DK3227654T3 - Polymer composite vacuum components - Google Patents

Polymer composite vacuum components Download PDF

Info

Publication number
DK3227654T3
DK3227654T3 DK16701716.9T DK16701716T DK3227654T3 DK 3227654 T3 DK3227654 T3 DK 3227654T3 DK 16701716 T DK16701716 T DK 16701716T DK 3227654 T3 DK3227654 T3 DK 3227654T3
Authority
DK
Denmark
Prior art keywords
polymer composite
composite vacuum
vacuum components
components
polymer
Prior art date
Application number
DK16701716.9T
Other languages
English (en)
Inventor
Brandon J Kelly
Clinton L Percy
Scott C Heinbuch
Gerardo A Brucker
Timothy C Swinney
Timothy R Piwonka-Corle
Original Assignee
Mks Instr Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mks Instr Inc filed Critical Mks Instr Inc
Application granted granted Critical
Publication of DK3227654T3 publication Critical patent/DK3227654T3/da

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/14—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
    • B29C45/14065—Positioning or centering articles in the mould
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0084—Electrical connection means to the outside of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G01L21/34—Vacuum gauges by making use of ionisation effects using electric discharge tubes with cold cathodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2023/00—Use of polyalkenes or derivatives thereof as moulding material
    • B29K2023/10—Polymers of propylene
    • B29K2023/12—PP, i.e. polypropylene
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2069/00—Use of PC, i.e. polycarbonates or derivatives thereof, as moulding material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2071/00—Use of polyethers, e.g. PEEK, i.e. polyether-etherketone or PEK, i.e. polyetherketone or derivatives thereof, as moulding material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2031/00—Other particular articles
    • B29L2031/752—Measuring equipment

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
DK16701716.9T 2015-01-15 2016-01-13 Polymer composite vacuum components DK3227654T3 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201562103968P 2015-01-15 2015-01-15
US201562191140P 2015-07-10 2015-07-10
PCT/US2016/013219 WO2016115232A2 (en) 2015-01-15 2016-01-13 Polymer composite vacuum components

Publications (1)

Publication Number Publication Date
DK3227654T3 true DK3227654T3 (en) 2022-05-30

Family

ID=55236938

Family Applications (1)

Application Number Title Priority Date Filing Date
DK16701716.9T DK3227654T3 (en) 2015-01-15 2016-01-13 Polymer composite vacuum components

Country Status (9)

Country Link
US (3) US10359332B2 (da)
EP (2) EP3227654B1 (da)
JP (1) JP6670839B2 (da)
KR (1) KR102254199B1 (da)
CN (2) CN107110730A (da)
DK (1) DK3227654T3 (da)
SG (2) SG10202105319QA (da)
TW (3) TWI739300B (da)
WO (1) WO2016115232A2 (da)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8062864B2 (en) * 2007-05-21 2011-11-22 Alderbio Holdings Llc Nucleic acids encoding antibodies to IL-6, and recombinant production of anti-IL-6 antibodies
TWI739300B (zh) 2015-01-15 2021-09-11 美商Ｍｋｓ儀器公司 離子化計及其製造方法
US10337940B2 (en) 2016-05-02 2019-07-02 Mks Instruments, Inc. Cold cathode ionization vacuum gauge with multiple cathodes
EP3555904A1 (en) * 2016-12-13 2019-10-23 MKS Instruments, Inc. Anode electrode shield for inverted magnetron cold cathode ionization gauge
US10049864B2 (en) * 2017-01-12 2018-08-14 Upendra D Desai Metallic glow discharge diode and triode devices with large cold cathode as efficient charger generator—a power cell
EP3419042A1 (en) * 2017-06-23 2018-12-26 Koninklijke Philips N.V. X-ray tube insulator
NL2020235B1 (en) * 2018-01-05 2019-07-12 Hennyz B V Vacuum transfer assembly
CN108766860B (zh) * 2018-06-29 2023-08-04 安徽华东光电技术研究所有限公司 一种长寿命冷阴极磁控管的阴极
JP7218217B2 (ja) * 2019-03-11 2023-02-06 住友重機械工業株式会社 フィードスルー構造および極低温冷却システム
US11145966B2 (en) * 2019-08-28 2021-10-12 Pctel, Inc. Over-molded thin film antenna device
MX2023007556A (es) * 2021-01-12 2023-07-10 Micro Motion Inc Empalme electrico que tiene un elemento de paso mejorado.
JP7096628B1 (ja) * 2022-03-22 2022-07-06 バキュームプロダクツ株式会社 隔膜圧力計及び複合圧力計
CH719946A2 (de) * 2022-08-08 2024-02-15 Inficon ag Kammer für Ionisationsvakuummeter.
WO2024103047A1 (en) * 2022-11-11 2024-05-16 Illinois Tool Works Inc. Pressure transducers having improved resistance to temperature error

