EP0071512B1 - Process for the preparation of an additive for an acid bath for the electrodeposition of copper and use thereof - Google Patents

Process for the preparation of an additive for an acid bath for the electrodeposition of copper and use thereof Download PDF

Info

Publication number
EP0071512B1
EP0071512B1 EP82401328A EP82401328A EP0071512B1 EP 0071512 B1 EP0071512 B1 EP 0071512B1 EP 82401328 A EP82401328 A EP 82401328A EP 82401328 A EP82401328 A EP 82401328A EP 0071512 B1 EP0071512 B1 EP 0071512B1
Authority
EP
European Patent Office
Prior art keywords
additive
concentration
bath
copper
acid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
EP82401328A
Other languages
German (de)
French (fr)
Other versions
EP0071512A1 (en
Inventor
Bernard Boudot
Georges Nury
André Lambert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rhone Poulenc Specialites Chimiques
Original Assignee
Rhone Poulenc Specialites Chimiques
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rhone Poulenc Specialites Chimiques filed Critical Rhone Poulenc Specialites Chimiques
Priority to AT82401328T priority Critical patent/ATE13697T1/en
Publication of EP0071512A1 publication Critical patent/EP0071512A1/en
Application granted granted Critical
Publication of EP0071512B1 publication Critical patent/EP0071512B1/en
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/38Electroplating: Baths therefor from solutions of copper

Definitions

  • the present invention relates to an additive for acid electrolytic copper plating bath, its preparation process and its application to copper plating of printed circuits.
  • compositions of acidic copper plating baths are known for coating by electrolysis.
  • French Patent No. 1,255,271 describes acid copper plating baths comprising one or more basic dyes which may in particular contain an ethenyl chromophore, amino compounds devoid of carbonyl groups, an organic sulfonic acid or a water-soluble salt of this acid and which contains, in its molecule at least one azido group, as additional brightening agent an organic compound which has at least one carbon atom linked exclusively to a heteroatom, and which carries a hydrocarbon radical, linked via a sulfur and / or nitrogen atom and one hydrogen of which is replaced by a sulfonic acid group, a thioamide or isothioamide which carries a sulfonic acid group linked to the nitrogen atom of the thioamide or isothioamide group via d 'a hydrocarbon radical, a thiourea derivative in which at least one nitrogen atom is replaced by an alkyl or anyle radical carrying an ether, hydroxyl or carboxyl group.
  • N, N diethyldithiocarbamate of n propyl w sodium sulfonate has the formula:
  • the violet crystal is constituted by a mixture of variable composition of the hydrochlorides of hexamethyl-, of pentamethyl-, of tetramethylpararosanilines.
  • the proportions of the constituents in the additive can vary within wide limits, a concentration of between 0.5 and 10 g / l and preferably between 1 and 3 g / I for N, N sodium propyl sulfonate diethyldithiocarbamate is suitable ; a concentration of between 10 and 100 g / l and preferably 15 and 20 g / l for polyethylene glycol is suitable; a concentration between 0.1 and 1 g / I and preferably 0.2 and 0.5 g / I for the violet crystal is suitable and a concentration between 0.1 and 0.2 N for sulfuric acid is suitable.
  • the components constituting the additive are mixed in the proportions which have been given above.
  • the additive thus prepared can be used in the acidic copper-plating bath.
  • concentration of the additive in the bath can vary between approximately 2 and 100 ml / l and preferably 3 and 50 ml / l.
  • metallization is carried out at temperatures below 60 ° and with current densities varying from 0.5 to 10 A / dm 2 .
  • the amperage zone giving the best gloss effects varies according to the proportions of the constituents of the additive.
  • metallic supports all kinds of metals usually used for this purpose can be used, such as iron, copper, steel, zinc and other base metals or alloys.
  • the acid copper baths in which the additives according to the invention can be used mainly comprise copper sulphate, the concentration of which can vary between 50 and 250 g / l and sulfuric acid, the concentration of which can vary between 60 and 250 g / I.
  • the additive according to the invention has excellent chemical stability in acid baths, so that they remain able to function even if one operates at temperatures. relatively high bath.
  • the additive of the invention can be used in copper plating operations.
  • the additive according to the present invention is particularly effective for operating the electrolytic copper plating of printed circuits and electroformed parts.
  • This additive can also be used in combination with other known agents, such as conductive salts, wetting agents or anti-porous agents.
  • the additive according to the invention makes it possible to obtain copper deposits which are shiny, ductile, leveling and resistant to thermal shock. It also allows, because of its low degradability in the bath during operation, to lead to a significant increase in the duration of use of the bath. In addition, its excellent stability at temperatures above 25 ° C leads to an additive consumption at these temperatures three times lower than with the additives used until now. It also allows use in a very wide current density range as well as a concentration in the copper bath also very wide.
  • the thickness of the copper deposits obtained with the additive can vary within wide limits; one can, for example, make deposits having a thickness of between a few microns and 5 mm.
  • the mixture is stirred for approximately two hours, then the temperature is raised to 60 ° C in two hours; the mixture is matured at this temperature for 100 hours and then cooled to room temperature: about 187 liters of additive are thus obtained.
  • the range of usable current density extends from 1 to 10 Aldm 2 if it is desired to obtain only a glossy deposit resistant to thermal shock, and from 1 to 8 A / dm 2 if in addition to these qualities, wishes to obtain a fine grain structure of copper.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroplating And Plating Baths Therefor (AREA)
  • Electrolytic Production Of Metals (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Electroplating Methods And Accessories (AREA)

Abstract

Additive composition for an acid copper electroplating bath, which bath being well adapted for the copper plating of printed circuits, is comprised of (1) the sodium salt of omega -sulfo-n-propyl N,N-diethyldithiocarbamate, (2) polyethylene glycol having an average molecular weight ranging from about 6,000 to 20,000, (3) crystal violet, and (4) sulfuric acid.

