SG11201704775QA - Polymer composite vacuum components - Google Patents

Polymer composite vacuum components

Info

Publication number
SG11201704775QA
SG11201704775QA SG11201704775QA SG11201704775QA SG11201704775QA SG 11201704775Q A SG11201704775Q A SG 11201704775QA SG 11201704775Q A SG11201704775Q A SG 11201704775QA SG 11201704775Q A SG11201704775Q A SG 11201704775QA SG 11201704775Q A SG11201704775Q A SG 11201704775QA
Authority
SG
Singapore
Prior art keywords
polymer composite
composite vacuum
vacuum components
components
polymer
Prior art date
Application number
SG11201704775QA
Inventor
Brandon J Kelly
Clinton L Percy
Scott C Heinbuch
Gerardo A Brucker
Timothy C Swinney
Timothy R Piwonka-Corle
Original Assignee
Mks Instr Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mks Instr Inc filed Critical Mks Instr Inc
Publication of SG11201704775QA publication Critical patent/SG11201704775QA/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G01L21/34—Vacuum gauges by making use of ionisation effects using electric discharge tubes with cold cathodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/14—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
    • B29C45/14065—Positioning or centering articles in the mould
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0084—Electrical connection means to the outside of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2023/00—Use of polyalkenes or derivatives thereof as moulding material
    • B29K2023/10—Polymers of propylene
    • B29K2023/12—PP, i.e. polypropylene
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2069/00—Use of PC, i.e. polycarbonates or derivatives thereof, as moulding material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2071/00—Use of polyethers, e.g. PEEK, i.e. polyether-etherketone or PEK, i.e. polyetherketone or derivatives thereof, as moulding material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2031/00—Other particular articles
    • B29L2031/752—Measuring equipment

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
SG11201704775QA 2015-01-15 2016-01-13 Polymer composite vacuum components SG11201704775QA (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201562103968P 2015-01-15 2015-01-15
US201562191140P 2015-07-10 2015-07-10
PCT/US2016/013219 WO2016115232A2 (en) 2015-01-15 2016-01-13 Polymer composite vacuum components

Publications (1)

Publication Number Publication Date
SG11201704775QA true SG11201704775QA (en) 2017-07-28

Family

ID=55236938

Family Applications (2)

Application Number Title Priority Date Filing Date
SG11201704775QA SG11201704775QA (en) 2015-01-15 2016-01-13 Polymer composite vacuum components
SG10202105319QA SG10202105319QA (en) 2015-01-15 2016-01-13 Polymer composite vacuum components

Family Applications After (1)

Application Number Title Priority Date Filing Date
SG10202105319QA SG10202105319QA (en) 2015-01-15 2016-01-13 Polymer composite vacuum components

Country Status (9)

Country Link
US (3) US10359332B2 (en)
EP (2) EP3227654B1 (en)
JP (1) JP6670839B2 (en)
KR (1) KR102254199B1 (en)
CN (2) CN111220321B (en)
DK (1) DK3227654T3 (en)
SG (2) SG11201704775QA (en)
TW (3) TWI795918B (en)
WO (1) WO2016115232A2 (en)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8062864B2 (en) * 2007-05-21 2011-11-22 Alderbio Holdings Llc Nucleic acids encoding antibodies to IL-6, and recombinant production of anti-IL-6 antibodies
TWI795918B (en) 2015-01-15 2023-03-11 美商Ｍｋｓ儀器公司 Method of making a gauge
KR102414085B1 (en) 2016-05-02 2022-06-27 엠케이에스 인스트루먼츠, 인코포레이티드 Cold Cathode Ionization Vacuum Gauge With Multiple Cathodes
JP6990251B2 (en) * 2016-12-13 2022-01-12 エム ケー エス インストルメンツ インコーポレーテッド Anode electrode shield used for reverse magnetron cold cathode ionization vacuum gauge
US10049864B2 (en) * 2017-01-12 2018-08-14 Upendra D Desai Metallic glow discharge diode and triode devices with large cold cathode as efficient charger generator—a power cell
EP3419042A1 (en) * 2017-06-23 2018-12-26 Koninklijke Philips N.V. X-ray tube insulator
NL2020235B1 (en) * 2018-01-05 2019-07-12 Hennyz B V Vacuum transfer assembly
CN108766860B (en) * 2018-06-29 2023-08-04 安徽华东光电技术研究所有限公司 Cathode of long-life cold cathode magnetron
JP7218217B2 (en) * 2019-03-11 2023-02-06 住友重機械工業株式会社 Feed-through structure and cryogenic cooling system
US11145966B2 (en) * 2019-08-28 2021-10-12 Pctel, Inc. Over-molded thin film antenna device
KR20230130091A (en) * 2021-01-12 2023-09-11 마이크로 모우션, 인코포레이티드 Electrical junction with improved feedthrough elements
JP7096628B1 (en) * 2022-03-22 2022-07-06 バキュームプロダクツ株式会社 Septal pressure gauge and compound pressure gauge
CH719946A2 (en) * 2022-08-08 2024-02-15 Inficon ag Chamber for ionization vacuum meters.
WO2024103047A1 (en) * 2022-11-11 2024-05-16 Illinois Tool Works Inc. Pressure transducers having improved resistance to temperature error

