JP6782115B2 - 圧力センサ及び前記圧力センサを製造するプロセス - Google Patents
圧力センサ及び前記圧力センサを製造するプロセス Download PDFInfo
- Publication number
- JP6782115B2 JP6782115B2 JP2016149764A JP2016149764A JP6782115B2 JP 6782115 B2 JP6782115 B2 JP 6782115B2 JP 2016149764 A JP2016149764 A JP 2016149764A JP 2016149764 A JP2016149764 A JP 2016149764A JP 6782115 B2 JP6782115 B2 JP 6782115B2
- Authority
- JP
- Japan
- Prior art keywords
- pressure sensor
- circuit board
- evaluation unit
- sensor
- electric circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title description 13
- 230000008569 process Effects 0.000 title description 12
- 238000004519 manufacturing process Methods 0.000 title description 9
- 238000011156 evaluation Methods 0.000 claims description 100
- 230000003014 reinforcing effect Effects 0.000 claims description 84
- 230000009471 action Effects 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims 1
- 239000000463 material Substances 0.000 description 55
- 239000004020 conductor Substances 0.000 description 28
- 238000003466 welding Methods 0.000 description 28
- 230000008054 signal transmission Effects 0.000 description 19
- 238000005476 soldering Methods 0.000 description 17
- 238000005304 joining Methods 0.000 description 16
- 238000009792 diffusion process Methods 0.000 description 15
- 239000012528 membrane Substances 0.000 description 15
- 238000007731 hot pressing Methods 0.000 description 13
- 229910000990 Ni alloy Inorganic materials 0.000 description 10
- 229910000531 Co alloy Inorganic materials 0.000 description 9
- 239000000919 ceramic Substances 0.000 description 9
- 239000000615 nonconductor Substances 0.000 description 9
- 239000002184 metal Substances 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 8
- 229910000679 solder Inorganic materials 0.000 description 8
- 230000035882 stress Effects 0.000 description 8
- 239000004696 Poly ether ether ketone Substances 0.000 description 6
- 230000008878 coupling Effects 0.000 description 6
- 238000010168 coupling process Methods 0.000 description 6
- 238000005859 coupling reaction Methods 0.000 description 6
- 230000000877 morphologic effect Effects 0.000 description 6
- 229920002530 polyetherether ketone Polymers 0.000 description 6
- 229910000640 Fe alloy Inorganic materials 0.000 description 5
- 238000002788 crimping Methods 0.000 description 5
- 230000010287 polarization Effects 0.000 description 5
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 4
- -1 polytetrafluoroethylene Polymers 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 239000004642 Polyimide Substances 0.000 description 3
- 206010063493 Premature ageing Diseases 0.000 description 3
- 208000032038 Premature aging Diseases 0.000 description 3
- 238000005452 bending Methods 0.000 description 3
- 238000010292 electrical insulation Methods 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 3
- 229920001721 polyimide Polymers 0.000 description 3
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 3
- 239000004810 polytetrafluoroethylene Substances 0.000 description 3
- 239000011265 semifinished product Substances 0.000 description 3
- 229910001313 Cobalt-iron alloy Inorganic materials 0.000 description 2
- 229910001021 Ferroalloy Inorganic materials 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 2
- 230000000712 assembly Effects 0.000 description 2
- 238000000429 assembly Methods 0.000 description 2
- 239000011575 calcium Substances 0.000 description 2
- 238000002485 combustion reaction Methods 0.000 description 2
- 229920001577 copolymer Polymers 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 238000006116 polymerization reaction Methods 0.000 description 2
- 230000001012 protector Effects 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 235000014676 Phragmites communis Nutrition 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000012777 electrically insulating material Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000010943 off-gassing Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 230000002028 premature Effects 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052613 tourmaline Inorganic materials 0.000 description 1
- 229940070527 tourmaline Drugs 0.000 description 1
- 239000011032 tourmaline Substances 0.000 description 1
- 229920006163 vinyl copolymer Polymers 0.000 description 1
- 230000003313 weakening effect Effects 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
- G01L23/08—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically
- G01L23/10—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically by pressure-sensitive members of the piezoelectric type
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
- G01L23/22—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines
- G01L23/221—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines for detecting or indicating knocks in internal combustion engines
- G01L23/222—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines for detecting or indicating knocks in internal combustion engines using piezoelectric devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
- G01D11/24—Housings ; Casings for instruments
- G01D11/245—Housings for sensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/142—Multiple part housings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
- G01L23/22—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines
- G01L23/221—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines for detecting or indicating knocks in internal combustion engines
- G01L23/225—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines for detecting or indicating knocks in internal combustion engines circuit arrangements therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
- G01L23/26—Details or accessories
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/08—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of piezoelectric devices, i.e. electric circuits therefor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Measuring Fluid Pressure (AREA)
Description
AA’、BB’、CC’ 軸
AB 半径方向面
1 圧力センサ
2 センサ組立体
5 評価ユニット
20 センサ筐体組立体
20.1 封止コーン
20.2 センサ・フランジ
20.3 センサ筐体フレーム
21 膜
22 センサ
22.1、22.3 支持要素
22.2 圧電センサ要素
23 電極構成体
23.1 電荷ピックオフ
23.2 電荷出力部
25 電気絶縁体
26 補償要素
50 評価ユニット筐体
51 電気回路基板
51.1 高温度区域
51.2 通常温度区域
52.1、52.2 補強要素
52.3、52.3’ 係止要素
52.4 窓
52.5 湾曲ゾーン
52.6、52.6’、52.6” 領域
53 電気的接続要素
53.0 ソケットの形態のアダプタ
53.1 環状のアダプタ
53.2 補償要素
54 信号ケーブル・フランジ
55 信号ケーブル
Claims (17)
- 圧力センサ(1)であって、前記圧力センサ(1)は、
センサ組立体(2)と評価ユニット(5)とを備え、
前記センサ組立体(2)は、センサ(22)と電極構成体(23)とを備え、前記センサ(22)は、圧力プロファイルの作用の下で信号を生成し、
前記評価ユニット(5)は、前記電極構成体(23)から送信される前記信号を受信するために、前記電極構成体(23)に電気的に接続され、
前記評価ユニット(5)は、評価ユニット筐体(50)と、電気回路基板(51)と、補強要素(52.1、52.2)とを備え、前記補強要素(52.1、52.2)は、前記電気回路基板(51)と前記評価ユニット筐体(50)との間において、前記圧力センサ(1)の長手方向軸線(CC’)に垂直な半径方向面(AB)に配置され、
前記補強要素(52.1、52.2)は、長手方向軸線(CC’)に沿って細長くなっている中空の筒体の形態を有しており、
前記補強要素(52.1、52.2)は、前記半径方向面(AB)のいくつかの領域において、前記電気回路基板(51)の周りに配置され、
前記補強要素(52.1、52.2)は、線的又は面的な接触によって前記電気回路基板(51)を取り囲み、
前記評価ユニット(5)は、前記電気回路基板(51)に機械的に接続され、半径方向面(AB)内に起こる前記電気回路基板(51)の機械的な共鳴振動を減衰するようになっていることを特徴とする、圧力センサ(1)。 - 前記圧力センサ(1)は、圧電式圧力センサ(1)であり、前記センサ(22)は、圧電センサ(22)であり、前記圧電センサ(22)は、圧力プロファイルの作用の下で圧電電荷を生じ、前記電極構成体(23)は、前記圧電電荷を前記圧電センサ(22)から受け取り、前記受け取った圧電電荷を信号として前記評価ユニット(5)に送信することを特徴とする、請求項1に記載の圧力センサ(1)。
- 前記補強要素(52.1、52.2)は、前記半径方向面(AB)の特定の領域において、前記電気回路基板(51)の周りに配置され、前記補強要素(52.1、52.2)は、線的又は面的な接触によって前記電気回路基板(51)を取り囲むことを特徴とする、請求項1又は2のいずれか一項に記載の圧力センサ(1)。
- 前記補強要素(52.1、52.2)は、長手方向軸線(CC’)に沿った特定の領域において、前記電気回路基板(51)を取り囲むことを特徴とする、請求項1から3までのいずれか一項に記載の圧力センサ(1)。
- 前記補強要素(52.1、52.2)は、前記半径方向面(AB)において、前記電気回路基板(51)を完全に取り囲むことを特徴とする、請求項1から3までのいずれか一項に記載の圧力センサ(1)。
- 前記補強要素(52.1、52.2)は、前記評価ユニット筐体(50)に対する前記半径方向面(AB)内の運動の自由度について前記電気回路基板(51)を固定することを特徴とする、請求項1から5までのいずれか一項に記載の圧力センサ(1)。
- 前記補強要素(52.1、52.2)は、少なくとも2つの同一のシェル(52.1、52.2)からなり、前記シェル(52.1、52.2)は、前記電気回路基板(51)に機械的に接続され得、及び/又は互いに対して機械的に接続され得ることを特徴とする、請求項1から6までのいずれか一項に記載の圧力センサ(1)。
- 前記シェル(52.1、52.2)は、少なくとも1つの突出する係止要素(52.3、52.3’)を介して前記電気回路基板(51)に機械的に接続され得、前記シェル(52.1、52.2)の一方の前記係止要素(52.3、52.3’)は、前記シェル(52.1、52.2)の他方の対応する開口を通じて前記電気回路基板(51)に係合し、前記電気回路基板(51)は、前記シェル(52.1、52.2)の間において前記半径方向面(AB)に配置されることを特徴とする、請求項7に記載の圧力センサ(1)。
- 前記シェル(52.1、52.2)は、少なくとも1つの突出する係止要素(52.3、52.3’)を介して互いに対して機械的に接続され得、前記シェル(52.1、52.2)の一方の前記係止要素(52.3、52.3’)は、前記シェル(52.1、52.2)の他方の対応する開口に係合し、前記電気回路基板(51)は、前記シェル(52.1、52.2)の間において前記半径方向面(AB)に配置されることを特徴とする、請求項7に記載の圧力センサ(1)。
- 前記評価ユニット(5)は、評価ユニット筐体(50)を備え、前記評価ユニット筐体(50)は、特定の領域において前記補強要素(52.1、52.2)を前記電気回路基板(51)に対して押し付けることを特徴とする、請求項1から9までのいずれか一項に記載の圧力センサ(1)。
- 前記補強要素(52.1、52.2)は、長手方向においていくつかの領域(52.6、52.6’、52.6”)を備え、前記領域(52.6、52.6’、52.6”)のそれぞれは、長手方向に沿って30mmの長さを有することを特徴とする、請求項10に記載の圧力センサ(1)。
- 前記補強要素(52.1、52.2)は、長手方向においていくつかの領域(52.6、52.6’、52.6”)を備え、前記領域(52.6、52.6’、52.6”)のそれぞれは、長手方向に沿って60mmの長さを有することを特徴とする、請求項10に記載の圧力センサ(1)。
- 前記補強要素(52.1、52.2)は、長手方向においていくつかの領域(52.6、52.6’、52.6”)を備え、前記領域(52.6、52.6’、52.6”)のそれぞれは、長手方向に沿って90mmの長さを有することを特徴とする、請求項10に記載の圧力センサ(1)。
- 前記評価ユニット筐体(50)は、長手方向に沿って後方領域(52.6”)から前方領域(52.6)へと、前記補強要素(52.1、52.2)に摺動可能であり、前記補強要素(52.1、52.2)は、前記後方領域(52.6”)及び前記前方領域(52.6)において異なる外径を有することを特徴とする、請求項10に記載の圧力センサ(1)。
- 前記評価ユニット筐体(50)は、長手方向に沿って後方領域(52.6”)から中央領域(52.6’)へ、及び前記中央領域(52.6’)から前方領域(52.6)へと、前記補強要素(52.1、52.2)に摺動可能であり、前記補強要素(52.1、52.2)は、前記後方領域(52.6”)、前記中央領域(52.6’)及び前記前方領域(52.6)において異なる外径を有し、前記中央領域(52.6’)の外径は、前記評価ユニット筐体(50)の内径と比べて大きくなっているが、前記評価ユニット筐体50は、手動で前記補強要素(52.1、52.2)に摺動可能であることを特徴とする、請求項10に記載の圧力センサ(1)。
- 前記前方領域(52.6)の外径は、前記評価ユニット筐体(50)の内径と比べて大きくなっており、前記評価ユニット筐体(50)は、もはや手動で前記補強要素(52.1、52.2)に摺動できないことを特徴とする、請求項14又は15のいずれか一項に記載の圧力センサ(1)。
- 前記補強要素(52.1、52.2)は、前記電気回路基板(51)と、前記補強要素(52.1、52.2)と、及び/又は前記評価ユニット(5)の前記評価ユニット筐体(50)との間の線熱膨脹率の差を補償するために少なくとも1つの湾曲ゾーン(52.5)を備えることを特徴とする、請求項1から16までのいずれか一項に記載の圧力センサ(1)。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP15179379.1 | 2015-07-31 | ||
EP15179379 | 2015-07-31 | ||
EP16151559.8 | 2016-01-15 | ||
EP16151559 | 2016-01-15 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017032562A JP2017032562A (ja) | 2017-02-09 |
JP6782115B2 true JP6782115B2 (ja) | 2020-11-11 |
Family
ID=56292637
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016149764A Active JP6782115B2 (ja) | 2015-07-31 | 2016-07-29 | 圧力センサ及び前記圧力センサを製造するプロセス |
Country Status (6)
Country | Link |
---|---|
US (1) | US10378988B2 (ja) |
EP (1) | EP3124938B1 (ja) |
JP (1) | JP6782115B2 (ja) |
KR (1) | KR102521007B1 (ja) |
CN (1) | CN106404235B (ja) |
DK (1) | DK3124938T3 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6196960B2 (ja) * | 2014-11-20 | 2017-09-13 | 長野計器株式会社 | 圧力センサ |
FR3043460B1 (fr) * | 2015-11-05 | 2019-01-25 | Continental Automotive France | Embout anti-resonnance de cavitation et anti-suie pour capteur de pression d'un moteur a combustion interne |
EP3421961B1 (en) * | 2016-02-25 | 2022-07-27 | Citizen Finedevice Co., Ltd. | Pressure detection device and pressure detection system |
US11156511B2 (en) * | 2019-04-09 | 2021-10-26 | Honeywell International Inc. | Load cell |
CN115112275B (zh) * | 2022-06-23 | 2024-06-14 | 中国科学院力学研究所 | 一种可主动驱动变形的薄膜式柔性压力传感器 |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH394637A (de) | 1963-04-05 | 1965-06-30 | Kistler Instrumente Ag | Verfahren zur Herstellung eines piezoelektrischen Messwandlers |
US3364368A (en) | 1963-04-05 | 1968-01-16 | Messrs Kistler Instr A G | Piezo-electric transducer |
GB2022261A (en) | 1978-04-28 | 1979-12-12 | Atomic Energy Authority Uk | A piezo-electric pressure transducer |
AT384676B (de) | 1983-07-07 | 1987-12-28 | Avl Verbrennungskraft Messtech | Messwertaufnehmer zur messung heisser medien und verfahren zur montage eines als druckaufnehmerausgebildeten messwertaufnehmers |
ATE34613T1 (de) | 1983-11-10 | 1988-06-15 | Kristal Instr Ag | Wandlerelement, verfahren zu seiner herstellung sowie verwendung fuer einen druckaufnehmer. |
US4645965A (en) * | 1984-10-26 | 1987-02-24 | Texas Instruments Incorporated | Cylinder pressure transmitter for an internal combustion engine |
US4701726A (en) * | 1985-12-03 | 1987-10-20 | Northeast Filter Co., Inc. | Trap filter assembly |
US4765659A (en) * | 1986-07-28 | 1988-08-23 | General Motors Corporation | High pressure tube attachment mechanism |
DE4314296A1 (de) * | 1993-04-30 | 1994-11-03 | Hydac Electronic Gmbh | Sensoreinheit mit Haltebügel |
TW382180B (en) * | 1996-07-15 | 2000-02-11 | Sony Corp | Camera lens |
US20030076691A1 (en) * | 2001-10-19 | 2003-04-24 | Becks Eric Roger | Impact resistant - long life trouble light |
CN1247974C (zh) * | 2003-02-17 | 2006-03-29 | 株式会社电装 | 具有其中包含压力敏感元件的细长外壳的压力探测器 |
JP4742593B2 (ja) | 2005-01-19 | 2011-08-10 | 株式会社デンソー | 圧力検出装置の製造方法 |
DE102012204905B4 (de) * | 2012-03-27 | 2024-07-11 | Robert Bosch Gmbh | Schaltungsträger für eine Sensoreinheit und korrespondierende Sensoreinheit |
JP5975793B2 (ja) * | 2012-08-29 | 2016-08-23 | シチズンファインデバイス株式会社 | 燃焼圧センサ |
WO2013147260A1 (ja) | 2012-03-29 | 2013-10-03 | シチズンファインテックミヨタ株式会社 | 圧力検出装置、圧力検出装置付き内燃機関 |
EP2781903B1 (en) * | 2013-03-20 | 2016-05-25 | Sensata Technologies, Inc. | A measuring plug and method for assembling a measuring plug |
EP2808665B1 (en) * | 2013-05-28 | 2019-02-20 | Sensata Technologies, Inc. | A measuring plug |
JP6318605B2 (ja) * | 2013-12-20 | 2018-05-09 | 株式会社デンソー | 溶接部を有する継手構造の組付構造 |
-
2016
- 2016-07-07 EP EP16178293.3A patent/EP3124938B1/de active Active
- 2016-07-07 DK DK16178293.3T patent/DK3124938T3/da active
- 2016-07-27 US US15/221,243 patent/US10378988B2/en active Active
- 2016-07-29 JP JP2016149764A patent/JP6782115B2/ja active Active
- 2016-07-30 KR KR1020160097634A patent/KR102521007B1/ko active IP Right Grant
- 2016-08-01 CN CN201610620983.8A patent/CN106404235B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
EP3124938B1 (de) | 2019-02-20 |
US20170030793A1 (en) | 2017-02-02 |
JP2017032562A (ja) | 2017-02-09 |
US10378988B2 (en) | 2019-08-13 |
KR20170015257A (ko) | 2017-02-08 |
CN106404235A (zh) | 2017-02-15 |
EP3124938A1 (de) | 2017-02-01 |
CN106404235B (zh) | 2020-08-07 |
DK3124938T3 (da) | 2019-05-13 |
KR102521007B1 (ko) | 2023-04-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6980367B2 (ja) | 圧力センサ及び前記圧力センサを製造するプロセス | |
JP6782115B2 (ja) | 圧力センサ及び前記圧力センサを製造するプロセス | |
JP6980368B2 (ja) | 圧力センサ | |
US7905209B2 (en) | Glow plug with combustion pressure sensor | |
US20170030787A1 (en) | Piezoelectric pressure sensor | |
JP2008157936A (ja) | 温度センサ | |
KR102521004B1 (ko) | 압전 압력 센서 | |
JP7429513B2 (ja) | 圧力検出装置 | |
JP2023049395A (ja) | 圧力検出装置 | |
JP6764770B2 (ja) | 圧力検出装置および圧力検出装置付き内燃機関 | |
JP2020085624A (ja) | 圧力検出装置、回路内蔵部材、圧力検出装置の製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20190729 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20200625 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20200707 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20200925 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20201013 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20201019 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6782115 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |