CN103245798B - Mechanical filtering method of high-range acceleration sensor - Google Patents
Mechanical filtering method of high-range acceleration sensor Download PDFInfo
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- CN103245798B CN103245798B CN201310148544.8A CN201310148544A CN103245798B CN 103245798 B CN103245798 B CN 103245798B CN 201310148544 A CN201310148544 A CN 201310148544A CN 103245798 B CN103245798 B CN 103245798B
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Abstract
The invention relates to a filtering technology of a high-range acceleration sensor, in particular to a mechanical filtering method of a high-range acceleration sensor, and solves problems that the filtering technology of a conventional high-range acceleration sensor cannot prevent high-frequency noises from damaging the high-range acceleration sensor, is complicated in manufacturing process and high in production cost, and cannot meet the miniaturization requirement of the high-range acceleration sensor. The mechanical filtering method of the high-range acceleration sensor is realized through the steps as follows: a buffering layer is selected and used as an inner filtering structure, and a sensitive structure of the high-range acceleration sensor is adhered to the bottom surface of an inner cavity of a pipe casing of the high-range acceleration sensor through the buffering layer; and a frustum structure is selected and used as an outer filtering structure, and the area of the upper bottom surface of the frustum structure is larger than that of the lower bottom surface of the pipe casing of the high-range acceleration sensor. The mechanical filtering method is suitable for filtering the high-range acceleration sensor.
Description
Technical field
The present invention relates to the filtering technique of high-range acceleration transducer, specifically a kind of mechanical filtering method of high-range acceleration transducer.
Background technology
As a kind of inertia device, high-range acceleration transducer has a wide range of applications in fields such as vehicle, test, Aero-Space.In the test environment of high-range acceleration transducer, conventionally have high frequency noise, high frequency noise can have a strong impact on high-range acceleration transducer correctly reading rigid body overloading acceleration value.Therefore in order to guarantee that high-range acceleration transducer normally works, need to carry out filtering to high-range acceleration transducer.The filtering technique of existing high-range acceleration transducer mainly comprises algorithm filtering, circuit filtering and mechanical filtering.Wherein, though algorithm filtering and circuit filtering can be realized the dirigibility of filtering, all cannot carry out filtering to high-range acceleration transducer itself, thereby all cannot avoid the infringement of high frequency noise to high-range acceleration transducer.Machinery filtering refers to and adopts mechanical filter to carry out filtering.Mechanical filter adopts silicon materials to be made conventionally, and is conventionally directly produced on the chip of high-range acceleration transducer, thereby its complex manufacturing technology.Meanwhile, cannot be separated between mechanical filter and high-range acceleration transducer, once mechanical filter damages, high-range acceleration transducer also cannot continue to use, thereby its production cost is high.In addition, the common volume of mechanical filter is excessive, thereby it cannot meet high-range acceleration transducer to microminiaturized requirement.Based on this, be necessary to invent a kind of filtering technique of brand-new high-range acceleration transducer, with solve the filtering technique of existing high-range acceleration transducer cannot avoid high frequency noise to the infringement of high-range acceleration transducer, complex manufacturing technology, production cost is high and cannot meet the problem of high-range acceleration transducer to microminiaturized requirement.
Summary of the invention
The present invention for solve the filtering technique of existing high-range acceleration transducer cannot avoid high frequency noise to the infringement of high-range acceleration transducer, complex manufacturing technology, production cost is high and cannot meet the problem of high-range acceleration transducer to microminiaturized requirement, and a kind of mechanical filtering method of high-range acceleration transducer is provided.
The present invention adopts following technical scheme to realize: the mechanical filtering method of high-range acceleration transducer, the method is to adopt following steps to realize: a. chooses cushion as interior filter structure, and by cushion, the sensitive structure of high-range acceleration transducer is bonded on the inner chamber bottom surface of shell of high-range acceleration transducer; By cushion, the sensitive structure of high-range acceleration transducer is carried out to filtering; B. choose platform shape structure as outer filter structure, and the area that guarantees the upper bottom surface of platform shape structure is greater than the area of bottom surface of the shell of high-range acceleration transducer; Then the bottom surface in platform shape structure digs cambered surface cavity, and the area of the upper and lower bottom surface of platform shape structure is equated; Then the shell of high-range acceleration transducer and platform shape structure are fixed; By platform shape structure, the sensitive structure of the shell of high-range acceleration transducer and high-range acceleration transducer is carried out to filtering.
In described step a, the thickness of cushion is less than 1mm, and the volume of cushion is 1.5mL.
In described step b, the thickness of platform shape structure is 5mm, and the platform shape inclination angle of inclined plane of platform shape structure is 20 °-45 °.
