EP0102884B1 - Direkt angetriebener Servo-Drehschieber - Google Patents

Direkt angetriebener Servo-Drehschieber Download PDF

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Publication number
EP0102884B1
EP0102884B1 EP83401596A EP83401596A EP0102884B1 EP 0102884 B1 EP0102884 B1 EP 0102884B1 EP 83401596 A EP83401596 A EP 83401596A EP 83401596 A EP83401596 A EP 83401596A EP 0102884 B1 EP0102884 B1 EP 0102884B1
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EP
European Patent Office
Prior art keywords
spool
sleeve
servo valve
direct drive
housing
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
EP83401596A
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English (en)
French (fr)
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EP0102884A1 (de
Inventor
Robert Kline Van Ausdal
Ralph Lewis Vick
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Allied Corp
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Allied Corp
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Publication date
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Publication of EP0102884A1 publication Critical patent/EP0102884A1/de
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/04Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor
    • F15B13/044Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor operated by electrically-controlled means, e.g. solenoids, torque-motors
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/04Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor
    • F15B13/0401Valve members; Fluid interconnections therefor
    • F15B13/0406Valve members; Fluid interconnections therefor for rotary valves

Definitions

  • This invention relates to a direct drive servo valve.
  • a direct drive servo valve includes a housing containing conduits connecting fluid from a high pressure source to and from a hydraulic actuator and includes a sleeve in the housing including passageways connected to the various conduits and a spool member movable to interconnect the passageways as desired to control the flow of operating fluid to the actuator, with motor means being employed to drive the spool.
  • One advantage resulting from the invention is that the direct drive rotary valve arrangement eliminates the necessity of converting the torque motor rotary motion to linear motion.
  • the rotary arrangement facilitates pressure-balancing of the spool in that the spool can be made symmetrical with fluid pressure forces acting on opposite sides simul- taneouslyto reduce the required operation forces.
  • a further advantage of the present invention is that the torque tube is utilized not only as a seal but also as a centering spring to assure that the spool returns to null position with electrical power off.
  • a further advantage is that the leakage of operating fluid referred to above is eliminated.
  • a still further advantage is that the direct drive valve, although having rather complicated patterns of passageways in its sleeve structure, is amenable to with electrical discharge milling (EDM) techniques or photo-etching techniques.
  • EDM electrical discharge milling
  • FIG. 1 itwill beseenthatthis is a perspective drawing, partially in section, showing our direct drive valve assembly including the torque motor 10 which drives a spool in the mechanical housing assembly 12.
  • the torque motor includes a housing 14 containing electrical windings 16, a magnet structure 18, and a rotatable armature member 20 which is supported in the housing in bearings 22 and 24.
  • armature 20 At its left end armature 20 is sealed to a torque tube 26 which, in turn, is sealed to an output shaft 28.
  • the opposite end of torque tube 26 is sealed to a member 30 which is pinned or otherwise secured to the housing 14.
  • Member 30 may be, and preferably is, a part of the torque tube.
  • housing 12 includes a plurality of ports, port 34 being connected to a source of operating fluid under high pressure (P), port 36 being connected to the return side of said source (R), port 38 being connected to supply pressure to drive an associated actuator in one direction such as to extend it (C E ) and port 40 being connected to the opposite side of said actuator to drive it in the opposite direction such as to retract it (C R ).
  • port 34 being connected to a source of operating fluid under high pressure (P)
  • port 36 being connected to the return side of said source (R)
  • port 38 being connected to supply pressure to drive an associated actuator in one direction such as to extend it (C E )
  • port 40 being connected to the opposite side of said actuator to drive it in the opposite direction such as to retract it (C R ).
  • the spool will be in a position to open a port 52 which permits flow from the actuator (C E ) to the return port 36 (R). Again, the flow from the extend side of the actuator C, flows along the spool to a port 54 but flows no farther because this port is blocked by the spool 42. This, of course, is only one of the patterns of flow through this valve, and others will be discussed below.
  • Figures 2 and 3 depict the arrangement of parts making up a typical sleeve assembly for our direct valve, Figure 2 being a side view showing endcaps 56 and 58 and a plurality of stacked disk members 60, 62, 64, 66, 64, 62, and 60'.
  • Figure 3 is an end view of the assembly shown in Figure 2, showing the endcap member 56 as well as a tab. 60a forming part of disk 60 as will appear hereafter. Also visible in this view is tab 64a forming part of disk 64, but similar tabs aligned with 64a are behind it forming parts of disks 62 and 60' appearng near the right end of the assembly of Figure 2.
  • the center bores of these tabs are drH!ed slightly off-center so as to produce this desired misalignment when the disks are assembled to indicate which disks are reversed.
