IL123418A - Monolithic acceleration transducer - Google Patents
Monolithic acceleration transducerInfo
- Publication number
- IL123418A IL123418A IL12341896A IL12341896A IL123418A IL 123418 A IL123418 A IL 123418A IL 12341896 A IL12341896 A IL 12341896A IL 12341896 A IL12341896 A IL 12341896A IL 123418 A IL123418 A IL 123418A
- Authority
- IL
- Israel
- Prior art keywords
- acceleration transducer
- monolithic acceleration
- monolithic
- transducer
- acceleration
- Prior art date
Links
- 230000001133 acceleration Effects 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR9511365A FR2739190B1 (en) | 1995-09-26 | 1995-09-26 | MONOLITHIC ACCELERATION TRANSDUCER |
| PCT/FR1996/001481 WO1997012249A1 (en) | 1995-09-26 | 1996-09-23 | Monolithic acceleration transducer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| IL123418A0 IL123418A0 (en) | 1998-09-24 |
| IL123418A true IL123418A (en) | 2000-07-26 |
Family
ID=9482994
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IL12341896A IL123418A (en) | 1995-09-26 | 1996-09-23 | Monolithic acceleration transducer |
Country Status (14)
| Country | Link |
|---|---|
| EP (1) | EP0852726B1 (en) |
| JP (1) | JP3982564B2 (en) |
| KR (1) | KR100432190B1 (en) |
| CN (1) | CN1075891C (en) |
| AU (1) | AU7134296A (en) |
| CA (1) | CA2233374C (en) |
| DE (1) | DE69605680T2 (en) |
| EA (1) | EA000375B1 (en) |
| ES (1) | ES2140134T3 (en) |
| FR (1) | FR2739190B1 (en) |
| GR (1) | GR3032773T3 (en) |
| IL (1) | IL123418A (en) |
| UA (1) | UA42849C2 (en) |
| WO (1) | WO1997012249A1 (en) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6389877B1 (en) | 1997-12-26 | 2002-05-21 | Ngk Insulators, Ltd. | Double-headed mass sensor and mass detection method |
| JP3545269B2 (en) | 1998-09-04 | 2004-07-21 | 日本碍子株式会社 | Mass sensor and mass detection method |
| JP2000180250A (en) | 1998-10-09 | 2000-06-30 | Ngk Insulators Ltd | Mass sensor and mass detection method |
| FR2789171B1 (en) * | 1999-02-01 | 2001-03-02 | Onera (Off Nat Aerospatiale) | MONOLITHIC STRUCTURE OF A VIBRATING GYROMETER |
| FR2805344B1 (en) | 2000-02-22 | 2002-04-05 | Onera (Off Nat Aerospatiale) | BENDING VIBRATION FORCE TRANSDUCER |
| FR2869998B1 (en) * | 2004-05-05 | 2006-07-07 | Onera (Off Nat Aerospatiale) | MECHANICAL DECOUPLING DEVICE FOR MONOLITHIC DIFFERENTIAL VIBRANT SENSOR |
| FR2880987B1 (en) * | 2005-01-18 | 2007-04-06 | Sagem | PROCESS FOR ETCHING A CRYSTALLINE MATERIAL |
| DE102008017156A1 (en) | 2008-04-03 | 2009-10-08 | Continental Teves Ag & Co. Ohg | Micromechanical acceleration sensor |
| WO2010001947A1 (en) * | 2008-07-04 | 2010-01-07 | アルプス電気株式会社 | Capacitance detection type movable sensor |
| JP5282715B2 (en) * | 2009-10-13 | 2013-09-04 | セイコーエプソン株式会社 | Force detection unit and force detection device |
| JP2013050321A (en) * | 2011-08-30 | 2013-03-14 | Seiko Epson Corp | Physical quantity detector and electronic apparatus |
| WO2013047933A1 (en) | 2011-09-30 | 2013-04-04 | (주)마이크로인피니티 | Mems resonant accelerometer |
| CN103245798B (en) * | 2013-04-26 | 2014-08-20 | 中北大学 | Mechanical filtering method of high-range acceleration sensor |
| CN108459173B (en) * | 2018-04-13 | 2023-08-11 | 北京强度环境研究所 | Mechanical filter applied to high-G-value impact acceleration sensor |
| CN112379125B (en) * | 2020-10-31 | 2022-08-12 | 华中光电技术研究所（中国船舶重工集团公司第七一七研究所） | Manufacturing and packaging method of split type differential quartz vibrating beam accelerometer |
