EP0162515B1 - Dispositif de transduction ultrasonore à réseau d'éléments transducteurs piézoélectrique - Google Patents

Dispositif de transduction ultrasonore à réseau d'éléments transducteurs piézoélectrique Download PDF

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Publication number
EP0162515B1
EP0162515B1 EP85200735A EP85200735A EP0162515B1 EP 0162515 B1 EP0162515 B1 EP 0162515B1 EP 85200735 A EP85200735 A EP 85200735A EP 85200735 A EP85200735 A EP 85200735A EP 0162515 B1 EP0162515 B1 EP 0162515B1
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EP
European Patent Office
Prior art keywords
piezoelectric
resonance frequencies
thickness
zones
frequencies
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP85200735A
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German (de)
English (en)
French (fr)
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EP0162515A1 (fr
Inventor
Roger Henri Coursant
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Laboratoires dElectronique Philips SAS
Koninklijke Philips NV
Original Assignee
Laboratoires dElectronique Philips SAS
Philips Gloeilampenfabrieken NV
Koninklijke Philips Electronics NV
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface

Definitions

  • the present invention relates to an ultrasonic transduction device comprising a linear array of parallel piezoelectric transducer elements.
  • the transducer elements have in such a device a length L large compared to the other dimensions (the width W and the thickness T).
  • This device can be used for example in the field of non-destructive testing of materials or in that of the exploration of biological tissues.
  • the unimodal operation of the device described in the cited patent is obtained by imposing on the W / T ratio an upper limit of the order of 0.8, a value below which, in addition, the effective electromechanical coupling coefficient takes a higher value (a variation curve of the electromechanical coupling coefficient, such as that of FIG. 9 of the cited patent, provides information on the relative amplitude of the vibrations obtained in the vibration mode considered, depending on the choice of W / T).
  • W / T a variation curve of the electromechanical coupling coefficient, such as that of FIG. 9 of the cited patent, provides information on the relative amplitude of the vibrations obtained in the vibration mode considered, depending on the choice of W / T.
  • the inherent constraint in the choice of such values of W / T is a greater complexity of production, the grooving between successive piezoelectric elements of the strip being all the more difficult to achieve the narrower the width of these elements.
  • the object of the invention is to propose a new bar structure which is no longer subject to this constraint relating to the W / T ratio and which is therefore simpler to produce while remaining efficient.
  • the originality rests on the way of exploiting vibrational modes coexisting in the so-called coupling zones of the diagram of dispersion of the resonance frequencies of the piezoelectric material used.
  • This operation is carried out by a judicious choice of the geometrical characteristics of the piezoelectric elements, and in particular of their thickness, and by placing themselves voluntarily in areas of operation of the transduction device where this operation is not unimodal.
  • the transduction sensitivity is thus increased due to the exploitation of several resonance modes having high electromechanical couplings and, simultaneously, due to the good damping of the residual and harmonic modes.
  • the vibratory state of the resonant cavity that it constitutes is said to be decoupled when the elastic vibrations along the thickness T are independent of those along the width W (and vice versa).
  • the resonance frequencies according to the thickness T of the cavity are then given by the expression: where n is a positive or zero integer, and v T the propagation speed of the ultrasonic waves according to T (assumed to be independent of the W / T ratio). Consequently, the product FT (which is the quantity represented on the ordinate on the Fabian-Sato diagrams) is given by the expression: which corresponds to a network of lines parallel to the abscissa axis (see Figure 1 attached).
  • the resonance frequencies of the cavity along the width W are given by the expression: where v w is the propagation speed according to W (also assumed to be independent of the W / T ratio), and the product FT by the expression: to which corresponds a network of hyperbolas also represented in FIG. 1.
  • This network of lines and this network of hyperbolas are ideal networks of asymptotes which are the limits obtained in the case of a decoupled bar, asymptotes of the dispersion curves observed in the case of a piezoelectric bar whose states vibratory according to the thickness and the width are coupled.
  • the frequency dispersion diagram takes the form of that shown in FIG. 2.
