EP0216086A2 - Automatic conveying and handling device for articles, especially printed circuit boards - Google Patents

Automatic conveying and handling device for articles, especially printed circuit boards

Info

Publication number
EP0216086A2
EP0216086A2 EP86110668A EP86110668A EP0216086A2 EP 0216086 A2 EP0216086 A2 EP 0216086A2 EP 86110668 A EP86110668 A EP 86110668A EP 86110668 A EP86110668 A EP 86110668A EP 0216086 A2 EP0216086 A2 EP 0216086A2
Authority
EP
European Patent Office
Prior art keywords
goods
transport
printed circuit
circuit boards
treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
EP86110668A
Other languages
German (de)
French (fr)
Other versions
EP0216086A3 (en
Inventor
Horst Bläsing
Thomas Kosikowski
Rudolf Kreisel
Ludwig Mankut
Walter Meyer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bayer Pharma AG
Original Assignee
Schering AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schering AG filed Critical Schering AG
Publication of EP0216086A2 publication Critical patent/EP0216086A2/en
Publication of EP0216086A3 publication Critical patent/EP0216086A3/en
Ceased legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G35/00Mechanical conveyors not otherwise provided for
    • B65G35/06Mechanical conveyors not otherwise provided for comprising a load-carrier moving along a path, e.g. a closed path, and adapted to be engaged by any one of a series of traction elements spaced along the path
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/0061Tools for holding the circuit boards during processing; handling transport of printed circuit boards
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0085Apparatus for treatments of printed circuits with liquids not provided for in groups H05K3/02 - H05K3/46; conveyors and holding means therefor
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S134/00Cleaning and liquid contact with solids
    • Y10S134/902Semiconductor wafer

Definitions

  • the invention relates to an automatic transport and loading handling device for goods, in particular printed circuit boards, and a method using this facility.
  • This treatment is generally done using immersion techniques in containers, which are mostly part of facilities, the Transport is carried out by means of goods carriers, which are the flat plates predominantly horizontally through the respective treatment solutions promote.
  • the object of the present invention is to create a direction and a method which an automatic transport of goods and treatment with the smallest space requirements lichen.
  • the device according to the invention enables automatic Transportation of flat goods, especially printed circuit boards, and their treatment in a particularly space-saving design, what technically means a breakthrough.
  • This device is suitable for all treatments from flat Goods, especially of printed circuit boards, in which treatment solutions are used.
  • Plate (16) is transported horizontally on a continuously or discontinuously operating conveyor belt (11) .
  • plate (16) With tilting device (17) plate (16) is brought from the horizontal to the vertical position.
  • the transport device (18) takes over the plate (16) on a goods rail (19) with clips (10) .
  • the transport device (18) with the plate (16) then sets vertically into the container (20) .
  • the plates are transported within the container, the entire goods package is additionally moved in a reversing manner by means of a goods movement (8) .
  • the plates are transferred by transport device (18) in a manner similar to that in the input station.
  • Conveyor belt (11) transports plate (16) continuously or discontinuously.
  • the goods rail with clamps is preferably passed through a double knob belt (21) and fed back to the entrance area.
  • the goods carrier (1) is placed on the slide guide bar.
  • the feed device (3) preferably structurally solved by a geared motor (4) , eccentric (5) and slide (6) , shifts goods carriers by one position.
  • the last goods carrier is lifted out of the guide bar by a transport device (18) .
  • the goods carrier chain (7) is reversed by goods movement (8) .
  • Feed device (3) is attached to the goods movement rail (9) , which causes the goods carrier chain (7) to remain closed.
  • FIG. 3 illustrates the return transport of the goods carrier Brackets.
  • Knob tape (21) transports goods carriers back to the entry area position B. During transport, clamps (10) cross the stripping container (12) , sink (13) and drying zone (14) . Knob tape (21) is designed so that the product carrier (1) can move freely in it and thus the partition walls (15) can pass over.