| FR3120700B1 (en) | 2021-03-10 | 2023-02-10 | Office National Detudes Rech Aerospatiales | HIGH QUALITY BENDING VIBRATION RESONATOR FOR THE REALIZATION OF TIME REFERENCES, FORCE SENSORS OR GYROMETERS |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2528183A1 (en) * | 1982-06-08 | 1983-12-09 | Thomson Csf | ELASTIC SURFACE WAVE ACCELEROMETER |
| FR2650895B1 (en) * | 1989-08-08 | 1991-10-11 | Onera (Off Nat Aerospatiale) | ACCELEROMETRIC SENSOR WITH BENDING VIBRATORS |
| US5186053A (en) * | 1990-12-19 | 1993-02-16 | New Sd, Inc. | Temperature compensated proofmass assembly for accelerometers |
| US5396797A (en) * | 1991-02-08 | 1995-03-14 | Alliedsignal Inc. | Triaxial angular rate and acceleration sensor |
| US5331852A (en) * | 1991-09-11 | 1994-07-26 | The Charles Stark Draper Laboratory, Inc. | Electromagnetic rebalanced micromechanical transducer |
| AU3421593A (en) * | 1991-12-23 | 1993-07-28 | Elf Atochem North America, Inc. | Multi-mode accelerometer |
| DE69423667T2 (en) * | 1993-03-01 | 2000-11-23 | Murata Manufacturing Co | Piezoelectric vibrator and acceleration sensor using this |
| JP3123301B2 (en) * | 1993-04-16 | 2001-01-09 | 株式会社村田製作所 | Angular velocity sensor |
| US5456110A (en) * | 1993-11-12 | 1995-10-10 | Alliedsignal Inc. | Dual pendulum vibrating beam accelerometer |
| JP2939922B2 (en) * | 1993-12-21 | 1999-08-25 | 株式会社共和電業 | Acceleration transducer |
-
1995
- 1995-09-26 FR FR9511365A patent/FR2739190B1/en not_active Expired - Fee Related
-
1996
- 1996-09-23 EA EA199800338A patent/EA000375B1/en not_active IP Right Cessation
- 1996-09-23 IL IL12341896A patent/IL123418A/en not_active IP Right Cessation
- 1996-09-23 CA CA002233374A patent/CA2233374C/en not_active Expired - Lifetime
- 1996-09-23 UA UA98031404A patent/UA42849C2/en unknown
- 1996-09-23 CN CN96197214A patent/CN1075891C/en not_active Expired - Lifetime
- 1996-09-23 EP EP96932635A patent/EP0852726B1/en not_active Expired - Lifetime
- 1996-09-23 KR KR10-1998-0701652A patent/KR100432190B1/en not_active IP Right Cessation
- 1996-09-23 AU AU71342/96A patent/AU7134296A/en not_active Abandoned
- 1996-09-23 WO PCT/FR1996/001481 patent/WO1997012249A1/en not_active Application Discontinuation
- 1996-09-23 DE DE69605680T patent/DE69605680T2/en not_active Expired - Lifetime
- 1996-09-23 JP JP51317197A patent/JP3982564B2/en not_active Expired - Lifetime
- 1996-09-23 ES ES96932635T patent/ES2140134T3/en not_active Expired - Lifetime
-
2000
- 2000-02-28 GR GR20000400475T patent/GR3032773T3/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| AU7134296A (en) | 1997-04-17 |
| CN1075891C (en) | 2001-12-05 |
| CN1197513A (en) | 1998-10-28 |
| CA2233374A1 (en) | 1997-04-03 |
| EP0852726A1 (en) | 1998-07-15 |
| DE69605680T2 (en) | 2000-07-27 |
| JP3982564B2 (en) | 2007-09-26 |
| GR3032773T3 (en) | 2000-06-30 |
| EA199800338A1 (en) | 1998-10-29 |
| WO1997012249A1 (en) | 1997-04-03 |
| EP0852726B1 (en) | 1999-12-15 |
| FR2739190A1 (en) | 1997-03-28 |
| FR2739190B1 (en) | 1997-11-28 |
| UA42849C2 (en) | 2001-11-15 |
| IL123418A0 (en) | 1998-09-24 |
| DE69605680D1 (en) | 2000-01-20 |
| KR19990044408A (en) | 1999-06-25 |
| JPH11512816A (en) | 1999-11-02 |
| EA000375B1 (en) | 1999-06-24 |
| KR100432190B1 (en) | 2004-08-18 |
| CA2233374C (en) | 2002-04-23 |
| ES2140134T3 (en) | 2000-02-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FF | Patent granted | ||
| KB | Patent renewed | ||
| KB | Patent renewed | ||
| KB | Patent renewed | ||
| KB | Patent renewed | ||
| KB | Patent renewed | ||
| EXP | Patent expired |