DK3124944T3 - Piezoelektrisk tryksensor - Google Patents
Piezoelektrisk tryksensor Download PDFInfo
- Publication number
- DK3124944T3 DK3124944T3 DK16178285.9T DK16178285T DK3124944T3 DK 3124944 T3 DK3124944 T3 DK 3124944T3 DK 16178285 T DK16178285 T DK 16178285T DK 3124944 T3 DK3124944 T3 DK 3124944T3
- Authority
- DK
- Denmark
- Prior art keywords
- sensor
- piezoelectric
- charge
- pressure sensor
- electrical insulating
- Prior art date
Links
- 239000000463 material Substances 0.000 claims description 76
- 239000012528 membrane Substances 0.000 claims description 46
- 230000010287 polarization Effects 0.000 claims description 13
- 239000000919 ceramic Substances 0.000 claims description 12
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 4
- 239000010936 titanium Substances 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
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- 229910000640 Fe alloy Inorganic materials 0.000 description 13
- 229910000531 Co alloy Inorganic materials 0.000 description 11
- 229910000990 Ni alloy Inorganic materials 0.000 description 11
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- 150000002739 metals Chemical class 0.000 description 11
- 238000005304 joining Methods 0.000 description 9
- 238000002788 crimping Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
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- 239000012080 ambient air Substances 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
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- 238000012544 monitoring process Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
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- 239000000470 constituent Substances 0.000 description 1
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- 239000012777 electrically insulating material Substances 0.000 description 1
- 239000012799 electrically-conductive coating Substances 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
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- 229910000154 gallium phosphate Inorganic materials 0.000 description 1
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- 229940070527 tourmaline Drugs 0.000 description 1
- 230000002463 transducing effect Effects 0.000 description 1
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0061—Electrical connection means
- G01L19/0084—Electrical connection means to the outside of the housing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
- G01L23/22—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines
- G01L23/221—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines for detecting or indicating knocks in internal combustion engines
- G01L23/222—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines for detecting or indicating knocks in internal combustion engines using piezoelectric devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
- G01D11/24—Housings ; Casings for instruments
- G01D11/245—Housings for sensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
- G01L19/0672—Leakage or rupture protection or detection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
- G01L23/08—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically
- G01L23/10—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically by pressure-sensitive members of the piezoelectric type
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
- G01L23/22—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines
- G01L23/221—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines for detecting or indicating knocks in internal combustion engines
- G01L23/225—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines for detecting or indicating knocks in internal combustion engines circuit arrangements therefor
Claims (13)
1. Piezoelektrisk tryksensor (1) forsynet med en sensorhusanordning (20) i en membran (21) , en piezoelektrisk sensor (22), en elektrodeanordning (23) og et forspændingslegeme (24.2); hvilken membran (21) opfanger et trykforløb; hvilket opfanget trykforløb genererer polariseringsladninger på den piezoelektriske sensor (22); hvor elektrodeanordningen (23) detekterer polariseringsladningerne; hvilken elektrodeanordning (23) omfatter en ladningsaftagning (23.1) og en ladningsudgang (23.2), hvilken ladningsaftagning (23.1) er elektrisk og mekanisk forbundet med ladningsudgangen (23.2); hvor ladningsudgangen (23.2) er elektrisk isoleret fra forspændingslegemet (24.2) af en tredje spalte; og hvor ladningsudgangen (23.2) er mekanisk forbundet med forspændingslegemet (24.2) på en side af forspændingslegemet (24.2), der vender væk fra membranen (21), med en elektrisk gennemføringsanordning (27) og tryktæt forsegler den tredje spalte fra et miljø, kendetegnet ved, at den elektriske gennemføringsanordning (27) omfatter et første adapterelement (27.1), et andet elektrisk isoleringslegeme (27.2) og et andet adapterelement (27.3); ved, at det første adapterelement (27.1) er forbundet med forspændingslegemet (24.2) ved materialebinding; ved, at det andet adapterelement (27.3) er elektrisk og mekanisk forbundet med ladningsudgang (23.2); ved, at det andet elektriske isoleringslegeme (27.2) er forbundet med det andet adapterelement (27.3) ved materialebinding; og ved, at det andet elektriske isoleringslegeme (27.2) isolerer ladningsudgang (23.2) og forspændingslegeme (24.2) elektrisk fra hinanden.
2. Piezoelektrisk tryksensor (1) ifølge krav 1, kendetegnet ved, at ladningsaftagningen (23.1) er dannet i ét med ladningsudgangen (23.2) eller er forbundet dermed ved materialebinding.
3. Piezoelektrisk tryksensor (1) ifølge et af krav 1 eller 2, kendetegnet ved, at ladningsaftagningen (23.1) er anbragt på en side af den piezoelektriske sensor (22), der vender væk fra membranen (21); et første elektrisk isoleringslegeme (25) er anbragt på en side af ladningsaftagningen (23.1), der vender væk fra membranen (21); den piezoelektriske sensor (22) , ladningsaftagning (23.1) og det første elektriske isoleringslegeme (25) er mekanisk forspændt mellem forspændingslegemet (24.2) og et forspændingshylster (24.1); og ved, at forspændingshylsteret (24.1) er adskilt af en anden spalte fra den piezoelektriske sensor (22), ladningsaftagningen (23.1) og det første elektriske isoleringslegeme (25).
4. Piezoelektrisk tryksensor (1) ifølge krav 3, kendetegnet ved, at ladningsudgangen (23.2) strækker sig centralt gennem det første elektriske isoleringslegeme (25) og forspændingslegemet (24.2) og er adskilt af den tredje spalte fra det første elektriske isoleringslegeme (25) og forspændingslegemet (24.2).
5. Piezoelektrisk tryksensor (1) ifølge et af krav 3 til 4, kendetegnet ved, at et kompenseringselement (26) er placeret mellem forspændingshylsteret (24.1) og den piezoelektriske sensor (22), eller mellem den piezoelektriske sensor (22) og ladningsaftagningen (23.1), eller mellem ladningsaftagningen (23.1) og det første elektriske isoleringslegeme (25), eller mellem det første elektriske isoleringslegeme (25) og forspændingslegemet (24.2); og ved, at forspændingshylsteret (24.1) er adskilt fra den piezoelektriske sensor (22), ladningsaftagningen (23.1), det første elektriske isoleringslegeme (25) og kompenseringselementet (26) af en anden spalte.
6. Piezoelektrisk tryksensor (1) ifølge et af krav 1 til 5, kendetegnet ved, at sensorhusanordningen (20) omfatter et sensorhus (20.1) og et forstærkningshus (20.2); ved, at sensorhuset (20.1) og forstærkningshus (20.2) er forbundet med hinanden ved materialebinding; og ved, at forspændingslegemet (24.2) er forbundet med forstærkningshuset (20.2) ved materialebinding.
7. Piezoelektrisk tryksensor (1) ifølge krav 1, kendetegnet ved, at en forskel i koefficienter af lineær termisk ekspansion af en parring af det andet adapterelement (27.3) med det andet elektriske isoleringslegeme (27.2) er mindre end 5 ppm.
8. Piezoelektrisk tryksensor (1) ifølge krav 7, kendetegnet ved, at det andet adapterelement (27.3) er fremstillet af en stållegering med materialenummer 1.3981 eller 1.3982; og det andet elektriske isoleringslegeme (27.2) består af AbCri-keramik.
9. Piezoelektrisk tryksensor (1) ifølge krav 1, kendetegnet ved, at det første adapterelement (27.1) er forbundet med det andet elektriske isoleringslegeme (27.2) ved materialebinding.
10. Piezoelektrisk tryksensor (1) ifølge krav 1, kendetegnet ved, at en forskel i koefficienter af lineær termisk ekspansion af en parring af det første adapterelement (27.1) med det andet elektriske isoleringslegeme (27.2) er mindre end 5 ppm.
11. Piezoelektrisk tryksensor (1) ifølge et af krav 9 eller 10, kendetegnet ved, at det første adapterelement (27.1) er fremstillet af titan; og det andet elektriske isoleringslegeme (27.2) består af AbCri-keramik.
12. Piezoelektrisk tryksensor (1) ifølge krav 1, kendetegnet ved, at en forskel i koefficienter af lineær termisk ekspansion af en parring af første adapterelement (27.1) med forspændingslegemet (24.2) er mindre end 10 ppm.
13. Piezoelektrisk tryksensor (1) ifølge krav 12, kendetegnet ved, at det første adapterelement (27.1) er fremstillet af titan; og forspændingslegemet (24.2) består af en stållegering med materialenummer 1.4542.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP15179392 | 2015-07-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DK3124944T3 true DK3124944T3 (da) | 2019-04-23 |
Family
ID=53773326
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DK16178285.9T DK3124944T3 (da) | 2015-07-31 | 2016-07-07 | Piezoelektrisk tryksensor |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US10101227B2 (da) |
| EP (1) | EP3124944B1 (da) |
| JP (1) | JP6778538B2 (da) |
| KR (1) | KR102521006B1 (da) |
| CN (1) | CN106404278B (da) |
| DK (1) | DK3124944T3 (da) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AT518650B1 (de) * | 2016-06-07 | 2017-12-15 | Piezocryst Advanced Sensorics | Piezoelektrischer drucksensor zum messen hoher drücke |
| DE112018005938T5 (de) * | 2017-11-21 | 2020-07-30 | Ngk Spark Plug Co., Ltd. | Drucksensor |
| DE102018114300A1 (de) | 2018-06-14 | 2019-12-19 | Endress+Hauser SE+Co. KG | Druckmesseinrichtung und Verfahren zu deren Herstellung |
| GB2581192A (en) * | 2019-02-08 | 2020-08-12 | Future Tech Sensors Ltd | Sensor assemblies |
| JP2024000961A (ja) * | 2022-06-21 | 2024-01-09 | キストラー ホールディング アクチエンゲゼルシャフト | 水素を含有する媒質内で使用するための圧力トランスデューサおよびそのような圧力トランスデューサの製造方法 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3158763A (en) * | 1961-01-02 | 1964-11-24 | List Hans | Piezoelectric gauge |
| CH394637A (de) | 1963-04-05 | 1965-06-30 | Kistler Instrumente Ag | Verfahren zur Herstellung eines piezoelektrischen Messwandlers |
| US3364368A (en) | 1963-04-05 | 1968-01-16 | Messrs Kistler Instr A G | Piezo-electric transducer |
| US3461327A (en) * | 1965-12-09 | 1969-08-12 | List Hans | Piezoelectric pressure transducer |
| AT269514B (de) * | 1966-07-12 | 1969-03-25 | Piezoelektrischer Meßwandler | |
| AT283010B (de) * | 1967-02-09 | 1970-07-27 | List H | Piezoelektrischer Meßwandler |
| AT276810B (de) * | 1967-06-14 | 1969-12-10 | List Hans | Piezoelektrischer Meßwandler |
| GB2022261A (en) * | 1978-04-28 | 1979-12-12 | Atomic Energy Authority Uk | A piezo-electric pressure transducer |
| AT384676B (de) * | 1983-07-07 | 1987-12-28 | Avl Verbrennungskraft Messtech | Messwertaufnehmer zur messung heisser medien und verfahren zur montage eines als druckaufnehmerausgebildeten messwertaufnehmers |
| AT394112B (de) * | 1989-03-30 | 1992-02-10 | Avl Verbrennungskraft Messtech | Druckaufnehmer |
| JP2004264037A (ja) * | 2003-01-28 | 2004-09-24 | Cimeo Precision Co Ltd | 圧力センサ |
| AT505015B1 (de) * | 2007-07-27 | 2008-10-15 | Piezocryst Advanced Sensorics | Drucksensor |
| US9222424B2 (en) * | 2012-03-16 | 2015-12-29 | Citizen Finedevice Co., Ltd. | Internal combustion engine fitted with combustion pressure detection device |
| WO2013147260A1 (ja) * | 2012-03-29 | 2013-10-03 | シチズンファインテックミヨタ株式会社 | 圧力検出装置、圧力検出装置付き内燃機関 |
| JP5975793B2 (ja) * | 2012-08-29 | 2016-08-23 | シチズンファインデバイス株式会社 | 燃焼圧センサ |
| JP6318605B2 (ja) * | 2013-12-20 | 2018-05-09 | 株式会社デンソー | 溶接部を有する継手構造の組付構造 |
-
2016
- 2016-07-07 DK DK16178285.9T patent/DK3124944T3/da active
- 2016-07-07 EP EP16178285.9A patent/EP3124944B1/de active Active
- 2016-07-22 US US15/217,147 patent/US10101227B2/en active Active
- 2016-07-29 JP JP2016149760A patent/JP6778538B2/ja active Active
- 2016-07-30 KR KR1020160097630A patent/KR102521006B1/ko active IP Right Grant
- 2016-08-01 CN CN201610620057.0A patent/CN106404278B/zh active Active
Also Published As
| Publication number | Publication date |
|---|---|
| EP3124944B1 (de) | 2019-01-23 |
| JP6778538B2 (ja) | 2020-11-04 |
| EP3124944A1 (de) | 2017-02-01 |
| CN106404278A (zh) | 2017-02-15 |
| CN106404278B (zh) | 2020-06-19 |
| KR20170015253A (ko) | 2017-02-08 |
| US20170030787A1 (en) | 2017-02-02 |
| US10101227B2 (en) | 2018-10-16 |
| JP2017032558A (ja) | 2017-02-09 |
| KR102521006B1 (ko) | 2023-04-11 |
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