EA201891455A1 - Ионный источник с полым катодом и способ экстрагирования и ускорения ионов - Google Patents

Ионный источник с полым катодом и способ экстрагирования и ускорения ионов

Info

Publication number
EA201891455A1
EA201891455A1 EA201891455A EA201891455A EA201891455A1 EA 201891455 A1 EA201891455 A1 EA 201891455A1 EA 201891455 A EA201891455 A EA 201891455A EA 201891455 A EA201891455 A EA 201891455A EA 201891455 A1 EA201891455 A1 EA 201891455A1
Authority
EA
Eurasian Patent Office
Prior art keywords
ion
ion source
acceleration
ions
hollow cathode
Prior art date
Application number
EA201891455A
Other languages
English (en)
Inventor
Джон Чамберс
Питер Машвитц
Original Assignee
Эй-Джи-Си Флет Гласс Норт Эмерике, Инк.
Асахи Гласс Ко., Лтд.
Эй-Джи-Си Гласс Юруоп
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US14/975,415 external-priority patent/US10573499B2/en
Priority claimed from US14/975,286 external-priority patent/US10242846B2/en
Application filed by Эй-Джи-Си Флет Гласс Норт Эмерике, Инк., Асахи Гласс Ко., Лтд., Эй-Джи-Си Гласс Юруоп filed Critical Эй-Джи-Си Флет Гласс Норт Эмерике, Инк.
Publication of EA201891455A1 publication Critical patent/EA201891455A1/ru

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/063—Geometrical arrangement of electrodes for beam-forming
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/54—Plasma accelerators
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/513—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using plasma jets
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32596—Hollow cathodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/48—Generating plasma using an arc
    • H05H1/481—Hollow cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources
    • H01J2237/0815—Methods of ionisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources
    • H01J2237/0822—Multiple sources
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2245/00—Applications of plasma devices
    • H05H2245/40—Surface treatments
    • H05H2245/42—Coating or etching of large items

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Plasma Technology (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
  • Optics & Photonics (AREA)
  • Particle Accelerators (AREA)

Abstract

В заявке описан ионный источник и способ экстрагирования и ускорения ионов. Ионный источник включает камеру. Ионный источник также включает первый полый катод, имеющий полость первого полого катода и первое выходное отверстие для плазмы, и второй полый катод, имеющий полость второго полого катода и второе выходное отверстие для плазмы. Первый и второй полые катоды расположены в камере рядом друг с другом. Ионный источник также включает первый ускоритель ионов, расположенный между первым выходным отверстием плазмы и камерой, и связанный с ними. Первый ускоритель ионов формирует первую полость ускорения ионов. Ионный источник также включает второй ускоритель ионов, расположенный между вторым выходным отверстием плазмы и камерой, и связанный с ними. Второй ускоритель ионов формирует вторую полость ускорения ионов. Первый полый катод и второй полый катод выполнены с возможностью попеременной работы в качестве электрода и противоэлектрода для генерирования плазмы. Каждой из первой и второй полостей ускорения ионов достаточно для обеспечения экстрагирования и ускорения ионов.
EA201891455A 2015-12-18 2016-11-08 Ионный источник с полым катодом и способ экстрагирования и ускорения ионов EA201891455A1 (ru)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14/975,415 US10573499B2 (en) 2015-12-18 2015-12-18 Method of extracting and accelerating ions
US14/975,286 US10242846B2 (en) 2015-12-18 2015-12-18 Hollow cathode ion source
PCT/US2016/060979 WO2017105673A1 (en) 2015-12-18 2016-11-08 Hollow cathode ion source and method of extracting and accelerating ions

Publications (1)

Publication Number Publication Date
EA201891455A1 true EA201891455A1 (ru) 2019-01-31

Family

ID=59057823

Family Applications (1)

Application Number Title Priority Date Filing Date
EA201891455A EA201891455A1 (ru) 2015-12-18 2016-11-08 Ионный источник с полым катодом и способ экстрагирования и ускорения ионов

Country Status (10)

