FR2587489B1 - Procede de controle optique automatique d'objets tels que des circuits integres - Google Patents

Procede de controle optique automatique d'objets tels que des circuits integres

Info

Publication number
FR2587489B1
FR2587489B1 FR8513678A FR8513678A FR2587489B1 FR 2587489 B1 FR2587489 B1 FR 2587489B1 FR 8513678 A FR8513678 A FR 8513678A FR 8513678 A FR8513678 A FR 8513678A FR 2587489 B1 FR2587489 B1 FR 2587489B1
Authority
FR
France
Prior art keywords
objects
integrated circuits
optical control
automatic optical
automatic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8513678A
Other languages
English (en)
Other versions
FR2587489A1 (fr
Inventor
Jean-Claude Georgel
Jacques Gerber
Olivier Hignette
Jean-Claude Noack
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bertin Technologies SAS
Original Assignee
Bertin et Cie SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bertin et Cie SA filed Critical Bertin et Cie SA
Priority to FR8513678A priority Critical patent/FR2587489B1/fr
Priority to JP50514386A priority patent/JPS63500976A/ja
Priority to PCT/FR1986/000307 priority patent/WO1987001806A1/fr
Priority to EP19860905320 priority patent/EP0238529A1/fr
Publication of FR2587489A1 publication Critical patent/FR2587489A1/fr
Application granted granted Critical
Publication of FR2587489B1 publication Critical patent/FR2587489B1/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G06T7/001—Industrial image inspection using an image reference approach
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/10—Image acquisition modality
    • G06T2207/10056—Microscopic image
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30148—Semiconductor; IC; Wafer

Landscapes

  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Health & Medical Sciences (AREA)
  • Quality & Reliability (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Theoretical Computer Science (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
FR8513678A 1985-09-16 1985-09-16 Procede de controle optique automatique d'objets tels que des circuits integres Expired FR2587489B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR8513678A FR2587489B1 (fr) 1985-09-16 1985-09-16 Procede de controle optique automatique d'objets tels que des circuits integres
JP50514386A JPS63500976A (ja) 1985-09-16 1986-09-15 集積回路の如き物体の自動光学検査方法
PCT/FR1986/000307 WO1987001806A1 (fr) 1985-09-16 1986-09-15 Procede de controle optique automatique d'objets tels que des circuits integres
EP19860905320 EP0238529A1 (fr) 1985-09-16 1986-09-15 Procede de controle optique automatique d'objets tels que des circuits integres

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8513678A FR2587489B1 (fr) 1985-09-16 1985-09-16 Procede de controle optique automatique d'objets tels que des circuits integres

Publications (2)

Publication Number Publication Date
FR2587489A1 FR2587489A1 (fr) 1987-03-20
FR2587489B1 true FR2587489B1 (fr) 1988-07-08

Family

ID=9322932

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8513678A Expired FR2587489B1 (fr) 1985-09-16 1985-09-16 Procede de controle optique automatique d'objets tels que des circuits integres

Country Status (4)

Country Link
EP (1) EP0238529A1 (fr)
JP (1) JPS63500976A (fr)
FR (1) FR2587489B1 (fr)
WO (1) WO1987001806A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2626074B1 (fr) * 1988-01-18 1990-05-04 Commissariat Energie Atomique Procede d'optimisation du contraste dans une image d'un echantillon

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3070721D1 (en) * 1980-12-18 1985-07-04 Ibm Process for inspecting and automatically classifying objects presenting configurations with dimensional tolerances and variable rejecting criteria depending on placement, apparatus and circuits therefor
DE3476916D1 (en) * 1983-04-28 1989-04-06 Hitachi Ltd Method of detecting pattern defect and its apparatus
JPS6021523A (ja) * 1983-07-15 1985-02-02 Toshiba Corp マスク欠陥検査方法
US4595289A (en) * 1984-01-25 1986-06-17 At&T Bell Laboratories Inspection system utilizing dark-field illumination
US4659220A (en) * 1984-10-22 1987-04-21 International Business Machines Corporation Optical inspection system for semiconductor wafers

Also Published As

Publication number Publication date
JPS63500976A (ja) 1988-04-07
WO1987001806A1 (fr) 1987-03-26
EP0238529A1 (fr) 1987-09-30
FR2587489A1 (fr) 1987-03-20

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Legal Events

Date Code Title Description
CL Concession to grant licenses
ST Notification of lapse