Description

La présente invention concerne un additif pour bain de cuivrage électrolytique acide, son procédé de préparation et son application au cuivrage des circuits imprimés.The present invention relates to an additive for acid electrolytic copper plating bath, its preparation process and its application to copper plating of printed circuits.

On connaît diverses compositions de bains de cuivrage acides pour revêtement par électrolyse.Various compositions of acidic copper plating baths are known for coating by electrolysis.

Ainsi le brevet français n° 1 255 271 décrit des bains de cuivrage acides comportant un ou des colorants basiques qui peuvent contenir notamment un chromophore éthényle, des composés aminés dépourvus de groupe carbonyles, un acide organique sulfonique ou un sel hydrosoluble de cet acide et qui contient, dans sa molécule au moins un groupe azido, à titre d'agent de brillantage additionnel un composé organique qui possède au moins un atome de carbone relié exclusivement à un hétéroatome, et qui porte un radical hydrocarbure, relié par l'intermédiaire d'un atome de soufre et/ou d'azote et dont un hydrogène est remplacé par un groupe acide sulfonique, une thioamide ou isothioamide qui porte un groupe acide sulfonique lié à l'atome d'azote du groupe thioamide ou isothioamide par l'intermédiaire d'un radical hydrocarbure, un dérivé de thiourée dans lequel au moins un atome d'azote est remplacé par un radical alcoyle ou anyle portant un groupe éther, hydroxyle ou carboxyle.Thus, French Patent No. 1,255,271 describes acid copper plating baths comprising one or more basic dyes which may in particular contain an ethenyl chromophore, amino compounds devoid of carbonyl groups, an organic sulfonic acid or a water-soluble salt of this acid and which contains, in its molecule at least one azido group, as additional brightening agent an organic compound which has at least one carbon atom linked exclusively to a heteroatom, and which carries a hydrocarbon radical, linked via a sulfur and / or nitrogen atom and one hydrogen of which is replaced by a sulfonic acid group, a thioamide or isothioamide which carries a sulfonic acid group linked to the nitrogen atom of the thioamide or isothioamide group via d 'a hydrocarbon radical, a thiourea derivative in which at least one nitrogen atom is replaced by an alkyl or anyle radical carrying an ether, hydroxyl or carboxyl group.

On connaît, par ailleurs, selon le brevet belge n° 572186 des bains de cuivrage acides comportant une teneur en acides sulfoniques organiques ou en leurs sels solubles dans l'eau contenant au moins un groupe azido dans la molécule, une teneur supplémentaire en esters alcoylés-sulfoniques d'acides dithiocarboniques N-mono- ou disubstitués ou en leurs sels solubles dans l'eau, une teneur supplémentaire en acide 1,3,5-triazine-2,4,6-tris-(mercaptoalcane-sulfoniques) ou en leurs sels solubles dans l'eau, une teneur supplémentaire en agents améliorant la ductilité des enduits.Furthermore, according to Belgian patent No. 572186, acid copper plating baths containing a content of organic sulfonic acids or their water-soluble salts containing at least one azido group in the molecule, an additional content of alkylated esters are known. -sulfonic of N-mono- or disubstituted dithiocarbonic acids or of their water-soluble salts, an additional content of 1,3,5-triazine-2,4,6-tris- (mercaptoalkane-sulfonic acid) or in their water-soluble salts, an additional content of agents improving the ductility of coatings.

Les additifs particuliers décrits dans ces brevets ne sont toutefois pas satisfaisants, notamment car ils se dégradent relativement rapidement au cours de leur utilisation, leur stabilité à des températures supérieures à 25 °C est faible.The particular additives described in these patents are however not satisfactory, in particular because they degrade relatively quickly during their use, their stability at temperatures above 25 ° C is low.

On connaît d'après le brevet US-A-4036 710 des bains de cuivrage contenant au moins un composé choisi parmi

  • (A) des colorants contenant des groupes triphénylméthane, par exemple le cristal violet et
  • (B) les sulfoalcoylsulfures contenant le groupement S-alcoyl-S03M.
There are known from US-A-4036 710 copper plating baths containing at least one compound chosen from
  • (A) dyes containing triphenylmethane groups, for example violet crystal and
  • (B) sulfoalkyl sulfides containing the group S-alcoyl-S0 3 M.

On connaît d'après le brevet US-A-4 038 161 des procédés d'obtention de revêtements de cuivre réguliers du type selon lequel on dépose électrolytiquement du cuivre à partir d'un bain de revêtement électrolytique acide aqueux contenant un ou plusieurs sels de cuivre solubles dans le bain et un acide libre, caractérisé par le fait que l'on ajoute dans le bain une quantité suffisante pour provoquer un dépôt électrolytique de cuivre régulier, d'au moins un composé égalisateur de niveau organique soluble dans le bain et obtenu en faisant réagir une ou plusieurs épihalohydrines avec un ou plusieurs composés azotés choisis parmi l'ensemble constitué par :

