EP0021205B1 - Hybrides Kompressions-Absorphionsverfahren für das Betreiben von Wärmepumpen oder Kältemaschinen - Google Patents
Hybrides Kompressions-Absorphionsverfahren für das Betreiben von Wärmepumpen oder Kältemaschinen Download PDFInfo
- Publication number
- EP0021205B1 EP0021205B1 EP80103173A EP80103173A EP0021205B1 EP 0021205 B1 EP0021205 B1 EP 0021205B1 EP 80103173 A EP80103173 A EP 80103173A EP 80103173 A EP80103173 A EP 80103173A EP 0021205 B1 EP0021205 B1 EP 0021205B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- heat
- working medium
- refrigerant
- absorber
- exchange action
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/002—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the refrigerant
- F25B9/006—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the refrigerant the refrigerant containing more than one component
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B25/00—Machines, plants or systems, using a combination of modes of operation covered by two or more of the groups F25B1/00 - F25B23/00
- F25B25/02—Compression-sorption machines, plants, or systems
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B30/00—Heat pumps
- F25B30/02—Heat pumps of the compression type
Definitions
- the invention relates to a hybrid compression absorption method for operating heat pumps or refrigerators, with a working medium consisting of a solvent and a refrigerant soluble therein, in which in a first heat exchange process the refrigerant is dissolved in the solvent with heat removal and after expansion as a liquid phase the solvent and the refrigerant dissolved therein from the first heat exchange process, the working medium which is supplied with heat in a second heat exchange process, and thereby the refrigerant dissolved in the solvent at least partially as.
- Vapor phase is expelled, and the vapor phase of the working medium drawn off from the second heat exchange process is compressed in a compression process, the concentration of the refrigerant in the liquid phase of the working medium being continuously changed along the path of the working medium by the second heat exchange process, preferably also by the first heat exchange process.
- the invention further relates to a hybrid refrigerator or heat pump for carrying out the method.
- the possible uses of heat pumps and the increase in their effectiveness are being explored with increased intensity everywhere in the world due to the energy crisis.
- the heat pump is actually a reversed chiller that transfers the energy from the environment into a functionally closed space.
- a medium with a variable temperature (a cooling medium) is to be cooled and the extracted energy is also to be transferred to a medium with a variable temperature (e.g. cooling water).
- the conventional compression refrigeration machines have the major disadvantage that the evaporation and condensation temperatures of the refrigeration machine on the side of the heat exhaust are below the lowest temperature of the medium to be cooled, and on the side of the heat output the highest temperature of the heat-absorbing medium must, and that - which is closely related - the pressures of the heat exchanger vessels must be determined with an unnecessarily large deviation. So the value of the pressure ratio, which basically determines the operation of the compressor, becomes rather unfavorable. The same problem also occurs with heat pumps.
- Compression processes are also known (DE-B-1 241 468), in which a mixture of two refrigerants with different boiling points is used, the higher-boiling component being liquefied by partial condensation from the compressed refrigerant-vapor mixture, separated from the lower-boiling vaporous component and is relaxed and evaporated to liquefy the lower-boiling component, whereas the liquefied lower-boiling component is expanded and evaporated and mixed with the relaxed higher-boiling component again before evaporation, after which the vaporous higher-boiling component and the vaporous lower-boiling component mixed with it are compressed again together.
- the absorber which is designed as a flooded standing tube bundle heat exchanger with an overhead common inlet for the vapor phase of the refrigerant and the liquid solvent
- the remaining refrigerant portion is separated from the refrigerant-enriched solution and in a degasser, which is the standing one Tube boiler with inlet below for the solution enriched with refrigerant in the absorber after its relaxation, brought into the heat exchange with the rich solution and partially condensed so that the refrigerant is expelled from the solution by the evaporation heat released.
- the working medium used is e.g. Amoniak and water used.
- the refrigerant expelled from the liquid solvent in the second heat exchange process is separated from the solvent, the vapor phase consisting of the separated refrigerant is returned to the first heat exchange process after compression, while the liquid phase consisting of the separated, low-refrigerant solution is pumped an inner heat exchanger, in which the liquid phase in countercurrent to the solution, which is drawn from the second heat exchange process and is rich in absorbed refrigerant, is heated before being released from the latter, is returned to the first heat exchange process and is brought back together with the compressed refrigerant vapor there.
- This known method shows that.
- the efficiency can be significantly increased if both in the first heat exchange process for the absorption of the compressed refrigerant in the solvent, and in the second heat exchange process for expelling the refrigerant from the solvent, the solvent in countercurrent to the heat to be supplied in the heat exchange processes or laxative external heat transfer medium is performed.
- the countercurrent principle it can be achieved that the temperature of the heat transfer medium changes continuously over the heat exchange surface and that the temperature of the solution on the other side of the heat exchange surface follows, so that in the solution of the solvent and the absorbed refrigerant in both Degassing process as well as in the absorption process, a state of equilibrium of the solution concentration and temperature which is continuously changed from the beginning to the end thereof.
- DE-C-84084 In another known combined compression-absorption method (DE-C-84084), after the separation of the vapor phase from the liquid phase of the working medium drawn off from the degasser. the vapor phase is compressed and recombined with the liquid phase after it has been heated in an internal countercurrent heat exchanger by the refrigerant-rich solution drawn off from the absorber while cooling, before entering the absorber.
- the degasser which can also be understood as an evaporator, the working medium is led through a coil and thereby extracts heat from a room to be cooled.
- Pipe coil evaporators of this type in which a course for the working medium is brought about by the course of the pipe coil, are also referred to as dry evaporators in contrast to flood evaporators, in which the wetting of the heat exchange surface with the liquid phase is increased.
- dry evaporators in contrast to flood evaporators, in which the wetting of the heat exchange surface with the liquid phase is increased.
- the invention solves the problem of designing a hybrid compression absorption method of the type mentioned at the beginning and a hybrid refrigeration machine or heat pump for carrying out the method in such a way that a higher energy efficiency can be achieved while avoiding the disadvantages of the known methods mentioned.
- the solvent is partially evaporated by the heat supply in the second heat exchange process, that along the path of the working medium through the second heat exchange process, preferably also through the first heat exchange process, the concentration of the refrigerant also in the steam phase of the working medium is changed simultaneously and together with that of the liquid phase, and that the compression process is subjected to the vapor phase and the liquid phase of the working medium, which are drawn off from the second heat exchange process, simultaneously and together.
- a hybrid refrigeration machine or heat pump with a working medium circuit which contains an absorber, a degasser connected downstream thereof via an expansion valve and a mechanical compressor connected downstream thereof, the absorber and the degasser being designed as such heat exchangers that Due to their construction between their inlet and outlet a common path for the working medium, which is formed by guiding elements, is brought about between the liquid phase and the vapor phase of the working medium, that an internal countercurrent heat exchanger is connected between the absorber and the expansion valve on the one hand and between the degasser and the compressor on the other hand is, and that the output of the degasser is connected to the compressor without branching via the internal heat exchanger.
- At least one of the heat exchangers that enables heat exchange with the environment is a so-called "dry" one that suitably consists of pipes or plates. Construction by means of which continuously changing concentration ratios and / or clearly assigned, continuously changing temperature ratios between the initial and final states are guaranteed both with respect to the liquid phase and the vapor phase of the working medium.
- the vapor phase which also contains a portion of solvent vapor
- the liquid phase of the working medium are present simultaneously and together in the compressor work space, so that the mixing of the vapor and liquid phases and the dissolving of the steam run in parallel with the pressure increase during compression, so that the regularities of the thermodynamics of the solutions are also used in the compression process.
- the system in the thermodynamic system of which a working medium consisting of a solvent and a refrigerant soluble therein is circulated, has an absorber 1 and a degasser 4 as a heat exchanger.
- An internal heat exchanger 2 temperature changer
- a pressure-reducing expansion valve 3 expediently a throttle valve
- the operation of the system is as follows:
- the solution emerging from the absorber 1 flows through one side of the inner heat exchanger 2 and through the expansion valve 3.
