EE05614B1 - Interferomeeter optiliste süsteemide ja näidiste testimiseks - Google Patents

Interferomeeter optiliste süsteemide ja näidiste testimiseks

Info

Publication number
EE05614B1
EE05614B1 EEP200800069A EEP200800069A EE05614B1 EE 05614 B1 EE05614 B1 EE 05614B1 EE P200800069 A EEP200800069 A EE P200800069A EE P200800069 A EEP200800069 A EE P200800069A EE 05614 B1 EE05614 B1 EE 05614B1
Authority
EE
Estonia
Prior art keywords
interferometer
samples
optical systems
testing optical
testing
Prior art date
Application number
EEP200800069A
Other languages
English (en)
Inventor
Voznesenskaya Maria
Kuznetsov Aleksei
Tsikhanchuk Heorhi
Mee Suk Jung
Original Assignee
Nikolay Voznesenskiy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikolay Voznesenskiy filed Critical Nikolay Voznesenskiy
Priority to EEP200800069A priority Critical patent/EE05614B1/et
Priority to US13/140,022 priority patent/US20110249272A1/en
Priority to PCT/EP2009/066065 priority patent/WO2010069744A1/en
Priority to EP09763942A priority patent/EP2376886A1/en
Publication of EE200800069A publication Critical patent/EE200800069A/et
Publication of EE05614B1 publication Critical patent/EE05614B1/et

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/005—Testing of reflective surfaces, e.g. mirrors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02034—Interferometers characterised by particularly shaped beams or wavefronts
    • G01B9/02038—Shaping the wavefront, e.g. generating a spherical wavefront
    • G01B9/02039—Shaping the wavefront, e.g. generating a spherical wavefront by matching the wavefront with a particular object surface shape
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/0271—Testing optical properties by measuring geometrical properties or aberrations by using interferometric methods

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Geometry (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
EEP200800069A 2008-12-16 2008-12-16 Interferomeeter optiliste süsteemide ja näidiste testimiseks EE05614B1 (et)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EEP200800069A EE05614B1 (et) 2008-12-16 2008-12-16 Interferomeeter optiliste süsteemide ja näidiste testimiseks
US13/140,022 US20110249272A1 (en) 2008-12-16 2009-11-30 Optical instrument for testing optical systems and samples
PCT/EP2009/066065 WO2010069744A1 (en) 2008-12-16 2009-11-30 Optical instrument for testing optical systems and samples
EP09763942A EP2376886A1 (en) 2008-12-16 2009-11-30 Optical instrument for testing optical systems and samples

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EEP200800069A EE05614B1 (et) 2008-12-16 2008-12-16 Interferomeeter optiliste süsteemide ja näidiste testimiseks

Publications (2)

Publication Number Publication Date
EE200800069A EE200800069A (et) 2010-08-16
EE05614B1 true EE05614B1 (et) 2012-12-17

Family

ID=41667393

Family Applications (1)

Application Number Title Priority Date Filing Date
EEP200800069A EE05614B1 (et) 2008-12-16 2008-12-16 Interferomeeter optiliste süsteemide ja näidiste testimiseks

Country Status (4)

Country Link
US (1) US20110249272A1 (et)
EP (1) EP2376886A1 (et)
EE (1) EE05614B1 (et)
WO (1) WO2010069744A1 (et)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10247539B2 (en) 2015-12-30 2019-04-02 Difrotec OÜ Two-channel point-diffraction interferometer

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105277338B (zh) * 2014-07-04 2018-10-26 中国科学院长春光学精密机械与物理研究所 大数值孔径移相式双针孔衍射干涉仪及其测试方法
CN105092530B (zh) * 2015-05-21 2018-01-05 南京理工大学 平行平晶光学非均匀性的绝对测量方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6141941A (ja) * 1984-08-06 1986-02-28 Agency Of Ind Science & Technol 軸外し放物面鏡の表面形状測定用ホログラム干渉計
JP2679221B2 (ja) 1989-03-02 1997-11-19 株式会社ニコン 干渉計
US5548403A (en) 1994-11-28 1996-08-20 The Regents Of The University Of California Phase shifting diffraction interferometer
US5822066A (en) 1997-02-26 1998-10-13 Ultratech Stepper, Inc. Point diffraction interferometer and pin mirror for use therewith
US6137574A (en) * 1999-03-15 2000-10-24 Zygo Corporation Systems and methods for characterizing and correcting cyclic errors in distance measuring and dispersion interferometry
JP4782958B2 (ja) * 2001-09-21 2011-09-28 株式会社リコー 表面形状測定装置及びその方法、プログラム並びに記憶媒体
DE102004001667A1 (de) 2004-01-12 2005-08-04 Carl Zeiss Smt Ag Verfahren zum Qualifizieren und Herstellen einer optischen Komponente
KR100611601B1 (ko) * 2004-04-21 2006-08-10 한국전기연구원 자동 시준 장치를 구비한 점회절 간섭계 장치

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10247539B2 (en) 2015-12-30 2019-04-02 Difrotec OÜ Two-channel point-diffraction interferometer

Also Published As

Publication number Publication date
EP2376886A1 (en) 2011-10-19
EE200800069A (et) 2010-08-16
WO2010069744A1 (en) 2010-06-24
US20110249272A1 (en) 2011-10-13

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Legal Events

Date Code Title Description
MM4A Lapsed by not paying the annual fees

Effective date: 20141216