In described step b, between the upper and lower bottom surface of the shell of high-range acceleration transducer, connect and offer three threaded holes, between the upper bottom surface of platform shape structure and the bottom surface of cambered surface cavity, connect and offer three threaded holes, and guarantee identical and position, three threaded hole apertures on the shell of structural three threaded holes of platform shape and high-range acceleration transducer over against; By threaded hole, the shell of high-range acceleration transducer and platform shape structure are fixed.
Compare with the filtering technique of existing high-range acceleration transducer, the mechanical filtering method tool of high-range acceleration transducer of the present invention has the following advantages: one, compare with circuit filtering with algorithm filtering, the mechanical filtering method of high-range acceleration transducer of the present invention has been realized high-range acceleration transducer itself has been carried out to filtering, has effectively avoided the infringement of high frequency noise to high-range acceleration transducer.Particularly, the mechanical filtering method of high-range acceleration transducer of the present invention adopts cushion to carry out preliminary filtering to the sensitive structure of high-range acceleration transducer, and adopts platform shape structure to carry out further filtering to the sensitive structure of the shell of high-range acceleration transducer and high-range acceleration transducer.In filtering, when high frequency noise arrives, cambered surface cavity not only makes the stressed dispersed of high-range acceleration transducer, and when being extruded, platform shape structure extrudes to both sides, the kinetic energy that is level by vertical kinetic transformation thus, thereby weakened the energy of high frequency noise, effectively avoided the infringement of high frequency noise to high-range acceleration transducer.The area of the upper and lower bottom surface of platform shape structure equates to have guaranteed that the propagation of high frequency noise in platform shape structure can not produce because of the change in cross section converges and become large, has further avoided the infringement of high frequency noise to high-range acceleration transducer.They are two years old, compare with other micromechanics filter structure, the mechanical filtering method of high-range acceleration transducer of the present invention is without adopting silicon materials, and in it, filter structure all can carry out separated with high-range acceleration transducer with outer filter structure, effectively simplify thus manufacture craft, effectively reduced production cost.Meanwhile, in it, the volume of filter structure and outer filter structure is all very little, has effectively met thus high-range acceleration transducer to microminiaturized requirement.In sum, the filtering technique that the mechanical filtering method of high-range acceleration transducer of the present invention efficiently solves existing high-range acceleration transducer cannot avoid high frequency noise to the infringement of high-range acceleration transducer, complex manufacturing technology, production cost is high and cannot meet the problem of high-range acceleration transducer to microminiaturized requirement.
The filtering technique that the present invention efficiently solves existing high-range acceleration transducer cannot avoid high frequency noise to the infringement of high-range acceleration transducer, complex manufacturing technology, production cost is high and cannot meet the problem of high-range acceleration transducer to microminiaturized requirement, be applicable to high-range acceleration transducer to carry out filtering.
Accompanying drawing explanation
Fig. 1 is the structural representation of interior filter structure of the present invention and outer filter structure.
Fig. 2 is the structural representation of interior filter structure of the present invention.
Fig. 3 is the structural representation of outer filter structure of the present invention.
Fig. 4 is the upward view of Fig. 3.
In figure: the shell of 1-high-range acceleration transducer, 2-threaded hole, the inner chamber of the shell of 3-high-range acceleration transducer, the sensitive structure of 4-high-range acceleration transducer, 5-cushion, 6-platform shape structure, 7-cambered surface cavity.
Embodiment
The mechanical filtering method of high-range acceleration transducer, the method is to adopt following steps to realize:
A. choose cushion 5 as interior filter structure, and by cushion 5, the sensitive structure of high-range acceleration transducer 4 is bonded on inner chamber 3 bottom surfaces of shell 1 of high-range acceleration transducer; Sensitive structure 4 by 5 pairs of high-range acceleration transducers of cushion carries out filtering;
B. choose platform shape structure 6 as outer filter structure, and the area that guarantees the upper bottom surface of platform shape structure 6 is greater than the area of bottom surface of the shell 1 of high-range acceleration transducer; Then the bottom surface in platform shape structure 6 digs cambered surface cavity 7, and the area of the upper and lower bottom surface of platform shape structure 6 is equated; Then that the shell of high-range acceleration transducer 1 is fixing with platform shape structure 6; By the shell 1 of 6 pairs of high-range acceleration transducers of platform shape structure and the sensitive structure 4 of high-range acceleration transducer, carry out filtering;
In described step a, the thickness of cushion 5 is less than 1mm, and the volume of cushion 5 is 1.5mL;
In described step b, the thickness of platform shape structure 6 is 5mm, and the platform shape inclination angle of inclined plane of platform shape structure 6 is 20 °-45 °;
In described step b, between the upper and lower bottom surface of the shell 1 of high-range acceleration transducer, connect and offer three threaded holes 2, between the upper bottom surface of platform shape structure 6 and the bottom surface of cambered surface cavity 7, connect and offer three threaded holes 2, and guarantee identical and position, three threaded hole 2 apertures on the shell 1 of three threaded holes 2 in platform shape structure 6 and high-range acceleration transducer over against; By threaded hole 2, the shell of high-range acceleration transducer 1 is fixing with platform shape structure 6;
During concrete enforcement, cushion 5 adopts the low-density elastic-plastic material that elastic modulus is 3GPa to make.The platform shape inclination angle of inclined plane of platform shape structure 6 is 30 °.