  • a) les pyridines substituées de formule générale :
    Figure imgb0001
    où R est un alcoyle inférieur, un alcényle inférieur, un alcoylène-amine, un mercapto, un cyano, un alcoylène 4-pyridyle, un groupe --C(S)NH2 ou -CH = NOH, ou un groupe de formule -C(O)R' où R' est un groupe alcoyle ou aryle inférieur ou -N(Et)2,
  • b) les pyridines substituées de formule générale :
    Figure imgb0002
    où R2 est un groupe amino, chloro, ou β-acide acrylique,
  • c) la 2-vinyl-pyridine,
  • d) la 2-méthyl-5-vinyl-pyridine,
  • e) la quinoléine ou la 3-amino-quinoléine,
  • f) l'isoquinoléine, ou
  • g) le benzimidazole.
From patent US Pat. No. 4,038,161, processes are known for obtaining regular copper coatings of the type according to which copper is electrolytically deposited from an aqueous acid electrolytic coating bath containing one or more salts of copper soluble in the bath and a free acid, characterized in that a sufficient amount is added to the bath to cause an electrolytic deposition of regular copper, of at least one leveling compound of organic level soluble in the bath and obtained by reacting one or more epihalohydrins with one or more nitrogenous compounds chosen from the group consisting of:
  • a) the substituted pyridines of general formula:
    Figure imgb0001
    where R is a lower alkyl, a lower alkenyl, an alkylene amine, a mercapto, a cyano, a 4-pyridyl alkylene, a group --C (S) NH 2 or -CH = NOH, or a group of formula - C (O) R 'where R' is a lower alkyl or aryl group or -N (Et) 2 ,
  • b) substituted pyridines of general formula:
    Figure imgb0002
    where R 2 is an amino, chloro, or β-acrylic acid group,
  • c) 2-vinyl-pyridine,
  • d) 2-methyl-5-vinyl-pyridine,
  • e) quinoline or 3-amino-quinoline,
  • f) isoquinoline, or
  • g) benzimidazole.

On connaît d'après l'article CA vol. 82, n° 26, 30 juin 1975, pages 415-416, le rôle des colorants contenant des groupements triphénylméthane dans les bains de cuivrage électrolytique.We know from the article CA vol. 82, n ° 26, June 30, 1975, pages 415-416, the role of dyes containing triphenylmethane groups in electrolytic copper plating baths.

La demanderesse a mis au point un additif et un procédé pour bain de cuivrage électrolytique acide qui remédie aux inconvénients précités et qui présente notamment les avantages suivants :

  • - une faible dégradabilité dans le bain en fonctionnement, conduisant à une augmentation importante de la durée d'utilisation d'un bain et à une faible consommation de produit,
  • - une excellente stabilité à des températures supérieures à 25 °C, conduisant à des consommations en additif à ces températures deux à trois fois plus faibles que celles nécessaires avec les additifs connus,
  • - l'additif permet d'utiliser une plage de densité de courant très étendue, par exemple de 1 à 10 A/dm2,
  • - on peut utiliser une plage de concentration en additif très étendue sans diminution de la qualité du dépôt électrolytique.
The Applicant has developed an additive and a process for acid electrolytic copper plating bath which overcomes the aforementioned drawbacks and which in particular has the following advantages:
  • - poor degradability in the bath in operation, leading to a significant increase in the duration of use of a bath and low consumption of product,
  • - excellent stability at temperatures above 25 ° C, leading to additive consumption at these temperatures two to three times lower than that required with known additives,
  • the additive makes it possible to use a very wide range of current density, for example from 1 to 10 A / dm 2 ,
  • - a very wide range of additive concentration can be used without reducing the quality of the electrolytic deposit.

La présente invention concerne en effet un procédé de préparation d'un additif pour bain de cuivrage électrolytique acide caractérisé en ce qu'il comporte les étapes suivantes :

  • a) on mélange le N,N diéthyldithiocarbamate de n propyle ω sulfonate de sodium, un polyéthylène glycol de poids moléculaire moyen compris entre 6000 et 20 000, le cristal violet, de l'acide sulfurique,
  • b) on opère le mûrissement du mélange ainsi obtenu à une température comprise entre environ 58 et 70 °C et de préférence 60 et 62 °C pendant un temps compris entre 60 et 200 heures et de préférence 75 et 100 heures.
The present invention indeed relates to a process for the preparation of an additive for an acid electrolytic copper plating bath, characterized in that it comprises the following steps:
  • a) mixing N, N n-propyl diethyldithiocarbamate de sodium sulfonate, a polyethylene glycol with an average molecular weight of between 6000 and 20,000, violet crystal, sulfuric acid,
  • b) the mixture thus obtained is ripened at a temperature between about 58 and 70 ° C and preferably 60 and 62 ° C for a time between 60 and 200 hours and preferably 75 and 100 hours.

Le N,N diéthyldithiocarbamate de n propyle w sulfonate de sodium présente la formule :

Figure imgb0003
The N, N diethyldithiocarbamate of n propyl w sodium sulfonate has the formula:
Figure imgb0003

Le cristal violet est constitué par un mélange de composition variable des chlorhydrates d'hexamé- thyl-, de pentaméthyl-, de tétraméthylpararosanilines.The violet crystal is constituted by a mixture of variable composition of the hydrochlorides of hexamethyl-, of pentamethyl-, of tetramethylpararosanilines.

