DK148997B - PROCEDURE FOR FRACTIONING A GAS MIXTURE - Google Patents

PROCEDURE FOR FRACTIONING A GAS MIXTURE Download PDF

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DK148997B
DK148997B DK438977AA DK438977A DK148997B DK 148997 B DK148997 B DK 148997B DK 438977A A DK438977A A DK 438977AA DK 438977 A DK438977 A DK 438977A DK 148997 B DK148997 B DK 148997B
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bed
pressure
gas
bearing
nitrogen
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DK148997C (en
DK438977A (en
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Ronny Eriksson
Sven-Goeran Svensson
Lars Blomberg
Otto Von Krusenstierna
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Aga Ab
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/047Pressure swing adsorption
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2253/00Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10Inorganic adsorbents
    • B01D2253/106Silica or silicates
    • B01D2253/108Zeolites
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2256/00Main component in the product gas stream after treatment
    • B01D2256/12Oxygen
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2257/00Components to be removed
    • B01D2257/10Single element gases other than halogens
    • B01D2257/102Nitrogen
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2259/00Type of treatment
    • B01D2259/40Further details for adsorption processes and devices
    • B01D2259/40011Methods relating to the process cycle in pressure or temperature swing adsorption
    • B01D2259/40013Pressurization
    • B01D2259/40015Pressurization with two sub-steps
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2259/00Type of treatment
    • B01D2259/40Further details for adsorption processes and devices
    • B01D2259/40011Methods relating to the process cycle in pressure or temperature swing adsorption
    • B01D2259/40035Equalization
    • B01D2259/40037Equalization with two sub-steps
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2259/00Type of treatment
    • B01D2259/40Further details for adsorption processes and devices
    • B01D2259/40011Methods relating to the process cycle in pressure or temperature swing adsorption
    • B01D2259/40043Purging
    • B01D2259/4005Nature of purge gas
    • B01D2259/40052Recycled product or process gas
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2259/00Type of treatment
    • B01D2259/40Further details for adsorption processes and devices
    • B01D2259/40011Methods relating to the process cycle in pressure or temperature swing adsorption
    • B01D2259/40058Number of sequence steps, including sub-steps, per cycle
    • B01D2259/40067Seven
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2259/00Type of treatment
    • B01D2259/40Further details for adsorption processes and devices
    • B01D2259/40011Methods relating to the process cycle in pressure or temperature swing adsorption
    • B01D2259/40077Direction of flow
    • B01D2259/40081Counter-current
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2259/00Type of treatment
    • B01D2259/40Further details for adsorption processes and devices
    • B01D2259/402Further details for adsorption processes and devices using two beds
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/047Pressure swing adsorption
    • B01D53/053Pressure swing adsorption with storage or buffer vessel

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Medicines Containing Material From Animals Or Micro-Organisms (AREA)

Description

148997148997

Den foreliggende opfindelse angår en fremgangsmåde til fraktionering af en gasblanding under anvendelse af mindst to lejer af et materiale, som er i stand til ved forholdsvis højt tryk selektivt at adsorbere en af gasblandingens komponenter, hvorved lejerne skiftevis sættes under og .holdes ved et forholdsvis højt tryk henholdsvis aflastes fra dette tryk, hvorhos trykpåføringen henholdsvis -aflastningen for hvert leje foretages ved et antal deloperationer, ved hvilke der i deloperationer (I) og (II) sker en adsorption af den adsorberbare komponent og en dannelse af produktgas, i deloperation (III) sker en tryksænkning ved trykudligning mellem de to lejer, i deloperation (IV) sker en tryksænkning til desadsorptionstrykket, .i deloperationer (V) og (VI) sker en skylning af lejerne med produktgas, og i deloperationer (VII, VIII, IX og X) sker 143337 2 en trykforøgelse i lejerne, indtil adsorptionstrykket nås.The present invention relates to a process for fractionating a gas mixture using at least two beds of a material capable of selectively adsorbing at one of the components of the gas mixture selectively adsorbed and alternately bearing the beds at a relatively high pressure. pressure, respectively, is relieved from this pressure, whereby the pressure application and relief for each bearing are carried out by a number of sub-operations, in which in sub-operations (I) and (II) an adsorption of the adsorbable component and a formation of product gas takes place in sub-operation (III ) a pressure drop occurs by pressure equalization between the two bearings, in sub-operation (IV) a pressure drop is applied to the desorption pressure, in sub-operations (V) and (VI), the bearings are flushed with product gas, and in sub-operations (VII, VIII, IX and X) there is a pressure increase in the bearings until the adsorption pressure is reached.

