DK1254473T3 - Elektronisk skiftende mikromagnetisk holderelæ og fremgangsmåde til betjening af samme - Google Patents
Elektronisk skiftende mikromagnetisk holderelæ og fremgangsmåde til betjening af sammeInfo
- Publication number
- DK1254473T3 DK1254473T3 DK01905135T DK01905135T DK1254473T3 DK 1254473 T3 DK1254473 T3 DK 1254473T3 DK 01905135 T DK01905135 T DK 01905135T DK 01905135 T DK01905135 T DK 01905135T DK 1254473 T3 DK1254473 T3 DK 1254473T3
- Authority
- DK
- Denmark
- Prior art keywords
- relay
- state
- micromagnetic
- operating
- same
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H50/00—Details of electromagnetic relays
- H01H50/005—Details of electromagnetic relays using micromechanics
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3566—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details involving bending a beam, e.g. with cantilever
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/3572—Magnetic force
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/358—Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H50/00—Details of electromagnetic relays
- H01H50/005—Details of electromagnetic relays using micromechanics
- H01H2050/007—Relays of the polarised type, e.g. the MEMS relay beam having a preferential magnetisation direction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H67/00—Electrically-operated selector switches
- H01H67/22—Switches without multi-position wipers
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Micromachines (AREA)
- Relay Circuits (AREA)
- Switches With Compound Operations (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/496,446 US6469602B2 (en) | 1999-09-23 | 2000-02-02 | Electronically switching latching micro-magnetic relay and method of operating same |
Publications (1)
Publication Number | Publication Date |
---|---|
DK1254473T3 true DK1254473T3 (da) | 2006-01-23 |
Family
ID=23972649
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DK01905135T DK1254473T3 (da) | 2000-02-02 | 2001-01-26 | Elektronisk skiftende mikromagnetisk holderelæ og fremgangsmåde til betjening af samme |
Country Status (11)
Country | Link |
---|---|
US (2) | US6469602B2 (da) |
EP (1) | EP1254473B1 (da) |
JP (1) | JP2003522377A (da) |
KR (1) | KR100474536B1 (da) |
CN (1) | CN1419702A (da) |
AT (1) | ATE304218T1 (da) |
AU (1) | AU2001233046A1 (da) |
DE (1) | DE60113233T2 (da) |
DK (1) | DK1254473T3 (da) |
ES (1) | ES2249409T3 (da) |
WO (1) | WO2001057899A1 (da) |
Families Citing this family (67)
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US6853067B1 (en) | 1999-10-12 | 2005-02-08 | Microassembly Technologies, Inc. | Microelectromechanical systems using thermocompression bonding |
US7064879B1 (en) * | 2000-04-07 | 2006-06-20 | Microsoft Corporation | Magnetically actuated microelectrochemical systems actuator |
US20020096421A1 (en) * | 2000-11-29 | 2002-07-25 | Cohn Michael B. | MEMS device with integral packaging |
WO2002080207A1 (en) * | 2001-03-30 | 2002-10-10 | Arizona State University | Micro-machined radio frequency switches and method of operating the same |
US6894592B2 (en) * | 2001-05-18 | 2005-05-17 | Magfusion, Inc. | Micromagnetic latching switch packaging |
US20020196110A1 (en) * | 2001-05-29 | 2002-12-26 | Microlab, Inc. | Reconfigurable power transistor using latching micromagnetic switches |
US6633158B1 (en) * | 2001-09-17 | 2003-10-14 | Jun Shen | Micro magnetic proximity sensor apparatus and sensing method |
JP2005503659A (ja) * | 2001-09-17 | 2005-02-03 | スタフォード,ジョン | マイクロ磁気ラッチ・リレーのパッケージおよびパッケージの方法 |
US7301334B2 (en) * | 2001-09-17 | 2007-11-27 | Schneider Electric Industries Sas | Micro magnetic proximity sensor system |
JP2003188882A (ja) * | 2001-10-12 | 2003-07-04 | Hiroyuki Shinoda | 通信装置、通信デバイス、基板実装方法および触覚センサ |