Selon l'invention, on met de préférence en oeuvre le cristal violet constitué de chlorhydrate d'hexanethylparasoaniline, de formule :

Figure imgb0004
According to the invention, use is preferably made of the violet crystal consisting of hexanethylparasoaniline hydrochloride, of formula:
Figure imgb0004

Les proportions des constituants dans l'additif peuvent varier dans de larges limites, une concentration comprise entre 0,5 et 10 g/l et de préférence entre 1 et 3 g/I pour le N,N diéthyldithiocarbamate de n propyle sulfonate de sodium convient ; une concentration comprise entre 10 et 100 g/I et de préférence 15 et 20 g/1 pour le polyéthylène glycol convient ; une concentration comprise entre 0,1 et 1 g/I et de préférence 0,2 et 0,5 g/I pour le cristal violet convient et une concentration comprise entre 0,1 et 0,2 N pour l'acide sulfurique convient.The proportions of the constituents in the additive can vary within wide limits, a concentration of between 0.5 and 10 g / l and preferably between 1 and 3 g / I for N, N sodium propyl sulfonate diethyldithiocarbamate is suitable ; a concentration of between 10 and 100 g / l and preferably 15 and 20 g / l for polyethylene glycol is suitable; a concentration between 0.1 and 1 g / I and preferably 0.2 and 0.5 g / I for the violet crystal is suitable and a concentration between 0.1 and 0.2 N for sulfuric acid is suitable.

La présente invention concerne également le procédé de préparation de l'additif. Le procédé est caractérisé en ce qu'il comporte les étapes suivantes :

  • a) on mélange les quatre constituants composant l'additif,
  • b) on opère le mûrissement du mélange ainsi obtenu à une température comprise entre environ 58 et 70°C et de préférence entre 60 et 62 °C pendant un temps compris entre environ 60 et 200 heures et de préférence de 75 à 100 heures.
The present invention also relates to the process for preparing the additive. The method is characterized in that it comprises the following steps:
  • a) the four constituents making up the additive are mixed,
  • b) the mixture thus obtained is ripened at a temperature between about 58 and 70 ° C and preferably between 60 and 62 ° C for a time between about 60 and 200 hours and preferably from 75 to 100 hours.

Le mélange des constituants composant l'additif est effectué dans les proportions qui ont été données ci-dessus.The components constituting the additive are mixed in the proportions which have been given above.

L'additif ainsi préparé peut être mis en oeuvre dans le bain acide de cuivrage. La concentration de l'additif dans le bain peut varier entre environ 2 et 100 ml/I et de préférence 3 et 50 ml/l.The additive thus prepared can be used in the acidic copper-plating bath. The concentration of the additive in the bath can vary between approximately 2 and 100 ml / l and preferably 3 and 50 ml / l.

En général, on métallise à des températures inférieures à 60° et avec des densités de courant variant de 0,5 à 10 A/dm2. La zone d'ampérage donnant les meilleurs effets de brillant varie suivant les proportions des constituants de l'additif. Par l'emploi de l'additif selon l'invention, on peut élargir la zone d'ampérage donnant l'effet brillant maximum et accroître la certitude de succès dans la pratique. Comme supports métalliques, on peut employer tous les genres de métaux habituellement affectés à cet usage comme le fer, le cuivre, l'acier, le zinc et autres métaux communs ou alliages.In general, metallization is carried out at temperatures below 60 ° and with current densities varying from 0.5 to 10 A / dm 2 . The amperage zone giving the best gloss effects varies according to the proportions of the constituents of the additive. By using the additive according to the invention, it is possible to widen the amperage zone giving the maximum brilliant effect and to increase the certainty of success in practice. As metallic supports, all kinds of metals usually used for this purpose can be used, such as iron, copper, steel, zinc and other base metals or alloys.

Les bains de cuivrage acides dans lesquels peuvent être utilisés les additifs selon l'invention comportent principalement du sulfate de cuivre dont la concentration peut varier entre 50 et 250 g/1 et de l'acide sulfurique dont la concentration peut varier entre 60 et 250 g/I.The acid copper baths in which the additives according to the invention can be used mainly comprise copper sulphate, the concentration of which can vary between 50 and 250 g / l and sulfuric acid, the concentration of which can vary between 60 and 250 g / I.

L'additif suivant l'invention présente une excellente stabilité chimique en bains acides, de sorte que ceux-ci demeurent aptes à fonctionner même si l'on opère à des températures. de bain relativement élevées.The additive according to the invention has excellent chemical stability in acid baths, so that they remain able to function even if one operates at temperatures. relatively high bath.

L'additif de l'invention peut s'employer dans les opérations de cuivrage.The additive of the invention can be used in copper plating operations.

L'additif selon la présente invention est particulièrement efficace pour opérer le cuivrage électrolytique des circuits imprimés et des pièces électroformées.The additive according to the present invention is particularly effective for operating the electrolytic copper plating of printed circuits and electroformed parts.

On peut aussi employer cet additif en combinaison avec d'autres agents connus, tels que des sels conducteurs, des mouillants ou des agents anti-poreux.This additive can also be used in combination with other known agents, such as conductive salts, wetting agents or anti-porous agents.

Ainsi l'additif selon l'invention permet d'obtenir des dépôts de cuivre qui sont brillants, ductiles, nivellants et résistants au choc thermique. Il permet également, du fait de sa faible dégradabilité dans le bain lors du fonctionnement de conduire à une augmentation importante de la durée d'utilisation du bain. De plus, son excellente stabilité à des températures supérieures à 25 °C conduit à une consommation en additif à ces températures trois fois plus faible qu'avec les additifs utilisés jusqu'à présent. Il permet en outre une utilisation dans une gamme de densité de courant très étendue ainsi qu'une concentration dans le bain de cuivrage également très étendue.Thus the additive according to the invention makes it possible to obtain copper deposits which are shiny, ductile, leveling and resistant to thermal shock. It also allows, because of its low degradability in the bath during operation, to lead to a significant increase in the duration of use of the bath. In addition, its excellent stability at temperatures above 25 ° C leads to an additive consumption at these temperatures three times lower than with the additives used until now. It also allows use in a very wide current density range as well as a concentration in the copper bath also very wide.

L'épaisseur des dépôts de cuivre obtenus avec l'additif peut varier dans de larges proportions ; on peut, par exemple, effectuer des dépôts ayant une épaisseur comprise entre quelques microns et 5 mm.The thickness of the copper deposits obtained with the additive can vary within wide limits; one can, for example, make deposits having a thickness of between a few microns and 5 mm.

L'exemple ci-après illustre l'invention sans en limiter la portée.The example below illustrates the invention without limiting its scope.

ExempleExample Préparation de l'additifAdditive preparation

Dans un réacteur en acier verré de 200 litres, on introduit successivement

  • - 186 litres d'eau distillée, 522 millilitres d'H2SO4 présentant une concentration de 36 N,
  • - 65 g de cristal violet,
  • - 3095 g de polyéthylène glycol présentant un poids moléculaire moyen de 12 000,
  • - 186 g de N,N diéthyldithiocarbamate de n propyle ω sulfonate de sodium.
In a 200 liter glass steel reactor, successively introduced
  • - 186 liters of distilled water, 522 milliliters of H 2 SO 4 with a concentration of 36 N,
  • - 65 g of purple crystal,
  • 3095 g of polyethylene glycol having an average molecular weight of 12,000,
  • - 186 g of N, N n-propyl diethyldithiocarbamate de sodium sulfonate.

On agite pendant deux heures environ, puis on monte la température jusqu'à 60 °C en deux heures ; le mélange est mûri à cette température pendant 100 heures puis refroidi jusqu'à la température ambiante : on obtient ainsi environ 187 litres d'additif.The mixture is stirred for approximately two hours, then the temperature is raised to 60 ° C in two hours; the mixture is matured at this temperature for 100 hours and then cooled to room temperature: about 187 liters of additive are thus obtained.

ApplicationApplication

Dans une cuve de 1 000 litres de métallisation de circuits imprimés, on monte un bain ayant la composition suivante :

  • - Sulfate de cuivre (CuSO4, 5H2O) 75 g/I
  • - Acide sulfurique 180 g/I
  • - Chlorure 50 mg/l
In a tank of 1000 liters of metallization of printed circuits, a bath having the following composition is mounted:
  • - Copper sulphate (CuSO 4 , 5H 2 O) 75 g / I
  • - Sulfuric acid 180 g / I
  • - Chloride 50 mg / l

Après avoir effectué une électrolyse de 10 heures à 1 Ampère/dm2 pour éliminer les impuretés métalliques, on ajoute 5 litres d'additif préparé selon l'exemple : les dépôts obtenus après cet ajout sont brillants, ductiles et sans tension interne ―la structure du cuivre déposé est à grains fins et aucune cassure n'apparaît dans le dépôt après le test de choc thermique (immersion 10 secondes dans la soudure à 290 °C puis trempé dans lleau).After carrying out an electrolysis of 10 hours at 1 Ampere / dm 2 to remove the metallic impurities, 5 liters of additive prepared according to the example are added: the deposits obtained after this addition are shiny, ductile and without internal tension ―the structure of the copper deposited is fine-grained and no breakage appears in the deposit after the thermal shock test (immersion 10 seconds in the solder at 290 ° C then dipped in water).

La plage de densité de courant utilisable s'étend de 1 à 10 Aldm2 si on souhaite n'obtenir qu'un dépôt brillant et résistant au choc thermique, et de 1 à 8 A/dm2 si en plus de ces qualités, on souhaite obtenir une structure à grains fins du cuivre.The range of usable current density extends from 1 to 10 Aldm 2 if it is desired to obtain only a glossy deposit resistant to thermal shock, and from 1 to 8 A / dm 2 if in addition to these qualities, wishes to obtain a fine grain structure of copper.

Le suivi de la concentration du bain en additif peut être aisément effectué à l'aide du test de cellule de Hull (Electroplating-Mc Graw-Hill Book Company 1978 pages 148-150) dans les conditions suivantes :

  • - Intensité : 2 Ampères
  • - Durée : 5 minutes
  • - Température : 22-24 °C
  • - Agitation : oui
  • - Volume d'électrolyte : 250 cm3
Monitoring the concentration of the additive bath can be easily carried out using the Hull cell test (Electroplating-Mc Graw-Hill Book Company 1978 pages 148-150) under the following conditions:
  • - Intensity: 2 Amps
  • - Duration: 5 minutes
  • - Temperature: 22-24 ° C
  • - Agitation: yes
  • - Electrolyte volume: 250 cm 3

Dans le cas de la cuve de 1 000 litres, des rajouts d'additif de 1 litre seront effectués chaque fois que la largeur de la zone brûlée sur la plaque de cellule de Hull atteindra 10 mm. Dans ces conditions, pour une température inférieure à 26 °C la consommation en additif sera comprise entre 1 et 2 litres pour 10000 Ampères/heure et la durée de vie du bain avant régénération sur charbon actif sera supérieure à 1,5 million d'Ampère x heure.In the case of the 1000 liter tank, additions of 1 liter additive will be made each time the width of the burnt area on the Hull cell plate reaches 10 mm. Under these conditions, for a temperature below 26 ° C, the additive consumption will be between 1 and 2 liters for 10,000 amperes / hour and the life of the bath before regeneration on activated carbon will be more than 1.5 million amperes. x hour.

