EA199800338A1 - Монолитный датчик ускорения и акселерометр, включающий датчики - Google Patents

Монолитный датчик ускорения и акселерометр, включающий датчики

Info

Publication number
EA199800338A1
EA199800338A1 EA199800338A EA199800338A EA199800338A1 EA 199800338 A1 EA199800338 A1 EA 199800338A1 EA 199800338 A EA199800338 A EA 199800338A EA 199800338 A EA199800338 A EA 199800338A EA 199800338 A1 EA199800338 A1 EA 199800338A1
Authority
EA
Eurasian Patent Office
Prior art keywords
resonator
parts
moving
sensor
fixed part
Prior art date
Application number
EA199800338A
Other languages
English (en)
Other versions
EA000375B1 (ru
Inventor
Оливье Ле Траон
Дени Жанио
Серж Мюллер
Original Assignee
Онера (Оффис Насьональ Д`Этюд Э Де Решерш Аэроспасьяль)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Онера (Оффис Насьональ Д`Этюд Э Де Решерш Аэроспасьяль) filed Critical Онера (Оффис Насьональ Д`Этюд Э Де Решерш Аэроспасьяль)
Publication of EA199800338A1 publication Critical patent/EA199800338A1/ru
Publication of EA000375B1 publication Critical patent/EA000375B1/ru

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Pressure Sensors (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Measuring Fluid Pressure (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

Монолитный датчик ускорения состоит из неподвижной части, двух подвижных массивных частей и резонатора, концевые части которого соединены с подвижными частями, гибкой рамы, окружающей две подвижные части, и двух связующих элементов, соединяющих раму со второй подвижной частью и с неподвижной частью. Рама создает механический фильтр между резонатором и неподвижной частью, которая не возбуждается колебаниями резонатора. Коэффициент перенапряжения резонатора не ухудшается, и измерения датчика становятся более точными. В акселерометре с дифференциальным выходом положение датчика выводится из положения другого идентичного датчика поворотом на 180° вокруг оси, параллельной резонатору, при этом неподвижные части датчиков соединены.Международная заявка была опубликована вместе с отчетом о международном поиске.
EA199800338A 1995-09-26 1996-09-23 Монолитный датчик ускорения и акселерометр, включающий датчики EA000375B1 (ru)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9511365A FR2739190B1 (fr) 1995-09-26 1995-09-26 Transducteur monolithique d'acceleration
PCT/FR1996/001481 WO1997012249A1 (fr) 1995-09-26 1996-09-23 Transducteur monolithique d'acceleration

Publications (2)

Publication Number Publication Date
EA199800338A1 true EA199800338A1 (ru) 1998-10-29
EA000375B1 EA000375B1 (ru) 1999-06-24

Family

ID=9482994

Family Applications (1)

Application Number Title Priority Date Filing Date
EA199800338A EA000375B1 (ru) 1995-09-26 1996-09-23 Монолитный датчик ускорения и акселерометр, включающий датчики

Country Status (14)