  • Figures 4 and 5 are plan and side views, respectively, of the end blocks of the assembly shown in Figure 2. It will be seen that these are simple annular structures with a flat at the top as shown in Figure 3.
  • Figure 6 is an enlarged plan view of disk 60 shown in Figure 2 which includes tab 60a at the top with a center bore located slightly off center of the tab but centered on a radius of the disk 60.
  • This view of disk 60 shows a center bore 68 communicating with opposite radial passages or openings 70 and 72 and also with a plurality of openings 74, 76, 78 and 80 which are located at 0°, 90°, 180°, and 270°, respectively, with 0° being chosen as the top position.
  • Openings 74 and 78 are larger than openings 76 and 80 and extend farther toward the outside of the disk.
  • FIG. 7 is a disk of essentially the same configuration as Figure 6, but with one significant exception in that disk 60' includes a tab 60'a which is displaced 90° from tab 60a relative to the rest of the openings in the disk. Thus, tab 60'a is positioned at approximately 90° or in alignment with opening 76'.
  • Figure 8 is a plan view of the two disks indicated at number 62 in Figure 2. It has a tab 62a at the top which is also slightly out of alignment with the center of the disk. This disk has a plurality of large area openings 86, 88, 90 and 92, none of which are designed to open to the outside surface when the sleeve is trimmed. When an identical copy of this disk is reversed, but with the tab still at the top, the reversed disk is aligned with disk 64a (see Figure 3). Reversing of this disk will place the elongated large area slots 82 and 84 at the 135°-315° positions (as measured with 0° at the top) rather than at the 45°-225° possitions.
  • Figure 9 is a plan view of a disk 64 which is quite similar to disk 62 except for the elongated large area slots 94 and 96 which are oriented similarly to slots 82 and 84.
  • These slots which extend a greater distance toward the periphery of the disk than slots 82 and 84 include outwardly extending radii which will remain when the sleeve is trimmed to approximately the radius of the dashed line to create opening into the center.
  • These disks 64 are located in two positions on the assembly of Figure 2 with the disk toward the right being reversed from the position shown so that the large area slots 94 and 96 are also reversed.
  • the single disk 66 is shown on Figure 10. In addition to the center opening 98, it has openings 100, 102, 104 and 106 which align axially at 0°, 90°, 180°, and 270° with similar openings in the other disks described above but none of which provide an opening to the outside when the sleeve is trimmed, nor do any of these openings communicate with the center sleeve opening 98.
  • the openings at top and bottom of the disks described above appear in this sleeve as elongated axial passageways 108 and 110. Visible in the wall of the center spool chamber 109 are a first elongated slot 112 resulting from the elongated large area openings of disks 60, 62 and 64 and a second such slot 114 resulting from the large area elongated openings in reversed disks 60', 62 and 64.
  • Figure 123 is an end view of the sleeve structure shown in Figure 11, showing the central spool chamber 109 and a large diameter flange 116 appearing at the right end of Figure 11 which assists in securing the sleeve to the housing.
  • a small port 118 communicates operating fluid at return pressure with chamber 120 at the end of the sleeve.
  • System pressure (Cp) or operating pressure C e is contained by means of lap-fitting of the spool to the sleeve; therefore, there is some leakage across the spool which will tend to increase the fluid pressure acting on the end of the spool and make operation more difficult.
  • port 118 permits any such increased pressure to be drained to return pressure.
  • Figure 13 is a side view of a spool 121 which is rotatable in sleeve 44a.
  • This spool carries lands 122, 124, and 126.
  • Land 124 contains grooves to assist in balancing the pressures P and R on the spool.
  • Land 122 contains channels 128 which can be oriented to connect control pressures C e and C R to return pressure R.
  • land 126 contains channels 130 which can be moved to connect control pressure C R and C E to system pressure P.
  • Figures 14 and 15 are cross-sectional views through lines 14-14 and 15-15 of Figure 13, respectively.
  • each channel has sides which are only slightly displaced from radii and parallel thereto, and these slots are movable to communicate with the small passageways shown at the 0°, 90°, 180°, and 270° positions on disks 60 and 60'.
  • Channels 128 are always in communication with the large elongated slots 112 ( Figure 11), and channels 130 are always in communication with slots 114.
  • Figure 16 is a sectional view of the sleeve 44a and the spool 121 described above assembled together in a housing 12.
  • Housing 12 includes conduits 132, 134, 136 and 138 connected with control pressure C E , system pressure P, system return pressure R, and control pressure C R , respectively.
  • Figure 17 is a sectional view taken along line 17-17 of Figure 16. This view shows a section through the spool at the channels 128 in combination with the sleeve at the location of disk 60. From this view it will be seen that channels 128 are aligned with large diagonal openings 70 and 72 but are not aligned with the passageways leading to the spool 121 from openings 74, 76, 78, and 80.
  • Rotation of spool 121 a small amount in a counterclockwise direction will cause the large diagonal openings 70 and 72 to communicate through channels 128 with openings 74 and 78, respectively. Since channel 128 communicates with return pressure R (see Figures 9 and 13), rotation of the spool as described results in flow decreasing control pressure C e in conduit 132.
  • Rotation of the spool 121 in the clockwise direction permits flow to the large diagonal openings 70 and 72 (Figure 17) from openings 76 and 80, respectively, which are part of elongated passageways running the length of the sleeve terminating at openings 78' and 74', respectively, and which thereby exhausts pressure C R from conduit 138 to return pressure conduit 134 (C R ).
  • clockwise movement of spool 121 at the opposite end of the sleeve results in a connecting diagonal opening 72' with opening 80' and diagonal opening 70' with opening 76'. Since diagonals 70' anbd 72' are connected to conduit 136 carrying system supply pressure P, this effectively connects control pressure C e conduit 132 with supply pressure conduit 136.
  • rotation of the spool 121 in a clockwise direction results in moving the actuator in a second direction which, in the case of the above described piston in a cylinder, would be such as to extend the actuating rod.
  • Disk 146' of Figure 23 is almost identical to disk 146 of Figure 22 except that the disk 146' includes a tab) 146'a which is rotated 90° counterclockwise as compared with the tab 146a of disk 146.
  • Disk 146 includes a center bore 148 in which a spool is received. Opening into center bore 148 are a plurality of slots communicating with openings 150,152, 154, and 156, all of which form parts of passageways within the completed sleeve.
  • slots 158 and 160 are also opening into center bore 148 which extend radially a greater distance from the center than the above described openings.
  • slots 158 and 160 become exterior openings into the sleeve.
  • the center disk 162 is shown in Figure 24. This disk has openings 164, 166, 168, and 170 corresponding to openings 150, 152, 154, and 156, respectively, in Figure 22, but with no openings into the center bore.
  • the elongated passageway 176 is formed from opening 154 in disk 146, 168 in disk 162,152' in disk 146', and 143 in the reversed disk 144 at the right end of the sleeve.
  • This view also shows a small diameter bore 178 extending from the left end of the sleeve through the end block member 56' and through disk 144 which communicates with slot 158.
  • a similar small diameter bore which is drilled through the reversed disk 144 but which is not utilized.
  • Figure 26 is a side view showing the spool 180 which cooperates with the sleeve 171.
  • a port is shown consisting of a rectangular opening 182 adjacent a circular bore 184, which openings are connected by means of a short slot all extending through the spool as shown on Figure 27, which is a cross-sectional view taken along line 27-27 of Figure 26, and Figure 28 which is a top view of spool 180.
  • an additional port is shown rotated 90° from openings 182 and 184, which port is also formed of a rectangular opening 186 and a bore 188 connected by a small slot.
  • Figure 29 is a cross-sectional view along lines 29-29 of Figure 28 and shows opening 186 extending across the width of the spool 180.
  • the compound port arrangement provides a means for controlling flow with great precision, particularly at the point of opening, since the bore is just slightly larger in diameter than the width of the rectangular opening; therefore, the initial valve opening is through an edge of the bore which can be lapped to very close tolerances to provide the desired initial flow pattern.
  • a plurality of unnumbered longitudinal slots are shown in Figures 26 through 29 whose function is to assist in pressure balancing of the spool, as will be understood by those skilled in the art.
  • FIG 30 is a cross-sectionai view showing the spool 180 installed in the sleeve 171, both of which are installed in a housing 12'.
  • This housing is the same as housing 12.
  • the system pressure conduit P is shown at numeral 190
  • the system return pressure R is carried in conduit 192, controlled pressure C e to one side of actuator at conduit 194 and controlled pressure C R to the other side of the actuator at conduit 196.
  • Each of conduits 190, 192, 194, and 196 communicates with an annulus surrounding sleeve 171.
  • return pressure conduit 192 is directly connected with the spool 180.
  • Figure 31 is a cross-sectional view taken along line 31-31 of Figure 30 and shows the elongated slots 158 and 160 (Figure 22) which communicate with spool 180 and the port 188 extending through the spool. With the spool in the position shown, there is flow across the spool through port 188 but no flow from any of the openings 150, 152, 154 or 156 ( Figure 22) which form part of the elongated passages 174,175,176, or 177.
  • Figure 32 is a cross-sectional view taken along line 32-32 of Figure 30. Fluid at system pressure P is connected through conduit 190 to an annulus 198 which surrounds the sleeve 171 so that this pressure is in communication through radial slots 158' and 160' with spool 180.
  • Rotation of the spool 180 in a counterclockwise direction connects slot 160 (R) to opening 177 and slot 158 to opening 174 which results in conduit 196 (C R ) being connected to return pressure (R) conduit 192.
  • slot 158' (P) is connected to opening 175 and slot 160' is connected to opening 176.
  • This connects control pressure C e in conduit 196 to system pressure (P) in conduit 190, causing the actuator to be moved in the opposite direction which may be the extended position.
  • the direct drive servo valve described above provides the several advantages enumerated above as compared with the conventional elec- trohydraulic servo valve. It incorporates a somewhat complex manifold structure in the sleeve, but this structure is readily fabricated through the use of the stacked or assembled disks which are preferably formed either by electrical discharge milling or by photo-etching techniques.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Multiple-Way Valves (AREA)
  • Servomotors (AREA)