- a solution of low pressure passes into the degasser 4 removes heat from the medium to be cooled. Due to the amount of heat qq extracted from the medium to be cooled, refrigerant and solvent are transferred to the vapor phase of the working medium, which means that this amount of heat drives the refrigerant out of the solution and evaporates the solvent portion and provides the necessary heat of solution and evaporation.
- the constructive design of the degasser 4 as a so-called "dry" construction which is characterized by the formation of a forced path for the working medium between the inlet and the outlet of the working medium, which is brought about by guide elements such as pipes or plates Heat exchanger, the proportion of the vapor phase along the heat exchanger surface gradually defined-increases.
- the temperature of the flowing system increases according to the laws of the solutions.
- the two-phase mixture emerging from the degasser 4 passes through the other side of the internal heat exchanger 2 into the compressor 8, which q is the two-phase working medium through the use of mechanical work . compressed to the higher pressure level of the absorber 1.
- the high-pressure liquid-vapor mixture flows back into the absorber 1, where the heat of vaporization and the heat of solution of the refrigerant, ie the amount of heat q o , change with a change Temperature sequence is withdrawn or used for heating purposes.
- the heat exchange surface of the absorber can also be uniquely assigned a temperature field that changes along the same; the heat given off can therefore really be used with changing temperature parameters.
- the use of the internal heat exchanger 2 improves the thermal efficiency of the system.
- the phases of the two-phase working medium emerging from the degasifier 4 are not separated, but instead pass after passing through the internal heat exchanger 2. together and at the same time in the working space of the compressor 8, where, in addition to the compression, the physical processes determined by the thermodynamics of the solutions also take place.
- the liquid can even be present in two different forms.
- the liquid phase can occur in its specifically liquid form.
- it can also be present in the form of aerosol in the steam.
- a suitable pump and also an atomizer are of course also required for the latter embodiment.
- the final temperature of the compression also decreases, which is of crucial importance with regard to the design features of the compressor and the materials that can be used.
- the pressure ratio of the single-stage compression can be increased significantly, whereby the goal can be achieved with simpler and cheaper means.
- this embodiment can achieve significant advantages.
- the embodiment according to FIG. 2 has the advantage that it combines the good properties of the working medium circuit discussed in FIG. 1 and the absorption machines as the drive circuit, since this embodiment from FIG. 2 functions without external mechanical energy expenditure by introducing thermal energy.
- this embodiment compared to the absorption chiller serving as the starting point is that it can be used to bridge a very large temperature difference between the heat exchangers, or, given the same external environmental conditions, this system according to the invention has almost twice the performance figure ⁇ :
- the liquid working medium flows from the absorber 1 in the already known manner over one side of the inner heat exchanger 2 and the pressure-reducing expansion valve 3 into the degasser 4, in which the working medium from the environment thermal energy q . withdrawn, as a result, part of the working medium evaporates.
- the working medium is pressed by the compressor 8 into the absorber 19 of the drive circuit.
- the vapor phase of the working medium is condensed and the refrigerant is dissolved in a poor solution coming from a boiler 18, the working medium giving off its heat of evaporation and solution q o2 .
- the rich solution flows with the aid of a solution pump 6 via one side of an inner heat exchanger 12 of the drive circuit into the boiler 18, in which the rich refrigerant vapor is expelled from this rich solution with the help of an external amount of energy q k high temperature levels becomes.
- the poor solution flows back over the other side of the inner heat exchanger 12 and the pressure-reducing expansion valve 3 into the drive-side absorber 19.
- the steam leaving the boiler 18 flows into a mechanical expansion machine 17, in which a part of the enthalpy of the steam in mechanical energy is converted.
- the compressor 8 is driven by this mechanical energy.
- the working medium emerging from the compressor 8 could also be conducted into the absorber 1, the steam emerging from the expansion machine 17 having to be conducted into the drive-side absorber 19. This could thermodynamically separate the working side and the drive side. This way of switching is less interesting because it means no further advantages in terms of function; it even results in a certain deterioration of the specific parameters because in the. in the former case, higher temperatures can be achieved by appropriately selecting the concentration ratios on the drive side in the absorber 19, as a result of which a larger proportion of the energy expended can be obtained at a higher temperature level.
