EP0072275B1 - Membranpumpe für ölfreies Vakuum - Google Patents

Membranpumpe für ölfreies Vakuum Download PDF

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Publication number
EP0072275B1
EP0072275B1 EP82401332A EP82401332A EP0072275B1 EP 0072275 B1 EP0072275 B1 EP 0072275B1 EP 82401332 A EP82401332 A EP 82401332A EP 82401332 A EP82401332 A EP 82401332A EP 0072275 B1 EP0072275 B1 EP 0072275B1
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EP
European Patent Office
Prior art keywords
diaphragm
pump
exhaust
control chamber
chamber
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Expired
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EP82401332A
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English (en)
French (fr)
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EP0072275A1 (de
Inventor
Robert Evrard
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Individual
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Individual
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Priority to AT82401332T priority Critical patent/ATE26870T1/de
Publication of EP0072275A1 publication Critical patent/EP0072275A1/de
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Publication of EP0072275B1 publication Critical patent/EP0072275B1/de
Expired legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/06—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having tubular flexible members
    • F04B45/073—Pumps having fluid drive
    • F04B45/0736—Pumps having fluid drive the actuating fluid being controlled by one or more valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum

Definitions

  • the present invention relates to a dry membrane vacuum pump, more particularly intended to constitute at least one stage of a vacuum pump for obtaining a vacuum free of oil contamination.
  • Oil diffusion pumps are therefore more and more often replaced by ionic, cryogenic, etc. pumps.
  • a diaphragm pump whether used as a vacuum pump or as a compressor, has a tight elastic membrane stretched between two rigid bodies. There is thus formed, on either side of the membrane, on the one hand a pumping chamber into which open orifices provided with valves for suction and discharge, and on the other hand a control chamber where the the pressure is varied cyclically to generate the pumping movement of the membrane.
  • French patent 581223 for example describes such a pump.
  • the limit vacuum obtained by such pumps in single-stage systems is of the order of at least 10 4 Pascals. This relatively high limit is due, among other things, to the use of valves. In particular, the conductance of an intake valve decreases with the pressure of the vacuum system and tends towards zero.
  • the valves are also generating what is called a "dead volume"; at the end of each cycle, a small volume of pumped gas is trapped at the discharge pressure and returns to the emptied enclosure. Finally, the movement of the membrane is obtained by rigid coupling with a mechanical device. The flexibility of the membrane is thus considerably reduced, which further increases the dead volume. But above all the discharge conductance for the parts remote from the discharge valve becomes very low. A certain quantity of gas is then trapped at high pressure, deforming the membrane and considerably increasing the dead volume.
  • the subject of the present invention is a means of obtaining a "clean" primary vacuum with a diaphragm pump, corresponding to a much lower limit pressure than that obtained with existing devices.
  • the discharge orifices communicate via valves with a capacity maintained at a pressure below atmospheric pressure by an auxiliary vacuum pump; on the other hand it includes a distribution mechanism for alternately communicating the control chamber with the atmosphere and with the suction of an auxiliary vacuum pump.
  • the same auxiliary vacuum pump is used both to maintain a vacuum downstream of the discharge valve, and to create the vacuum applied cyclically to the control chamber.
  • the auxiliary pump intended to create a vacuum in the control chamber, is integrated into the main pump. It is essentially constituted by a second thick elastic membrane, stretched between the second rigid body and the first membrane.
  • a distribution mechanism allows on the one hand to communicate alternately the space between the second rigid body and the second membrane with a source of compressed air and the atmosphere, and on the other hand, to put the control chamber , that is to say here the space between the two menbranes, at the atmospheric pressure or isolate it.
  • the admission of atmospheric air into the control chamber coincides with the admission of compressed air under the second membrane: during this simultaneous admission, the first membrane is pressed against the first rigid body: the main pump delivers. At the same time, the second membrane is pressed against the first.
  • the control chamber is isolated while the compressed air under the second membrane escapes, the second membrane retracts, creating a vacuum under the first which also retracts: the main pump sucks.
  • Figures 1 and 2 show in simplified manner, and in longitudinal section, a pump produced according to the invention provided with an external auxiliary vacuum pump.
  • Figure 1 shows the pump at the end of the suction phase;
  • Figure 2 at the end of the delivery phase.
  • Figures 3 and 4 show an alternative embodiment of the dispensing mechanism, applied to the pump of Figures 1 and 2, respectively in the suction and discharge control position.
  • Figures 5 and 8 show in the same conditions as in Figures 1 and 2, respectively at the end of suction and at the end of delivery, an alternative embodiment with an auxiliary control pump integrated.