Claims (11)

1. Direktantriebsdrehservoventil mit einem Grehäuse (12, 12'), das Leitungen (34, 36, 38, 40) aufweist, die an eine Quelle eines unter einem Druck (P) stehenden Arbeitsmittels, an die Rückführseite (R) dieser Quelle und an eine gesteuerte Betätigungseinheit angeschlossen sind, einer in dem Gehäuse angeordneten Hülse (44, 44a), die eine Vielzahl von Kanälen (74, 78, 174, 176) aufweist, die an die Leitungen (34, 36, 38, 40) angeschlossen sind, einem Schieber (42), der Kanäle (108, 110) besitzt, um das Arbeitsmittel in gewünschter Weise den Kanälen zuzuführen, und einer Motoreinrichtung (10), die in Antriebverbindung mit dem Schieber steht, wobei der Schieber (42) über einen begrenzten Bewegungsbereich drehbar ist, die Motoreinrichtung (10) als Rotationsdrehmomentmotor ausgebildet ist, der ein Gehäuse (14), einen Stator und einen Rotor (20) in dem Motorgehäuse (14) umfaßt, eine Ausgangswelle (28) an den Schieber (42) und den Rotor (20) angeschlossen ist und das Ventil desweiteren eine zentrierende Federeinrichtung (26) aufweist, um den Schieber (42) in seine neutrale Stellung zurückzuführen, wenn die Motoreinrichtung (10) nicht betätigt wird, dadurch gekennzeichnet, daß die zentrierende Federeinrichtung (26) ein Drehmomentrohr (26) aufweist, das die Ausgangswelle (28) umgibt und an einem Ende mit dem Rotor (20) sowie am gegenüberliegenden Ende mit dem Motorgehäuse (14) oder der Hülse (44, 171) dichtend verbunden ist, und daß die Hülse (44, 171) aus Endkappen (56, 58 und 56', 58') sowie eine Vielzahl von Ringscheiben (60, 60', 62, 64, 66) mit axial hindurchgerichten kanälen gebildet ist, wobei einige Scheiben Randöffnungen, die mit den Leitungen (34, 36, 38, 40) in Verbindung stehen, und innere Öffnungen aufweisen, die mit dem Schieber (42) in Verbindung stehen, und die Scheiben und Endkappen zur Ausbildung einer Verteilereinheit zusammengelöst sind.
2. Servoventil nach Anspruch 1, dadurch gekennzeichnet, daß die Kanäle (74, 78,174,176) und die Kanäle (108, 110) das Arbeitsmittel auf gegenüberliegende Seiten des Schiebers richten, so daß dieser während des Betriebes im wesentlichen druckausgeglichen ist.
3. Servoventil nach Anspruch 1, dadurch gekennzeichnet, daß die Drehmomentrohrausgangswelle (28) und der Schieber (42) etwa entlang einer gemeinsamen Mittellinie miteinander verbunden sind.
4. Servoventil nach Anspruch 1, dadurch gekennzeichnet, daß die Drehmomentrohrausgangswelle (28) und der Schieber (42) über eine flexible Kupplung (32) miteinander verbunden sind, welche eine extreme Torsionssteifigkeit besitzt, jedoch eine geringfügige winklige Durchbiegung zuläßt.
5. Servoventil nach Anspruch 1, dadurch gekennzeichnet, daß die Hülse (44, 171) einen ersten Kanal in der Nähe ihrer Mitte, der an die Hochdruckarbeitsmittelquelle (P, 136) angeschlossen ist, einen zweiten Kanal in der Nähe ihrer Mitte, der an die Rückführseite (R, 134) der Hochdruckarbeitsmittelquelle angeschlossen ist, sowie einen dritten und vierten Kanal in der Nähe der Enden der Hülse, die an die gesteuerte_Betätigungseinheit (bei 132, 138) angeschlossen sind, umfaßt.
6. Servoventil nach Anspruch 5, dadurch gekennzeichnet, daß Die Hülse (44,171) ein erstes Paar von Kanälen, die den ersten Kanal mit dem dritten Kanal verbinden, und ein zweites Paar von Kanälen, die den zweiten Kanal mit dem vierten Kanal verbinden, aufweist.