Family Cites Families (62)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2605445A (en) * 1947-05-08 1952-07-29 Herbert J Reich Magnetron
JPS5233901Y2 (en) * 1972-01-20 1977-08-02
US3769537A (en) 1972-09-14 1973-10-30 Hughes Aircraft Co Baffle for perforated electrode in a crossed-field switch device
US4013913A (en) * 1976-01-19 1977-03-22 Hnu Systems Inc. Ion detection electrode arrangement
US4325005A (en) * 1979-07-16 1982-04-13 Emil A Ab Ion accelerator and a method for increasing its efficiency
US4295117A (en) * 1980-09-11 1981-10-13 General Motors Corporation Pressure sensor assembly
US5422573A (en) * 1990-04-11 1995-06-06 Granville-Phillips Company Ionization gauge and method of using and calibrating same
US5157333A (en) * 1991-03-12 1992-10-20 Mks Instruments, Inc. Discharge initiating means for cold cathode discharge ionization gauge
GB9111747D0 (en) 1991-05-31 1991-07-24 Boc Group Plc Improvements relating to vacuum pumps
GB2256310A (en) 1991-05-31 1992-12-02 Boc Group Plc A vacuum gauge
FR2679653B1 (en) * 1991-07-23 1993-09-24 Commissariat Energie Atomique IONIZATION VACUMETER.
US5502354A (en) 1992-07-31 1996-03-26 Correa; Paulo N. Direct current energized pulse generator utilizing autogenous cyclical pulsed abnormal glow discharges
DE69411620T2 (en) 1993-04-28 1999-02-04 Fredericks Co Ionization converter with opposing magnets
DE29708673U1 (en) * 1997-05-15 1997-08-21 Filtertek Bv Pressure transmission device
JP3658235B2 (en) 1999-03-30 2005-06-08 キヤノン株式会社 Electron gun, drawing apparatus using electron gun, and electron beam application apparatus
FR2792493B1 (en) 1999-04-14 2001-05-25 Commissariat Energie Atomique CARTRIDGE FOR PLASMA TORCH AND EQUIPPED PLASMA TORCH
FR2792772B1 (en) * 1999-04-20 2001-05-18 Commissariat Energie Atomique IONIZATION CHAMBER, MEASUREMENT CHAIN OF ACTIVITY OF A BETA RADIATION EMITTING GAS AND METHOD OF IMPLEMENTING SAME
US6251471B1 (en) 1999-05-12 2001-06-26 University Of New Hampshire Surface trace electrical feedthru
US7838850B2 (en) * 1999-12-13 2010-11-23 Semequip, Inc. External cathode ion source
JP4493139B2 (en) * 2000-02-02 2010-06-30 キヤノンアネルバ株式会社 Ionization gauge
GB2362806B (en) * 2000-05-31 2002-04-24 Better Electrical Products Fty A method of securing articles and an electric kettle made by such a method
US6451142B1 (en) * 2000-06-22 2002-09-17 Agilent Technologies, Inc Mounting process for outgassing-sensitive optics
KR100383441B1 (en) * 2000-09-26 2003-05-12 김도윤 The Vaccum Gauge Using Field-Ionization of Carbon-Nano-Tube
US20040128016A1 (en) * 2001-03-22 2004-07-01 Stewart David H. Method for manufacturing a near net-shape mold
US6566884B2 (en) * 2001-09-13 2003-05-20 Duniway Stockroom Corporation Ionization vacuum pressure gauge
US6993973B2 (en) 2003-05-16 2006-02-07 Mks Instruments, Inc. Contaminant deposition control baffle for a capacitive pressure transducer
CN100555552C (en) * 2004-07-30 2009-10-28 清华大学 Vacuum gauge
US20060157891A1 (en) * 2005-01-14 2006-07-20 Tyco Electronics Corporation Insert injection-compression molding of polymeric PTC electrical devices
EP1698878A1 (en) * 2005-03-04 2006-09-06 Inficon GmbH Electrode configuration and pressure measuring apparatus
JP5127042B2 (en) * 2005-05-09 2013-01-23 株式会社アンペール Ionization gauge
US8160707B2 (en) * 2006-01-30 2012-04-17 Medtronic, Inc. Method and apparatus for minimizing EMI coupling in a feedthrough array having at least one unfiltered feedthrough
CN100427912C (en) * 2006-03-31 2008-10-22 核工业西南物理研究院 Fast response ionization vacuum gauge with high anti-jamming capacity
US7928366B2 (en) * 2006-10-06 2011-04-19 Lam Research Corporation Methods of and apparatus for accessing a process chamber using a dual zone gas injector with improved optical access
JP5183036B2 (en) * 2006-06-23 2013-04-17 株式会社ジェイテクト Torque detection device and method for manufacturing yoke assembly
US7456634B2 (en) * 2006-10-26 2008-11-25 Brooks Automation, Inc. Method and apparatus for shielding feedthrough pin insulators in an ionization gauge operating in harsh environments
CN104614932A (en) * 2006-10-30 2015-05-13 应用材料公司 Endpoint detection for photomask etching
FR2910966B1 (en) * 2006-12-28 2009-04-17 Commissariat Energie Atomique COUPLED MEASURING DEVICE FOR GLOBAL AND CONTINUOUS TRACKING OF TARESTS PRESENT IN A GASEOUS FLOW
US7768267B2 (en) 2007-07-11 2010-08-03 Brooks Automation, Inc. Ionization gauge with a cold electron source
JP4518128B2 (en) * 2007-10-01 2010-08-04 株式会社デンソー Electronic circuit device manufacturing method and electronic circuit device
GB0722063D0 (en) 2007-11-12 2007-12-19 Edwards Ltd Ionisation vacuum gauges and gauge heads
KR101541273B1 (en) 2007-12-19 2015-08-03 엠케이에스 인스트루먼츠, 인코포레이티드 Ionization gauge having electron multiplier cold emission source
CN101470039A (en) * 2007-12-28 2009-07-01 中国航天科技集团公司第五研究院第五一〇研究所 Hole entrance sphere taper type converter gauge
EP2252869B1 (en) 2008-02-21 2018-12-12 MKS Instruments, Inc. Ionization gauge with operational parameters and geometry designed for high pressure operation
DK2326931T3 (en) 2008-09-19 2019-07-22 Mks Instr Inc Ionization meter with emission current and bias potential control
US7906971B2 (en) * 2008-10-14 2011-03-15 Itt Manufacturing Enterprises, Inc. Molecular shield for an ionizaton vacuum gauge
KR20100055262A (en) * 2008-11-17 2010-05-26 현대자동차주식회사 High capacity ptc heater
JP2010151623A (en) 2008-12-25 2010-07-08 Canon Anelva Corp Cold cathode ionization gauge and discharge start assist electrode plate for use in the same
JP5669411B2 (en) 2009-04-09 2015-02-12 キヤノンアネルバ株式会社 Cold cathode ionization vacuum gauge, vacuum processing apparatus equipped with the same, and discharge start auxiliary electrode
WO2010129690A2 (en) 2009-05-06 2010-11-11 Brook Automation, Inc. Electrostatic ion trap
JP5632644B2 (en) * 2009-05-28 2014-11-26 キヤノンアネルバ株式会社 Cold cathode ionization vacuum gauge, discharge starting auxiliary electrode and vacuum processing apparatus
JP2011133386A (en) 2009-12-25 2011-07-07 Dia Shinku Kk Cold cathode ionization vacuum gauge
CN201837495U (en) 2010-03-17 2011-05-18 杭州吉星仪表机械有限公司 Diaphragm type plastic case pressure gauge
US8453493B2 (en) * 2010-11-02 2013-06-04 Agilent Technologies, Inc. Trace gas sensing apparatus and methods for leak detection
CN202033149U (en) * 2011-04-27 2011-11-09 陕西三令激光电气有限责任公司 High-vacuum precise gas pressure sensor
JP5764433B2 (en) * 2011-08-26 2015-08-19 株式会社日立ハイテクノロジーズ Mass spectrometer and mass spectrometry method
CH705474A1 (en) 2011-09-08 2013-03-15 Inficon Gmbh Ionization - vacuum measuring cell.
EP2800960B1 (en) 2012-02-08 2018-10-31 MKS Instruments, Inc. Ionization gauge for high pressure operation
CH707685A1 (en) * 2013-03-06 2014-09-15 Inficon Gmbh Ionization vacuum measuring cell with shielding.
JP6131113B2 (en) 2013-06-13 2017-05-17 キヤノンアネルバ株式会社 Cold cathode ionization vacuum gauge and inner wall protection member
WO2015048664A1 (en) 2013-09-30 2015-04-02 Mks Instruments, Inc. Cold cathode ionization vacuum gauge
US9588004B2 (en) 2014-11-07 2017-03-07 Mks Instruments, Inc. Long lifetime cold cathode ionization vacuum gauge design
TWI795918B (en) 2015-01-15 2023-03-11 美商Ｍｋｓ儀器公司 Method of making a gauge

Also Published As

Publication number Publication date
JP2018502305A (en) 2018-01-25
US20210096035A1 (en) 2021-04-01
CN111220321A (en) 2020-06-02
US11366036B2 (en) 2022-06-21
DK3227654T3 (en) 2022-05-30
JP6670839B2 (en) 2020-03-25
TW202025222A (en) 2020-07-01
WO2016115232A2 (en) 2016-07-21
TWI739300B (en) 2021-09-11
SG10202105319QA (en) 2021-07-29
TW202201473A (en) 2022-01-01
EP4033216A1 (en) 2022-07-27
US20160209288A1 (en) 2016-07-21
CN107110730A (en) 2017-08-29
CN111220321B (en) 2021-11-23
EP3227654B1 (en) 2022-04-20
KR20170102553A (en) 2017-09-11
TW201634219A (en) 2016-10-01
US10876917B2 (en) 2020-12-29
KR102254199B1 (en) 2021-05-20
US10359332B2 (en) 2019-07-23
EP3227654A2 (en) 2017-10-11
WO2016115232A3 (en) 2016-12-08
US20190271607A1 (en) 2019-09-05
TWI795918B (en) 2023-03-11

Similar Documents

Publication Publication Date Title
DK3227654T3 (en) Polymer composite vacuum components
GB2533153B (en) Vacuum system
EP3202572A4 (en) Resin composite
GB201418581D0 (en) Composite component
EP3198125A4 (en) Composite molded rotary component
GB201413136D0 (en) Conductive polymer composite
GB201501507D0 (en) Composite materials
PL3195303T3 (en) Composite reed
EP3225652A4 (en) Prepreg
GB201505964D0 (en) Composite membrane
GB201513213D0 (en) Composite structure
PL3374180T3 (en) Adhesive composite
SG11201703878SA (en) Bioresorbable-magnesium composite
PT3359713T (en) Composite fibre
GB201510648D0 (en) Composite membranes
GB201509386D0 (en) Vacuum pump
PL3377563T3 (en) Fluoropolymer hybrid composite
GB201417781D0 (en) Composite component
GB2526292B (en) Vacuum system
GB201613026D0 (en) A composite component
GB2541881B (en) Composite member
GB201513804D0 (en) Vacuum Pump
GB201416051D0 (en) Composite Component Manufacture
GB201502276D0 (en) Vacuum pump system
GB201402264D0 (en) Composite