DK1451547T3 - Optisk forskydningssensor - Google Patents
Optisk forskydningssensorInfo
- Publication number
- DK1451547T3 DK1451547T3 DK02765714T DK02765714T DK1451547T3 DK 1451547 T3 DK1451547 T3 DK 1451547T3 DK 02765714 T DK02765714 T DK 02765714T DK 02765714 T DK02765714 T DK 02765714T DK 1451547 T3 DK1451547 T3 DK 1451547T3
- Authority
- DK
- Denmark
- Prior art keywords
- displacement sensor
- optical displacement
- optical
- displacement
- microphone
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R23/00—Transducers other than those covered by groups H04R9/00 - H04R21/00
- H04R23/008—Transducers other than those covered by groups H04R9/00 - H04R21/00 using optical signals for detecting or generating sound
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
- G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light
- G01L9/0079—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light with Fabry-Perot arrangements
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Measuring Fluid Pressure (AREA)
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
- Geophysics And Detection Of Objects (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Glass Compositions (AREA)
- Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
- Switches Operated By Changes In Physical Conditions (AREA)
- Micromachines (AREA)
- Spectrometry And Color Measurement (AREA)
- Gyroscopes (AREA)
- Measurement Of Optical Distance (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NO20015825A NO315177B1 (no) | 2001-11-29 | 2001-11-29 | Optisk forskyvnings-sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
DK1451547T3 true DK1451547T3 (da) | 2006-08-21 |
Family
ID=19913078
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DK02765714T DK1451547T3 (da) | 2001-11-29 | 2002-10-02 | Optisk forskydningssensor |
Country Status (11)
Country | Link |
---|---|
US (1) | US7164479B2 (es) |
EP (1) | EP1451547B1 (es) |
AT (1) | ATE324577T1 (es) |
AU (1) | AU2002329130A1 (es) |
CA (1) | CA2465311C (es) |
DE (1) | DE60211016T2 (es) |
DK (1) | DK1451547T3 (es) |
ES (1) | ES2262837T3 (es) |
NO (1) | NO315177B1 (es) |
PT (1) | PT1451547E (es) |
WO (1) | WO2003046498A1 (es) |
Families Citing this family (43)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FI118548B (fi) | 2002-09-30 | 2007-12-14 | Noveltech Solutions Ltd | Fotoakustinen detektori |
FI116859B (fi) | 2002-09-30 | 2006-03-15 | Noveltech Solutions Ltd | Fotoakustinen detektori |
US7492463B2 (en) | 2004-04-15 | 2009-02-17 | Davidson Instruments Inc. | Method and apparatus for continuous readout of Fabry-Perot fiber optic sensor |
NO321281B1 (no) * | 2004-09-15 | 2006-04-18 | Sintef | Infrarod kilde |
US7864329B2 (en) | 2004-12-21 | 2011-01-04 | Halliburton Energy Services, Inc. | Fiber optic sensor system having circulators, Bragg gratings and couplers |
US7835598B2 (en) * | 2004-12-21 | 2010-11-16 | Halliburton Energy Services, Inc. | Multi-channel array processor |
EP1869737B1 (en) * | 2005-03-16 | 2021-05-12 | Davidson Instruments, Inc. | High intensity fabry-perot sensor |
US7639368B2 (en) * | 2005-09-13 | 2009-12-29 | Halliburton Energy Services, Inc. | Tracking algorithm for linear array signal processor for Fabry-Perot cross-correlation pattern and method of using same |
US7355720B1 (en) | 2005-12-20 | 2008-04-08 | Sandia Corporation | Optical displacement sensor |
US7583390B2 (en) * | 2006-03-02 | 2009-09-01 | Symphony Acoustics, Inc. | Accelerometer comprising an optically resonant cavity |
US7355723B2 (en) * | 2006-03-02 | 2008-04-08 | Symphony Acoustics, Inc. | Apparatus comprising a high-signal-to-noise displacement sensor and method therefore |
US20070211257A1 (en) * | 2006-03-09 | 2007-09-13 | Kearl Daniel A | Fabry-Perot Interferometer Composite and Method |
US7359067B2 (en) * | 2006-04-07 | 2008-04-15 | Symphony Acoustics, Inc. | Optical displacement sensor comprising a wavelength-tunable optical source |
US7684051B2 (en) | 2006-04-18 | 2010-03-23 | Halliburton Energy Services, Inc. | Fiber optic seismic sensor based on MEMS cantilever |
WO2007126475A2 (en) | 2006-04-26 | 2007-11-08 | Davidson Instruments, Inc. | Fiber optic mems seismic sensor with mass supported by hinged beams |
US7551295B2 (en) * | 2006-06-01 | 2009-06-23 | Symphony Acoustics, Inc. | Displacement sensor |
US7894618B2 (en) * | 2006-07-28 | 2011-02-22 | Symphony Acoustics, Inc. | Apparatus comprising a directionality-enhanced acoustic sensor |
US8115937B2 (en) * | 2006-08-16 | 2012-02-14 | Davidson Instruments | Methods and apparatus for measuring multiple Fabry-Perot gaps |
CA2676246C (en) * | 2007-01-24 | 2013-03-19 | Halliburton Energy Services, Inc. | Transducer for measuring environmental parameters |
US7626707B2 (en) * | 2007-10-29 | 2009-12-01 | Symphony Acoustics, Inc. | Dual cavity displacement sensor |
US8007609B2 (en) * | 2007-10-31 | 2011-08-30 | Symphony Acoustics, Inc. | Parallel plate arrangement and method of formation |
US8604566B2 (en) | 2008-06-17 | 2013-12-10 | Infineon Technologies Ag | Sensor module and semiconductor chip |
JP2011170137A (ja) * | 2010-02-19 | 2011-09-01 | Seiko Epson Corp | 波長可変干渉フィルター、光センサーおよび分析機器 |
US8390916B2 (en) * | 2010-06-29 | 2013-03-05 | Qualcomm Mems Technologies, Inc. | System and method for false-color sensing and display |
DE102010038718B4 (de) * | 2010-07-30 | 2016-02-25 | Carl Zeiss Ag | Messvorrichtung und Verfahren zum Bestimmen eines eine elektrische Eigenschaft einer Dünnschicht auf einem Träger beschreibenden ersten Parameters |
JP5987573B2 (ja) * | 2012-09-12 | 2016-09-07 | セイコーエプソン株式会社 | 光学モジュール、電子機器、及び駆動方法 |
GB2508908B (en) | 2012-12-14 | 2017-02-15 | Gen Electric | Resonator device |
FR3000545B1 (fr) * | 2012-12-27 | 2015-07-31 | Commissariat Energie Atomique | Microbarometre a soufflet et a transducteur interferometrique |
CN103200510B (zh) * | 2013-03-12 | 2015-12-02 | 中国电子科技集团公司第三研究所 | 基于fp干涉原理的光纤传声器的波分复用装置 |
CN103152684B (zh) * | 2013-03-12 | 2015-12-02 | 中国电子科技集团公司第三研究所 | 光纤传声器探头 |
NO20130884A1 (no) | 2013-06-21 | 2014-12-22 | Sinvent As | Sensorelement med optisk forskyvning |
US9513261B2 (en) | 2013-10-14 | 2016-12-06 | Infineon Technologies Ag | Photoacoustic gas sensor device and a method for analyzing gas |
NO20140263A1 (no) | 2014-02-28 | 2015-08-31 | Pgs Geophysical As | Optisk bevegelsessensor |
US9404860B2 (en) | 2014-05-09 | 2016-08-02 | Apple Inc. | Micro-electro-mechanical system optical sensor with tilt plates |
CN104502016B (zh) * | 2014-12-04 | 2017-06-09 | 刘玉珏 | 一种基于mems工艺的腔长可调f‑p压力传感器及成型方法 |
CN104596685B (zh) * | 2014-12-04 | 2017-05-10 | 刘玉珏 | 一种基于mems工艺的微型封装f‑p压力传感器及成型方法 |
GB201506046D0 (en) | 2015-04-09 | 2015-05-27 | Sinvent As | Speech recognition |
ES2789448T3 (es) * | 2015-09-21 | 2020-10-26 | Opsens Solutions Inc | Captador de presión óptico con menos tensiones mecánicas |