Family Cites Families (62)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2605445A (en) * 1947-05-08 1952-07-29 Herbert J Reich Magnetron
JPS5233901Y2 (da) 1972-01-20 1977-08-02
US3769537A (en) 1972-09-14 1973-10-30 Hughes Aircraft Co Baffle for perforated electrode in a crossed-field switch device
US4013913A (en) * 1976-01-19 1977-03-22 Hnu Systems Inc. Ion detection electrode arrangement
US4325005A (en) * 1979-07-16 1982-04-13 Emil A Ab Ion accelerator and a method for increasing its efficiency
US4295117A (en) * 1980-09-11 1981-10-13 General Motors Corporation Pressure sensor assembly
US5422573A (en) * 1990-04-11 1995-06-06 Granville-Phillips Company Ionization gauge and method of using and calibrating same
US5157333A (en) * 1991-03-12 1992-10-20 Mks Instruments, Inc. Discharge initiating means for cold cathode discharge ionization gauge
GB2256310A (en) 1991-05-31 1992-12-02 Boc Group Plc A vacuum gauge
GB9111747D0 (en) 1991-05-31 1991-07-24 Boc Group Plc Improvements relating to vacuum pumps
FR2679653B1 (fr) * 1991-07-23 1993-09-24 Commissariat Energie Atomique Vacumetre a ionisation.
US5502354A (en) * 1992-07-31 1996-03-26 Correa; Paulo N. Direct current energized pulse generator utilizing autogenous cyclical pulsed abnormal glow discharges
ATE168467T1 (de) 1993-04-28 1998-08-15 Fredericks Co Ionisationswandler mit sich gegenuberliegenden magneten
DE29708673U1 (de) * 1997-05-15 1997-08-21 Filtertek B.V., Limerick Druckübertragungsvorrichtung
JP3658235B2 (ja) 1999-03-30 2005-06-08 キヤノン株式会社 電子銃および電子銃を用いた描画装置および電子線応用装置
FR2792493B1 (fr) 1999-04-14 2001-05-25 Commissariat Energie Atomique Cartouche pour torche a plasma et torche a plasma equipee
FR2792772B1 (fr) * 1999-04-20 2001-05-18 Commissariat Energie Atomique Chambre d'ionisation, chaine de mesure d'activite d'un gaz emetteur de rayonnement beta et procede de mise en oeuvre de celle-ci
US6251471B1 (en) 1999-05-12 2001-06-26 University Of New Hampshire Surface trace electrical feedthru
US7838850B2 (en) * 1999-12-13 2010-11-23 Semequip, Inc. External cathode ion source
JP4493139B2 (ja) * 2000-02-02 2010-06-30 キヤノンアネルバ株式会社 電離真空計
GB2362806B (en) * 2000-05-31 2002-04-24 Better Electrical Products Fty A method of securing articles and an electric kettle made by such a method
US6451142B1 (en) * 2000-06-22 2002-09-17 Agilent Technologies, Inc Mounting process for outgassing-sensitive optics
KR100383441B1 (ko) * 2000-09-26 2003-05-12 김도윤 탄소나노튜브의 장이온화를 이용한 진공 게이지
US20040128016A1 (en) * 2001-03-22 2004-07-01 Stewart David H. Method for manufacturing a near net-shape mold
US6566884B2 (en) * 2001-09-13 2003-05-20 Duniway Stockroom Corporation Ionization vacuum pressure gauge
US6993973B2 (en) 2003-05-16 2006-02-07 Mks Instruments, Inc. Contaminant deposition control baffle for a capacitive pressure transducer
CN100555552C (zh) * 2004-07-30 2009-10-28 清华大学 真空规管
WO2006076483A1 (en) * 2005-01-14 2006-07-20 Tyco Electronics Corporation Insert injection-compression molding of polymeric ptc electrical devices
EP1698878A1 (en) * 2005-03-04 2006-09-06 Inficon GmbH Electrode configuration and pressure measuring apparatus
JP5127042B2 (ja) * 2005-05-09 2013-01-23 株式会社アンペール 電離真空計
