EP0200645A1 - Verfahren und Probeneinlassvorichtung für ein Massenspektrometer - Google Patents

Verfahren und Probeneinlassvorichtung für ein Massenspektrometer Download PDF

Info

Publication number
EP0200645A1
EP0200645A1 EP86400902A EP86400902A EP0200645A1 EP 0200645 A1 EP0200645 A1 EP 0200645A1 EP 86400902 A EP86400902 A EP 86400902A EP 86400902 A EP86400902 A EP 86400902A EP 0200645 A1 EP0200645 A1 EP 0200645A1
Authority
EP
European Patent Office
Prior art keywords
micro
sample
tube
source
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP86400902A
Other languages
English (en)
French (fr)
Other versions
EP0200645B1 (de
Inventor
Robert Boyer
Jean-Pierre Journoux
Claude Duval
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Orano Demantelement SAS
Original Assignee
Compagnie Generale des Matieres Nucleaires SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Compagnie Generale des Matieres Nucleaires SA filed Critical Compagnie Generale des Matieres Nucleaires SA
Publication of EP0200645A1 publication Critical patent/EP0200645A1/de
Application granted granted Critical
Publication of EP0200645B1 publication Critical patent/EP0200645B1/de
Expired legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/04Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0422Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components for gaseous samples
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/04Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0468Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components with means for heating or cooling the sample
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/04Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0495Vacuum locks; Valves

Definitions

  • the invention relates to the field of sample analysis by mass spectrometry and it relates more particularly to the methods and devices making it possible to introduce, into the spectrometer, a micro-sample flow rate, the ions of which are subjected to analysis.
  • mass spectrometers use either a source of thermionic ions or a source of ions with electron bombardment of a gas flow.
  • the first solution has the advantage of allowing to use * samples of very low weight, frequently from 0.1 to 10 micrograms.
  • the sample is deposited, usually in liquid form, on a refractory metal tape. By evaporation of the liquid, a solid deposit is obtained.
  • the ribbon is placed in the ion source of the device, then brought to high temperature (2600 ° C for example) by Joule effect.
  • the sample then emits neutral molecules and ions. The latter, accelerated and focused in the form of a particle beam, are subjected to analysis.
  • a mass spectrometer using a thermionic source cannot be used to conduct chemical composition analyzes and can very easily be connected online to a separation or treatment line.
  • the usual method consists in introducing the sample from a sealed container through piping and micro-leakage valves allowing a well determined and very low gas flow to pass without altering the very low pressure which must prevail in the analyzer of the spectrometer.
  • the molecules of gas or vapor which pass at very low flow rate are subjected to the action of a beam of electrons of determined energy which ionizes the gas to give rise to ions subjected to analysis.
  • the intensity of the ion currents obtained is usually of the order of 10-9 A, that is to say much higher than in thermo-ionization spectrometers, which simplifies the measurement.
  • measurements made using a spectrometer using an ion source by electron bombardment are generally differential measurements, which guarantee high precision, typically 50 to 100 times higher than with a thermionization source.
  • the present invention aims to provide a supply method and device for a mass spectrometer, using the ionization technique of a very low flow rate, typically using an electron beam, but responding better than those previously known to the requirements of the practice, in particular in that they authorize the use of samples of very low mass.
  • the invention proposes in particular a process for introducing micro-samples in gaseous form into the ionization source of a mass spectrum, process according to which the sample is transformed into gaseous compound by heating in an atmosphere of a reactive gas, a flow of the compound and of the reactive gas in molecular flow regime is organized towards a wall maintained at a temperature low enough to trap the gaseous compound and the reagent and the gaseous compounds are selectively released by temperature control. of said wall.
  • the invention also proposes a device for introducing micro-samples into the ionization source of a mass spectrometer, comprising a reactor provided with means for introducing the micro-sample, with means for heating the micro-sample, means for connecting to a vacuum source and means for supplying an adjustable flow rate of reagent for transforming the micro-sample into gaseous compounds; a throttled and calibrated passage of gas flow from the reactor; and a sublimation tube connected on the one hand to the passage, on the other hand to the ion source of the spectrometer via a valve, provided with means making it possible to bring it to an adjustable cryogenic temperature.
  • this device keeps all the advantages of using an electron bombardment source in the apparatus: it makes it possible to work with relatively intense ion beams, which simplifies their measurement; it avoids breaking the vacuum in the source to introduce the sample; It is not necessary to have watertight containers to handle the samples and connect them to the device.
  • the proposed device has many advantages: the size of the samples to be analyzed is reduced to a few micrograms; It is not necessary to have sealed containers for handling the samples and introducing them into the device; the consumption of standards or reference products can be reduced to the order of magnitude of that of the samples, the preparation of which is simple and rapid.
  • the device shown in Figures t 2 can be viewed as comprising a reactor 10, the essential element of which is a micro-oven with adjustable temperature, a passage 12 sufficiently constricted for the flow to take place therein in the form of molecular flow, and a micro- sublimator 14.
  • the microsublimator is connected, by means of a valve 16, to the ion source 18 of the spectrometer, which can be of any of the types making it possible to ionize a low flow of gas which penetrates it .
  • this source will perform ionization by electron bombardment.
  • the reactor 10 the schematic diagram of which is shown in FIG. 1, comprises an enclosure, generally cylindrical, in the axis of which is placed the actual micro-oven 20 consisting of a metal tube capable of withstanding high temperatures, for example nickel , nichrome or "monel". Means are provided for heating the oven by the Joule effect.
  • these means are shown in the form of an electrical source 22 connected to one end of the tube, the other of which is grounded.
  • Another solution consists in winding an electric heating resistor around the tube 20.
  • This tube can carry a temperature sensor 24 connected to a circuit 26 for regulating the temperature by modulating the electric power supplied by the source 22.
  • a sample holder 28 is provided to allow the introduction of a very small quantity of samples, in the form of a deposit on a needle or a thread.
  • the head of this sample holder will be provided to seal the microfour.
  • One end of the tube 20 forming a micro-oven is connected, by a valve 30, to a vacuum source 32 (mechanical primary pump for example) and to a source 34 of reagent, of a nature such that it gives rise with the sample to a gaseous or volatile compound.
  • the sources 32 and 34 are each provided with a shut-off valve 36 and 38.
  • the valves 30 and 38 at least must be made of a material resistant to very corrosive gases, since it will frequently be necessary to use highly reactive chemical species, such as fluorine.
  • the valve 30 must also be strictly sealed.
  • the constricted passage 12 may have a fixed passage section.