Country Link
EP (1) EP0852726B1 (ru)
JP (1) JP3982564B2 (ru)
KR (1) KR100432190B1 (ru)
CN (1) CN1075891C (ru)
AU (1) AU7134296A (ru)
CA (1) CA2233374C (ru)
DE (1) DE69605680T2 (ru)
EA (1) EA000375B1 (ru)
ES (1) ES2140134T3 (ru)
FR (1) FR2739190B1 (ru)
GR (1) GR3032773T3 (ru)
IL (1) IL123418A (ru)
UA (1) UA42849C2 (ru)
WO (1) WO1997012249A1 (ru)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3298898B2 (ja) * 1997-12-26 2002-07-08 日本碍子株式会社 双頭型質量センサおよびその質量検出方法
JP3545269B2 (ja) 1998-09-04 2004-07-21 日本碍子株式会社 質量センサ及び質量検出方法
JP2000180250A (ja) * 1998-10-09 2000-06-30 Ngk Insulators Ltd 質量センサ及び質量検出方法
FR2789171B1 (fr) 1999-02-01 2001-03-02 Onera (Off Nat Aerospatiale) Structure monolithique de gyrometre vibrant
FR2805344B1 (fr) 2000-02-22 2002-04-05 Onera (Off Nat Aerospatiale) Transducteur de force a vibration de flexion
FR2869998B1 (fr) * 2004-05-05 2006-07-07 Onera (Off Nat Aerospatiale) Dispositif de decouplage mecanique pour capteur vibrant differentiel monolithique
FR2880987B1 (fr) * 2005-01-18 2007-04-06 Sagem Procede de gravure d'une galette en matiere cristalline
DE102008017156A1 (de) * 2008-04-03 2009-10-08 Continental Teves Ag & Co. Ohg Mikromechanischer Beschleunigungssensor
EP2315039A4 (en) * 2008-07-04 2012-10-10 Alps Electric Co Ltd MOVABLE SENSOR OF CAPACITY DETECTION TYPE
JP5282715B2 (ja) * 2009-10-13 2013-09-04 セイコーエプソン株式会社 力検出ユニット及び力検出装置
JP2013050321A (ja) * 2011-08-30 2013-03-14 Seiko Epson Corp 物理量検出器及び電子機器
EP2762893B1 (en) * 2011-09-30 2016-06-15 Microinfinity, Inc. Mems resonant accelerometer
CN103245798B (zh) * 2013-04-26 2014-08-20 中北大学 高量程加速度传感器的机械滤波方法
CN108459173B (zh) * 2018-04-13 2023-08-11 北京强度环境研究所 一种应用于高g值冲击加速度传感器的机械滤波器
CN112379125B (zh) * 2020-10-31 2022-08-12 华中光电技术研究所（中国船舶重工集团公司第七一七研究所） 一种分体式差分石英振梁加速度计的制作及封装方法
FR3120700B1 (fr) 2021-03-10 2023-02-10 Office National Detudes Rech Aerospatiales Resonateur en vibration de flexion a haut facteur de qualite pour la realisation de references de temps, de capteurs de force ou de gyrometres

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2528183A1 (fr) * 1982-06-08 1983-12-09 Thomson Csf Accelerometre a ondes elastiques de surface
FR2650895B1 (fr) * 1989-08-08 1991-10-11 Onera (Off Nat Aerospatiale) Capteur accelerometrique a poutres vibrant en flexion
US5186053A (en) * 1990-12-19 1993-02-16 New Sd, Inc. Temperature compensated proofmass assembly for accelerometers
US5396797A (en) * 1991-02-08 1995-03-14 Alliedsignal Inc. Triaxial angular rate and acceleration sensor
US5331852A (en) * 1991-09-11 1994-07-26 The Charles Stark Draper Laboratory, Inc. Electromagnetic rebalanced micromechanical transducer
EP0572657B1 (en) * 1991-12-23 1998-08-05 Elf Atochem North America, Inc. Multi-mode accelerometer
EP0614087B1 (en) * 1993-03-01 2000-03-29 Murata Manufacturing Co., Ltd. Piezoelectric vibrator and acceleration sensor using the same
JP3123301B2 (ja) * 1993-04-16 2001-01-09 株式会社村田製作所 角速度センサ
US5456110A (en) * 1993-11-12 1995-10-10 Alliedsignal Inc. Dual pendulum vibrating beam accelerometer
JP2939922B2 (ja) * 1993-12-21 1999-08-25 株式会社共和電業 加速度変換器

Also Published As

Publication number Publication date
EA000375B1 (ru) 1999-06-24
WO1997012249A1 (fr) 1997-04-03
KR100432190B1 (ko) 2004-08-18
DE69605680T2 (de) 2000-07-27
GR3032773T3 (en) 2000-06-30
KR19990044408A (ko) 1999-06-25
JPH11512816A (ja) 1999-11-02
CN1197513A (zh) 1998-10-28
CN1075891C (zh) 2001-12-05
CA2233374A1 (en) 1997-04-03
DE69605680D1 (de) 2000-01-20
IL123418A0 (en) 1998-09-24
JP3982564B2 (ja) 2007-09-26
FR2739190B1 (fr) 1997-11-28
UA42849C2 (ru) 2001-11-15
IL123418A (en) 2000-07-26
ES2140134T3 (es) 2000-02-16
EP0852726B1 (fr) 1999-12-15
EP0852726A1 (fr) 1998-07-15
FR2739190A1 (fr) 1997-03-28
CA2233374C (en) 2002-04-23
AU7134296A (en) 1997-04-17

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Legal Events

Date Code Title Description
MM4A Lapse of a eurasian patent due to non-payment of renewal fees within the time limit in the following designated state(s)

Designated state(s): AM AZ BY KZ KG MD TJ TM

MK4A Patent expired

Designated state(s): RU