  • the pump is constituted by a first hollow rigid body 1 whose inner wall is in the form of two trunks of cones joined by their bases.
  • the body 1 has a suction orifice 2 in an end region with a small internal diameter, while the discharge orifice 3 is located in the central part with a large internal diameter.
  • the suction port 2 is connected by a tube 4 to the enclosure 5 in which we want to create a vacuum.
  • the discharge orifice 3 is provided with a valve 7 constituted by a simple elastic sheet, one end of which is fixed at 8 to the body 1, while its other end is free to press against the body or to move away from it according to pressure variations on either side of the body.
  • the valve 7 is inside a small delivery chamber 9 provided with a nozzle 10.
  • the center of the hollow body 1 is occupied by a cylindrical body 11 covered with a waterproof tubular elastic membrane 12, for example in a product sold under the trademark "NEOPRENE".
  • the natural internal diameter of the membrane 12 is less than the external diameter of the body 11, so that it is applied under tension against the body 11.
  • the membrane 12 is distended at each end to enclose an outer flange 13; each flange 13, by tightening the screws 14 engaged on the body 11, tightly blocks each end of the membrane 12 on the end faces of the body 1.
  • the chamber 15 between the membrane 12 and the body 1 constitutes the actual pumping chamber, where both the suction and discharge orifices 2 and 3 open.
  • the chamber 16 between the membrane 12 and the body 11 constitutes the control chamber under the action of a distribution system to which it is connected by the conduit 17.
  • the chamber 16 is in fact cut into two parts , each at one end of the body 11, but connected by the balancing duct 18.
  • the conduit 17, via the T-conduit 19, is connected to two two-way solenoid valves 20 and 21.
  • the other path of the solenoid valve 20 communicates directly with the atmosphere.
  • the other path of the solenoid valve 21 is connected by the conduit 22 to an auxiliary vacuum pump 23.
  • a tube 24 connects the nozzle 10 of the discharge chamber 9 to a nozzle 25 on the conduit 22, in the vicinity of the solenoid valve 21.
  • the type and connection of electrical supply to the coils of the solenoid valves 20 and 21 are such that they operate in opposition, that is to say that one is necessarily open while the other is closed, and vice versa.
  • the solenoid valve 20 is normally closed and the solenoid valve 21 normally open, and the two coils are supplied in parallel from a line 26, by means of an oscillating relay 27 which cyclically energizes and cuts power to both coils.
  • the first phase of evacuating the enclosure 5 can be ensured by the conventional auxiliary pump 23.
  • the solenoid valves 20 and 21 are de-energized with the oscillating relay 27 in the rest position as shown in FIG. 1.
  • the pump 23 sucks then directly into the enclosure 5 through the tube 4, the orifice 2, the chamber 15, the orifice 3, the valve 7 open, and the tube 24; at the same time it maintains the chamber 18 in depression, which allows the membrane 12 to remain pressed against the body 11 by its own elasticity.
  • the pump according to the invention is actuated by activating the relay 27.
  • the relay switches to take the position shown in FIG. 2 the coils of the solenoid valves 20 and 21 are powered; 21 is closed and 20 open.
  • the atmospheric pressure is then established in the chamber 16 and the membrane 12 is inflated from the inside to come to be pressed against the internal biconical face of the body 1.
  • the membrane firstly closes the suction orifice 2 , then the progressive reduction in volume of the chamber 18 flushes out by compressing the gas it contained towards the discharge orifice 3.
  • the combined action of the compression upstream of the valve 7 and of the vacuum maintained continuously in downstream by the auxiliary pump 23 is sufficient to lift the valve and expel the gas towards the pipe 24.
  • the valve 7 although constituted by a simple elastic sheet, functions in fact like a complex valve with pneumatic control: at the start of the intake phase the solenoid valve 21 opens and the air return solenoid valve 20 closes. The air accumulated in the chamber 18 under the membrane 12 spreads in the auxiliary circuit 22-24 and the pressure downstream of the discharge valve 7 rises suddenly. This valve is thus pressed energetically on its seat and the "return flow" is practically canceled in the critical intake phase. The downstream pressure, continuously pumped by the auxiliary pump 23 will then decrease continuously. At the start of the compression phase, the air re-entry valve 20 opens while the valve 21 closes to isolate the auxiliary pumping circuit downstream from the valve.
  • the pressure in the discharge chamber 9 therefore continues to decrease during compression in the chamber 15 and the gas can be easily evacuated through the valve 7 made soft by a minimum plating force.
  • This optimization of the operation of the discharge valve eliminates the drawbacks of "stiff" discharge valves as they exist in conventional devices.
  • the membrane 12 may have a smaller thickness at the ends.
  • the inlet 2 is closed off at an earlier point in the compression phase.
  • the tubular membrane 12 with a diameter less than the outside diameter of the cylinder 11 is here still taut. It therefore retracts for a reasonable vacuum between it and the cylinder 11, even if the vacuum between it and the body 1 is already very high.
  • the symmetrical shape of 1, with the delivery port in the center ensures that at the end of compression the residual delivery cavity is exactly opposite the corresponding port 3. The real "dead volume" is thus reduced to a minimum.