Claims (3)
1. a mechanical filtering method for high-range acceleration transducer, is characterized in that: the method is to adopt following steps to realize:
A. choose cushion (5) as interior filter structure, and by cushion (5), the sensitive structure of high-range acceleration transducer (4) is bonded on inner chamber (3) bottom surface of shell (1) of high-range acceleration transducer; By cushion (5), the sensitive structure of high-range acceleration transducer (4) is carried out to filtering;
B. choose platform shape structure (6) as outer filter structure, and the area that guarantees the upper bottom surface of platform shape structure (6) is greater than the area of bottom surface of the shell (1) of high-range acceleration transducer; Then the bottom surface in platform shape structure (6) digs cambered surface cavity (7), and the area of the upper and lower bottom surface of platform shape structure (6) is equated; Then that the shell of high-range acceleration transducer (1) and platform shape structure (6) is fixing; By platform shape structure (6), the sensitive structure (4) of the shell of high-range acceleration transducer (1) and high-range acceleration transducer is carried out to filtering.
2. the mechanical filtering method of high-range acceleration transducer according to claim 1, is characterized in that: in described step b, the thickness of platform shape structure (6) is 5mm, and the platform shape inclination angle of inclined plane of platform shape structure (6) is 20 °-45 °.
3. the mechanical filtering method of high-range acceleration transducer according to claim 1, it is characterized in that: in described step b, between the upper and lower bottom surface of the shell (1) of high-range acceleration transducer, connect and offer three threaded holes (2), between the upper bottom surface of platform shape structure (6) and the bottom surface of cambered surface cavity (7), connect and offer three threaded holes (2), and guarantee identical and position, three threaded holes (2) aperture on the shell (1) of three threaded holes (2) in platform shape structure (6) and high-range acceleration transducer over against; By threaded hole (2), the shell of high-range acceleration transducer (1) and platform shape structure (6) is fixing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310148544.8A CN103245798B (en) | 2013-04-26 | 2013-04-26 | Mechanical filtering method of high-range acceleration sensor |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310148544.8A CN103245798B (en) | 2013-04-26 | 2013-04-26 | Mechanical filtering method of high-range acceleration sensor |
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| CN103245798A CN103245798A (en) | 2013-08-14 |
| CN103245798B true CN103245798B (en) | 2014-08-20 |
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| CN201310148544.8A Active CN103245798B (en) | 2013-04-26 | 2013-04-26 | Mechanical filtering method of high-range acceleration sensor |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108872634B (en) * | 2018-06-21 | 2021-01-22 | 京东方科技集团股份有限公司 | Acceleration sensor |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1197513A (en) * | 1995-09-26 | 1998-10-28 | 国家航空与空间研究事务局 | Monolithic acceleration transducer |
| CN101539587A (en) * | 2009-04-21 | 2009-09-23 | 中国科学院上海微系统与信息技术研究所 | Test method for sensitive direction and sensitivity of medium and high measuring range acceleration sensor |
| CN102259827A (en) * | 2011-06-25 | 2011-11-30 | 中北大学 | Method for encapsulating MEMS (micro electro mechanical system) high-range acceleration sensor |
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2013
- 2013-04-26 CN CN201310148544.8A patent/CN103245798B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1197513A (en) * | 1995-09-26 | 1998-10-28 | 国家航空与空间研究事务局 | Monolithic acceleration transducer |
| CN101539587A (en) * | 2009-04-21 | 2009-09-23 | 中国科学院上海微系统与信息技术研究所 | Test method for sensitive direction and sensitivity of medium and high measuring range acceleration sensor |
| CN102259827A (en) * | 2011-06-25 | 2011-11-30 | 中北大学 | Method for encapsulating MEMS (micro electro mechanical system) high-range acceleration sensor |
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