US20030080839A1 (en) * | 2001-10-31 | 2003-05-01 | Wong Marvin Glenn | Method for improving the power handling capacity of MEMS switches |
US6717496B2 (en) * | 2001-11-13 | 2004-04-06 | The Board Of Trustees Of The University Of Illinois | Electromagnetic energy controlled low actuation voltage microelectromechanical switch |
US20030107460A1 (en) * | 2001-12-10 | 2003-06-12 | Guanghua Huang | Low voltage MEM switch |
US6836194B2 (en) * | 2001-12-21 | 2004-12-28 | Magfusion, Inc. | Components implemented using latching micro-magnetic switches |
US20030169135A1 (en) * | 2001-12-21 | 2003-09-11 | Jun Shen | Latching micro-magnetic switch array |
JP3770158B2 (ja) * | 2001-12-26 | 2006-04-26 | ソニー株式会社 | Mems素子の製造方法 |
US20030179057A1 (en) * | 2002-01-08 | 2003-09-25 | Jun Shen | Packaging of a micro-magnetic switch with a patterned permanent magnet |
US20030137374A1 (en) * | 2002-01-18 | 2003-07-24 | Meichun Ruan | Micro-Magnetic Latching switches with a three-dimensional solenoid coil |
EP1331656A1 (en) * | 2002-01-23 | 2003-07-30 | Alcatel | Process for fabricating an adsl relay array |
US20030222740A1 (en) * | 2002-03-18 | 2003-12-04 | Microlab, Inc. | Latching micro-magnetic switch with improved thermal reliability |
US6924966B2 (en) * | 2002-05-29 | 2005-08-02 | Superconductor Technologies, Inc. | Spring loaded bi-stable MEMS switch |
US20030227035A1 (en) * | 2002-06-05 | 2003-12-11 | Hiromu Ishii | Micromachine and manufacturing method therefor |
CN100565740C (zh) | 2002-09-18 | 2009-12-02 | 麦克弗森公司 | 层压机电系统 |
US20040121505A1 (en) | 2002-09-30 | 2004-06-24 | Magfusion, Inc. | Method for fabricating a gold contact on a microswitch |
US7317232B2 (en) * | 2002-10-22 | 2008-01-08 | Cabot Microelectronics Corporation | MEM switching device |
US6943448B2 (en) * | 2003-01-23 | 2005-09-13 | Akustica, Inc. | Multi-metal layer MEMS structure and process for making the same |
US6831542B2 (en) * | 2003-02-26 | 2004-12-14 | International Business Machines Corporation | Micro-electromechanical inductive switch |
US7005876B2 (en) * | 2003-04-14 | 2006-02-28 | Magfusion, Inc. | Wafer-level tester with magnet to test latching micro-magnetic switches |
DE10340619B4 (de) * | 2003-09-03 | 2011-06-01 | Rohde & Schwarz Gmbh & Co. Kg | Eichleitung |
US20050083157A1 (en) * | 2003-10-15 | 2005-04-21 | Magfusion, Inc. | Micro magnetic latching switches and methods of making same |
CN1319096C (zh) * | 2004-01-16 | 2007-05-30 | 北京工业大学 | 一种微机械电磁继电器及其制备方法 |
FR2880729B1 (fr) * | 2005-01-10 | 2009-02-27 | Schneider Electric Ind Sas | Microsysteme a commande electromagnetique |
FR2880730A1 (fr) * | 2005-01-10 | 2006-07-14 | Schneider Electric Ind Sas | Microsysteme utilisant un microactionneur magnetique a aimant permanent. |
DE602006012619D1 (de) * | 2005-01-10 | 2010-04-15 | Schneider Electric Ind Sas | Mikrosystem mit integrierter rückhaltemagnetschaltung |
US9284183B2 (en) | 2005-03-04 | 2016-03-15 | Ht Microanalytical, Inc. | Method for forming normally closed micromechanical device comprising a laterally movable element |
US7692521B1 (en) | 2005-05-12 | 2010-04-06 | Microassembly Technologies, Inc. | High force MEMS device |
KR100726434B1 (ko) | 2005-07-29 | 2007-06-11 | 삼성전자주식회사 | 수직 콤 액츄에이터 알에프 멤스 스위치 |
US7482899B2 (en) * | 2005-10-02 | 2009-01-27 | Jun Shen | Electromechanical latching relay and method of operating same |
GB0618045D0 (en) * | 2006-09-13 | 2006-10-25 | Cavendish Kinetics Ltd | Non-volatile memory bitcell |
US8174343B2 (en) * | 2006-09-24 | 2012-05-08 | Magvention (Suzhou) Ltd. | Electromechanical relay and method of making same |
US7598829B1 (en) | 2007-05-25 | 2009-10-06 | National Semiconductor Corporation | MEMS actuator and relay with vertical actuation |
US7602267B1 (en) | 2007-05-25 | 2009-10-13 | National Semiconductor Corporation | MEMS actuator and relay with horizontal actuation |