  • the ultrasonic transduction device described here preferably comprises the following structure, namely a network of piezoelectric transducer elements in the form of rectangular plates of piezoelectric material (generally produced from a single plate which has been cut out) , these plates of length L, of width W and of thickness T having their front and rear faces equipped with electrodes and being arranged parallel to each other and at regular intervals with their faces of dimensions L and T facing each other.
  • the structure according to the invention is then characteristic, in the sense that the thickness of the piezoelectric elements is chosen to be equal to half the wavelength corresponding to a frequency substantially equal to the average of two successive resonant frequencies of the piezoelectric material concerned.
  • the impedance curve of FIG. 3 corresponds to a curve of the associated one-dimensional transfer function (examples corresponding to the paired modes of the boxed zones B and C of FIG. 2 are given in FIGS. 4 and 5 respectively), which translates the variation of the! RVEI module of the vibratory speed / electrical excitation ratio at the terminals as a function of the frequency. If such a transfer function takes into account the internal losses of the piezoelectric material, the resonances presented by this transfer function are damped (see FIG. 6, corresponding to the area C of FIG. 2).
  • the device can be equipped with an interference transmittance structure resonating on the frequency F A , this structure comprising one or more adaptation layers at the front, or at the rear, or at the front and at the rear.
  • F A is the average frequency, in the example of FIG. 6, of the frequencies F R2 and F R3 corresponding to the maximums of the transfer function, these maximums corresponding themselves, as we have seen, to the minima of the curve associated electrical impedance.
  • the adaptation is carried out for example with a single interference layer known as a quarter wave tuned to the frequency F A.
  • the difference l: 1F visible in FIG. 7 shows the transfer function corresponding to this adaptation structure, and is more precisely the width at half height of the transmittance of the quarter wave layer tuned to F A with tap taking into account the acoustic impedances of the adjacent media.
  • load conditions can also be used to improve, via electrical adaptation, the Guassian aspect of the module of the spectrum of the impulse response.
  • the relative difference of the coupled modes 1 and 2 is such that it is then necessary to associate with the transduction device not only a structure d broadband adaptation-several layers of quarter-wave type, with possibly offset chords-but also an electrical adaptation network, for example simply consisting of a resistor in series and an inductor in parallel.
  • any simple, arithmetic or geometric average, or an average of a more complex nature, such as a quadratic average, or a weighted average the weighting of each frequency can then for example be effected by the electromechanical coupling coefficient associated with each of them in the vibration mode concerned.
  • the invention is applicable in a rigorously similar manner to the case of three-dimensional vibrational states, when the ultrasonic transduction device is a grooved two-dimensional strip with a network of piezoelectric parallelepipedal transducer elements.
  • the FT product this time being expressed not as a function only of the W / T ratio but of the two geometrical configuration reports. W / T and L / T.
  • a two-dimensional Fabian-Sato diagram such as that of FIG. 2 is the limit, when L and therefore L / T become large, of a three-dimensional Fabian-Sato diagram.
  • the plane coupling zones observed on the three-dimensional diagrams become, in this case of the three-dimensional generalization, three-dimensional coupling zones, tubular regions, such as for example the region R indicated by an arrow in FIG. 9 which shows the look of a three-dimensional Fabian-Sato diagram. It will also be noted that, given the reversibility between the dimensions L and W depending on whether one or the other is greater than the other, this three-dimensional diagram and the particular coupling zones which are observed there have symmetry with respect to the bisector plane of the axes (0, LIT), (0, W / T).

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
EP85200735A 1984-05-22 1985-05-10 Dispositif de transduction ultrasonore à réseau d'éléments transducteurs piézoélectrique Expired - Lifetime EP0162515B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8407957A FR2565033B1 (fr) 1984-05-22 1984-05-22 Dispositif de transduction ultrasonore a reseau d'elements transducteurs piezoelectriques
FR8407957 1984-05-22

Publications (2)

Publication Number Publication Date
EP0162515A1 EP0162515A1 (fr) 1985-11-27
EP0162515B1 true EP0162515B1 (fr) 1990-08-08

Family

ID=9304258

Family Applications (1)

Application Number Title Priority Date Filing Date
EP85200735A Expired - Lifetime EP0162515B1 (fr) 1984-05-22 1985-05-10 Dispositif de transduction ultrasonore à réseau d'éléments transducteurs piézoélectrique