US8160707B2 (en) * 2006-01-30 2012-04-17 Medtronic, Inc. Method and apparatus for minimizing EMI coupling in a feedthrough array having at least one unfiltered feedthrough
CN100427912C (zh) * 2006-03-31 2008-10-22 核工业西南物理研究院 具有高抗干扰能力的快响应电离真空计
US7928366B2 (en) * 2006-10-06 2011-04-19 Lam Research Corporation Methods of and apparatus for accessing a process chamber using a dual zone gas injector with improved optical access
JP5183036B2 (ja) * 2006-06-23 2013-04-17 株式会社ジェイテクト トルク検出装置及びヨーク組立体の製造方法
US7456634B2 (en) * 2006-10-26 2008-11-25 Brooks Automation, Inc. Method and apparatus for shielding feedthrough pin insulators in an ionization gauge operating in harsh environments
CN104614932A (zh) * 2006-10-30 2015-05-13 应用材料公司 用于光掩模刻蚀的终点检测
FR2910966B1 (fr) * 2006-12-28 2009-04-17 Commissariat Energie Atomique Dispositif de mesures couplees permettant un suivi global et en continu de traces de goudrons presentes dans un flux gazeux
US7768267B2 (en) 2007-07-11 2010-08-03 Brooks Automation, Inc. Ionization gauge with a cold electron source
JP4518128B2 (ja) * 2007-10-01 2010-08-04 株式会社デンソー 電子回路装置の製造方法および電子回路装置
GB0722063D0 (en) 2007-11-12 2007-12-19 Edwards Ltd Ionisation vacuum gauges and gauge heads
KR101541273B1 (ko) 2007-12-19 2015-08-03 엠케이에스 인스트루먼츠, 인코포레이티드 전자 멀티플라이어 냉 방출 소스를 갖는 이온화 게이지
CN101470039A (zh) * 2007-12-28 2009-07-01 中国航天科技集团公司第五研究院第五一〇研究所 一种孔入口球锥型转换器规
JP5728728B2 (ja) 2008-02-21 2015-06-03 エム ケー エス インストルメンツインコーポレーテッドＭｋｓ Ｉｎｓｔｒｕｍｅｎｔｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 高圧力動作用に設計された動作パラメータと形状とを有する電離真空計
CN102159929A (zh) 2008-09-19 2011-08-17 布鲁克机械公司 具有发射电流及偏压电位控制的电离计
US7906971B2 (en) * 2008-10-14 2011-03-15 Itt Manufacturing Enterprises, Inc. Molecular shield for an ionizaton vacuum gauge
KR20100055262A (ko) * 2008-11-17 2010-05-26 현대자동차주식회사 고용량 피티씨 히터
JP2010151623A (ja) 2008-12-25 2010-07-08 Canon Anelva Corp 冷陰極電離真空計およびそれに用いる放電開始補助電極板
JP5669411B2 (ja) 2009-04-09 2015-02-12 キヤノンアネルバ株式会社 冷陰極電離真空計及びそれを備えた真空処理装置並びに放電開始補助電極
KR101570652B1 (ko) 2009-05-06 2015-11-23 엠케이에스 인스트루먼츠, 인코포레이티드 정전 이온 트랩
JP5632644B2 (ja) 2009-05-28 2014-11-26 キヤノンアネルバ株式会社 冷陰極電離真空計、放電開始補助電極及び真空処理装置
JP2011133386A (ja) * 2009-12-25 2011-07-07 Dia Shinku Kk 冷陰極電離真空計
CN201837495U (zh) 2010-03-17 2011-05-18 杭州吉星仪表机械有限公司 膜片式塑料表壳压力表
US8453493B2 (en) * 2010-11-02 2013-06-04 Agilent Technologies, Inc. Trace gas sensing apparatus and methods for leak detection
CN202033149U (zh) * 2011-04-27 2011-11-09 陕西三令激光电气有限责任公司 高真空精密气体压力传感器
JP5764433B2 (ja) * 2011-08-26 2015-08-19 株式会社日立ハイテクノロジーズ 質量分析装置及び質量分析方法
CH705474A1 (de) * 2011-09-08 2013-03-15 Inficon Gmbh Ionisations - Vakuummesszelle.
US9593996B2 (en) 2012-02-08 2017-03-14 Mks Instruments, Inc. Ionization gauge for high pressure operation
CH707685A1 (de) * 2013-03-06 2014-09-15 Inficon Gmbh Ionisations-Vakuummesszelle mit Abschirmvorrichtung.
JP6131113B2 (ja) 2013-06-13 2017-05-17 キヤノンアネルバ株式会社 冷陰極電離真空計及び内壁保護部材
WO2015048664A1 (en) 2013-09-30 2015-04-02 Mks Instruments, Inc. Cold cathode ionization vacuum gauge
US9588004B2 (en) 2014-11-07 2017-03-07 Mks Instruments, Inc. Long lifetime cold cathode ionization vacuum gauge design
TWI739300B (zh) 2015-01-15 2021-09-11 美商Ｍｋｓ儀器公司 離子化計及其製造方法