Claims (3)

1. Process for the preparation of an additive for an acidic electrolytic coppering bath, characterised in that it comprises the following stages :
a) ω-(sodium sulphonate)-n-propyl N,N-diethyldithiocarbamate, a polyethylene glycol of mean molecular weight between 6,000 and 20,000, crystal violet and sulphuric acid are mixed, and
b) the mixture thus obtained is ripened at a temperature of between 58 and 70 °C for a period of between 60 and 200 hours.
2. Process according to Claim 1, characterised in that the concentration of w-(sodium sulphonate)-n-propyl N,N-diethyldithiocarbamate is between 0.5 and 10 g/l, the concentration of polyethylene glycol is between 10 and 100 g/l, the concentration of crystal violet is between 0,1 and 1 g/I and the concentration of sulphuric acid is between 0.1 and 0.5 N.
3. Electrolytic coppering process, characterised in that the additive prepared according to Claims 1 or 2 is employed in a coppering bath which principally contains copper sulphate of concentration between 50 and 250 g/I and sulphuric acid of concentration between 60 and 250 g/l, the concentration of the additive in the bath being between 2 and 100 ml/I, the bath temperature being less than 60 °C and the current density being between 0.5 and 10 A/dm2.
EP82401328A 1981-07-24 1982-07-16 Process for the preparation of an additive for an acid bath for the electrodeposition of copper and use thereof Expired EP0071512B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT82401328T ATE13697T1 (en) 1981-07-24 1982-07-16 PROCESS FOR THE PREPARATION OF AN ADDITIVE FOR AN ACID COPPER ELECTRIC PLATING BATH AND ITS USE.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8114394A FR2510145B1 (en) 1981-07-24 1981-07-24 ADDITIVE FOR AN ACID ELECTROLYTIC COPPER BATH, ITS PREPARATION METHOD AND ITS APPLICATION TO COPPER PRINTED CIRCUITS
FR8114394 1981-07-24

Publications (2)

Publication Number Publication Date
EP0071512A1 EP0071512A1 (en) 1983-02-09
EP0071512B1 true EP0071512B1 (en) 1985-06-05

Family

ID=9260823

Family Applications (1)

Application Number Title Priority Date Filing Date
EP82401328A Expired EP0071512B1 (en) 1981-07-24 1982-07-16 Process for the preparation of an additive for an acid bath for the electrodeposition of copper and use thereof

Country Status (9)

Country Link
US (1) US4430173A (en)
EP (1) EP0071512B1 (en)
JP (1) JPS5827992A (en)
AT (1) ATE13697T1 (en)
DE (1) DE3264038D1 (en)
FR (1) FR2510145B1 (en)
HK (1) HK96586A (en)
IE (1) IE53352B1 (en)
SG (1) SG64086G (en)

