EP0129709A2 - Kombinierte, leicht zu reinigende Molekularpumpe - Google Patents

Kombinierte, leicht zu reinigende Molekularpumpe Download PDF

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Publication number
EP0129709A2
EP0129709A2 EP84105770A EP84105770A EP0129709A2 EP 0129709 A2 EP0129709 A2 EP 0129709A2 EP 84105770 A EP84105770 A EP 84105770A EP 84105770 A EP84105770 A EP 84105770A EP 0129709 A2 EP0129709 A2 EP 0129709A2
Authority
EP
European Patent Office
Prior art keywords
cylindrical member
pump
molecular pump
center axis
additional
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP84105770A
Other languages
English (en)
French (fr)
Other versions
EP0129709A3 (de
Inventor
Junji C/O Anelva Corporation Takada
Shigeru Kaneto
Masashi Iguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Osaka Vacuum Ltd
Original Assignee
Osaka Vacuum Ltd
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP58073706A external-priority patent/JPS591818A/ja
Application filed by Osaka Vacuum Ltd, Anelva Corp filed Critical Osaka Vacuum Ltd
Publication of EP0129709A2 publication Critical patent/EP0129709A2/de
Publication of EP0129709A3 publication Critical patent/EP0129709A3/de
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps

Definitions

  • This invention relates to a molecular pump for use in evacuating a space to be exhausted to an ultra-high vacuum. It is to be noted here throughout the instant specification that the molecular pump comprises a combination of a molecular pump member of an axial-flow type with an additional molecular pump member having a helical groove.
  • the molecular pump comprises a pump vessel of a cylindrical shape which has a center axis, an inner surface defining a hollow space along the center axis, an inlet port, and an outlet port.
  • the molecular pump further comprises a first pump member operable as the molecular pump member of an axial-flow type within the hollow space.
  • the first pump member is disposed nearer to the inlet port than the outlet port.
  • a second pump member is operable as the additional molecular pump member and has a helical groove in communication with the hollow space.
  • the second pump member is positioned nearer to the outlet port than • the inlet port.
  • the first pump member comprises a plurality of rotor blade members rotatable around the center axis and a plurality of stator blade members held on the inner surface with the rotor blade members alternately interposed.
  • the second pump member comprises an inside cylindrical member and an outside cylindrical member held on the inner surface and having an inner peripheral surface parallel to the center axis.
  • the inner peripheral surface faces the hollow space.
  • the inside cylindrical member has an outer peripheral surface rotatable around the center axis with a predetermined distance left in the hollow space from the inner peripheral surface. It is possible the to form the helical groove into either of the inner andfouter peripheral surfaces.
  • the stator blade members and the outside cylindrical member are fixed to the inner surface of the pump vessel by pressing the pump vessel onto a pump base member which is for use in supporting the molecular pump.
  • the gas to be evacuated includes dust and/or a substance which changes into a solid.
  • dust and solids adhere as a deposit onto the inner peripheral surface of the outside cylindrical member at a location nearer to the outlet port.
  • the deposit reduces the ultimate degree of vacuum and the speed of exhaust. It is therefore necessary to often clean the molecular pump. More particularly, the deposit should be removed by taking the molecular pump to pieces after the molecular pump is operated for a long time. The molecular pump is taken to pieces by upwardly pulling out the pump vessel from the pump base member at first, next removing the stator blade members away from the rotor blade members, and then upwardly pulling out the outside cylindrical member. However, it is difficult to pull out the outside cylindrical member when the deposit has grown bulky.