Country Link
EP (1) EP3390688B1 (ru)
JP (1) JP2019501496A (ru)
KR (1) KR20180103909A (ru)
CN (1) CN108699691B (ru)
BR (1) BR112018012413A2 (ru)
EA (1) EA201891455A1 (ru)
MX (1) MX2018007547A (ru)
PH (1) PH12018501300A1 (ru)
SG (1) SG11201805171YA (ru)
WO (1) WO2017105673A1 (ru)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114189974A (zh) * 2021-11-08 2022-03-15 中国电子科技集团公司第十二研究所 一种驻波边耦合加速管及加速器
CN115681062B (zh) * 2023-01-03 2023-06-02 国科大杭州高等研究院 混合工作模式霍尔推进系统及具有其的航天器
JP7455439B1 (ja) 2023-05-31 2024-03-26 Ｍｕｓｃａｔスペース・エンジニアリング株式会社 人工物体の制御方法、人工物体の制御装置およびこれを備えた人工物体

Family Cites Families (17)

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US2920235A (en) * 1958-07-24 1960-01-05 Persa R Bell Method and apparatus for producing intense energetic gas discharges
US4419203A (en) * 1982-03-05 1983-12-06 International Business Machines Corporation Apparatus and method for neutralizing ion beams
JPS59228338A (ja) * 1983-06-10 1984-12-21 Mitsubishi Electric Corp ホロ−カソ−ド
US5286534A (en) * 1991-12-23 1994-02-15 Minnesota Mining And Manufacturing Company Process for plasma deposition of a carbon rich coating
FR2693770B1 (fr) * 1992-07-15 1994-10-14 Europ Propulsion Moteur à plasma à dérive fermée d'électrons.
US6174450B1 (en) * 1997-04-16 2001-01-16 Lam Research Corporation Methods and apparatus for controlling ion energy and plasma density in a plasma processing system
JP3069700B1 (ja) * 1999-07-22 2000-07-24 静岡大学長 放電容器及びその放電容器を備えたプラズマラジカル生成装置
US7411352B2 (en) * 2002-09-19 2008-08-12 Applied Process Technologies, Inc. Dual plasma beam sources and method
KR100599037B1 (ko) * 2004-08-04 2006-07-12 삼성전자주식회사 이온 소스 및 이를 갖는 이온 주입 장치
GB0703044D0 (en) * 2007-02-16 2007-03-28 Nordiko Technical Services Ltd Apparatus
EP1993329A1 (en) * 2007-05-15 2008-11-19 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. Plasma source
EP2316252B1 (en) * 2008-08-04 2018-10-31 AGC Flat Glass North America, Inc. Plasma source and method for depositing thin film coatings using plasma enhanced chemical vapor deposition and method thereof
US9136086B2 (en) * 2008-12-08 2015-09-15 General Plasma, Inc. Closed drift magnetic field ion source apparatus containing self-cleaning anode and a process for substrate modification therewith
BE1019991A3 (fr) * 2011-05-25 2013-03-05 Agc Glass Europe Procede de depot de couches sur un substrat verrier par pecvd a faible pression.
US9443703B2 (en) * 2011-12-19 2016-09-13 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Apparatus for generating a hollow cathode arc discharge plasma
US9257285B2 (en) * 2012-08-22 2016-02-09 Infineon Technologies Ag Ion source devices and methods
JP2018028109A (ja) * 2014-12-22 2018-02-22 旭硝子株式会社 プラズマｃｖｄ装置

Also Published As

Publication number Publication date
CN108699691B (zh) 2021-09-03
EP3390688A4 (en) 2019-08-21
EP3390688B1 (en) 2023-01-04
EP3390688A1 (en) 2018-10-24
JP2019501496A (ja) 2019-01-17
MX2018007547A (es) 2019-05-09
WO2017105673A1 (en) 2017-06-22
KR20180103909A (ko) 2018-09-19
SG11201805171YA (en) 2018-07-30
PH12018501300A1 (en) 2019-02-11
CN108699691A (zh) 2018-10-23
BR112018012413A2 (pt) 2018-12-18

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