- the heat pump according to the invention has a very wide field of application, because from the deep-freezing tasks to the heating purposes, it guarantees more energy-efficient operation than the previous systems.
- Another advantage of the system according to the invention is that it can be adapted very flexibly to the task to be solved, depending on the concentration ratios of the solution used, and in this way its operating characteristics can be optimized.
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Sorption Type Refrigeration Machines (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE8383101481T DE3071785D1 (en) | 1979-06-08 | 1980-06-09 | Operation of a heat pump or refrigeration machine |
AT80103173T ATE6387T1 (de) | 1979-06-08 | 1980-06-09 | Hybrides kompressions-absorphionsverfahren fuer das betreiben von waermepumpen oder kaeltemaschinen. |
AT83101481T ATE22490T1 (de) | 1979-06-08 | 1980-06-09 | Betreiben einer waermepumpe oder kaeltemaschine. |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
HUPE001086 | 1979-06-08 | ||
HU79PE1086A HU186726B (en) | 1979-06-08 | 1979-06-08 | Hybrid heat pump |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP83101481.6 Division-Into | 1983-02-16 |
Publications (3)
Publication Number | Publication Date |
---|---|
EP0021205A2 EP0021205A2 (de) | 1981-01-07 |
EP0021205A3 EP0021205A3 (en) | 1981-03-18 |
EP0021205B1 true EP0021205B1 (de) | 1984-02-22 |
Family
ID=11000504
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP80103173A Expired EP0021205B1 (de) | 1979-06-08 | 1980-06-09 | Hybrides Kompressions-Absorphionsverfahren für das Betreiben von Wärmepumpen oder Kältemaschinen |
EP83101481A Expired EP0085994B1 (de) | 1979-06-08 | 1980-06-09 | Betreiben einer Wärmepumpe oder Kältemaschine |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP83101481A Expired EP0085994B1 (de) | 1979-06-08 | 1980-06-09 | Betreiben einer Wärmepumpe oder Kältemaschine |
Country Status (5)
Country | Link |
---|---|
US (1) | US4481783A (ru) |
EP (2) | EP0021205B1 (ru) |
JP (1) | JPS5637471A (ru) |
DE (1) | DE3066679D1 (ru) |
HU (1) | HU186726B (ru) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7859659B2 (en) | 1998-03-06 | 2010-12-28 | Kla-Tencor Corporation | Spectroscopic scatterometer system |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2497931A1 (fr) * | 1981-01-15 | 1982-07-16 | Inst Francais Du Petrole | Procede de chauffage et de conditionnement thermique au moyen d'une pompe a chaleur a compression fonctionnant avec un fluide mixte de travail et appareil pour la mise en oeuvre dudit procede |
JPS5864470A (ja) * | 1981-10-13 | 1983-04-16 | 工業技術院長 | 圧縮式冷凍装置 |
FR2526136B1 (fr) * | 1982-04-28 | 1986-05-30 | Rodie Talbere Henri | Procede a cycle de resorption pour les pompes a chaleur |
US4674297A (en) * | 1983-09-29 | 1987-06-23 | Vobach Arnold R | Chemically assisted mechanical refrigeration process |
CA1233655A (en) * | 1983-09-29 | 1988-03-08 | Arnold R. Vobach | Chemically assisted mechanical refrigeration process |
HU198328B (en) * | 1984-12-03 | 1989-09-28 | Energiagazdalkodasi Intezet | Method for multiple-stage operating hibrid (compression-absorption) heat pumps or coolers |
HU198329B (en) * | 1986-05-23 | 1989-09-28 | Energiagazdalkodasi Intezet | Method and apparatus for increasing the power factor of compression hybrid refrigerators or heat pumps operating by solution circuit |
US4724679A (en) * | 1986-07-02 | 1988-02-16 | Reinhard Radermacher | Advanced vapor compression heat pump cycle utilizing non-azeotropic working fluid mixtures |