Country Status (7)

Country Link
US (1) US4603276A (ja)
EP (1) EP0162515B1 (ja)
JP (1) JPH0695088B2 (ja)
CA (1) CA1230409A (ja)
DE (1) DE3579039D1 (ja)
FR (1) FR2565033B1 (ja)
IL (1) IL75246A (ja)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2589247B1 (fr) * 1985-10-25 1988-06-10 Labo Electronique Physique Appareil d'exploration de milieux par echographie ultrasonore comprenant un reseau d'elements transducteurs piezoelectiques
US4713572A (en) * 1986-06-06 1987-12-15 Accuray Corporation Ultrasonic transducers for on-line applications
WO1991015090A1 (fr) * 1990-03-20 1991-10-03 Matsushita Electric Industrial Co., Ltd. Sonde ultrasonique
US5744898A (en) * 1992-05-14 1998-04-28 Duke University Ultrasound transducer array with transmitter/receiver integrated circuitry
US5311095A (en) * 1992-05-14 1994-05-10 Duke University Ultrasonic transducer array
US5329496A (en) * 1992-10-16 1994-07-12 Duke University Two-dimensional array ultrasonic transducers
KR20010021135A (ko) * 1999-08-05 2001-03-15 사토 히로시 압전공진자 및 압전공진부
US6771785B2 (en) * 2001-10-09 2004-08-03 Frank Joseph Pompei Ultrasonic transducer for parametric array
US8264126B2 (en) * 2009-09-01 2012-09-11 Measurement Specialties, Inc. Multilayer acoustic impedance converter for ultrasonic transducers
US8987976B2 (en) * 2011-09-23 2015-03-24 Qualcomm Incorporated Piezoelectric resonator having combined thickness and width vibrational modes
US9270254B2 (en) * 2011-09-30 2016-02-23 Qualcomm Mems Technologies, Inc. Cross-sectional dilation mode resonators and resonator-based ladder filters
US8811636B2 (en) 2011-11-29 2014-08-19 Qualcomm Mems Technologies, Inc. Microspeaker with piezoelectric, metal and dielectric membrane
WO2016183243A1 (en) 2015-05-11 2016-11-17 Measurement Specialties, Inc. Impedance matching layer for ultrasonic transducers with metallic protection structure
WO2017145850A1 (ja) * 2016-02-22 2017-08-31 日本電気株式会社 検査装置、検査方法、及び、検査プログラムが記録された記録媒体
JP7127977B2 (ja) * 2017-10-19 2022-08-30 古野電気株式会社 送受波器
CN108889589B (zh) * 2018-04-23 2023-09-12 中国科学院苏州生物医学工程技术研究所 超声换能器及超声装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH608335B (de) * 1976-09-14 Ebauches Sa Microresonateur piezoelectrique.
JPS5353393A (en) * 1976-10-25 1978-05-15 Matsushita Electric Ind Co Ltd Ultrasonic probe
FR2426338A1 (fr) * 1978-05-19 1979-12-14 Seiko Instr & Electronics Resonateur a quartz rectangulaire en coupe at
DE2829570C2 (de) * 1978-07-05 1979-12-20 Siemens Ag, 1000 Berlin Und 8000 Muenchen Ultraschallkopf
US4525647A (en) * 1983-12-02 1985-06-25 Motorola, Inc. Dual frequency, dual mode quartz resonator

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
Acta Electronica, 25, 4, 1983, pp. 325-340 *
Proc IEEE, 1983, Ultrasonics Symposium, Atlanta, pp. 773-777 *

Also Published As

Publication number Publication date
IL75246A (en) 1988-11-15
JPH0695088B2 (ja) 1994-11-24
IL75246A0 (en) 1985-09-29
FR2565033B1 (fr) 1987-06-05
JPS60260849A (ja) 1985-12-24
FR2565033A1 (fr) 1985-11-29
DE3579039D1 (de) 1990-09-13
CA1230409A (en) 1987-12-15
US4603276A (en) 1986-07-29
EP0162515A1 (fr) 1985-11-27

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