  • the rate of pressure increase in the chamber 15, between the suction position of Figure 1 and the discharge position of Figure 2 is of the order of at least 500.
  • the new pump could thus play the role of a "boost pump”. Its coupling with existing coarse vacuum dry pumps transforms them into high performance pumps and divides the limit vacuum by a factor of at least 500.
  • the pumping speed depends essentially on the frequency of the intake cycle, that is to say on the pumping speed of the auxiliary pump.
  • the vacuum required for operation is of the order of 2.10 4 Pascals or more, and corresponds to a pressure range where the pumping speed of conventional diaphragm pumps is high.
  • the "boost pump” not only considerably improves the limit pressure, but allows the conventional pump to be used under optimum pressure conditions for pumping speed.
  • FIGS. 3 and 4 show in a simplified manner another device operating purely pneumatically and performing the same functions as the combination of two solenoid valves 20 and 21.
  • the device which constitutes a vacuum dynamometer with piston and return spring, comprises a tubular body in bronze 30, closed by two bottoms 31 and 32.
  • a piston 33 slides freely in the bore of the body 30, which it seals in two chambers 34 and 35.
  • the piston 33 is returned by a tension spring 36 until 'in a position in abutment on a shoulder 37.
  • the conduit 17 of the chamber 16 is connected by a U-shaped conduit 39 to the inner chamber 34 of the body 30.
  • a conduit 40 connected to the conduit 22 for connection with the auxiliary pump 23.
  • An orifice 41 also opens facing the other branch of the conduit 39 to communicate the chamber 34 with the outside.
  • the bottom 31 has an exhaust valve 43 and a calibrated orifice 44 between the chamber 35 and the outside.
  • the internal bent conduit 45 opens onto the lateral face of the piston 33, a usual guide not shown being provided to prevent the latter from rotating during its longitudinal stroke, so that the lateral outlet of the conduit 45 passes in front of the branches of the conduit 39.
  • the device is equivalent to the two solenoid valves 20 and 21 in their positions in FIG. 1.
  • the chamber 16 communicates with the auxiliary pump via 17, 39, 34 40 and 22, while the communication with the atmosphere is cut off by the piston 33 which closes the orifice 41.
  • the vacuum generated in the chamber 34 causes the suction of the piston 33 to the left, against the return action of the spring 36. But this movement is slowed down by the calibrated orifice 44 which does not lets air in very gradually into chamber 35.
  • the piston cuts the communication with the atmosphere of the chamber 16 and re-establishes the vacuum therein of the pump 23, which corresponds to a new suction cycle.
  • FIGS. 5 and 6 for an alternative embodiment with an integrated control auxiliary pump.
  • the general geometry is the same, but the central cylindrical body 11 is surrounded by another thick waterproof elastic membrane 50, of tubular shape and hermetically tightened by its ends on the body 11 by means of collars 51.
  • the conduit 54 At rest when the solenoid valve coil is not supplied, as shown in Figure 5, the conduit 54 is in communication with the atmosphere. When the coil is energized, the solenoid valve communicates the conduit 54 with the conduit 57 connected to a compressed air distribution 58, autonomous compressor or distribution network.
  • the electrical supply connection of the solenoid valves 20 and 55 is such that when the valve 20 is closed the valve 55 puts the conduit 54 into the atmosphere, and when the valve 20 is open the valve 55 supplies the conduit 54 and the chamber 52 in compressed air.
  • the coils of the solenoid valves 20 and 55 are supplied in parallel from a line 26, by means of an oscillating relay 27 which cyclically energizes and cuts the supply of the two coils.
  • the delivery chamber 9 downstream from the valve 7 is maintained in permanent vacuum; this is achieved here by connecting its nozzle 10 to a compressed air ejector 60.
  • the atmospheric pressure established by the opening of the valve 20 in the chamber-16 drives the membrane 12 on the internal face of the body 1.
  • the compressed air brought into the chamber 52 by the valve 55 inflates the membrane 50 which comes into contact with the membrane 12 and minimizes the volume of the chamber 16.
  • the switching of the relay 27 then cuts the supply of the coils of the two solenoid valves 20 and 55 which take the positions represented in FIG. 5.
  • the setting in the atmosphere of the chamber 52 lets the membrane 50 return to its normal position to come to be pressed against the body 11. By its removal the membrane 50 creates a strong vacuum in the chamber 16 under the membrane 12 because the closed valve 20 prevents air from entering it.
  • the depression in the chamber 16 in turn allows the membrane 12 to retract towards the membrane 50 and the body 11, which causes a strong depression in the pumping chamber 15 and the suction as soon as the orifice 2 is uncovered .
  • the internal membrane 50 and its inflating operation with compressed air or deflating plays the same role as the auxiliary pump 23 of the first variant to create the vacuum under the main membrane 12 during the suction phase.
  • the vacuum chamber 9 is kept under vacuum by the independent ejector 60.
  • the pumping speed depends essentially on the flow rate of the supply circuit used.
  • the intake volume is much larger than in mechanically coupled diaphragm pumps and the pumping speed may be increased by death.