Also Published As

Publication number Publication date
EP3227654A2 (en) 2017-10-11
JP2018502305A (ja) 2018-01-25
EP3227654B1 (en) 2022-04-20
TWI795918B (zh) 2023-03-11
US11366036B2 (en) 2022-06-21
US20190271607A1 (en) 2019-09-05
KR102254199B1 (ko) 2021-05-20
EP4033216A1 (en) 2022-07-27
CN111220321B (zh) 2021-11-23
TWI739300B (zh) 2021-09-11
KR20170102553A (ko) 2017-09-11
WO2016115232A2 (en) 2016-07-21
US10876917B2 (en) 2020-12-29
JP6670839B2 (ja) 2020-03-25
CN111220321A (zh) 2020-06-02
US20160209288A1 (en) 2016-07-21
CN107110730A (zh) 2017-08-29
TW202201473A (zh) 2022-01-01
TW202025222A (zh) 2020-07-01
US10359332B2 (en) 2019-07-23
SG10202105319QA (en) 2021-07-29
US20210096035A1 (en) 2021-04-01
SG11201704775QA (en) 2017-07-28
TW201634219A (zh) 2016-10-01
WO2016115232A3 (en) 2016-12-08

Similar Documents

Publication Publication Date Title
DK3227654T3 (en) Polymer composite vacuum components
GB2533153B (en) Vacuum system
EP3202572A4 (en) Resin composite
GB201418581D0 (en) Composite component
EP3198125A4 (en) Composite molded rotary component
PL3195303T3 (pl) Stroik kompozytowy
GB201413136D0 (en) Conductive polymer composite
GB201501507D0 (en) Composite materials
EP3225652A4 (en) Prepreg
GB201505964D0 (en) Composite membrane
GB201513213D0 (en) Composite structure
PL3374180T3 (pl) Kompozyt przyczepny
SG11201703878SA (en) Bioresorbable-magnesium composite
GB201510648D0 (en) Composite membranes
PT3359713T (pt) Fibra compósita
GB201509386D0 (en) Vacuum pump
PL3377563T3 (pl) Hybrydowy kompozyt fluoropolimerowy
GB201417781D0 (en) Composite component
GB2526292B (en) Vacuum system
GB201402264D0 (en) Composite
GB201613026D0 (en) A composite component
GB2541881B (en) Composite member
GB201513804D0 (en) Vacuum Pump
GB201416051D0 (en) Composite Component Manufacture
GB201502276D0 (en) Vacuum pump system