Fra US patentskrift nr. 3.788.036 kendes en fremgangsmåde til fraktionering af en flerkomponent-gasblanding, hvilken fremgangsmåde i en af sine udførelsesformer udøves i vekselvirkning mellem to adsorptionskolonner, der indeholder et materiale, som er i stand til selektivt at adsorbere en af gasblandingens komponenter, og hvorved adsorptionskolonnerne skiftevis sættes under og holdes ved et forholdsvis højt tryk henholdsvis aflastes for dette tryk, idet trykpåføringen henholdsvis -aflastningen for hver kolonne foretages i et antal trin, ved hvilke der for enhver af kolonnerne i følgende rækkefølge foretages en adsorption af den adsorberbare komponent og en dannelse af produktgas, en tryksænkning ved trykudligning mellem de to adsorptionskolonner, en yderligere tryksænkning til desadsorptionstrykket, en skylning af adsorptionskolonnen, eventuelt med produktgas, og en trykforøgelse i adsorptionskolonnen, indtil adsorptionstrykket nås. Ved denne fremgangsmåde sker der imidlertid en vis forurening af det andet adsorptionslejes udløbsende med adsorberbar komponent ved tryk-udligningen, idet der ved tryksænkning i et adsorptionsleje altid frigøres en del af den adsorberede gas, hvorved produktgassens renhed i de efterfølgende produktionstrin forringes.U.S. Patent No. 3,788,036 discloses a process for fractionating a multi-component gas mixture, which method is carried out in one of its embodiments in interaction between two adsorption columns containing a material capable of selectively adsorbing one of the components of the gas mixture. and wherein the adsorption columns are alternately subjected to and maintained at a relatively high pressure, respectively, for this pressure, the pressure application or relief for each column being carried out in a number of steps in which for each of the columns an adsorption of the adsorbable is carried out in the following order. component and a product gas formation, a pressure drop by pressure equalization between the two adsorption columns, an additional pressure drop to the desadsorption pressure, a flushing of the adsorption column, optionally with product gas, and a pressure increase in the adsorption column until adsorption pressure is reached. In this method, however, some contamination of the outlet end of the second adsorption bed with adsorbable component occurs at the pressure equalization, with pressure lowering in an adsorption bed always releasing a portion of the adsorbed gas, thereby deteriorating the purity of the product gas in subsequent production steps.

Ved fremgangsmåden ifølge opfindelsen opnås i forhold til ovennævnte fremgangsmåde for det første en produktgas (eksempelvis oxygen) med en højere renhed, idet adsorptionslejets udløbsende holdes fri for adsorberbar komponent (eksempelvis nitrogen), og for det andet en bedre udnyttelse af gassen, hvorved behovet for rågastilførsel mindskes.In the process according to the invention, in relation to the above-mentioned process, firstly, a product gas (e.g. oxygen) with a higher purity is obtained, keeping the outlet end of the adsorbent free of adsorbable component (e.g. nitrogen), and secondly, better utilization of the gas, feedstock is reduced.

Dette opnås ved, at fremgangsmåden ifølge opfindelsen er ejendommelig ved, at trykudligningen mellem lejerne i deloperation (III) udføres ved, at det første lejes udløbsende (bund) forbindes med det andet lejes indløbsende (top), at skylningen af lejerne i deloperationerne (V) og (VI) udføres med produktgas fra en produktgasbeholder, og at trykforøgelsen i deloperation (VII) udføres ved, at produktgassen tilføres lejernes udløbsende (bund), og i deloperation (VIII) ved, at det andet lejes udløbsende (bund) forbindes med det første lejes indløbsende (top).This is achieved by the method according to the invention being characterized in that the pressure equalization between the bearings in part operation (III) is carried out by connecting the outlet end (bottom) of the first bed with the inlet end (top) of the second bed, that the rinsing of the bearings in the sub operations (V ) and (VI) are carried out with product gas from one product gas tank and the pressure increase in sub-operation (VII) is carried out by adding the product gas to the outlet end (bottom) of the bearings and in sub-operation (VIII) by connecting the outlet end (bottom) of the second bearing with the first bearing is inlet end (top).

En udførelsesform for fremgangsmåden ifølge opfindelsen er ejendommelig ved, at produktgassen tilføres til en produktgasbeholder via en produktrørledning, og at produktgassen ved den første deloperation (VII). af trykpåsætningen af et leje (f.eks. 1) 3 148997 udtages fra produktbeholderen via en rørledning, som er forskellig fra produktrørledningen.An embodiment of the method according to the invention is characterized in that the product gas is supplied to a product gas container via a product pipeline and that the product gas in the first part operation (VII). of the pressure application of a bearing (eg 1) 3 148997 is taken from the product container via a pipeline which is different from the product pipeline.