Claims (10)

1) Trockene Membranvakuumpumpe für die Überführung eines Gases von mindestens einem Einlaßstutzen (2) zu mindestens einem Auslaßstutzen (3), bestehend aus einer elastischen Membrane (12), die derart zwischen einem ersten und zweiten starren Körper eingespannt ist, daß das Volumen zwischen der Membrane (12) und dem ersten starren Körper (1) einen Schöpfraum (15) bildet, in den die Einlaß-und Auslaßöffnungen münden und derart, daß das Volumen auf der anderen Seite der Membrane (12) eine Regelkammer (16) zum Antrieb der Membrane bildet, so daß in Folge diese den Druck zyklisch variiert und damit im Wechsel hervorruft
a) eine Ausstoßbewegung, in der die Membrane (12) stetig gegen den ersten starren Körper (1) gepreßt wird, wobei sie zuerst die Einlaßöffnungen verschließt und dann das Gas in Richtung der Auslaßöffnung ausstößt,
b) eine Ansaugbewegung, in der die Membrane (12) zum zweiten starren Körper (11) zurückkehrt und dabei zuerst zum Schließen der Auslaßventile führt und dann die Einlaßöffnung freigibt,

wobei die Auslaßöffnung (3) über die Ventile (7) mit einem Raum (9) in Verbindung stehen, der durch eine Hilfsvakuumpumpe (23) unter einem Druck niedriger als Atmosphärendruck gehalten wird und durch die Ausbildung, daß die Pumpe eine Verteilervörrichtung (21, 22) enthält, die die Regelkammen (16) abwechselnd in Verbindung mit der Atmospähre und mit dem Einlaß einer Hilfsvakuumpumpe bringt.
2) Trockene Membranvakuumpumpe für die Überführung von Gas von mindestens einem Einlaßstutzen (2) zu mindestens einem Auslaßstutzen (3), bestehend aus einer elastischen Membrane (12), die derart zwischen einem ersten und zweiten starren Körper eingespannt ist, daß das Volumen zwischen der Membrane (12) und dem ersten starren Körper (1) einen Schöpfraum (15) bildet, in den die Einlaß-und Auslaßöffnungen münden und derart, daß das Volumen auf der anderen Seite der Membrane (12) eine Regelkammer (16) zum Antrieb der Membrane bildet, indem durch zyklisches Variieren des Drucks in dieser Kammer im Wechsel hervorgerufen wird:
a) eine Ausstoßbewegung, in der die Membrane (12) stetig gegen den ersten starren Körper (1) gepreßt wird, wobei sie zuerst die Einlaßöffnungen verschließt und dann das Gas in Richtung der Auslaßöffnung ausstößt,
b) eine Ansaugbewegung, in der die Membrane (12) zum zweiten starren Körper (11) zurückkehrt und dabei zuerst zum Schließen der Auslaßventile führt und dann die Einlaßöffnung freigibt,