  • a diaphragm or a capillary duct can be used. It can also be adjustable and formed by a conventional type micro-leakage valve or a piezoelectric valve, the opening of which is caused by the deformation of a piezoelectric crystal under the action of an electric field.
  • the passage must prohibit any entry of ambient air and it must offer a passage section having a sufficiently small diameter (typically a few microns) so that the gas flow between the reactor 10 and the microsublimation tube maintained at low pressure or in molecular regime. We know that in this regime the free path of the gaseous molecules is greater than the transverse dimensions of the passage.
  • the microsublimator 14 will generally consist of a tube 40 of small diameter, one end of which is tightly connected to the passage 12 and the other end is connected, by means of the valve 16, to the ion source 18.
  • This tube is provided with cryogenic temperature cooling means.
  • cryogenic temperature cooling means These means are represented in FIG. 1 in the form of an enclosure 42 provided with an inlet and an outlet for fluid at very low temperature.
  • adjustable heating means are associated with it. In the case of Figure 1, these means are constituted by a heating resistor 44 wound around the tube 40 and supplied by an electric generator 46 of adjustable power.
  • a temperature probe may be placed on the tube 40 to regulate, via a circuit similar to circuit 26, the temperature of the tube to an adjustable value. This temperature can also be slaved to a reference value by the intensity of the ion beams received at the collectors of the mass spectrometer.
  • a signal is taken from the ion current amplifier. This is constantly compared with a reference representing the chosen temperature, this reference being able to be programmed itself using a computer. A voltage is therefore obtained which is converted into calibrated pulses giving quantities of energy supplying the heating systems of the tube 40.
  • a valve 46 in parallel with the valve 16, makes it possible to connect the outlet of the tube 40 to a vacuum pump.
  • An additional connector provided with a valve 47 may be provided to connect the ion source to a reference gas supply and / or to another device similar to that which has just been described.
  • the elements 10, 12 and 14 of FIG. 1 are grouped together to form a one-piece assembly made up of several assembled parts, for example by welding.
  • the reactor is delimited by two nozzles 48 and 50 and a cylindrical shell in the axis of which the tube 20 is placed, a few millimeters in internal diameter, forming the micro-oven.
  • the downstream end of this tube is grounded via the end piece 50.
  • the upstream end isolated from ground by a pin 52, is connected to the electrical heating source by means of a tab 54 which crosses the vi.ro- tightly.
  • the sample holder 28 comprises a head screwable into the end piece 48, the seal being ensured by a seal 58.
  • a locking screw 60 provided in the head makes it possible to retain a thread or a needle 62 for supporting the dry sample.
  • a channel 64 formed in the end piece 48 makes it possible to connect the tube 20 to a valve 30 for admitting the reagent (gaseous fluorinating agent in general) or to a vacuum pump.
  • the latter has a very similar constitution to that of the reactor 10, except that the ferrule is provided with fittings 68 and 70 for inlet and outlet of cryogenic fluid.
  • the micro-sublimation tube 40 is connected, via an insulating pin 72, to the end piece 50 and its downstream end is welded to an end piece 74 provided with a seat intended for the valve 46 (not shown) .
  • this nozzle comprises a tubular extension 76 intended to be connected to the valve 16.
  • the device used is of the type shown in FIG. 2.
  • the sample must first be transferred to the sample holder 28.
  • the wire 62 which for example is 0.8 mm in diameter and 7 cm long, is deposited, using a micro-pipette , a few drops of uranyl nitrate containing a total of for example 10 micrograms of uranium to be analyzed.
  • the wire covered with the deposit is placed in the sample holder 28 and the latter fixed to the end piece 48.
  • the tube 20 is put under vacuum by pumping up to a pressure of the order of 10 _ 3 torr. And heating the tube 20, by passing current to a temperature of about 400 * C to remove the residual water vapor.
  • the temperature of the micro-sublimation tube 20 is then brought to that of liquid nitrogen by circulation of this nitrogen around the tube 40, from the connection 68 to the connection 70 by the circulation of a heat transfer gas (helium for example) brought to the temperature of liquid nitrogen.
  • a heat transfer gas helium for example
  • valve 12 is closed.
  • the pumping valve 46 is open, and one very gradually heats the tube 40 by passing an electric current. The oxygen sublimes and it is evacuated by the vacuum pump, through the valve 46.
  • the valve 46 is closed and the valve 16 is opened.
  • the heating is carried out with a temperature programming such that, as soon as the flow rate of hexafluoride reaches a predetermined value (that is to say when one reaches the set value of the intensity of the ion beam in the spectrometer), the temperature is controlled, so that the flow rate, measured by means not shown, remains constant until the mass of hexafluoride trapped uranium.
  • a predetermined value that is to say when one reaches the set value of the intensity of the ion beam in the spectrometer
  • Another solution consists in using two devices of the kind shown in FIG. 2. One of them receives a wire carrying a deposit whose isotopic ratio is to be measured, the other a deposit of U 0 of known isotopic composition.
  • This very low mass allows in particular the use of a device according to the invention for the analysis of irradiated fuels containing the isotopes of plutonium, the analysis then being carried out on PuF 6 formed by fluorination of PuO 2 .
  • the invention is not however limited to these particular embodiments. It is applicable whenever a reaction giving a gaseous compound of the sample is available.
  • the method is applicable in the case of carbon, which can be fluorinated to give CF 4 , which is particularly interesting for the isotopic analysis C 12 / C 14 used in dating.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
EP19860400902 1985-04-24 1986-04-24 Verfahren und Probeneinlassvorichtung für ein Massenspektrometer Expired EP0200645B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8506257A FR2581246B1 (fr) 1985-04-24 1985-04-24 Procede et dispositif d'introduction d'echantillons pour spectrometre de masse
FR8506257 1985-04-24