US7644490B1 (en) * | 2007-05-25 | 2010-01-12 | National Semiconductor Corporation | Method of forming a microelectromechanical (MEMS) device |
FR2926922B1 (fr) * | 2008-01-30 | 2010-02-19 | Schneider Electric Ind Sas | Dispositif de commande a double mode d'actionnement |
US9019756B2 (en) * | 2008-02-14 | 2015-04-28 | Cavendish Kinetics, Ltd | Architecture for device having cantilever electrode |
US8665041B2 (en) * | 2008-03-20 | 2014-03-04 | Ht Microanalytical, Inc. | Integrated microminiature relay |
US8451077B2 (en) * | 2008-04-22 | 2013-05-28 | International Business Machines Corporation | MEMS switches with reduced switching voltage and methods of manufacture |
US8068002B2 (en) * | 2008-04-22 | 2011-11-29 | Magvention (Suzhou), Ltd. | Coupled electromechanical relay and method of operating same |
US7902946B2 (en) * | 2008-07-11 | 2011-03-08 | National Semiconductor Corporation | MEMS relay with a flux path that is decoupled from an electrical path through the switch and a suspension structure that is independent of the core structure and a method of forming the same |
US8314467B1 (en) | 2009-02-20 | 2012-11-20 | Rf Micro Devices, Inc. | Thermally tolerant electromechanical actuators |
US8143978B2 (en) * | 2009-02-23 | 2012-03-27 | Magvention (Suzhou), Ltd. | Electromechanical relay and method of operating same |
US8570122B1 (en) * | 2009-05-13 | 2013-10-29 | Rf Micro Devices, Inc. | Thermally compensating dieletric anchors for microstructure devices |
US8836454B2 (en) * | 2009-08-11 | 2014-09-16 | Telepath Networks, Inc. | Miniature magnetic switch structures |
US8159320B2 (en) * | 2009-09-14 | 2012-04-17 | Meichun Ruan | Latching micro-magnetic relay and method of operating same |
US8581679B2 (en) * | 2010-02-26 | 2013-11-12 | Stmicroelectronics Asia Pacific Pte. Ltd. | Switch with increased magnetic sensitivity |
DE102010002818B4 (de) * | 2010-03-12 | 2017-08-31 | Robert Bosch Gmbh | Verfahren zur Herstellung eines mikromechanischen Bauelementes |
US8432240B2 (en) | 2010-07-16 | 2013-04-30 | Telepath Networks, Inc. | Miniature magnetic switch structures |
WO2012040092A1 (en) | 2010-09-21 | 2012-03-29 | Cavendish Kinetics, Inc | Pull up electrode and waffle type microstructure |
US8957747B2 (en) | 2010-10-27 | 2015-02-17 | Telepath Networks, Inc. | Multi integrated switching device structures |
WO2013049196A2 (en) | 2011-09-30 | 2013-04-04 | Telepath Networks, Inc. | Multi integrated switching device structures |
DE102014201100B4 (de) | 2013-02-14 | 2016-01-14 | Ford Global Technologies, Llc | Bestimmungs verfahren und Kraftfahrzeug |
US9972459B1 (en) | 2013-09-09 | 2018-05-15 | Apple Inc. | Tactile switch assembly in an electronic device |
US10109432B1 (en) * | 2014-06-16 | 2018-10-23 | Apple Inc. | Switch assemblies |
US10145906B2 (en) | 2015-12-17 | 2018-12-04 | Analog Devices Global | Devices, systems and methods including magnetic structures |
US10707032B1 (en) | 2016-12-02 | 2020-07-07 | Apple Inc. | Electronic device having travel-magnifying input/output structure |
US10825628B2 (en) | 2017-07-17 | 2020-11-03 | Analog Devices Global Unlimited Company | Electromagnetically actuated microelectromechanical switch |
CN110033993A (zh) * | 2019-04-03 | 2019-07-19 | 成都宏明电子科大新材料有限公司 | 一种微型继电器及制造方法 |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4570139A (en) | 1984-12-14 | 1986-02-11 | Eaton Corporation | Thin-film magnetically operated micromechanical electric switching device |
FR2618914B1 (fr) | 1987-07-31 | 1991-12-06 | Alain Souloumiac | Perfectionnements apportes aux interrupteurs optomagnetiques |
JP2714736B2 (ja) * | 1992-06-01 | 1998-02-16 | シャープ株式会社 | マイクロリレー |
JPH06251684A (ja) | 1993-02-24 | 1994-09-09 | Sharp Corp | 電磁式リレー |