7. Servoventil nach Anspruch 1, dadurch gekennzeichnet, daß die Kanäle im Schieber (121) aus einem ersten Paar von Nuten (128) in der Oberfläche des Schiebers in der Nähe eines Endes desselben bestehen, deren Seitenwände parallel zueinander verlaufen und nur um eine geringe Strecke versetzt einen Abstand von 90° aufweisen, während die Nuten in einem Abstand von 180° angeordnet sind, sowie aus einem zweiten Paar von entsprechenden Nuten (130) in der Nähe des gegenüberliegenden Endes des Schiebers, die um 90° gegenüber dem ersten Paar Nuten versetzt angeordnet sind.
8. Servoventil nach Anspruch 1, dadurch gekennzeichnet, daß das Drehmomentrohr (26) immer so wirkt, daß der Schieber (42) zentriert wird, um bei Abwesenheit eines Signales für den Motor die Verbindung zwischen den Kanälen zu blockieren.
9. Servoventil nach Anspruch 1, dadurch gekennzeichnet, daß des Öffnungen (190, 192, 194, 196) im Gehäuse (12') aufweist, die an eine Hochdruckarbeitsmittelquelle (P), eine Neiderdruckarbeitsmittelquelle (R), eine erste Steuerdruckleitung (CE) und eine zweite Steuerdruckleitung (CR) angeschlossen sind, daß die Hülse (171) im Gehäuse (12') Leitungseinrichtungen (158, 160, 158', 160') besitzt, die Arbeitsmittel in das Innere der Hülse (171) führen, daß der in der Hülse (171) bewegliche Schieber (180) Kanäle (182, 184, 186, 188) aufweist, um Arbeitsmittel in gesteuerter Weise den Öffnungen (190, 192, 194, 196) und der zur Bewegung des Schiebers (180) in der Hülse (171) dienenden Drehmomentmotoreinrichtung (10) zuzuführen, daß jede Öffnung (190, 192, 194, 196) an einen Ring im Gehäuse (12'), das die Hülse umgibt, angeschlossen ist, daß die Hülse (171) aus einem Paar von allgemein scheibenförmigen Endkappen (56', 58') und einer Vielzahl von dazwischen angeordneten perforierten Scheiben (144, 146, 146', 162) gebildet ist, wobei die Scheiben und Endkappen zusammengelötet und derart bearbeitet sind, daß die Hülse einen ersten radial gerichteten Kanal (158', 160') besitzt, der die Hochdruckarbeitsmittelquelle (P) mit dem Schieber (180) verbindet, und einen zweiten radial gerichteten Kanal (158, 160), der die Niederdruckarbeitsmittelquelle (R) mit dem Schieber (180) verbindet, einen ersten axial gerichteten Innenkanal (174), der die erste Steuerdruckleitung (CE) mit dem Schieber (180) benachbart zu dem ersten (158', 160') und zweiten (158, 160) radial gerichteten Kanal verbindet, und einen zweiten axial gerichteten Innenkanal (176), der die zweite Steuerdruckleitung (CR) mit dem Schieber (180) benachbart zu dem ersten (158', 160') und zweiten (158, 160) radial gericheteten Kanal verbindet.
10. Servoventil nach Anspruch 9, dadurch gekennzeichnet, daß der Schieber (180) eine Vielzahl von Dosieröffnungen (182, 184, 186, 188) aufweist, von denen mindestens eine den Durchfluß zwischen der Hochdruckarbeitsmittelquelle (P) und einem der axial gerichteten Innenkanäle (174) und eine andere den Durchfluß zwischen dem anderen axial gerichteten Innenkanal (176) und der Niederdruckarbeitsmittelquelle (R) steuert.
11. Servoventil nach Anspruch 10, dadurch gekennzeichnet, daß jede Dosieröffnung (182, 184, 186, 188) eine Rechtecköffnung (182, 186) umfaßt, die mit einer kreisförmigen Öffnung (184, 188) verbunden ist, wobei diese öffnungen so bemessen und angeordnet sind, daß das anfängliche Öffnen der öffnungen zwischen einem Rand von einem der radial gerichteten Kanäle und einem Rand von einem der kreisförmigen Öffnungen geschieht.
EP83401596A 1982-08-02 1983-08-02 Direkt angetriebener Servo-Drehschieber Expired EP0102884B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US40360482A 1982-08-02 1982-08-02
US403604 1982-08-02