US5600967A (en) * | 1995-04-24 | 1997-02-11 | Meckler; Milton | Refrigerant enhancer-absorbent concentrator and turbo-charged absorption chiller |
US5791157A (en) * | 1996-01-16 | 1998-08-11 | Ebara Corporation | Heat pump device and desiccant assisted air conditioning system |
KR100385432B1 (ko) * | 2000-09-19 | 2003-05-27 | 주식회사 케이씨텍 | 표면 세정용 에어로졸 생성 시스템 |
TWI263384B (en) | 2002-12-19 | 2006-10-01 | Fuji Electric Co Ltd | Terminal device for electrical equipment |
FR2913762A1 (fr) * | 2007-03-16 | 2008-09-19 | Usifroid | "boucles frigorifiques a troncon commun" |
US7878236B1 (en) | 2009-02-09 | 2011-02-01 | Breen Joseph G | Conserving energy in an HVAC system |
ITUA20161730A1 (it) | 2016-03-16 | 2017-09-16 | Stefano Briola | Impianto e metodo per la fornitura all’utenza di potenza elettrica e/o potenza meccanica, potenza termica e/o potenza frigorifera |
US9453665B1 (en) * | 2016-05-13 | 2016-09-27 | Cormac, LLC | Heat powered refrigeration system |
Family Cites Families (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE84084C (ru) * | ||||
DE142330C (ru) * | ||||
DE386863C (de) * | 1920-06-17 | 1923-12-17 | Siemens Schuckertwerke G M B H | Anlage zum Heben von Waerme auf hoehere Temperaturen mittels zweier zusammengeschalteter Kaeltemaschinen |
FR537438A (fr) * | 1920-11-03 | 1922-05-23 | Procédé et dispositifs de production de frigories à cycle fermé | |
DE491065C (de) * | 1926-06-12 | 1930-02-05 | Frans Georg Liljenroth | Kaelteerzeugungsmaschine nach dem Absorptionsprinzip |
US2041725A (en) * | 1934-07-14 | 1936-05-26 | Walter J Podbielniak | Art of refrigeration |
US2307380A (en) * | 1939-12-26 | 1943-01-05 | Carroll W Baker | Refrigeration |
FR983950A (fr) * | 1943-09-08 | 1951-06-29 | Machine à froid | |
US2581558A (en) * | 1947-10-20 | 1952-01-08 | Petrocarbon Ltd | Plural stage cooling machine |
DE953378C (de) * | 1950-08-29 | 1956-11-29 | Margarete Altenkirch Geb Schae | Verfahren und Vorrichtung zum Betrieb einer Waermepumpe |
US2952139A (en) * | 1957-08-16 | 1960-09-13 | Patrick B Kennedy | Refrigeration system especially for very low temperature |
US3067590A (en) * | 1960-07-06 | 1962-12-11 | Jr Charles P Wood | Pumping apparatus for refrigerator systems |
DE1125956B (de) * | 1961-05-25 | 1962-03-22 | Giovanni Novaro | Verfahren und Vorrichtung zur Kaelteerzeugung mit einer Absorptionskaeltemaschine und einem Verdichter fuer das Kaeltemittel zwischen Verdampfer und Absorber |
DE1241468B (de) * | 1962-12-01 | 1967-06-01 | Andrija Fuderer Dr Ing | Kompressionsverfahren zur Kaelterzeugung |
US3283524A (en) * | 1964-03-17 | 1966-11-08 | Byron John Thomson | Refrigeration system |
DE1426956A1 (de) * | 1964-07-17 | 1969-05-08 | Fuderer Michael | Verfahren zur Tiefkuehlung |
US3872682A (en) * | 1974-03-18 | 1975-03-25 | Northfield Freezing Systems In | Closed system refrigeration or heat exchange |
US3952533A (en) * | 1974-09-03 | 1976-04-27 | Kysor Industrial Corporation | Multiple valve refrigeration system |
AU501390B2 (en) * | 1974-11-14 | 1979-06-21 | Carrier Corporation | Refrigeration heat reclaiming system |
US3922873A (en) * | 1974-11-14 | 1975-12-02 | Carrier Corp | High temperature heat recovery in refrigeration |
US3990264A (en) * | 1974-11-14 | 1976-11-09 | Carrier Corporation | Refrigeration heat recovery system |
SE419479B (sv) * | 1975-04-28 | 1981-08-03 | Sten Olof Zeilon | Kylalstringsforfarande och apparatur for utovning av forfarandet |
FR2314456A1 (fr) * | 1975-06-09 | 1977-01-07 | Inst Francais Du Petrole | Procede de production de froid |
JPS5848820B2 (ja) * | 1976-04-23 | 1983-10-31 | ステン オロフ ザイロン | 冷凍方法及び装置 |
DE2628007A1 (de) * | 1976-06-23 | 1978-01-05 | Heinrich Krieger | Verfahren und anlage zur erzeugung von kaelte mit wenigstens einem inkorporierten kaskadenkreislauf |
JPS5434159A (en) * | 1977-08-08 | 1979-03-13 | Hitachi Ltd | Refrigerating device with screw compressor |
-
1979
- 1979-06-08 HU HU79PE1086A patent/HU186726B/hu not_active IP Right Cessation
-
1980
- 1980-06-09 DE DE8080103173T patent/DE3066679D1/de not_active Expired
- 1980-06-09 EP EP80103173A patent/EP0021205B1/de not_active Expired
- 1980-06-09 EP EP83101481A patent/EP0085994B1/de not_active Expired
- 1980-06-09 JP JP7762080A patent/JPS5637471A/ja active Granted
-
1982
- 1982-11-10 US US06/440,529 patent/US4481783A/en not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7859659B2 (en) | 1998-03-06 | 2010-12-28 | Kla-Tencor Corporation | Spectroscopic scatterometer system |
US7898661B2 (en) | 1998-03-06 | 2011-03-01 | Kla-Tencor Corporation | Spectroscopic scatterometer system |
Also Published As
Publication number | Publication date |
---|---|
EP0021205A2 (de) | 1981-01-07 |
EP0085994A2 (de) | 1983-08-17 |
HU186726B (en) | 1985-09-30 |
EP0021205A3 (en) | 1981-03-18 |
JPS5637471A (en) | 1981-04-11 |
EP0085994A3 (en) | 1984-10-03 |
EP0085994B1 (de) | 1986-09-24 |
US4481783A (en) | 1984-11-13 |
JPH0423185B2 (ru) | 1992-04-21 |
DE3066679D1 (en) | 1984-03-29 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP0021205B1 (de) | Hybrides Kompressions-Absorphionsverfahren für das Betreiben von Wärmepumpen oder Kältemaschinen | |
DE2754626C2 (de) | Mit einer Energiequelle relativ niedriger Temperatur, insbesondere Solarenergie, arbeitende Kälteanlage | |
DE102008005978B4 (de) | Niedertemperaturkraftwerk und Verfahren zum Betreiben eines thermodynamischen Zyklus | |
DE10194530B4 (de) | Kryogenisches Kühlsystem | |
EP0248296B1 (de) | Verfahren zur Erhoehung des Leistungsfaktors von hybriden Kaeltemaschinen oder Waermepumpen | |
DE2810972C2 (ru) | ||
WO2006018216A1 (de) | Absorptionskältemaschine | |
DE1140957B (de) | Absorptionskuehlsystem und Verfahren fuer den Betrieb desselben | |
CH661786A5 (de) | Verfahren und vorrichtung zur erzeugung einer eiskristallsuspension mittels gefrierverdampfung am tripelpunkt. | |
DE69921871T2 (de) | Absorptionskälteanlage mit Kupplung von Kondensat und Lösung | |
EP3540333B1 (de) | Sorptionswärmepumpe und sorptionskreisprozess | |
DE4415199A1 (de) | Kälteanlage | |
DE3100019A1 (de) | Verfahren zur durchfuehrung von kaelte- und waermepumpenprozessen nach dem kompressionsprinzip mit loesungskreislauf | |
DE69126777T2 (de) | Kompressionskältekreislauf mit Vorrichtung zur Vergrösserung des Temperaturschifts bei Verwendung einer nichtazeotroper Kältemittelmischung | |
DE3536953C1 (en) | Resorption-type heat converter installation with two solution circuits | |
DE3129957C2 (ru) | ||
DE19533755C2 (de) | Vorrichtung und Verfahren zur Erzeugung von Wärme und Kälte | |
EP0184181B1 (de) | Wärmepumpe | |
EP3058289A1 (de) | Absorptionskältemaschine | |
DE961631C (de) | Verfahren zum Fraktionieren von Gasgemischen in einer Gasfraktioniersaeule | |
DE2837695A1 (de) | Verfahren und vorrichtung zur wirkungsgradverbesserung in einer kuehlanlage | |
DE673984C (de) | Kontinuierlich wirkende Absorptionskaeltemaschine | |
DE102007062343B4 (de) | Verfahren und Anordnung zur Kälteerzeugung nach einem Wasser-Lithiumbromid-Resorptionskälteprozess | |
DE19723566C1 (de) | Verfahren zum Vakuumverdampfen von einem mit einem Lösungsmittel versetzten Substrat sowie Vorrichtung zur Durchführung des Verfahrens | |
DE19500335A1 (de) | Verfahren zur Erzeugung von Kälte und Wärme mit Hilfe einer umkehrosmotisch angetriebenen Sorptionskältemaschine |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
AK | Designated contracting states |
Designated state(s): AT BE CH DE FR GB IT NL SE |
|
PUAL | Search report despatched |
Free format text: ORIGINAL CODE: 0009013 |
|
ITCL | It: translation for ep claims filed |
Representative=s name: ING. C. GREGORJ S.P.A. |
|
AK | Designated contracting states |
Designated state(s): AT BE CH DE FR GB IT NL SE |
|
17P | Request for examination filed |
Effective date: 19810917 |
|
ITF | It: translation for a ep patent filed |
Owner name: CALVANI SALVI E VERONELLI S.R.L. |
|
GRAA | (expected) grant |
Free format text: ORIGINAL CODE: 0009210 |
|
AK | Designated contracting states |
Designated state(s): AT BE CH DE FR GB IT LI NL SE |
|
REF | Corresponds to: |
Ref document number: 6387 Country of ref document: AT Date of ref document: 19840315 Kind code of ref document: T |
|
REF | Corresponds to: |
Ref document number: 3066679 Country of ref document: DE Date of ref document: 19840329 |
|
ET | Fr: translation filed | ||
PLBE | No opposition filed within time limit |
Free format text: ORIGINAL CODE: 0009261 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT |
|
26N | No opposition filed | ||
ITTA | It: last paid annual fee | ||
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: GB Payment date: 19920529 Year of fee payment: 13 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: FR Payment date: 19920616 Year of fee payment: 13 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: SE Payment date: 19920623 Year of fee payment: 13 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: AT Payment date: 19920625 Year of fee payment: 13 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: NL Payment date: 19920630 Year of fee payment: 13 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: BE Payment date: 19920708 Year of fee payment: 13 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: CH Payment date: 19920720 Year of fee payment: 13 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: DE Payment date: 19920831 Year of fee payment: 13 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: GB Effective date: 19930609 Ref country code: AT Effective date: 19930609 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: SE Effective date: 19930610 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: LI Effective date: 19930630 Ref country code: CH Effective date: 19930630 Ref country code: BE Effective date: 19930630 |
|
BERE | Be: lapsed |
Owner name: ENERGIAGAZDALKODASI INTEZET Effective date: 19930630 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: NL Effective date: 19940101 |
|
GBPC | Gb: european patent ceased through non-payment of renewal fee |
Effective date: 19930609 |
|
NLV4 | Nl: lapsed or anulled due to non-payment of the annual fee | ||
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: FR Effective date: 19940228 |
|
REG | Reference to a national code |
Ref country code: CH Ref legal event code: PL |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: DE Effective date: 19940301 |
|
REG | Reference to a national code |
Ref country code: FR Ref legal event code: ST |
|
EUG | Se: european patent has lapsed |
Ref document number: 80103173.3 Effective date: 19940110 |