  • a molecular pump to which this invention is applicable comprises a pump vessel which has a center axis and an inner surface defining a hollow space along the center axis and which has an inlet port and an outlet port in communication with the hollow space, a first pump member comprising a plurality of rotor blade members rotatable around the center axis in the hollow space near the inlet port and a plurality of stator blade members held on the inner surface members with the rotor blade alternately interposed, and a second pump member comprising an inside cylindrical member near the outlet port and an outside cylindrical member held on said inner surface and having an inner peripheral surface parallel to the center axis and in a face to face relationship relative to the hollow space.
  • the inside cylindrical member has an outer peripheral surface rotatable around the center axis with a predetermined distance left in the hollow space from the inner peripheral surface. Either of the inner and the outer peripheral surfaces is provided with a helical groove. According to this invention, the outside cylindrical member is brought into contact with an additional cylindrical member situated nearer to the outlet port than the inside cylindrical member and cut into radially a plurality of separate pieces each of which is/detachable from another.
  • the molecular pump comprises a pump vessel 11 of a cylindrical shape.
  • the pump vessel 11 has a center axis 12, an inner surface defining a hollow space along the center axis 12, an inlet port 13, and an outlet port 14.
  • a first pump member 20 is operable as a molecular pump member of an axial-flow type within the hollow space.
  • the first pump member 20 comprises a plurality of rotor blade members 21 rotatable around the center axis 12 in the hollow space nearer to the inlet port 13 than the outlet port 14.
  • the rotor blade members 21 are stacked from one another with a gap left between two adjacent ones of the rotor blade members 21.
  • Each of the rotor blade members 21 has a plurality of rotor blades in the manner known in the art.
  • the first pump member 20 further comprises a plurality of stator blade member 22 held on the inner surface by a plurality of spacers 23, respectively, with the stator blade members 22 interposed between each gap left between two adjacent rotor blade members 21.
  • Each of the stator blade members 22 also has a plurality of stator blades in the manner known in the art.
  • the second pump member 30 comprises an inside cylindrical member 31 nearer to the outlet port 14 than the inlet port 13 and an outside cylindrical member 32 held on or snugly received by the inner surface of the pump vessel 11.
  • the outside cylindrical member 32 has an inner peripheral surface parallel to the center axis 12.
  • the inner peripheral surface is in a face to face relationship relative to the hollow space.
  • the inside cylindrical member 31 has an outer peripheral surface rotatable around the center axis 12 with a predetermined distance left in the hollow space from the inner peripheral surface of the outside cylindrical member 32.
  • the inner peripheral surface of the outside cylindrical member 32 is provided with a helical groove 33 having predetermined depth, width and pitch.
  • the stator blade members 22 and the outside cylindrical member 32 are fixed to the inner surface of the pump vessel 11 by pressing the pump vessel 11 onto a pump base member 40.
  • the pump base member 40 is for use in supporting the molecular pump.
  • the pump base member 40 has an exhaust pipe 41 which communicates with the outlet port 14 of the pump vessel 11.
  • the molecular pump is attached at the inlet port 13 to a device which is to be evacuated.
  • a forepump is coupled with the exhaust port 41 in order to evacuate to a fore-vacuum.
  • a gas is evacuated from the device through the exhaust port 41 during operation of the first and the second pump members 20 and 30.
  • the gas to be evacuated includes dust and/or a substance readily solidified.
  • dust and solidified substance adhere as a deposit 50 onto the inner peripheral surface of the outside cylindrical member 32 at a location nearer to the outlet port 14.
  • the deposit 50 reduces the ultimate degree of vacuum and the speed of exhaust. Therefore, the molecular pump should often be cleaned or swept so as to remove the deposit 50. Such cleaning is very cumbersome. More particularly, the molecular pump must be disassembled into pieces on cleaning in the following manner. At first, the pump vessel 11 is detached from the pump base member 40 by upwardly pulling out the pump vessel 11. Subsequently, the spacers 23 and the stator blade members 22 are removed from the rotor blade members 21.
  • the outside cylindrical member 32 is upwardly pulled out to be detached from the pump base member 4 0.
  • the detached elements should be assembled in position.
  • the inside cylindrical member 31 must be precisely positioned because the inside cylindrical member 31 is rotated at a high speed and is therefore accurately balanced.
  • a modified molecular pump be tentatively considered to remove the defect.
  • the inner peripheral surface of the outside cylindrical member 32 is given a greater diameter at a portion of the deposit 50 than the remaining inner peripheral surface.
  • the deposit 50 adheres onto the inner peripheral surface of the outside cylindrical member 32 so as to protrude inwardly over the outer peripheral surface of the inside cylindrical member 31 at a location nearer to the bottom end of the inside cylindrical member 31, as illustrated in Fig. 2.
  • the deposit 50 tenaciously adheres also to the pump base member 40. It is therefore impossible with the modified molecular pump to pull out the outside cylindrical member 32 without detaching the inside cylindrical member 31.
  • a molecular pump according to a first embodiment of this invention comprises similar parts designated by like reference numerals.
  • the outside cylindrical member 11 is brought into contact with an additional cylindrical member 32a situated nearer to the outlet port 14 than the inside cylindrical member 31.
  • the additional cylindrical member 32a is cut into a plurality of separate pieces each of which is detachable from another away from the center axis 12.
  • the additional cylindrical member 32a is separable from the outside cylindrical member 32.
  • the additional cylindrical member 32a is cut into separate pieces along at least two lines.
  • the line may have an angle with the center axis 12.
  • the lines semicircular are parallel in effect to the center axis 12 so that the separate radially pieces are/detachable from each other away from the center axis 12.
  • the molecular pump of Fig. 3 When the molecular pump of Fig. 3 is to be cleaned or swept, the molecular pump is disassembled by upwardly pulling out the pump vessel 11 from the pump base member 40 at first, by removing the spacers 23 and the stator blade members 22 away from the rotor blade members 21, by pulling out the outside cylindrical member 32, and then by detaching the additional cylindrical member 32a.
  • the molecular pump of Fig. 3 can be readily cleaned or swept to remove the deposit 50.
  • a molecular pump according to a second embodiment of this invention comprises similar parts designated by like reference numerals.
  • the helical groove 33' is formed on the outer peripheral surface of the inside cylindrical member 31'.
  • the outside cylindrical member 32' is integral with the additional cylindrical member 32a situated nearer to the outlet port 14 than the inside cylindrical member 31'. Consequently, the additional cylindrical member 32a is brought into contact with the outside cylindrical member 32', like in Fig. 3. As will presently be described, the illustrated outside cylindrical member 32' is cut into a plurality of separate pieces, as is the case with the additional cylindrical member 32a illustrated in Fig. 3. Each of radially the separate pieces is/detachable from another.
  • the outside cylindrical member 32' made integral with the additional cylindrical member 32a comprises two pieces each of which is separable from another and which is of a semicircle. Each piece has a pair of ends brought into contact with those of the other piece. As mentioned in conjunction with Fig. 4, the separate pieces can be manufactured by cutting a cylindrical member serving as the outside cylindrical member 32' and the additional cylindrical member 32a.
  • the molecular pump of Fig. 5 it is also possible to clean the molecular pump in order to remove the deposit 50 by separating the outside cylindrical member 32' made integral with the additional cylindrical member 32a.
  • the molecular pump of Fig. 5 can be readily cleaned or swept to remove the deposit 50.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Reciprocating Pumps (AREA)
  • Details Of Reciprocating Pumps (AREA)
EP84105770A 1983-04-26 1984-05-21 Kombinierte, leicht zu reinigende Molekularpumpe Withdrawn EP0129709A3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP58073706A JPS591818A (ja) 1982-04-29 1983-04-26 自動車用スタータリングギャー−点火タイミングマーク手段式クラッチ
JP73706/83 1983-05-19