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EP0102884A1 EP0102884A1 (de) 1984-03-14
EP0102884B1 true EP0102884B1 (de) 1986-07-30

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JP (1) JPS5947508A (de)
DE (1) DE3364944D1 (de)

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GB8821724D0 (en) * 1988-09-16 1988-10-19 Fairey Hydraulics Direct drive valve
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KR101781155B1 (ko) 2012-02-09 2017-09-22 무그 인코포레이티드 전자 유압식 서보 밸브
US10024444B2 (en) 2012-02-23 2018-07-17 Moog Inc. Integrated structure electro-hydraulic valve
US9228596B2 (en) 2013-09-23 2016-01-05 Moog Inc. Direct drive rotary valve
CN106930993A (zh) * 2015-12-29 2017-07-07 博世力士乐(常州)有限公司 换向阀
GB2581162B (en) * 2019-02-05 2022-12-14 Domin Fluid Power Ltd Rotary servo valve
CN113710902A (zh) * 2019-02-05 2021-11-26 多明流体动力有限公司 旋转伺服阀
CN113162313B (zh) * 2021-04-15 2023-06-23 浙大城市学院 一种二维电机及伺服阀

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* Cited by examiner, † Cited by third party
Title
HYDRAULICS & PNEUMATICS, no. 7, July 1980 CLEVELAND OHIO (US) Y.M. EL-IBIARY et al.: "Fluid Power Research Update", pages 86,87,100. *

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DE3364944D1 (en) 1986-09-04
JPS5947508A (ja) 1984-03-17
EP0102884A1 (de) 1984-03-14

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