I det følgende vil opfindelsen blive beskrevet nærmere i forbindelse med en udførelsesform med to lejer og under henvisning til tegningen, hvor fig. 1 viser et koblingsskema for anlægget, fig. 2 viser tidsfølgen for de forskellige funktionsfaser for de to i anlægget indgående lejer, fig. 3 viser de gasstrømme, som forekommer i anlægget i forskellige funktionsfaser, og fig. 4 viser koncentrationsprofilen i et leje på forskellige tidspunkter over en hel driftscyklus.In the following, the invention will be described in more detail in connection with an embodiment with two bearings and with reference to the drawing, in which fig. 1 shows a wiring diagram of the system; FIG. 2 shows the time sequence of the different operating phases of the two bearings included in the system; FIG. 3 shows the gas streams that occur in the plant in various phases of operation, and FIG. 4 shows the concentration profile in a bed at different times over an entire operating cycle.

Det på fig. 1 skematisk viste anlæg er et to-leje system, som kan anvendes til fraktionering af en vilkårlig gasblanding, men i det foreliggende tilfælde antages det, at det er beregnet til fraktionering af luft, således at der som produktgas fås oxygen, som er praktisk taget fri for nitrogen. Anlægget omfatter to lejer 1 og 2. Begge disse indeholder en zeolitisk molekylsi med evne til ved forholdsvis højt tryk at adsorbere nitrogen i væsentlig højere grad end oxygen. Rågassen, som i dette tilfælde udgøres af komprimeret luft, tilføres til et tilslutningssted 3. Den tilførte luft 2 kan være komprimeret til et tryk på ca. 4,1 kg/cm . Fra tilslutningsstedet 3 passerer rågassen gennem en trykregulator 4 og en indstillelig drøvleventil 5 til et par styrbare ventiler 6 og 7.The FIG. Figure 1 schematically illustrates a two-bed system which can be used to fractionate any gas mixture, but in the present case it is assumed that it is intended for fractionation of air, so that as a product gas oxygen is obtained which is practically free of nitrogen. The plant comprises two beds 1 and 2. Both contain a zeolitic molecular sieve with the ability to adsorb nitrogen to a substantially higher degree than oxygen at relatively high pressure. The raw gas, which in this case is compressed air, is supplied to a connection point 3. The supplied air 2 can be compressed to a pressure of approx. 4.1 kg / cm. From the connection point 3, the raw gas passes through a pressure regulator 4 and an adjustable throttle valve 5 to a pair of controllable valves 6 and 7.

Gennem disse kan rågassen ledes enten til lejet 1 eller til lejet 2. Den produktgas, som forlader lejet 1 ved dettes udløbsside, når via en styrbar ventil 8 og en indstillelig drøvleventil 9 til en produkttank 10, som er beregnet til opsamling af den fremkomne produktgas. Den produktgas, som fremkommer i lejet 2, når på analog vis via en styrbar ventil 11 og drøvleventilen 9 til produkttanken 10. Herfra kan produktgassen udtages via en udløbsrørledning 12. Drøvleventilen 9 indgår i en produktrørledning 13.Through these, the raw gas can be directed either to the bearing 1 or to the bearing 2. The product gas leaving the bearing 1 at its outlet side reaches via a controllable valve 8 and an adjustable throttle valve 9 to a product tank 10, which is intended to collect the resulting product gas. . The product gas produced in the bearing 2 reaches analogously via a controllable valve 11 and the throttle valve 9 to the product tank 10. From this, the product gas can be extracted via an outlet pipeline 12. The throttle valve 9 is part of a product pipeline 13.

På i og for sig kendt måde kan udløbssiden af et leje forbindes med indløbssiden for det andet leje. Dette sker via styrbare ventiler 14 og 15 ved lejernes udløbsende og styrbare ventiler 16 og 17 ved lejernes indløbsende samt en mellem disse ventilpar indkoblet indstillelig drøvleventil 18. Endvidere kan indløbsenden af lejet 1 via en styrbar ventil 19 og indløbsenden af lejet 2 via en styrbar ventil 20 sættes i direkte forbindelse med den omgivende atmosfære eller med en vakuumpumpe via en aflastningsrørledning 21.In a manner known per se, the outlet side of one bearing can be connected to the inlet side of the other bearing. This is done via controllable valves 14 and 15 at the outlet end of the bearings and controllable valves 16 and 17 at the inlet end of the bearings and an adjustable throttle valve coupled between these valve pairs. Furthermore, the inlet end of the bearing 1 can be via a controllable valve 19 and the inlet end of the bed 2 via a controllable valve. 20 is connected directly to the ambient atmosphere or to a vacuum pump via a relief pipeline 21.

4 1489974 148997

For at gøre det muligt at iværksætte udskylning og tryk-påsætning af et leje med produktgas uafhængigt af funktionstilstanden af det andet leje, er anordningen udført således, at produktgas fra tanken 10 kan tilføres til udløbssiden af de respektive lejer via en rørledning 22 og hver af de styrbare ventiler 14 og 15. Af årsager, som vil fremgå af det følgende, er rørledningen opdelt i to parallelle grene, der hver indeholder en styrbar ventil 23 respektive 24 samt en indstillelig drøvleventil 25 respektive 26.In order to enable the flushing and pressure application of a bearing with product gas independently of the operating state of the second bearing, the device is designed so that product gas from the tank 10 can be supplied to the outlet side of the respective bearings via a pipeline 22 and each of the the controllable valves 14 and 15. For reasons which will become apparent from the following, the pipeline is divided into two parallel branches, each containing a controllable valve 23 and 24, respectively, and an adjustable throttle valve 25 and 26, respectively.

De forskellige styrbare ventiler styres hensigtsmæssigt automatisk, således at der under de deloperationer, som betegnes med I____ X, som tilsammen udgør en hel driftscyklus, tilvejebringes de gasstrømme, som ses på fig. 3. Modsvarende deloperationer som funktion af tiden vises på fig. 2, hvor den øverste linie viser deloperationerne for lejet 1, og den nederste linie viser deloperationerne for lejet 2. For lejet 1 sker der således i løbet af faserne I og II adsorption af adsorberbar komponent og fremkomst af produktgas, i løbet af fasen III tryksænkning ved trykudligning mellem lejeene 1 og 2 (Tsl) og i løbet af fasen IV tryksænkning til det forholdsvis lave desorptionstryk (Ts2). i løbet af faserne V og VI sker der i lejet 1 en udskylning med produktgas, hvorefter der i løbet af faserne VII-X gennemføres en trykstigning i lejet 1, nemlig i løbet af fasen VII med produktgassen (Tø2), i løbet af fasen VIII ved trykudligning mellem lejerne (Tøl) og endelig i løbet af faserne IX og X ved hjælp af rågas (Tø3). Derefter er dette lejepåny klar til at frembringe produktgas. Ved det her valgte udførelseseksempel er en hel cyklustid 208 sekunder, og af fig. 2 fremgår de tidspunkter, hvor anlægget overgår fra en deloperation til den næste. Af figurerne 2 og 3 fremgår det, at operationscyklen for lejet 2 er tidsforskudt i forhold til operationscyklen for lejet 1 på en sådan måde, at der under trykudligning mellem lejerne sker en tryksænkning i det ene leje og en trykforøgelse i det andet leje.Conveniently, the various controllable valves are automatically controlled so that during the sub-operations designated I____ X, which together constitute an entire operating cycle, the gas flows seen in FIG. 3. Corresponding partial operations as a function of time are shown in FIG. 2, where the top line shows the sub operations for the bearing 1 and the bottom line shows the sub operations for the bearing 2. Thus, for the bearing 1, adsorption of adsorbable component and the emergence of product gas occurs during phases I and II, during phase III pressure reduction. by pressure equalization between bearings 1 and 2 (Tsl) and during phase IV pressure lowering to the relatively low desorption pressure (Ts2). during phases V and VI, there is a flushing with product gas in the bed 1, after which a pressure increase is carried out in the bed 1, namely during the phase VII with the product gas (Tø2), during the phase VIII by pressure equalization between the bearings (Töl) and finally during phases IX and X using raw gas (Tø3). Then this rental pouch is ready to produce product gas. In the embodiment selected here, an entire cycle time is 208 seconds, and of FIG. 2 shows the times when the plant moves from one sub operation to the next. Figures 2 and 3 show that the operating cycle of the bearing 2 is time-shifted with respect to the operating cycle of the bearing 1 in such a way that during pressure equalization between the bearings a pressure decrease in one bearing and a pressure increase in the other bearing takes place.

Fig. 4 viser et eksempel på udseendet af koncentrationsprofilen, altså oxygenindholdet, i forskellige dele af lejet 1 fra indløbssiden øverst til udløbssiden, altså nederst i den respektive delfigur. Hver delfigur anskueliggør koncentrationsprofilen på et i den respektive delfigur angivet tidspunkt under overgangen fra en deloperation til den næste.FIG. 4 shows an example of the appearance of the concentration profile, i.e. the oxygen content, in different parts of the bed 1 from the inlet side at the top to the outlet side, ie at the bottom of the respective part figure. Each part figure illustrates the concentration profile at a time specified in the respective part figure during the transition from one part operation to the next.

Der vil nu blive redegjort mere detaljeret for de processer, som foregår i lejet 1, nedenfor, under henvisning til tegningen.The processes that are carried out in the bearing 1, below, will now be explained in more detail with reference to the drawing.

5 1489975 148997

Til tiden O er adsorptionstrykket opnået i lejet i ved tilførsel af luft under deloperationerne IX og X. I lejets indløbsende er molekylsien mættet med luft af det herskende tryk. I udløbsenden findes "ren" produktgas, altså en gas, som tilnærmelsesvis består af 95% oxygen og 5% argon. I løbét af deloperation I udtages produktgas fra lejet med en af drøvleventilen 9 nøje kontrolleret hastighed, og trykregulatoren 4 ved indløbsenden bevirker, at der tilføres luft på en sådan måde, at trykket hele tiden holdes konstant. Når gassen passerer gennem lejet sker en fraktionering, eftersom nitrogen adsorberes i højere grad end oxygen. Efterhånden, som adsorptionen skrider frem, bliver lejet mere og mere mættet med luft. Ved, at gashastigheden holdes under en højeste kritisk værdi, bibeholdes en nitrogenfri zone nærmest udløbsenden over hele det tidsrum, hvori der udtages produktgas fra lejet.At time 0, the adsorption pressure is obtained in the bed i by supplying air during sub operations IX and X. At the inlet end of the bed, the molecular sieve is saturated with air of the prevailing pressure. At the outlet end there is "pure" product gas, that is, a gas consisting approximately of 95% oxygen and 5% argon. In the course of sub-operation I, product gas is withdrawn from the bearing at a rate controlled by the throttle valve 9, and the pressure regulator 4 at the inlet end causes air to be supplied in such a way that the pressure is kept constant at all times. As the gas passes through the bed, a fractionation occurs as nitrogen is adsorbed to a greater extent than oxygen. As the adsorption progresses, the bed becomes increasingly saturated with air. By maintaining the gas velocity below the highest critical value, a nitrogen-free zone is maintained near the outlet end throughout the period in which product gas is withdrawn from the bearing.

Under deloperation II fortsætter produktionen af nitrogenfri produktgas fra lejet· 1. Denne produktion afbrydes til tiden 66 (sek.), umiddelbart inden indholdet af nitrogen stiger i den udgående produktgas.During sub-operation II, production of nitrogen-free product gas from the bearing continues 1. This production is interrupted on time 66 (sec), immediately before the content of nitrogen increases in the outgoing product gas.

I løbet af deloperation III er udløbsenden af lejet 1 blevet forbundet med indløbsenden af lejet 2 samtidig med, at tilførsel af luft til lejet 1 er blevet afbrudt, og som følge deraf sker der en tryksænkning i lejet 1. Den partialtryksænkning for gaskomponenterne, som bliver følgen, forårsager desorption af disse i lejet . Den første gasfraktion, som forlader lejet 1, indeholder ca. 95% oxygen, medens den sidste har et indhold på 40-60%. Middelindholdet af oxygen i den gas, som forlader lejet 1, ligger altså betydeligt over oxygenindholdet i luft.During part operation III, the outlet end of the bearing 1 has been connected to the inlet end of the bearing 2 at the same time as the supply of air to the bed 1 has been interrupted, and consequently a pressure drop in the bed 1. The partial pressure reduction for the gas components which is the result, causing desorption of these into the bearing. The first gas fraction leaving the bed 1 contains approx. 95% oxygen, while the latter has a content of 40-60%. Thus, the average oxygen content in the gas leaving the bed 1 is significantly above the oxygen content in air.

I løbet af deloperation IV sker der en tryksænkning i lejet 1 ved, at dettes indløbsende forbindes med atmosfæren eller med en vakuumpumpe. Sænkningen af partialtrykket giver så en yderligere desorption, og en del af det desorberede materiale udskylles.During sub-operation IV, a pressure drop in the bearing 1 occurs by connecting its inlet end to the atmosphere or to a vacuum pump. The lowering of the partial pressure then gives a further desorption and part of the desorbed material is flushed out.

I løbet af deloperation V påbegyndes udskylning af lejet 1 fra dets udløbsende til dets indløbsende, hvorved nitrogenfri produktgas tilføres fra produkttanken 10 via den styrbare ventil 23 og den indstillelige drøvleventil 25 i ledningen 22. Den indstillelige drøvleventil 25 er da indstillet således, at tilførslen af produktgas foregår forholdsvis langsomt.During part operation V, the bed 1 is flushed from its outlet end to its inlet end, whereby nitrogen-free product gas is supplied from the product tank 10 via the controllable valve 23 and the adjustable throttle valve 25 in the line 22. The adjustable throttle valve 25 is then adjusted so that the supply of product gas takes place relatively slowly.

I løbet af deloperation VI fortsætter udskylningen af lejet 1 med produktgas via ventilen 23 og drøvleventilen 25. Det lave partialtryk af nitrogen i udskylningsgassen bevirker, at nitrogen de-sorberes fra molekylsien og udskylles fra lejet.During sub-operation VI, the flushing of the bed 1 continues with product gas via the valve 23 and the throttle valve 25. The low partial pressure of nitrogen in the flushing gas causes the nitrogen to be desorbed from the molecular sieve and flushed from the bed.

6 1489976 148997

Ved deloperation VII's begyndelse lukkes udløbet til atmosfæren, og tilførsel af produktgas til lejet 1 fortsætter nu gennem den styrbare ventil 24 og den indstillelige drøvleventil 26. Den nitrogenfri produktgas, som nu strømmer ind i lejet, bevirker dels en trykforøgelse, dels en desorption af nitrogen i den nedre udløbsende. Det desorberede nitrogen føres med gasstrømmen mod lejets øvre indløbsende og adsorberes igen i molekylsien, når gassens partialtryk af nitrogen overskrider den værdi, som modsvarer ligevægtsforholdet i molekylsien.At the beginning of sub-operation VII, the outlet is closed to the atmosphere and the supply of product gas to the bed 1 now continues through the controllable valve 24 and the adjustable throttle valve 26. The nitrogen-free product gas which now flows into the bed causes a pressure increase and partly a desorption of nitrogen. at the lower outlet end. The desorbed nitrogen is fed with the gas flow towards the upper inlet end of the bed and is again adsorbed in the molecular sieve when the gas partial pressure of nitrogen exceeds the value corresponding to the equilibrium ratio of the molecular sieve.

I løbet af deloperation VII sker der således en flytning af nitrogen fra lejets udløbsende mod dets indløbsende samtidig med, at en nitrogenfri zone etableres i lejets udløbsende.Thus, during sub-operation VII, nitrogen is moved from the outlet end of the bed to its inlet end while establishing a nitrogen-free zone at the outlet end of the bed.

Ved deloperation VIII's begyndelse afbrydes tilførslen af produktgas til lejet 1, og i stedet forbindes indløbsenden af lejet 1 med udløbsenden af lejet 2. Gas strømmer således fra lejet 2 til lejet 1 under trykstigning heri. Denne deloperation foregår, indtil der er opnået trykligevægt mellem lejerne. Til trykforøgelsen af lejet 1 benyttes en forholdsvis oxygenrig gas, således som det blev angivet i forbindelse med beskrivelsen af deloperation III. Eftersom denne gas har et betydeligt lavere oxygenindhold end den gas, som befinder sig ved udløbsenden af lejet 1, må trykudligningen ikke gennemføres så hurtigt, at den nitrogenrige gas strømmer gennem lejet 1 med så høj en hastighed, at nitrogenet ikke når at blive adsorberet. Den nødvendige lave strømningshastighed opnås i dette tilfælde med den indstillelige drøvleventil 18.At the beginning of sub-operation VIII, the supply of product gas to the bed 1 is stopped and instead the inlet end of the bed 1 is connected to the outlet end of the bed 2. Gas thus flows from the bed 2 to the bed 1 under pressure increase therein. This sub-operation is carried out until pressure balance between the bearings is achieved. For the pressure increase of the bearing 1, a relatively oxygen-rich gas is used, as stated in connection with the description of sub-operation III. Since this gas has a significantly lower oxygen content than the gas located at the outlet end of the bed 1, the pressure equalization must not be carried out so rapidly that the nitrogen-rich gas flows through the bed 1 at such a rate that the nitrogen cannot be adsorbed. The required low flow rate is obtained in this case with the adjustable throttle valve 18.

I løbet af deloperation IX strømmer komprimeret luft ind ved indløbsenden af lejet 1. Derved foregår en langsom, fortsat trykforøgelse, og lejet bliver i løbet af denne deloperation mættet med luft i indløbsenden samtidig med, at der bibeholdes en nitrogenfri zone i lejets udløb s ende.During part operation IX, compressed air flows in at the inlet end of the bed 1. This causes a slow, continued pressure increase, and during this sub operation the bed is saturated with air at the inlet end while maintaining a nitrogen-free zone at the end of the bed. .

I løbet af deloperation X fortsætter trykforøgelsen i lejet 1 ved tilførsel af luft, indtil adsorptionstrykket er opnået, hvorefter lejet er klar til produktion, hvilket indebærer, at de ovenfor beskrevne deloperationer gentages cyklisk.During sub-operation X, the pressure increase in the bed 1 continues with the supply of air until the adsorption pressure is reached, after which the bed is ready for production, which means that the above-described sub-operations are cyclically repeated.

Som det fremgår af ovenstående beskrivelse sker trykforøgelsen i lejet 1 op til sluttrykket i tre trin. I løbet af det første trin, deloperation VII, sker trykforøgelsen med produktgas fra produkttanken 10. Umiddelbart inden denne deloperation er der blevet gennemført udskylning med produktgas, og koncentrationsprofilen i lejet er så nærmest retliniet, hvilket fremgår af den delfigur på fig. 4, som betegnes t = 152. Når nu der under deloperation VII tilføres nitrogenfri produktgas via udløbsenden af lejet 1 under samtidig trykforøgelse, 7 148997 fås i gasfasen en forøgelse af forholdet mellem oxygenets og nitrogenets partialtryk. Nitrogenet desorberes og føres lasngere ind i lejet i retning mod dets indløbsende. Efter denne trykforøgelse har lejet omtrent den koncentrationsprofil, som på fig. 4 ses i den delfigur, der er betegnet t = 170. Af denne fremgår, at en zone med nitrogenfri gas her er etableret nærmest udløbsenden. I denne zone foregår senere slut-fraktioneringen under adsorptionen. Nitrogenholdig gas kan nu slippes ind i lejet 1, men dette må ske gennem lejets indløbsende, eftersom den nævnte nitrogenfri zone ellers ville blive forstyrret. I denne sammenhæng kan det påpeges, at hvis nitrogenholdig gas var blevet indført i lejets indløbsende direkte efter udskylningen under deloperåtion VI, ville dette have medført, at en del nitrogen passerede gennem lejet uden at adsorberes. Derved ville man have fået nitrogenholdig gas ved udløbsenden og som følge deraf en nitrogenholdig produktgas.As can be seen from the above description, the pressure increase in the bearing 1 occurs up to the final pressure in three steps. During the first step, part operation VII, the pressure increase with product gas from product tank 10. Immediately prior to this part operation, flushing with product gas has been carried out, and the concentration profile in the bed is then almost straight, as can be seen from the sub-figure in fig. 4, which is designated t = 152. When, during sub-operation VII, nitrogen-free product gas is supplied via the outlet end of the bed 1 during simultaneous pressure increase, an increase in the ratio of the partial pressure of the oxygen to the nitrogen is obtained in the gas phase. The nitrogen is desorbed and introduced into the bearing towards the inlet end. After this pressure increase, the bed has approximately the concentration profile shown in FIG. 4 can be seen in the part figure designated t = 170. From this it can be seen that a zone of nitrogen-free gas is established here closest to the outlet end. In this zone, the final fractionation takes place later during the adsorption. Nitrogen-containing gas can now be released into the bed 1, but this must be done through the inlet end of the bed, as the said nitrogen-free zone would otherwise be disturbed. In this context, it may be pointed out that if nitrogen-containing gas had been introduced into the bed's inlet end directly after flushing during suboperation VI, this would have resulted in some nitrogen passing through the bed without adsorbing. Thereby, nitrogen-containing gas would have been obtained at the outlet end and, consequently, a nitrogen-containing product gas.

Det andet trin af trykforøgelsen tilvejebringes ved trykudligning mellem lejerne. Dette sker for lejet 1 under deloperationen VIII. Ved denne trykudligning sker der en tryksænkning i lejet 2, og derved desorberes i dette en del nitrogen, som følger med ind i lejet 1, som skal sættes under tryk. Af denne grund sker tilførslen til lejet 1 ved dettes indløbsside, således at den nitrogenfrie zone kan opretholdes ved udløbsenden. Den nitrogenholdige gas, som tilføres, fraktioneres i lejet 1 under denne deloperation, og ved slutningen af trykudligningen har man opnået den koncentrationsprofil, som i fig. 4 vises i den delfigur, der er betegnet t = 183.The second step of the pressure increase is provided by pressure equalization between the bearings. This is done for bearing 1 during sub-operation VIII. At this pressure equalization, a pressure drop takes place in the bearing 2, thereby desorbing some of the nitrogen that comes into the bed 1, which must be pressurized. For this reason, the supply to the bed 1 is effected at its inlet side so that the nitrogen-free zone can be maintained at the outlet end. The nitrogen-containing gas supplied is fractionated in the bed 1 during this sub-operation, and at the end of the pressure equalization the concentration profile obtained in FIG. 4 is shown in the sub-figure designated t = 183.

Trykforøgelsen til det endelige adsorptionstryk sker ved tilførsel af luft fra kompressoren ved indløbsenden af lejet 1. Under denne trykforøgelse sker der en fraktionering af den indstrømmende luft, og når det endelige adsorptionstryk efter deloperationerne IX og X er blevet opnået, udviser lejet 1 en koncentrationsprofil ifølge den delfigur i fig. 4, som er betegnet t = 208. Lejet 1 er dermed igen klar til produktion.The pressure increase to the final adsorption pressure occurs by supplying air from the compressor at the inlet end of the bed 1. During this pressure increase, the inflowing air is fractionated and when the final adsorption pressure has been obtained after the sub-operations IX and X, the bed 1 exhibits a concentration profile according to the part figure of FIG. 4, which is designated t = 208. The bearing 1 is thus again ready for production.

Den her beskrevne trykvariationssekvens adskiller sig fra og indebærer forbedringer sammenlignet med tidligere kendte sekvenser i følgende henseender. Trykforøgelse med produktgas fri for adsorberbar komponent sker som det første trin, og produktgassen indføres via lejets udløbsende. Derved skabes en koncentrationsfordeling i lejet, som er gunstig for fraktionering af gas, som indføres senere under operationscyklen. Endvidere indføres al gas, som indeholder den adsorberbare komponent, altid ved lejets indløbsende, og efter at produktgas, som er fri for adsorberbar komponent, er blevet indført via udløbsenden.The pressure variation sequence described herein differs from and involves improvements compared to previously known sequences in the following respects. Pressure increase with product gas free of adsorbable component occurs as the first step and the product gas is introduced via the outlet end of the bed. This creates a concentration distribution in the bed, which is favorable for gas fractionation, which is introduced later during the operation cycle. Furthermore, all gas containing the adsorbable component is always introduced at the inlet end of the bed and after product gas which is free of adsorbable component has been introduced via the outlet end.

DK438977A 1976-10-04 1977-10-04 PROCEDURE FOR FRACTIONING A GAS MIXTURE DK148997C (en)

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CA1182765A (en) * 1980-12-29 1985-02-19 Calgon Corporation Repressurization for pressure swing adsorption system
CA1176994A (en) * 1980-12-29 1984-10-30 Toan P. Vo Repressurization for pressure swing adsorption system
US4440548A (en) * 1982-04-19 1984-04-03 Calgon Carbon Corporation Pressure swing absorption system
JPS5922625A (en) * 1982-07-27 1984-02-04 Osaka Oxgen Ind Ltd Method for removing gaseous nitrogen contained in gaseous carbon monoxide or gaseous mixture of carbon monoxide and carbon dioxide by adsorption method
PT79586B (en) * 1983-12-07 1986-10-15 Calgon Carbon Corp Process for separating a feed stream gas mixture using pressure swing adsorption
DE3433058A1 (en) * 1984-09-08 1986-03-20 Bergwerksverband Gmbh, 4300 Essen METHOD AND DEVICE FOR PRODUCING NITROGEN
JPH01125858A (en) * 1987-11-10 1989-05-18 Fujitsu Ltd Semiconductor device and manufacture thereof
US4982263A (en) * 1987-12-21 1991-01-01 Texas Instruments Incorporated Anodizable strain layer for SOI semiconductor structures
JP2683806B2 (en) * 1988-03-17 1997-12-03 住友精化株式会社 Concentrated oxygen recovery method
DE69124276T2 (en) * 1990-03-29 1997-05-07 Boc Group Inc Process for the production of an oxygen enriched product stream
DE69133359T2 (en) * 1990-08-03 2004-12-16 Canon K.K. Process for the production of an SOI substrate
DE69233314T2 (en) * 1991-10-11 2005-03-24 Canon K.K. Process for the production of semiconductor products
JPH05217824A (en) * 1992-01-31 1993-08-27 Canon Inc Semiconductor wafer and its manufacture
EP0553856B1 (en) * 1992-01-31 2002-04-17 Canon Kabushiki Kaisha Method of preparing a semiconductor substrate
JP3214631B2 (en) 1992-01-31 2001-10-02 キヤノン株式会社 Semiconductor substrate and method of manufacturing the same

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US3788036A (en) * 1972-07-26 1974-01-29 D Stahl Pressure equalization and purging system for heatless adsorption systems
FR2270928A1 (en) * 1974-05-15 1975-12-12 Air Liquide Gas mixt. fractioning of adsorption type - uses pressurising and expanding phases in several adsorption zones followed by equalising zone
FR2270927A1 (en) * 1974-05-15 1975-12-12 Air Liquide Gas mixt. fractioning of adsorption type - uses pressurising and expanding phases in several adsorption zones followed by equalising zone
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IT1085299B (en) 1985-05-28
DE2743861C2 (en) 1984-06-28
SE7610947L (en) 1978-04-05
NO773366L (en) 1978-04-05
NO145420C (en) 1982-04-14
NO145420B (en) 1981-12-14
DK148997C (en) 1986-05-26
SE409553B (en) 1979-08-27
DE2743861A1 (en) 1978-04-06
FR2366050B1 (en) 1981-08-14
NL7710848A (en) 1978-04-06
BE859324A (en) 1978-02-01
FR2366050A1 (en) 1978-04-28
FI62229C (en) 1982-12-10
FI772916A (en) 1978-04-05
DK438977A (en) 1978-04-05
JPS5345675A (en) 1978-04-24
FI62229B (en) 1982-08-31

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