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Intermediate Stations On Conveyors (AREA)
  • Multi-Process Working Machines And Systems (AREA)

Abstract

Die Erfindung betrifft eine automatische Transport- und Behandlungseinrichtung für Waren, insbesondere Leiterplatten, dadurch gekennzeichnet, daß die Transporteinrichtung mit Warenträgern ausgestattet ist, die in zwei Ebenen oberhalb der Behandlungsgefäße angeordnet sind, wobei die untere Ebene für den an den Trägern befestigten Waren durch die Behandlungsflüssigkeit und die obere Ebene für den Rücktransport der Warenträger vorgesehen ist, sowie ein Verfahren unter Verwendung dieser Einrichtung. Die erfindungsgemäße Einrichtung eignet sich insbesondere zur Fertigung von gedruckten Schaltungen aus Leiterplatten für die Elektronik und Elektrotechnik.The invention relates to an automatic transport and treatment device for goods, in particular printed circuit boards, characterized in that the transport device is equipped with goods carriers which are arranged in two levels above the treatment vessels, the lower level for the goods attached to the carriers by the treatment liquid and the upper level is intended for the return transport of the goods carriers, and a method using this device. The device according to the invention is particularly suitable for the production of printed circuits from printed circuit boards for electronics and electrical engineering.

Description

Die Erfindung betrifft eine automatische Transport- und Be­ handlungseinrichtung für Waren, insbesondere Leiterplatten, sowie ein Verfahren unter Verwendung dieser Einrichtung. The invention relates to an automatic transport and loading handling device for goods, in particular printed circuit boards, and a method using this facility.

Einrichtungen und Verfahren der eingangs genannten Art sind bereits bekannt. Diese finden Verwendung insbesondere zur Herstellung von gedruckten Schaltungen, wofür die Leiter­ platten in unterschiedlichen Prozessstufen, wie Ätzen, Aktivie­ ren, chemisch Metallisieren, galvanisch Metallisieren unter anderem unter Zwischenschaltung von Wasch- und Trockenschritten behandelt werden. Facilities and procedures of the type mentioned are already known. These are used in particular for Manufacture of printed circuits for which the ladder plates in different process stages, such as etching, activation ren, chemical metallization, galvanic metallization under inter alia with the interposition of washing and drying steps be treated.

Diese Behandlung erfolgt im allgemeinen durch Eintauchtechniken in Behältern, die meist Teil von Einrichtungen sind, wobei die Beförderung mittels Warenträger erfolgt, welche die flachen Platten vorwiegend horizontal durch die jeweiligen Behandlungslösungen fördern. This treatment is generally done using immersion techniques in containers, which are mostly part of facilities, the Transport is carried out by means of goods carriers, which are the flat plates predominantly horizontally through the respective treatment solutions promote.

Ein Nachteil dieser Techniken ist es, daß die Platten in der Regel mittels Einklemmen von Hand befestigt und nach beendeter Behand­ lung ebenso wieder gelöst werden müssen. Weitere Nachteile beste­ hen darin, daß die Anlagen übergroßen Raumbedarf haben, wobei die Rückführung zum Eingangsbereich ebenfalls per Hand oder im Rahmen einer Rundanlage erfolgen muß, was übergroßen Raumbedarf verursacht. A disadvantage of these techniques is that the plates are usually attached by hand by clamping and after treatment is complete must also be solved again. Other disadvantages best hen in that the plants take up too much space, the Return to the entrance area also by hand or in the frame a circular system must take place, which causes excessive space requirements.

Aufgabe der vorliegenden Erfindung ist die Schaffung einer Ein­ richtung und eines Verfahrens, welche einen automatischen Transport von Waren und eine Behandlung unter geringstem Raumbedarf ermög­ lichen. The object of the present invention is to create a direction and a method which an automatic transport of goods and treatment with the smallest space requirements lichen.

Diese Aufgabe wird erfindungsgemäß durch den im Anspruch 1 gekenn­ zeichneten Gegenstand gelöst. This object is characterized by the in claim 1 drawn object solved.  

Vorteilhafte Weiterbildungen sind in den Unteransprüchen be­ schrieben. Advantageous further developments are in the dependent claims wrote.

Die erfindungsgemäße Einrichtung ermöglicht eine automatische Beförderung von flachen Waren, insbesondere von Leiterplatten, und deren Behandlung in besonders platzsparender Bauweise, was technisch einen Durchbruch bedeutet. The device according to the invention enables automatic Transportation of flat goods, especially printed circuit boards, and their treatment in a particularly space-saving design, what technically means a breakthrough.

Diese Einrichtung eignet sich für alle Behandlungen von flachen Waren, insbesondere von Leiterplatten, bei denen Behandlungs­ lösungen verwendet werden. This device is suitable for all treatments from flat Goods, especially of printed circuit boards, in which treatment solutions are used.