Publications (2)

Publication Number Publication Date
EP0129709A2 true EP0129709A2 (de) 1985-01-02
EP0129709A3 EP0129709A3 (de) 1985-03-06

Family

ID=13525925

Family Applications (1)

Application Number Title Priority Date Filing Date
EP84105770A Withdrawn EP0129709A3 (de) 1983-04-26 1984-05-21 Kombinierte, leicht zu reinigende Molekularpumpe

Country Status (1)

Country Link
EP (1) EP0129709A3 (de)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2597552A1 (fr) * 1986-04-19 1987-10-23 Pfeiffer Vakuumtechnik Pompe a vide moleculaire, notamment du type turbomoleculaire
EP0256234A2 (de) * 1986-06-12 1988-02-24 Hitachi, Ltd. Vakuumerzeugungssystem
EP0283736A2 (de) * 1987-02-24 1988-09-28 ALCATEL HOCHVAKUUMTECHNIK GmbH Hochvakuumpumpe mit einem glockenförmigen Rotor
JPH01124396U (de) * 1988-02-17 1989-08-24
US5049168A (en) * 1988-09-12 1991-09-17 Philip Danielson Helium leak detection method and system
EP0695872A1 (de) * 1994-08-01 1996-02-07 Balzers-Pfeiffer GmbH Reibungspumpe mit Magnetlagerung
EP0751297A1 (de) * 1995-06-30 1997-01-02 Alcatel Cit Turbomolekularpumpe
EP1160459A2 (de) * 2000-06-02 2001-12-05 The BOC Group plc Vakuumpumpe
EP1039137A3 (de) * 1999-03-23 2002-03-13 Ebara Corporation Turbomolekularpumpe

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2218615A1 (de) * 1972-04-18 1973-10-31 Leybold Heraeus Gmbh & Co Kg Turbomolekularpumpe mit rotor und stator
DD129822A1 (de) * 1976-12-20 1978-02-08 Harry Werner Stator fuer eine turbomolekularpumpe

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2218615A1 (de) * 1972-04-18 1973-10-31 Leybold Heraeus Gmbh & Co Kg Turbomolekularpumpe mit rotor und stator
DD129822A1 (de) * 1976-12-20 1978-02-08 Harry Werner Stator fuer eine turbomolekularpumpe

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2597552A1 (fr) * 1986-04-19 1987-10-23 Pfeiffer Vakuumtechnik Pompe a vide moleculaire, notamment du type turbomoleculaire
EP0256234A2 (de) * 1986-06-12 1988-02-24 Hitachi, Ltd. Vakuumerzeugungssystem
EP0256234A3 (en) * 1986-06-12 1989-11-23 Hitachi, Ltd. Vacuum generating system
EP0283736A2 (de) * 1987-02-24 1988-09-28 ALCATEL HOCHVAKUUMTECHNIK GmbH Hochvakuumpumpe mit einem glockenförmigen Rotor
EP0283736A3 (de) * 1987-02-24 1989-03-08 ALCATEL HOCHVAKUUMTECHNIK GmbH Hochvakuumpumpe mit einem glockenförmigen Rotor
JPH01124396U (de) * 1988-02-17 1989-08-24
US5049168A (en) * 1988-09-12 1991-09-17 Philip Danielson Helium leak detection method and system
EP0695872A1 (de) * 1994-08-01 1996-02-07 Balzers-Pfeiffer GmbH Reibungspumpe mit Magnetlagerung
EP0751297A1 (de) * 1995-06-30 1997-01-02 Alcatel Cit Turbomolekularpumpe
FR2736103A1 (fr) * 1995-06-30 1997-01-03 Cit Alcatel Pompe turbomoleculaire
US5722819A (en) * 1995-06-30 1998-03-03 Alcatel Cit Molecular drag pump
EP1039137A3 (de) * 1999-03-23 2002-03-13 Ebara Corporation Turbomolekularpumpe
US6585480B2 (en) 1999-03-23 2003-07-01 Ebara Corporation Turbo-molecular pump
EP1160459A2 (de) * 2000-06-02 2001-12-05 The BOC Group plc Vakuumpumpe
EP1160459A3 (de) * 2000-06-02 2003-01-22 The BOC Group plc Vakuumpumpe
US6626639B2 (en) 2000-06-02 2003-09-30 The Boc Group Plc Vacuum pump

Also Published As

Publication number Publication date
EP0129709A3 (de) 1985-03-06

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Inventor name: IGUCHI, MASASHI

Inventor name: KANETO, SHIGERU

Inventor name: TAKADA, JUNJIC/O ANELVA CORPORATION