1989-03-01 | Hitachi, Ltd. | Verfahren und Einrichtung zur Feststellung von Fehlern in Mustern |
| JPS6021523A (ja) * | 1983-07-15 | 1985-02-02 | Toshiba Corp | マスク欠陥検査方法 |
| US4595289A (en) * | 1984-01-25 | 1986-06-17 | At&T Bell Laboratories | Inspection system utilizing dark-field illumination |
| US4659220A (en) * | 1984-10-22 | 1987-04-21 | International Business Machines Corporation | Optical inspection system for semiconductor wafers |
-
1985
- 1985-09-16 FR FR8513678A patent/FR2587489B1/fr not_active Expired
-
1986
- 1986-09-15 WO PCT/FR1986/000307 patent/WO1987001806A1/fr not_active Application Discontinuation
- 1986-09-15 JP JP50514386A patent/JPS63500976A/ja active Pending
- 1986-09-15 EP EP19860905320 patent/EP0238529A1/de not_active Withdrawn
Non-Patent Citations (1)
| Title |
|---|
| See references of WO8701806A1 * |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2587489B1 (fr) | 1988-07-08 |
| FR2587489A1 (fr) | 1987-03-20 |
| JPS63500976A (ja) | 1988-04-07 |
| WO1987001806A1 (fr) | 1987-03-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
| 17P | Request for examination filed |
Effective date: 19870505 |
|
| AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AT BE CH DE FR GB IT LI LU NL SE |
|
| 17Q | First examination report despatched |
Effective date: 19890202 |
|
| STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
| 18D | Application deemed to be withdrawn |
Effective date: 19890613 |
|
| RIN1 | Information on inventor provided before grant (corrected) |
Inventor name: NOACK, JEAN-CLAUDE Inventor name: GEORGEL, JEAN-CLAUDE Inventor name: GERBER, JACQUES Inventor name: HIGNETTE, OLIVIER |