Sie läßt sich daher insbesondere zur Fertigung von gedruckten Schaltungen aus Leiterplatten für die Elektronik und Elektro­ technik einsetzen. It can therefore be used in particular for the production of printed matter Circuits made of printed circuit boards for electronics and electronics use technology.

Das gekennzeichnete Verfahren unter Verwendung der erfindungs­ gemäßen Einrichtung gehört ebenfalls zum Gegenstand der vorlie­ genden Erfindung. The marked method using the fiction modern facility is also part of the subject invention.

Ausführungsbeispiele der Erfindung werden in den folgenden Figuren näher beschrieben. Embodiments of the invention are shown in the following figures described in more detail.  

Es stellt dar:

  • Figur 1: Seitenansicht der Gesamteinrichtung
  • Figur 2: Seitenansicht der Vorschubeinrichtung
  • Figur 3: Seitenansicht der oberen Ebene der Einrichtung mit Förderband und Teilansicht des Förderbandes
  • It shows:
  • Figure 1: Side view of the entire device
  • Figure 2: Side view of the feed device
  • Figure 3: Side view of the upper level of the device with conveyor belt and partial view of the conveyor belt
  • Hierin bedeuten:

  • 1 Warenträger
  • 2 Gleitführungsleiste
  • 3 Vorschubeinrichtung
  • 4 Getriebemotor
  • 5 Exzenter
  • 6 Schlitten
  • 7 Warenträgerkette
  • 8 Warenbewegung
  • 9 Warenbewegungsschiene
  • 10 Klammern
  • 11 Transportband
  • 12 Behälter mit Stripper
  • 13 Behälter mit Spüllösung
  • 14 Trockenzone
  • 15 Zwischenwände
  • 16 Leiterplatte
  • 17 Kippeinrichtung
  • 18 Transporteinrichtung
  • 19 Warenschiene
  • 20 Behandlungsgefäß
  • 21 Transport - Noppenband
  • Leiterplattentransportrichtung
  • Warenträgertransportrichtung
  • Here mean:
  • 1 product carrier
  • 2 sliding guide rails
  • 3 feed device
  • 4 gear motor
  • 5 eccentrics
  • 6 sledges
  • 7 product carrier chain
  • 8 goods movement
  • 9 goods movement track
  • 10 brackets
  • 11 conveyor belt
  • 12 containers with strippers
  • 13 containers with rinsing solution
  • 14 drying zone
  • 15 partitions
  • 16 circuit board
  • 17 tilting device
  • 18 Transport device
  • 19 goods rail
  • 20 treatment vessel
  • 21 Transport - dimpled belt
  • PCB transport direction
  • Goods carrier transport direction
  • Die Arbeitsvorgänge laufen beim Betrieb der erfindungsgemäßen Einrichtung im wesentlichen wie folgt ab: The operations run when operating the invention Setup essentially as follows:

    Platte (16) wird auf einem kontinuierlich oder diskontinuierlich arbeitenden Förderband (11) horizontal transportiert.
    Mit Kippeinrichtung (17) wird Platte (16) aus der horizontalen in die vertikale Lage gebracht. Ferner übernimmt Transporteinrichtung (18) Platte (16) auf eine Warenschiene (19) mit Klammern (10). Danach setzt Transporteinrichtung (18) mit Platte (16) senkrecht in Behälter (20) ab. Durch Verschieben aller Warenträger erfolgt der Transport der Platten innerhalb des Behälters, das gesamte Warenpaket wird zusätzlich mittels einer Warenbewegung (8) reversierend bewegt. Im Ausfahrbereich erfolgt die Plattenübergabe durch Transporteinrichtung (18) in ähnlicher Weise wie in der Eingabestation. Transportband (11) transportiert Platte (16) kontinuierlich oder diskontinuierlich weiter. Die Warenschiene mit Klammern wird vorzugsweise durch ein doppeltes Noppenband (21) geführt und wieder dem Einfahrtbereich zugeführt.
    Plate (16) is transported horizontally on a continuously or discontinuously operating conveyor belt (11) .
    With tilting device (17) plate (16) is brought from the horizontal to the vertical position. Furthermore, the transport device (18) takes over the plate (16) on a goods rail (19) with clips (10) . The transport device (18) with the plate (16) then sets vertically into the container (20) . By moving all the goods carriers, the plates are transported within the container, the entire goods package is additionally moved in a reversing manner by means of a goods movement (8) . In the exit area, the plates are transferred by transport device (18) in a manner similar to that in the input station. Conveyor belt (11) transports plate (16) continuously or discontinuously. The goods rail with clamps is preferably passed through a double knob belt (21) and fed back to the entrance area.

