CN101470039A - Hole entrance sphere taper type converter gauge - Google Patents
Hole entrance sphere taper type converter gauge Download PDFInfo
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- CN101470039A CN101470039A CNA2007103046045A CN200710304604A CN101470039A CN 101470039 A CN101470039 A CN 101470039A CN A2007103046045 A CNA2007103046045 A CN A2007103046045A CN 200710304604 A CN200710304604 A CN 200710304604A CN 101470039 A CN101470039 A CN 101470039A
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Abstract
The invention relates to a spherical cone type converter gauge having a hole inlet, belonging to the test technical field, which comprises a front air hole, a front air chamber, three support bolts, a rectangular cone, an anode, a polytetrafluoroethylene tube, a high voltage interface, an insulating ceramic, a magnet, a cathode (shell), a back air hole and a detection chamber, wherein the front air chamber adopts a hollow semispherical chamber whose top is provided with the front air hole; the semispherical chamber opposite to the front air hole is mounted with the rectangle cone as a flow choking reflecting plate; the rectangle cone and the front air chamber are connected by the three support bolts; the anode, the polytetrafluoroethylene tube, the high voltage interface, the insulating ceramic, the magnet and the cathode (shell) form a cold cathode ionization gauge; the detection chamber is connected integrally with the front air chamber. The spherical cone type converter gauge having a hole inlet has compact structure, small volume, low weight and fast response, and has good directionality, thus being applied for detecting atmospheric density on the operation orbits of spacecraft and detecting the leakage of large vacuum containers.
Description
Technical field
The present invention relates to a kind of hole entrance sphere taper type converter gauge, belong to field tests.
Background technology
Under isothermal or anisothermal situation,, make molecular flow become non-homogeneous state because the gas oriented molecule flows.In the non-homogeneous molecular flow of stable state was measured, converter gauge was a strong instrument.Converter gauge is to be converted to the instrument that the equilibrium state molecular flow is measured by the nonequilibrium state molecular flow that the balance cylinder will enter in the rule.In general, converter gauge comprises inlet, three parts in balance cylinder and sensing chamber.Inlet has aperture inlet, slender tube inlet and many tubules to enter the mouth three kinds.The balance cylinder has spherical and two kinds of cylindrical shapes.Sensing chamber separates with the balance cylinder or is identical, and ionization mechanism is equipped with in inside.Gas molecule enters the inlet back and reach equilibrium state in the balance cylinder, and equilibrium state gas enters sensing chamber, by measuring after the ionization of ionization mechanism.Conventional holes inlet type converter gauge is simple in structure, the response fast, for the rule of spherical balance cylinder, and the conversion good balance effect, but that weak point is a directivity is poor.Single tube collimation-type converter gauge good directionality, but weak point is a low-response.The response of multitube collimation-type converter gauge is fast, good directionality.
Document " vacuum measurement in the nonequilibrium state molecular flow environment, " vacuum and low temperature " the 2nd volume, the 1st phase of nineteen eighty-three, the 49th～59 page " has provided the change curve of conventional holes inlet type converter gauge sensitivity with respect to the incident angle theta.From curve as can be seen, the directivity of conventional holes inlet type converter gauge is poor, and the directivity angle is 60 °.
Document " many tubules collimation-type converter gauge, " vacuum science and technology " the 8th volume, the 5th phase in 1988, the 293rd～300 page " has been introduced a kind of converter gauge of measurement space nonequilibrium state molecular flow.These rule are made up of colimated light system, three parts of balanced system and ionization mechanism.Colimated light system is by the stainless-steel tube spot welding of 19 φ 2.5mm and be arranged in centrosymmetric regular polygon, pipe range 20mm, wall thickness 0.1mm.Balanced system comprises molybdenum shell, molecule barricade and tubule outlet.Ionization mechanism is made up of loop filament, electron collector, ion collector and screening electrode.With this many tubules collimation-type converter gauge measurement space oriented molecule stream, good directionality (the directivity angle is 16 °), response fast (responsive time constant is 0.04 second).
The directivity that converter gauge is measured oriented molecule stream is mainly determined by the geometry of converter gauge itself.Improve the directivity of conventional holes inlet type converter gauge, need structurally improve it.
Summary of the invention
The weak point of directivity difference when the objective of the invention is to overcome conventional holes inlet type converter gauge measurement space oriented molecule stream, a kind of hole entrance sphere taper type converter gauge is provided, during this rule measurement space oriented molecule stream, because there is the annular region between the awl end and the Internal Spherical Surface in hole entrance sphere taper type converter gauge, make it have good conversion counterbalance effect and directivity, the directivity angle of its directivity and best tube inlet type converter gauge is approximate.
The objective of the invention is to be achieved through the following technical solutions: a kind of hole entrance sphere taper type converter gauge, comprise preceding pore, preceding air chamber, carrying bolt, anode, polyfluortetraethylene pipe, high voltage interface, insulating ceramics, magnet, negative electrode (shell), posterior spiracle, right angle circular cone, sensing chamber, its characteristics are: preceding air chamber is a hollow hemisphere shape chamber, and there is a preceding pore on the top, chamber; Preceding pore over against semisphere indoor, a right angle circular cone is installed as the choked flow reflecting plate; The right angle circular cone is connected with three carrying bolts with preceding air chamber; Form the cold cathode type ionization gauge by anode, polyfluortetraethylene pipe, high voltage interface, insulating ceramics, magnet, negative electrode (shell), anode is installed in the inside of sensing chamber, and by insulating ceramics and sensing chamber's casing insulation, introduce high-voltage power supply by high voltage interface, magnet is installed on sensing chamber's shell, with the shell of sensing chamber as negative electrode; Sensing chamber and preceding air chamber are connected as a single entity.
The principle of such scheme is: the gas molecule or the particle of air chamber before entering by preceding pore, in preceding air chamber, become the stochastic equilibrium state through repeatedly colliding earlier, most of gas molecule or particle be the preceding air chamber of pore effusion in the past, small part of gas molecule or particle enter into sensing chamber from the annular region between conical baffled and the Internal Spherical Surface by posterior spiracle, measure mobile equilibrium pressure with the ionization gauge that is installed in the sensing chamber, the reading of these rule can be used to monitor the oriented molecule flow.
The present invention's beneficial effect compared with prior art is:
(1) hole entrance sphere taper type converter gauge good directionality (the directivity angle is 14 °), approximate with the directivity angle of the best tube inlet type converter gauge of directivity, overcome the deficiency of conventional holes inlet type converter gauge directivity difference.
(2) hole entrance sphere taper type converter gauge compact conformation, little, the light weight of volume are more suitable for the space and use.
(3) adopt hole entrance sphere taper type converter gauge measurement space oriented molecule stream, the response time short (responsive time constant is 0.005 second), can be used for the transient state molecular flow and measure.
Description of drawings
Fig. 1 is the structural representation of hole entrance sphere taper type converter gauge of the present invention;
Among the figure: 1-preceding pore, 2-preceding air chamber, 3-carrying bolt, 4-anode, 5-polyfluortetraethylene pipe, 6-high voltage interface, 7-insulating ceramics, 8-magnet, 9-negative electrode (shell), 10-posterior spiracle, 11-right angle circular cone, 12-sensing chamber.
Embodiment
Below in conjunction with drawings and Examples the present invention is further described.
As shown in Figure 1, hole entrance sphere taper type converter gauge of the present invention is made up of preceding pore 1, preceding air chamber 2, carrying bolt 3, anode 4, polyfluortetraethylene pipe 5, high voltage interface 6, insulating ceramics 7, magnet 8, negative electrode (shell) 9, posterior spiracle 10, right angle circular cone 11, sensing chamber 12.
Preceding air chamber 2 is hollow hemisphere shape chambers that a diameter is 48mm, makes with the special 316L stainless steel material of vacuum melting.There is the preceding pore 1 of a diameter 24mm on top, hollow hemisphere shape chamber, and its conductance can satisfy the needs of gas molecule loss rate.Preceding pore 1 over against semisphere indoor, be provided with the choked flow reflecting plate, the condition of setting up between gas molecule and the chamber interior walls fully collision and regulating.The choked flow reflecting plate is end 35mm, the right angle circular cone 11 of high 17.5mm.The carrying bolt 3 that three nominal diameters of right angle circular cone 11 and preceding air chamber 2 usefulness are 4mm is connected, and makes the relative position of right angle circular cone 11 to regulate, and the material of carrying bolt 3 is still selected the special 316L stainless steel of vacuum melting for use.Adopt the vacuum drying oven high-temperature baking that the sphere taper type balance cylinder is carried out degasification, reduce H in the material
2Content, the gas efficiency that makes material is less than 5 * 10
-10Pam
3/ (sm
2).
Form the cold cathode type ionization gauge by anode 4, polyfluortetraethylene pipe 5, high voltage interface 6, insulating ceramics 7, magnet 8, negative electrode (shell) 9.The cold cathode type ionization gauge requires the transformation of the way to form by the modern anti-magnet controlled Penning gauge of commercialization according to space flight.The cold cathode type ionization gauge is based on the Penning discharge principle, and is for the helical movement in quadrature E (electric field) and B (magnetic field) field by the electronics of discharge generation, and carries out the ionized many times collision with neutral gas molecule, and the positive ion of generation has no to move to negative electrode with hindering.Electron stream is made up of the secondary electron of ionized gas generation and the electronics of ion collision negative electrode generation, and has kept continuous discharge, and this two parts electronics all is directly proportional with gaseous tension, and measurement range is 10
-7Pa～10
-1Pa.This cold cathode type ionization gauge is at 4.2kV, and 17.5KGuss magnetic field is work down.
Claims (3)
1, a kind of hole entrance sphere taper type converter gauge, comprise preceding pore (1), preceding air chamber (2), carrying bolt (3), anode (4), polyfluortetraethylene pipe (5), high voltage interface (6), insulating ceramics (7), magnet (8), negative electrode (shell) (9), posterior spiracle (10), right angle circular cone (11), sensing chamber (12), it is characterized in that: preceding air chamber (2) is a hollow hemisphere shape chamber, and there is a preceding pore (1) on the top, chamber; Preceding pore (1) over against semisphere indoor, a right angle circular cone (11) is installed as the choked flow reflecting plate; Right angle circular cone (11) is connected with three carrying bolts (3) with preceding air chamber (2); Form the cold cathode type ionization gauge by anode (4), polyfluortetraethylene pipe (5), high voltage interface (6), insulating ceramics (7), magnet (8), negative electrode (shell) (9), anode (4) is installed in the inside of sensing chamber (12), and by insulating ceramics (7) and sensing chamber (12) casing insulation, introduce high-voltage power supply by high voltage interface (6), magnet (8) is installed on sensing chamber (12) shell, with the shell of sensing chamber (12) as negative electrode (9); Sensing chamber (12) and preceding air chamber (2) are connected as a single entity.
2, a kind of hole entrance sphere taper type converter gauge according to claim 1, the conductance of described inlet aperture must be greater than 200 times of described cold cathode type ionization gauge pumping speed.
3, a kind of hole entrance sphere taper type converter gauge according to claim 1, the material of described preceding air chamber, right angle circular cone, carrying bolt all adopts the special 316L stainless steel of vacuum melting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007103046045A CN101470039A (en) | 2007-12-28 | 2007-12-28 | Hole entrance sphere taper type converter gauge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007103046045A CN101470039A (en) | 2007-12-28 | 2007-12-28 | Hole entrance sphere taper type converter gauge |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101470039A true CN101470039A (en) | 2009-07-01 |
Family
ID=40827718
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2007103046045A Pending CN101470039A (en) | 2007-12-28 | 2007-12-28 | Hole entrance sphere taper type converter gauge |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101470039A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111220321A (en) * | 2015-01-15 | 2020-06-02 | 万机仪器公司 | Polymer composite vacuum component |
| CN114354058A (en) * | 2021-12-06 | 2022-04-15 | 兰州空间技术物理研究所 | Gauge tube of wide-range ionization vacuum gauge |
-
2007
- 2007-12-28 CN CNA2007103046045A patent/CN101470039A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111220321A (en) * | 2015-01-15 | 2020-06-02 | 万机仪器公司 | Polymer composite vacuum component |
| US11366036B2 (en) | 2015-01-15 | 2022-06-21 | Mks Instruments, Inc. | Polymer composite vacuum components |
| CN114354058A (en) * | 2021-12-06 | 2022-04-15 | 兰州空间技术物理研究所 | Gauge tube of wide-range ionization vacuum gauge |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Open date: 20090701 |