EA201991909A1 - Интегрированный плазмонно-фотонный биосенсор и способ его использования - Google Patents

Интегрированный плазмонно-фотонный биосенсор и способ его использования

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Publication number
EA201991909A1
EA201991909A1 EA201991909A EA201991909A EA201991909A1 EA 201991909 A1 EA201991909 A1 EA 201991909A1 EA 201991909 A EA201991909 A EA 201991909A EA 201991909 A EA201991909 A EA 201991909A EA 201991909 A1 EA201991909 A1 EA 201991909A1
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EA
Eurasian Patent Office
Prior art keywords
optical
mzi
splitter
specified
sensor
Prior art date
Application number
EA201991909A
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English (en)
Inventor
Николаос Плерос
Димитриос Тсиокос
Георгиос Нтампос
Димитра Кетцаки
Анна-Лена Гизеке
Original Assignee
Аристотл Юнивёрсити Оф Тессалоники-Рисёч Коммитти, Е.Л.К.Е.
Амо Гмбх Гезелльшафт Фюр Ангевандте Микро- Унд Оптоэлектроник Мит Бешренктер Хафтунг)
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Application filed by Аристотл Юнивёрсити Оф Тессалоники-Рисёч Коммитти, Е.Л.К.Е., Амо Гмбх Гезелльшафт Фюр Ангевандте Микро- Унд Оптоэлектроник Мит Бешренктер Хафтунг) filed Critical Аристотл Юнивёрсити Оф Тессалоники-Рисёч Коммитти, Е.Л.К.Е.
Publication of EA201991909A1 publication Critical patent/EA201991909A1/ru

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G01N21/552—Attenuated total reflection
    • G01N21/553—Attenuated total reflection and using surface plasmons
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/2202—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling
    • G01N1/2205—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling with filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
    • G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
    • G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
    • G01N21/7703—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1226—Basic optical elements, e.g. light-guiding paths involving surface plasmon interaction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
    • G01N2021/458—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods using interferential sensor, e.g. sensor fibre, possibly on optical waveguide
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
    • G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
    • G01N2021/7769—Measurement method of reaction-produced change in sensor
    • G01N2021/7779—Measurement method of reaction-produced change in sensor interferometric
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
    • G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
    • G01N2021/7793—Sensor comprising plural indicators

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Biomedical Technology (AREA)
  • Molecular Biology (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optics & Photonics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)

Abstract

Изобретение относится к устройству, содержащему оптический сенсор на основе первого интерферометра (ИМЦ1) Маха-Цендера с большим свободным спектральным диапазоном, причем предусмотрен плазмонный волновод (107), в частности тонкопленочный или гибридный щелевой волновод, в качестве преобразовательного элемента, планарно интегрированного на фотонных Si3N4-волноводах, и второго оптического интерферометра (ИМЦ2) Маха-Цендера, причем оба интерферометра содержат термооптические фазорегуляторы (104, 106) для оптимальной настройки указанного ИМЦ-сенсора (ИМЦ1) и ИМЦ в качестве регулируемого оптического аттенюатора (РОА). Устройство дополнительно содержит общий чип (112), характеризующийся тем, что он содержит набор фотонных волноводов (103) с полосой (303, 603) из нитрида кремния с высоким показателем преломления, который расположен между оксидной подложкой (из SiO2) с низким показателем преломления и оксидным покрывающим слоем (из низкотемпературного оксида) с низким показателем преломления; оптические структуры (102, 109) связи, расположенные на обоих концах сенсора и действующие в качестве оптических средств ввода/вывода; оптический расщепитель (102) и оптический объединитель (109) для оптического расщепления на первом разветвителе (102) указанного первого сенсора (ИМЦ1) и для оптического объединения на втором разветвителе (109) указанного первого ИМЦ (ИМЦ1); регулируемый оптический аттенюатор (РОА) с указанным дополнительным вторым ИМЦ (ИМЦ2), встроенным в указанный первый ИМЦ-сенсор (ИМЦ1) и выполненный с возможностью использования оптического расщепителя и оптического объединителя для оптического расщепления на первом разветвителе указанного дополнительного второго ИМЦ (ИМЦ2) и для оптического объединения на втором разветвителе указанного второго ИМЦ (ИМЦ2); набор термооптических фазорегуляторов (104, 106) для настройки фазы оптического сигнала в опорном плече (104, 106) каждого из указанных ИМЦ (ИМЦ1, ИМЦ2-РОА), причем термооптические фазорегуляторы сформированы посредством осаждения поверх секции фотонного волновода двух металлических полос, параллельных одна другой и ориентированных вдоль направления распространения света; причем плазмонный волновод (107) сформирован в верхней ветви (103) указанного первого ИМЦ (ИМЦ1) и пространственно ограничивает распространение света посредством его связывания в поверхностные плазмонные поляритоны на границе раздела металл-аналит. Предложен также способ использования данного устройства.
EA201991909A 2017-02-17 2018-02-20 Интегрированный плазмонно-фотонный биосенсор и способ его использования EA201991909A1 (ru)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GR20170100088A GR1009480B (el) 2017-02-17 2017-02-17 Μεθοδος κατασκευης ολοκληρωμενου πλασμο-φωτονικου βιοαισθητηρα και συσκευη για το σκοπο αυτο
PCT/GR2018/000007 WO2018150205A1 (en) 2017-02-17 2018-02-20 Integrated plasmo-photonic biosensor and method of use

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EA201991909A1 true EA201991909A1 (ru) 2021-02-05

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US (1) US11204326B2 (ru)
EP (1) EP3583406B1 (ru)
JP (1) JP7212901B2 (ru)
KR (1) KR102499209B1 (ru)
CN (1) CN110325840B (ru)
AU (1) AU2018221428B2 (ru)
CA (1) CA3053715A1 (ru)
EA (1) EA201991909A1 (ru)
GR (1) GR1009480B (ru)
WO (1) WO2018150205A1 (ru)

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CN113785404B (zh) * 2019-03-01 2022-10-28 加州理工学院 波导集成等离子体激元辅助场发射检测器
EP4127668A4 (en) 2020-04-13 2024-05-01 Univ British Columbia PHOTONIC SENSOR WITH A FIXED WAVELENGTH LASER
CN113917603B (zh) * 2021-03-26 2023-06-16 广东工业大学 基于亚波长金属/介质的集成光学器件
CN113253403B (zh) * 2021-06-17 2021-10-29 苏州浪潮智能科技有限公司 一种光学器件、电子器件和可编程光子集成电路
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JP2020508471A (ja) 2020-03-19
US20200003696A1 (en) 2020-01-02
CN110325840A (zh) 2019-10-11
GR20170100088A (el) 2018-10-31
AU2018221428A1 (en) 2019-10-10
WO2018150205A8 (en) 2019-05-09
CA3053715A1 (en) 2018-08-23
AU2018221428B2 (en) 2023-03-16
EP3583406A1 (en) 2019-12-25
CN110325840B (zh) 2023-02-03
WO2018150205A1 (en) 2018-08-23
EP3583406B1 (en) 2023-10-18
KR102499209B1 (ko) 2023-02-10
US11204326B2 (en) 2021-12-21
JP7212901B2 (ja) 2023-01-26
KR20190128172A (ko) 2019-11-15
EP3583406C0 (en) 2023-10-18
GR1009480B (el) 2019-03-19

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