    Aus Figur 2 ist die Funktion der Vorschubeinrichtung ersichtlich. The function of the feed device can be seen from FIG.

    Der Warenträger (1) wird auf Gleit-Führungsleiste abgesetzt.
    Die Vorschubeinrichtung (3), vorzugsweise konstruktiv gelöst durch Getriebemotor (4), Exzenter (5) und Schlitten (6), verschiebt jeweils Warenträger um eine Position.
    Am Ende der Warenträgerkette (7) wird der letzte Warenträger durch eine Transporteinrichtung (18) aus der Führungsleiste herausgehoben. Während der Behandlungszeit wird Warenträgerkette (7) durch Waren­ bewegung (8) reversierend bewegt. Vorschubeinrichtung (3) ist auf Warenbewegungsschiene (9) befestigt, was bewirkt, daß Warenträger­ kette (7) geschlossen bleibt.
    The goods carrier (1) is placed on the slide guide bar.
    The feed device (3) , preferably structurally solved by a geared motor (4) , eccentric (5) and slide (6) , shifts goods carriers by one position.
    At the end of the goods carrier chain (7) , the last goods carrier is lifted out of the guide bar by a transport device (18) . During the treatment period, the goods carrier chain (7) is reversed by goods movement (8) . Feed device (3) is attached to the goods movement rail (9) , which causes the goods carrier chain (7) to remain closed.

    Figur 3 illustriert den Rücktransport der Warenträger mit Klammern. Figure 3 illustrates the return transport of the goods carrier Brackets.

    Warenträger (1) mit Klammern (10) wird von einer Transport­ einrichtung (18) auf dem Transportband (21) abgesetzt in Position A.
    Noppenband (21) transportiert Warenträger zurück zum Einfahrts­ bereich Position B. Während des Transportes überqueren Klammern (10) den Strippenbehälter (12), Spüle (13) und Trockenzone (14). Noppenband (21) ist so gestaltet, daß der Warenträger (1) sich frei in ihm bewegen und somit die Zwischenwände (15) übergehen kann.
    Goods carrier (1) with clamps (10) is placed in position A by a transport device (18) on the conveyor belt (21) .
    Knob tape (21) transports goods carriers back to the entry area position B. During transport, clamps (10) cross the stripping container (12) , sink (13) and drying zone (14) . Knob tape (21) is designed so that the product carrier (1) can move freely in it and thus the partition walls (15) can pass over.

    Claims (16)