Publications (2)

Publication Number Publication Date
EP0200645A1 true EP0200645A1 (de) 1986-11-05
EP0200645B1 EP0200645B1 (de) 1989-07-12

Family

ID=9318634

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19860400902 Expired EP0200645B1 (de) 1985-04-24 1986-04-24 Verfahren und Probeneinlassvorichtung für ein Massenspektrometer

Country Status (5)

Country Link
EP (1) EP0200645B1 (de)
CA (1) CA1263765A (de)
DE (1) DE3664401D1 (de)
FR (1) FR2581246B1 (de)
WO (1) WO1986006545A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2629270A2 (fr) * 1988-03-25 1989-09-29 Cogema Dispositif d'introduction d'echantillons pour spectrometre de masse

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1132049A (fr) * 1954-05-26 1957-03-04 Thomson Houston Comp Francaise Dispositif d'introduction d'un échantillon dans un spectrographe de masse
US3888107A (en) * 1969-10-08 1975-06-10 Dow Chemical Co Differential thermal analysis cell assembly
EP0083472A1 (de) * 1981-11-30 1983-07-13 Vg Instruments Group Limited Automatisches Probeneinlasssystem für ein Massenspektrometer

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1132049A (fr) * 1954-05-26 1957-03-04 Thomson Houston Comp Francaise Dispositif d'introduction d'un échantillon dans un spectrographe de masse
US3888107A (en) * 1969-10-08 1975-06-10 Dow Chemical Co Differential thermal analysis cell assembly
EP0083472A1 (de) * 1981-11-30 1983-07-13 Vg Instruments Group Limited Automatisches Probeneinlasssystem für ein Massenspektrometer

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
REVIEW OF SCIENTIFIC INSTRUMENTS, vol. 55, no. 7, juillet 1984, pages 1160,1161, Am. Inst. of Physics, New York, US; S. HALAS et al.: "Device for rapid transfer of condensable gases into a capillary" *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2629270A2 (fr) * 1988-03-25 1989-09-29 Cogema Dispositif d'introduction d'echantillons pour spectrometre de masse

Also Published As

Publication number Publication date
EP0200645B1 (de) 1989-07-12
DE3664401D1 (en) 1989-08-17
FR2581246B1 (fr) 1987-07-10
WO1986006545A1 (fr) 1986-11-06
FR2581246A1 (fr) 1986-10-31
CA1263765A (fr) 1989-12-05

Similar Documents

Publication Publication Date Title
Chan et al. Study of laser-material interactions using inductively coupled plasma-atomic emission spectrometry
EP0768525B1 (de) Verfahren zur Detektion von gasförmigen, molekularen Spezien in den Kammerabgasen einer Halbleiterprozesskammer, und damit ausgerüstetes Halbleiterverarbeitungssystem
US4851683A (en) Element specific radio frequency discharge helium plasma detector for chromatography
Lee et al. Laser-induced breakdown spectrometry
JPS604933B2 (ja) 所定の化学的パラメ−タについて試料を分析する方法と装置
Pisonero et al. High efficiency aerosol dispersion cell for laser ablation-ICP-MS
Dvořák et al. Radical theory of hydride atomization confirmed after four decades–determination of H radicals in a quartz hydride atomizer by two-photon absorption laser-induced fluorescence
EP0200645B1 (de) Verfahren und Probeneinlassvorichtung für ein Massenspektrometer
EP1212779A2 (de) Nachweis- und analysevorrichtung durch laserabtragung und übertragung in eine spektrometerionenfalle sowie zugehöriges verfahren
Gill et al. Low-power resonant laser ablation of copper
FR2532470A1 (fr) Dispositif d'ionisation d'un materiau par chauffage a haute temperature
EP0142414A2 (de) Ionenquelle insbesondere zum Erzeugen eines Stroms mehrfachgeladener metallischer Ionen, bei der der Ionenstrom geregelt wird
Imai et al. Investigations of pyrolysed ascorbic acid in an electrothermal graphite furnace by inductively coupled argon plasma mass spectrometry and Raman spectrometry
EP0305241A1 (de) Verfahren und Vorrichtung zur Behandlung von Oberflächen unter Verwendung von elektrischem Nachglimmen in strömendem Gas
FR2629270A2 (fr) Dispositif d'introduction d'echantillons pour spectrometre de masse
Sergeev et al. A new compact linear beam-plasma discharge simulator BPD-PSI
FR2684497A1 (fr) Laser impulsionnel.
JP2557435B2 (ja) 誘導結合プラズマ質量分析用試料導入装置
Reid et al. The relation between current flow and oxygen adsorption in a reverse biassed silicon pn junction
EP0446080A1 (de) Verfahren und Gerät zur elementaren Analyse einer Probe mittels Massenspektrometrie, gekoppelt mit einem durch Hochfrequenz induzierten Plasma
EP1080613B1 (de) Vorrichtung zur erzeugung eines magnetischen feldes innerhalb eines gefässes
Tsunoda et al. Effect of absorption-tube shape on hydride generation for trace selenium determination in flame-in-tube atomic absorption spectrometry
Doyle A 1m normal incidence multi-channel spectrometer for laser plasma spectroscopy
Goodfellow et al. Experimental verification of a high-current cathode thermal model
FR2703077A1 (fr) Dispositif de régulation de flux issus de cellules d'évaporation de matériaux solides, utilisant des vannes asservies à des mesures de pressions partielles.

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): DE GB

17P Request for examination filed

Effective date: 19870110

17Q First examination report despatched

Effective date: 19880324

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): DE GB

REF Corresponds to:

Ref document number: 3664401

Country of ref document: DE

Date of ref document: 19890817

GBT Gb: translation of ep patent filed (gb section 77(6)(a)/1977)
PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed
PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 19920416

Year of fee payment: 7

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 19920418

Year of fee payment: 7

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Effective date: 19930424

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 19930424

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Effective date: 19940101