US5472539A (en) | 1994-06-06 | 1995-12-05 | General Electric Company | Methods for forming and positioning moldable permanent magnets on electromagnetically actuated microfabricated components |
US5475353A (en) * | 1994-09-30 | 1995-12-12 | General Electric Company | Micromachined electromagnetic switch with fixed on and off positions using three magnets |
US5629918A (en) * | 1995-01-20 | 1997-05-13 | The Regents Of The University Of California | Electromagnetically actuated micromachined flap |
US5847631A (en) | 1995-10-10 | 1998-12-08 | Georgia Tech Research Corporation | Magnetic relay system and method capable of microfabrication production |
FR2742917B1 (fr) | 1995-12-22 | 1998-02-13 | Suisse Electronique Microtech | Dispositif miniature pour executer une fonction predeterminee, notamment microrelais |
US5945898A (en) | 1996-05-31 | 1999-08-31 | The Regents Of The University Of California | Magnetic microactuator |
US6094116A (en) | 1996-08-01 | 2000-07-25 | California Institute Of Technology | Micro-electromechanical relays |
US5742712A (en) | 1996-10-08 | 1998-04-21 | E-Tek Dynamics, Inc. | Efficient electromechanical optical switches |
US6028689A (en) | 1997-01-24 | 2000-02-22 | The United States Of America As Represented By The Secretary Of The Air Force | Multi-motion micromirror |
EP0968530A4 (en) | 1997-02-04 | 2001-04-25 | California Inst Of Techn | MICRO-ELECTROMECHANICAL RELAY |
FR2761518B1 (fr) | 1997-04-01 | 1999-05-28 | Suisse Electronique Microtech | Moteur planaire magnetique et micro-actionneur magnetique comportant un tel moteur |
US5818316A (en) | 1997-07-15 | 1998-10-06 | Motorola, Inc. | Nonvolatile programmable switch |
CA2211830C (en) | 1997-08-22 | 2002-08-13 | Cindy Xing Qiu | Miniature electromagnetic microwave switches and switch arrays |
CH692829A5 (de) | 1997-11-20 | 2002-11-15 | Axicom Ltd | Mikrorelais als miniaturisiertes Flachspul-Relais. |
DE19820821C1 (de) * | 1998-05-09 | 1999-12-16 | Inst Mikrotechnik Mainz Gmbh | Elektromagnetisches Relais |
US6143997A (en) | 1999-06-04 | 2000-11-07 | The Board Of Trustees Of The University Of Illinois | Low actuation voltage microelectromechanical device and method of manufacture |
US6124650A (en) | 1999-10-15 | 2000-09-26 | Lucent Technologies Inc. | Non-volatile MEMS micro-relays using magnetic actuators |
-
2000
- 2000-02-02 US US09/496,446 patent/US6469602B2/en not_active Expired - Lifetime
- 2000-06-19 US US09/596,608 patent/US6469603B1/en not_active Expired - Lifetime
-
2001
- 2001-01-26 CN CN01807026A patent/CN1419702A/zh active Pending
- 2001-01-26 JP JP2001557063A patent/JP2003522377A/ja active Pending
- 2001-01-26 AU AU2001233046A patent/AU2001233046A1/en not_active Abandoned
- 2001-01-26 ES ES01905135T patent/ES2249409T3/es not_active Expired - Lifetime
- 2001-01-26 AT AT01905135T patent/ATE304218T1/de active
- 2001-01-26 DK DK01905135T patent/DK1254473T3/da active
- 2001-01-26 WO PCT/US2001/002722 patent/WO2001057899A1/en active IP Right Grant
- 2001-01-26 EP EP01905135A patent/EP1254473B1/en not_active Expired - Lifetime
- 2001-01-26 KR KR10-2002-7009830A patent/KR100474536B1/ko not_active IP Right Cessation
- 2001-01-26 DE DE60113233T patent/DE60113233T2/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE60113233T2 (de) | 2007-01-18 |
JP2003522377A (ja) | 2003-07-22 |
KR20030028451A (ko) | 2003-04-08 |
KR100474536B1 (ko) | 2005-03-10 |
DE60113233D1 (de) | 2005-10-13 |
US6469603B1 (en) | 2002-10-22 |
AU2001233046A1 (en) | 2001-08-14 |
ATE304218T1 (de) | 2005-09-15 |
US20020050880A1 (en) | 2002-05-02 |
CN1419702A (zh) | 2003-05-21 |
US6469602B2 (en) | 2002-10-22 |
EP1254473B1 (en) | 2005-09-07 |
ES2249409T3 (es) | 2006-04-01 |
EP1254473A1 (en) | 2002-11-06 |
WO2001057899A1 (en) | 2001-08-09 |
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