    1. Automatische Transport- und Behandlungseinrichtung für Waren, insbesondere Leiterplatten, dadurch gekennzeichnet, daß die Transporteinrichtung mit Warenträgern ausgestattet ist, die in zwei Ebenen oberhalb der Behandlungsgefäße angeordnet sind, wobei die untere Ebene für den Transport der an den Trägern befestigten Waren durch die Behandlungsflüssigkeit und die obere Ebene für den Rücktransport der Warenträger vorgesehen ist. 1. Automatic transport and treatment device for goods, in particular printed circuit boards, characterized in that the Transport device is equipped with goods carriers that are in are arranged two levels above the treatment vessels, being the lower level for transporting the to the beams fortified goods through the treatment liquid and the upper level is intended for the return transport of the goods carriers is. 2. Einrichtung gemäß Anspruch 1, dadurch gekennzeichnet, daß in der unteren Ebene eine Vorschubeinrichtung (3) vorgesehen ist, welche die Warenträger (1) im gleichmäßigen Takt bewegt. 2. Device according to claim 1, characterized in that a feed device (3) is provided in the lower level, which moves the goods carrier (1) in a uniform cycle. 3. Einrichtung gemäß Anspruch 2, dadurch gekennzeichnet, daß diese eine Gleitführungsleiste (2) aufweist, die den Warenträger nach dem Aufsetzen positioniert. 3. Device according to claim 2, characterized in that it has a slide guide strip (2) which positions the product carrier after placement. 4. Einrichtung gemäß Anspruch 2, dadurch gekennzeichnet, daß diese einen Getriebemotor (4), einen Exzenter (5) und einen Schlitten (6) aufweist. 4. Device according to claim 2, characterized in that it has a geared motor (4) , an eccentric (5) and a carriage (6) . 5. Einrichtung gemäß Anspruch 2, dadurch gekennzeichnet, daß diese auf einer Warenbewegungsschiene (9) befestigt ist. 5. Device according to claim 2, characterized in that it is attached to a goods movement rail (9) . 6. Einrichtung gemäß Anspruch 1, dadurch gekennzeichnet, daß in der oberen Ebene ein Transportband (21) für den Rücktransport der Warenträger angeordnet ist. 6. Device according to claim 1, characterized in that a conveyor belt (21) for the return transport of the goods carrier is arranged in the upper level. 7. Einrichtung gemäß Anspruch 6, dadurch gekennzeichnet, daß unter­ halb des Transportbandes flache Behälter (12,13) angeordnet sind, welche zur Reinigung der an den Warenträgern (1) angeordneten Klammern (10) mit Spül- beziehungsweise Reinigungsflüssigkeiten vorgesehen sind. 7. Device according to claim 6, characterized in that under half of the conveyor belt flat containers (12, 13) are arranged, which are provided for cleaning the brackets (10) arranged on the product carriers (1 ) with rinsing or cleaning liquids. 8. Einrichtung gemäß Anspruch 7, dadurch gekennzeichnet, daß das Transportband mit Schlaufen beziehungsweise Noppen ausgestattet ist. 8. Device according to claim 7, characterized in that the Conveyor belt equipped with loops or knobs is. 9. Einrichtung gemäß Anspruch 1, dadurch gekennzeichnet, daß eine Transporteinrichtung (18) vorgesehen ist, welche die Platten von der horizontalen Ebene in die vertikale Ebene transportiert. 9. Device according to claim 1, characterized in that a transport device (18) is provided which transports the plates from the horizontal plane to the vertical plane. 10. Einrichtung gemäß Anspruch 1, dadurch gekennzeichnet, daß eine Transporteinrichtung (18) vorgesehen ist, welche die Platten von der vertikalen in die horizontale Ebene transportiert. 10. Device according to claim 1, characterized in that a transport device (18) is provided which transports the plates from the vertical to the horizontal plane. 11. Einrichtung gemäß Anspruch 1, dadurch gekennzeichnet, daß diese Bestandteil einer Anlage zur Behandlung von Waren, insbesondere Leiterplatten, in vorzugsweise horizontaler Positionierung ist. 11. The device according to claim 1, characterized in that this Part of an installation for the treatment of goods, in particular Printed circuit boards, preferably in a horizontal position. 12. Verfahren zum Transport und zur Behandlung von Waren, insbesondere Leiterplatten, in Behandlungsbädern, dadurch gekennzeichnet, daß hierfür Einrichtungen gemäß Ansprüchen 1 bis 11 verwendet werden. 12. Process for the transport and treatment of goods, in particular Printed circuit boards in treatment baths, characterized in that facilities according to claims 1 to 11 are used for this. 13. Verfahren gemäß Anspruch 12, dadurch gekennzeichnet, daß die Waren von an Warenträgern befindlichen Klammern in einer unteren Ebene erfaßt werden, darauf in eine Behandlungsflüssigkeit vertikal ein­ gesenkt werden, wobei der Transport durch diese Behandlungsflüssig­ keit im gleichmäßigen Takt erfolgt, wonach die Platten in eine hori­ zontale Position gelegt werden, worauf die von den Platten befreiten Warenträger in eine obere Ebene auf ein Förderband gehoben werden, welches die Warenträger gegebenenfalls durch unterhalb des Förder­ bandes angebrachte Behälter mit Reinigungslösungen hindurchzieht und zum Einfahrbereich zurücktransportiert, wo die Warenträger in die untere Ebene zur Erfassung weiterer Platten gesenkt werden. 13. The method according to claim 12, characterized in that the goods of clips on goods carriers in a lower level be detected, then vertically into a treatment liquid be reduced, the transport through this treatment liquid speed takes place at an even rate, after which the plates are placed in a hori be placed in the central position, after which the plates freed Goods carriers are lifted onto an upper level on a conveyor belt, which the goods carrier if necessary through below the conveyor tape attached container with cleaning solutions   and transported back to the entry area, where the goods carriers in the lower level can be lowered to capture more panels. 14. Verfahren gemäß Anspruch 13, dadurch gekennzeichnet, daß die Vor- und Weiterbehandlung der Waren in einer horizontalen Posi­ tionierung erfolgt. 14. The method according to claim 13, characterized in that the Pre- and further processing of the goods in a horizontal position tionation takes place. 15. Verfahren gemäß Anspruch 13 zur Herstellung von Leiterplatten für gedruckte Schaltungen. 15. The method according to claim 13 for the production of printed circuit boards for printed circuits. 16. Verwendung der gemäß Anspruch 13 hergestellten Leiterplatten in der Elektronik und Elektrotechnik. 16. Use of the printed circuit boards according to claim 13 in electronics and electrical engineering.
    EP86110668A 1985-08-14 1986-08-01 Automatic conveying and handling device for articles, especially printed circuit boards Ceased EP0216086A3 (en)

    Applications Claiming Priority (2)

    Application Number Priority Date Filing Date Title
    DE19853529313 DE3529313A1 (en) 1985-08-14 1985-08-14 AUTOMATIC TRANSPORT AND TREATMENT DEVICE FOR GOODS, ESPECIALLY PCB
    DE3529313 1985-08-14

    Publications (2)

    Publication Number Publication Date
    EP0216086A2 true EP0216086A2 (en) 1987-04-01
    EP0216086A3 EP0216086A3 (en) 1989-06-14

    Family

    ID=6278605

    Family Applications (1)

    Application Number Title Priority Date Filing Date
    EP86110668A Ceased EP0216086A3 (en) 1985-08-14 1986-08-01 Automatic conveying and handling device for articles, especially printed circuit boards

    Country Status (9)

    Country Link
    US (1) US4828878A (en)
    EP (1) EP0216086A3 (en)
    JP (1) JPS6296223A (en)
    KR (1) KR870002756A (en)
    CN (1) CN1007776B (en)
    AT (1) AT397329B (en)
    CA (1) CA1267732A (en)
    CS (1) CS594386A2 (en)
    DE (1) DE3529313A1 (en)

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    EP0641156A1 (en) * 1993-08-24 1995-03-01 Gebr. Schmid GmbH & Co. Holder for plate-like objects, in particular circuit boards, and unloading/loading device for this holder

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    US5795405A (en) * 1996-03-13 1998-08-18 Eric F. Harnden Machine and method for processing of printed circuit boards by immersion in transversely flowing liquid chemical
    US5711806A (en) * 1996-03-13 1998-01-27 Harnden; Eric F. Printed circuit board processing apparatus
    US6009890A (en) * 1997-01-21 2000-01-04 Tokyo Electron Limited Substrate transporting and processing system
    JP3293519B2 (en) * 1997-05-22 2002-06-17 松下電器産業株式会社 Printed circuit board positioning method
    US5954888A (en) * 1998-02-09 1999-09-21 Speedfam Corporation Post-CMP wet-HF cleaning station
    DE102006054846C5 (en) * 2006-11-20 2012-05-03 Permatecs Gmbh Production plant for the production of solar cells in the inline process, as well as process for the integration of a batch process into a multi-lane inline production plant for solar cells
    CN104164689A (en) * 2014-07-30 2014-11-26 东莞市五株电子科技有限公司 Horizontal pre-treatment vertical continuous type electroplating equipment
    CN106757288A (en) * 2016-12-30 2017-05-31 昆山元茂电子科技有限公司 Printed circuit board electroplating system and electro-plating method

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    Also Published As

    Publication number Publication date
    EP0216086A3 (en) 1989-06-14
    CS594386A2 (en) 1991-07-16
    CN86106250A (en) 1987-03-18
    US4828878A (en) 1989-05-09
    ATA217986A (en) 1993-07-15
    JPH055728B2 (en) 1993-01-25
    JPS6296223A (en) 1987-05-02
    DE3529313A1 (en) 1987-02-26
    AT397329B (en) 1994-03-25
    KR870002756A (en) 1987-04-06
    CN1007776B (en) 1990-04-25
    CA1267732A (en) 1990-04-10

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