Families Citing this family (51)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4667049A (en) * 1984-11-02 1987-05-19 Etd Technology Inc. Method of making dialkylamino-thioxomethyl-thioalkanesulfonic acid compounds
DE4032864A1 (en) * 1990-10-13 1992-04-16 Schering Ag ACIDIC BATH FOR THE GALVANIC DEPOSITION OF COPPER COVERS AND METHODS USING THIS COMBINATION
DE4126502C1 (en) * 1991-08-07 1993-02-11 Schering Ag Berlin Und Bergkamen, 1000 Berlin, De
US6024857A (en) * 1997-10-08 2000-02-15 Novellus Systems, Inc. Electroplating additive for filling sub-micron features
DE19758121C2 (en) * 1997-12-17 2000-04-06 Atotech Deutschland Gmbh Aqueous bath and method for electrolytic deposition of copper layers
EP1118696A4 (en) * 1998-09-03 2007-10-17 Ebara Corp Method for plating substrate and apparatus
US7425250B2 (en) * 1998-12-01 2008-09-16 Novellus Systems, Inc. Electrochemical mechanical processing apparatus
US6610190B2 (en) * 2000-11-03 2003-08-26 Nutool, Inc. Method and apparatus for electrodeposition of uniform film with minimal edge exclusion on substrate
US7578923B2 (en) * 1998-12-01 2009-08-25 Novellus Systems, Inc. Electropolishing system and process
US6497800B1 (en) * 2000-03-17 2002-12-24 Nutool Inc. Device providing electrical contact to the surface of a semiconductor workpiece during metal plating
US6413388B1 (en) 2000-02-23 2002-07-02 Nutool Inc. Pad designs and structures for a versatile materials processing apparatus
US7204924B2 (en) * 1998-12-01 2007-04-17 Novellus Systems, Inc. Method and apparatus to deposit layers with uniform properties
US7427337B2 (en) * 1998-12-01 2008-09-23 Novellus Systems, Inc. System for electropolishing and electrochemical mechanical polishing
KR100665745B1 (en) * 1999-01-26 2007-01-09 가부시키가이샤 에바라 세이사꾸쇼 A method of copper plating and an apparatus therefor
JP2001073182A (en) * 1999-07-15 2001-03-21 Boc Group Inc:The Improved acidic copper electroplating solution
US6355153B1 (en) * 1999-09-17 2002-03-12 Nutool, Inc. Chip interconnect and packaging deposition methods and structures
US6612915B1 (en) 1999-12-27 2003-09-02 Nutool Inc. Work piece carrier head for plating and polishing
US6354916B1 (en) 2000-02-11 2002-03-12 Nu Tool Inc. Modified plating solution for plating and planarization and process utilizing same
US20090020437A1 (en) * 2000-02-23 2009-01-22 Basol Bulent M Method and system for controlled material removal by electrochemical polishing
US20060131177A1 (en) * 2000-02-23 2006-06-22 Jeffrey Bogart Means to eliminate bubble entrapment during electrochemical processing of workpiece surface
US7141146B2 (en) * 2000-02-23 2006-11-28 Asm Nutool, Inc. Means to improve center to edge uniformity of electrochemical mechanical processing of workpiece surface
US6406609B1 (en) * 2000-02-25 2002-06-18 Agere Systems Guardian Corp. Method of fabricating an integrated circuit
US6482307B2 (en) 2000-05-12 2002-11-19 Nutool, Inc. Method of and apparatus for making electrical contact to wafer surface for full-face electroplating or electropolishing
US6852208B2 (en) 2000-03-17 2005-02-08 Nutool, Inc. Method and apparatus for full surface electrotreating of a wafer
US20060118425A1 (en) * 2000-04-19 2006-06-08 Basol Bulent M Process to minimize and/or eliminate conductive material coating over the top surface of a patterned substrate
WO2001084617A1 (en) * 2000-04-27 2001-11-08 Nu Tool Inc. Conductive structure for use in multi-level metallization and process
US6695962B2 (en) 2001-05-01 2004-02-24 Nutool Inc. Anode designs for planar metal deposits with enhanced electrolyte solution blending and process of supplying electrolyte solution using such designs
US6478936B1 (en) * 2000-05-11 2002-11-12 Nutool Inc. Anode assembly for plating and planarizing a conductive layer
US7195696B2 (en) * 2000-05-11 2007-03-27 Novellus Systems, Inc. Electrode assembly for electrochemical processing of workpiece
US6921551B2 (en) * 2000-08-10 2005-07-26 Asm Nutool, Inc. Plating method and apparatus for controlling deposition on predetermined portions of a workpiece
US7754061B2 (en) * 2000-08-10 2010-07-13 Novellus Systems, Inc. Method for controlling conductor deposition on predetermined portions of a wafer
US6776893B1 (en) 2000-11-20 2004-08-17 Enthone Inc. Electroplating chemistry for the CU filling of submicron features of VLSI/ULSI interconnect
US6802946B2 (en) 2000-12-21 2004-10-12 Nutool Inc. Apparatus for controlling thickness uniformity of electroplated and electroetched layers
US6866763B2 (en) * 2001-01-17 2005-03-15 Asm Nutool. Inc. Method and system monitoring and controlling film thickness profile during plating and electroetching
US20050040049A1 (en) * 2002-09-20 2005-02-24 Rimma Volodarsky Anode assembly for plating and planarizing a conductive layer
US20070131563A1 (en) * 2003-04-14 2007-06-14 Asm Nutool, Inc. Means to improve center to edge uniformity of electrochemical mechanical processing of workpiece surface
US7297247B2 (en) * 2003-05-06 2007-11-20 Applied Materials, Inc. Electroformed sputtering target
DE10337669B4 (en) * 2003-08-08 2006-04-27 Atotech Deutschland Gmbh Aqueous, acid solution and process for the electrodeposition of copper coatings and use of the solution
US7648622B2 (en) * 2004-02-27 2010-01-19 Novellus Systems, Inc. System and method for electrochemical mechanical polishing
CN1946879B (en) * 2005-01-25 2010-05-05 日矿金属株式会社 Copper electrolysis solution containing compound having specific skeleton as additive, and electrolytic copper foil produced therefrom
US9127362B2 (en) 2005-10-31 2015-09-08 Applied Materials, Inc. Process kit and target for substrate processing chamber
US8790499B2 (en) * 2005-11-25 2014-07-29 Applied Materials, Inc. Process kit components for titanium sputtering chamber
EP1839695A1 (en) * 2006-03-31 2007-10-03 Debiotech S.A. Medical liquid injection device
US8500985B2 (en) * 2006-07-21 2013-08-06 Novellus Systems, Inc. Photoresist-free metal deposition
US20080237048A1 (en) * 2007-03-30 2008-10-02 Ismail Emesh Method and apparatus for selective electrofilling of through-wafer vias
US8968536B2 (en) * 2007-06-18 2015-03-03 Applied Materials, Inc. Sputtering target having increased life and sputtering uniformity
US7901552B2 (en) 2007-10-05 2011-03-08 Applied Materials, Inc. Sputtering target with grooves and intersecting channels
KR20110079466A (en) 2009-12-31 2011-07-07 제일모직주식회사 Thermoplastic resin composition and molded product using the same
CN105568326A (en) * 2015-12-31 2016-05-11 深圳市鑫鸿顺科技有限公司 Coppering solution special for vertical and continuous electroplating of PCB
CN113166962A (en) 2018-11-07 2021-07-23 科文特亚股份有限公司 Satin copper bath and method for depositing a satin copper layer
CN110284163B (en) * 2019-07-31 2020-08-04 广州三孚新材料科技股份有限公司 Copper plating solution for solar cell and preparation method thereof

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4036710A (en) * 1974-11-21 1977-07-19 M & T Chemicals Inc. Electrodeposition of copper
US4038161A (en) * 1976-03-05 1977-07-26 R. O. Hull & Company, Inc. Acid copper plating and additive composition therefor