dadurch gekennzeichnet, daß die Auslaßventile (3) über die Ventile (7) mit einem Raum (9) in Verbindung stehen, der durch eine Hilfsvakuumpumpe (60) auf einem Druck niedriger als Atmosphärendruck gehalten wird; weiter gekennzeichnet dadurch, daß die Regelkammer durch die Membrane (12) und eine zweite dicke, elastische Membrane (50), die den zweiten starren Körper (11) umgibt, begrenzt wird; weiter gekennzeichnet dadurch, daß die Pumpe mit einer Verteilervorrichtung (20-55) ausgestattet ist, um den Raum (52) zwischen dem zweiten Körper (11) und der zweiten Membrane (50) wechselweise in Verbindung mit der Amosphäre und mit einem Preßluftverteiler (58) zu bringen und wechselseitig die Regelkammer (16) abzutrennen und sie in Verbindung mit der Atmosphäre zu bringen, wobei diese Phase mit dem Einlaß von Druckluft in den Raum (52) zusammenfällt; ferner gekennzeichnet dadurch, daß während des Einlasses von Luft unter Atmosphärendruck in den Regelraum und von Druckluft in den Raum (52), die Membrane (12) durch den Atmosphärendruck gegen den ersten starren Körper (1) gesperrt wird (Ausstoßtakt), während dessen die zweite dicke Membrane (5) durch die Druckluft gegen die erste Membrane (12) gepreßt wird und damit das Volumen der Regelkammer (16) auf ein Mindestmaß reduziert; weiter gekennzeichnet dadurch, daß im nächsten Takt die Regelkammer (16) abgetrennt wird und der Raum (52) unterhalb der zweiten, dicken Membrane mit der Atmosphäre verbunden wird: die Druckluft wird dabei evakuiert und die zweite dicke Membrane (50) schrumpft und eine Druckentlastung unterhalb der ersten Membrane (12) hervorruft, die dadurch ebenfalls schrumpft (Einlaßtakt). Die dicke Membrane spielt dabei die Rolle einer Hilfspumpe, die direkt unterhalb der Membrane (12) untergebracht ist.
3) Pumpe nach Anspruch 1) oder 2) dadurch gekennzeichnet, daß
a) die interne Oberfläche des ersten starren Körpers (1) die Form zweier an ihrer Grundfläche verbundenen Kegelstümpfe hat, die Ausstoßöffnungen (3) am größeren Durchmesser . in der Mittelzone angeb racht sind und die Einlaßöffnungen an den Endzonen mit schmälerem Durchmesser sind;
b) der zweite Körper (11) koaxial zum ersten ist;
c) die elastische Membrane (12) röhrenförmig ist, mit einem natürlichen Durchmesser, der geringer ist als der Außendurchmesser des zweiten Körpers (11) und dabei fest mit ihren Enden an den Enden des ersten Körpers (1) angeheftet ist.
4) Pumpe nach Anspruch 1) dadurch gekenn zeichnet, daß dieselbe Hilfsvakuumpumpe (23) zur Erzeugung eines Teilvakuums ausstoßseitig vom Auslaßventil (7) und zur Erzeugung des zyklisch in der Kontrollkammen (16) angewendeten Vakuums benutzt wird.
5) Pumpe nach Anspruch 4, dadurch gekennzeichnet, daß die Einlaßleitung der Hilfspumpe (23) über einen starken Leitungsweg (22, 24) zwischen der Ausstoßseite des Auslaßventils (7) und der Einlaßleitung (17) in die Regelkammer (16) verfügt.
6) Pumpe nach Anspruch 1, dadurch gekennzeichnet, daß die besagte Verteilungsvorrichtung aus zwei 2-Weg Elektromagnet-Wechselventilen (20, 21) besteht, deren einer Weg parallel zur Betätigungsleitung (17) ist und der andere Weg einerseits zur: Atmosphäre andererseits zum Einlaß der Hilfspumpe (23) ist, wobei die zwei Wechselventile durch ein Wechselrelais (27) im Gegentakt geregelt werden.
7) Pumpe nach Anspruch 1, dadurch gekennzeichnet, daß die besagte Verteilungsvorrichtung aus einem Teilvakuumdynamometer (30) mit Kolben (33) und Rückholfeder (36) besteht.
8) Pumpe nach Anspruch 2, dadurch gekennzeichnet, daß die besagte Verteilungsvorrichtung in Bezug zum Raum zwischen dem zweiten Körper und der zweiten Membrane ein elektrisch gesteuerter Verteiler (55) ist, der durch dasselbe Wechselrelais (27) gesteuert wird, das auch die Ansteuerung der Regelkammer (16) zur Verbindung mit der Atmosphäre regelt.
9) Pumpe nach den Ansprüchen 1,2,3,4,5,6,7oder 8 dadurch gekennzeichnet, daß die erste Membrane (12) im Bereich der Einlaßöffnungen ( 2) einen geringeren Durchmesser hat.
EP82401332A 1981-07-24 1982-07-16 Membranpumpe für ölfreies Vakuum Expired EP0072275B1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT82401332T ATE26870T1 (de) 1981-07-24 1982-07-16 Membranpumpe fuer oelfreies vakuum.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8114489 1981-07-24
FR8114489A FR2510203A1 (fr) 1981-07-24 1981-07-24 Pompe primaire seche a membrane

Publications (2)

Publication Number Publication Date
EP0072275A1 EP0072275A1 (de) 1983-02-16
EP0072275B1 true EP0072275B1 (de) 1987-04-29

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EP82401332A Expired EP0072275B1 (de) 1981-07-24 1982-07-16 Membranpumpe für ölfreies Vakuum

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US (1) US4452572A (de)
EP (1) EP0072275B1 (de)
AT (1) ATE26870T1 (de)
DE (1) DE3276188D1 (de)
FR (1) FR2510203A1 (de)

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US5876190A (en) 1996-01-03 1999-03-02 Buchi Labortechnik Ag Vacuum membrane pump and a head portion for a vacuum membrane pump
GB2314591B (en) * 1996-06-26 1999-10-27 Poss Limited Flexible tube pump
EP1343400B1 (de) 2000-12-22 2010-05-19 Draeger Medical Systems, Inc. Schaukelgerät für kleinkinder
US6572259B2 (en) * 2001-04-20 2003-06-03 Burnett Lime Co., Inc. Apparatus and method to dispense a slurry
US9228579B2 (en) 2008-12-19 2016-01-05 Stobbe Tech A/S Method and device for industrial biolayer cultivation
NL1038329C2 (en) * 2010-10-25 2012-04-26 Lely Patent Nv Milking installation with milk pump.
US8951419B2 (en) 2010-12-17 2015-02-10 Burnett Lime Company, Inc. Method and apparatus for water treatment
US9114237B2 (en) * 2012-01-10 2015-08-25 Kci Licensing, Inc. Systems and methods for delivering fluid to a wound therapy dressing
CN103075328A (zh) * 2013-01-25 2013-05-01 沈阳大学 水动隔膜泵
CA3056915A1 (en) * 2016-03-18 2017-09-21 Deka Products Limited Partnership Pressure control gaskets for operating pump cassette membranes

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FR689893A (fr) * 1929-04-19 1930-09-12 Compresseur à membrane
US2494529A (en) * 1945-02-23 1950-01-10 Axel M Wirtanen Vacuum rupture operated pump
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US3824792A (en) * 1971-05-14 1974-07-23 Bendix Corp Vacuum intensified brake booster system
IN150056B (de) * 1977-09-12 1982-07-10 Tudor Ab
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Publication number Publication date
FR2510203B1 (de) 1984-01-06
DE3276188D1 (en) 1987-06-04
EP0072275A1 (de) 1983-02-16
ATE26870T1 (de) 1987-05-15
US4452572A (en) 1984-06-05
FR2510203A1 (fr) 1983-01-28

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