NO344002B1 (en) * | 2015-09-29 | 2019-08-12 | Sintef Tto As | Optical gas detector |
NO343314B1 (no) * | 2015-11-29 | 2019-01-28 | Tunable As | Optisk trykksensor |
GB201807889D0 (en) | 2018-05-15 | 2018-06-27 | Sintef Tto As | Microphone housing |
CN112449295A (zh) | 2019-08-30 | 2021-03-05 | 华为技术有限公司 | 麦克风芯片、麦克风及终端设备 |
US20240107239A1 (en) * | 2022-09-26 | 2024-03-28 | Aac Acoustic Technologies (Shenzhen) Co., Ltd. | Mems optical microphone |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB8506589D0 (en) | 1985-03-14 | 1985-04-17 | Ici Plc | Pressure sensor |
JPH0690329B2 (ja) | 1985-10-16 | 1994-11-14 | ブリティシュ・テレコミュニケ−ションズ・パブリック・リミテッド・カンパニ | ファブリペロ−干渉計 |
US4983824A (en) | 1989-07-06 | 1991-01-08 | Metricor Inc. | Optically resonant sensor with increased monotonic range |
EP0460357A3 (en) | 1990-06-08 | 1992-07-29 | Landis & Gyr Betriebs Ag | Device for optical measurement of pressure differences |
US5165416A (en) * | 1990-08-23 | 1992-11-24 | Colin Electronics Co., Ltd. | Continuous blood pressure monitoring system having a digital cuff calibration system and method |
CH681047A5 (en) | 1991-11-25 | 1992-12-31 | Landis & Gyr Betriebs Ag | Measuring parameter, esp. pressure difference, using Fabry-Perot detector - controlling optical length of detector according to output parameter to determine working point on graph |
US5909280A (en) | 1992-01-22 | 1999-06-01 | Maxam, Inc. | Method of monolithically fabricating a microspectrometer with integrated detector |
FI98095C (fi) * | 1992-05-19 | 1997-04-10 | Vaisala Technologies Inc Oy | Fabry-Perot resonaattoriin perustuva optinen voima-anturi, jossa ilmaisimen osana toimii pyyhkäisevä Fabry-Perot resonaattori |
US5479539A (en) * | 1994-06-15 | 1995-12-26 | Texas Instruments Incorporated | Integrated optical transmitter and receiver |
FI98325C (fi) | 1994-07-07 | 1997-05-26 | Vaisala Oy | Selektiivinen infrapunadetektori |
GB2338059B (en) | 1998-05-20 | 2000-03-08 | Bookham Technology Ltd | An optically addressed sensing system |
-
2001
- 2001-11-29 NO NO20015825A patent/NO315177B1/no not_active IP Right Cessation
-
2002
- 2002-10-02 AU AU2002329130A patent/AU2002329130A1/en not_active Abandoned
- 2002-10-02 EP EP02765714A patent/EP1451547B1/en not_active Expired - Lifetime
- 2002-10-02 WO PCT/NO2002/000355 patent/WO2003046498A1/en not_active Application Discontinuation
- 2002-10-02 PT PT02765714T patent/PT1451547E/pt unknown
- 2002-10-02 AT AT02765714T patent/ATE324577T1/de active
- 2002-10-02 DK DK02765714T patent/DK1451547T3/da active
- 2002-10-02 CA CA002465311A patent/CA2465311C/en not_active Expired - Lifetime
- 2002-10-02 ES ES02765714T patent/ES2262837T3/es not_active Expired - Lifetime
- 2002-10-02 DE DE60211016T patent/DE60211016T2/de not_active Expired - Lifetime
- 2002-10-02 US US10/497,099 patent/US7164479B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
NO20015825L (no) | 2003-05-30 |
AU2002329130A1 (en) | 2003-06-10 |
ATE324577T1 (de) | 2006-05-15 |
NO20015825D0 (no) | 2001-11-29 |
EP1451547B1 (en) | 2006-04-26 |
CA2465311A1 (en) | 2003-06-05 |
NO315177B1 (no) | 2003-07-21 |
WO2003046498A1 (en) | 2003-06-05 |
US7164479B2 (en) | 2007-01-16 |
DE60211016T2 (de) | 2006-11-30 |
CA2465311C (en) | 2009-08-25 |
US20050105098A1 (en) | 2005-05-19 |
PT1451547E (pt) | 2006-09-29 |
EP1451547A1 (en) | 2004-09-01 |
DE60211016D1 (de) | 2006-06-01 |
ES2262837T3 (es) | 2006-12-01 |
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