Also Published As

Publication number Publication date
DE3264038D1 (en) 1985-07-11
IE821754L (en) 1983-01-24
FR2510145B1 (en) 1986-02-07
JPS6155599B2 (en) 1986-11-28
SG64086G (en) 1987-09-18
ATE13697T1 (en) 1985-06-15
US4430173A (en) 1984-02-07
IE53352B1 (en) 1988-10-26
FR2510145A1 (en) 1983-01-28
EP0071512A1 (en) 1983-02-09
HK96586A (en) 1986-12-19
JPS5827992A (en) 1983-02-18

Similar Documents

Publication Publication Date Title
EP0071512B1 (en) Process for the preparation of an additive for an acid bath for the electrodeposition of copper and use thereof
FR2699556A1 (en) Baths for forming an electrolytic deposit of copper and process for electrolytic deposition using this bath.
EP1423557B1 (en) Electrolytic solution for electrochemical deposition of gold and its alloys
EP1272691B1 (en) Electrolytic solution for electrochemical deposit of palladium or its alloys
FR2597118A1 (en) ELECTROLYTE OF ZINC-NICKEL ALLOYS AND METHOD FOR ITS ELECTRODEPOSITION
FR2586713A1 (en) ELECTROLYTE AND METHOD FOR FORMING A ZINC ALLOY COATING
FR2571065A1 (en) IMPROVED ELECTROLYTE FOR ELECTROLYTIC DEPOSITION OF A ZINC ALLOY AND METHOD OF ELECTROLYTIC DEPOSITION OF THIS ALLOY
EP1268347A1 (en) Palladium complex salt and use thereof for adjusting palladium concentration of an electrolytic solution for deposit of palladium or one of its alloys
FR2470169A1 (en) GALVANIZATION BATHS AND METHOD FOR THEIR IMPLEMENTATION
EP0480876A2 (en) Electrodeposition of a gold alloy containing copper and zinc and its method of production
US4411744A (en) Bath and process for high speed nickel electroplating
FR2547318A1 (en) ELECTROLYTE COMPOSITION AND METHOD FOR THE ELECTROLYTIC DEPOSITION OF COPPER
FR2527230A1 (en) ZINC COATING BATHS CONTAINING BRILLIANTS FORMED BY A-AMINOPROPIONIC ACID DERIVATIVES AND THEIR POLYMERS
FR2512444A1 (en) ALKALINE BATHS WITH ELECTROLYTIC ZINC COATING, CONTAINING ALKYLATED HYDROXYLARYLIC COMPOUNDS
JPH0359995B2 (en)
FR2492849A1 (en) ELECTROLYTIC COATING BATHS FOR SEMI-GLOSSY NICKEL DEPOSITION, CONTAINING BENZENESULFONIC ACID AS A BRILLIANT AND A PERFLUOROALKYLSULFONATE WETTING AGENT
FR2509756A1 (en) ELECTROLYTE FOR THE DEPOSITION OF BRILLIANT TIN COATINGS
RU2110621C1 (en) Self-adjusting electrolyte for chrome plating
SU1696607A1 (en) Solution for treating aluminium and its alloys before depositing metal coats
SU1006546A1 (en) Electrolyte for mirror-bright nickel plating
SU322414A1 (en) METHOD OF ELECTROLYTIC DEPOSITION BY ALUMINUM — BISMUT
RU2013469C1 (en) Electrolyte for coating application from alloy nickel-cadmium
LU85403A1 (en) PROCESS FOR FORMING A GLOSSY DEPOSIT OF METAL OR A METAL CONTAINING ALLOY ON A CONDUCTIVE SUBSTRATE
SU973673A1 (en) Electrolyte for bright nickel plating
JPH08209393A (en) Alkaline zinc plating

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Designated state(s): AT BE CH DE FR GB IT LI NL SE

17P Request for examination filed

Effective date: 19830121

ITF It: translation for a ep patent filed

Owner name: BARZANO' E ZANARDO MILANO S.P.A.

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Designated state(s): AT BE CH DE FR GB IT LI NL SE

REF Corresponds to:

Ref document number: 13697

Country of ref document: AT

Date of ref document: 19850615

Kind code of ref document: T

REF Corresponds to:

Ref document number: 3264038

Country of ref document: DE

Date of ref document: 19850711

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed
ITTA It: last paid annual fee
PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: SE

Payment date: 19930727

Year of fee payment: 12

Ref country code: AT

Payment date: 19930727

Year of fee payment: 12

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AT

Effective date: 19940716

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SE

Effective date: 19940717

EUG Se: european patent has lapsed

Ref document number: 82401328.8

Effective date: 19950210

EUG Se: european patent has lapsed

Ref document number: 82401328.8

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 19980707

Year of fee payment: 17

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 19980723

Year of fee payment: 17

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 19980724

Year of fee payment: 17

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: NL

Payment date: 19980731

Year of fee payment: 17

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: BE

Payment date: 19980813

Year of fee payment: 17

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: CH

Payment date: 19981019

Year of fee payment: 17

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 19990716

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 19990731

Ref country code: FR

Free format text: THE PATENT HAS BEEN ANNULLED BY A DECISION OF A NATIONAL AUTHORITY

Effective date: 19990731

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 19990731

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 19990731

BERE Be: lapsed

Owner name: RHONE-POULENC SPECIALITES CHIMIQUES

Effective date: 19990731

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20000201

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 19990716

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

NLV4 Nl: lapsed or anulled due to non-payment of the annual fee

Effective date: 20000201

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20000503

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST