DK112794B - Apparat til digelfri zonesmeltning. - Google Patents
Apparat til digelfri zonesmeltning.Info
- Publication number
- DK112794B DK112794B DK193964AA DK193964A DK112794B DK 112794 B DK112794 B DK 112794B DK 193964A A DK193964A A DK 193964AA DK 193964 A DK193964 A DK 193964A DK 112794 B DK112794 B DK 112794B
- Authority
- DK
- Denmark
- Prior art keywords
- crucible
- free zone
- zone melting
- melting
- free
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/08—Downward pulling
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/16—Heating of the molten zone
- C30B13/20—Heating of the molten zone by induction, e.g. hot wire technique
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10S117/91—Downward pulling
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
- Y10T117/1072—Seed pulling including details of means providing product movement [e.g., shaft guides, servo means]
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crucibles And Fluidized-Bed Furnaces (AREA)
- Manufacture And Refinement Of Metals (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DES0086157 | 1963-07-13 | ||
DES0099116 | 1965-08-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
DK112794B true DK112794B (da) | 1969-01-20 |
Family
ID=25997302
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DK193964AA DK112794B (da) | 1963-07-13 | 1964-04-20 | Apparat til digelfri zonesmeltning. |
Country Status (6)
Country | Link |
---|---|
US (1) | US3563810A (de) |
BE (2) | BE650386A (de) |
CH (1) | CH407959A (de) |
DE (2) | DE1719021B1 (de) |
DK (1) | DK112794B (de) |
GB (2) | GB1012998A (de) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59190300A (ja) * | 1983-04-08 | 1984-10-29 | Hitachi Ltd | 半導体製造方法および装置 |
DE3433458A1 (de) * | 1984-09-12 | 1986-03-20 | Leybold-Heraeus GmbH, 5000 Köln | Verfahren und vorrichtung zum abschmelzen von stangenfoermigem material mittels einer induktionsspule |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE975158C (de) * | 1953-12-30 | 1961-09-14 | Siemens Ag | Verfahren und Vorrichtung zum tiegelfreien Zonenschmelzen eines langgestreckten stabfoermigen Koerpers |
AT194444B (de) * | 1953-02-26 | 1958-01-10 | Siemens Ag | Verfahren und Einrichtung zur Behandlung einer längserstreckten Halbleiterkristallanordnung |
NL108958C (de) * | 1959-05-29 |
-
1963
- 1963-07-13 DE DE19631719021D patent/DE1719021B1/de active Pending
-
1964
- 1964-04-06 CH CH431364A patent/CH407959A/de unknown
- 1964-04-20 DK DK193964AA patent/DK112794B/da unknown
- 1964-07-10 BE BE650386D patent/BE650386A/xx unknown
- 1964-07-13 GB GB28882/64A patent/GB1012998A/en not_active Expired
-
1965
- 1965-08-28 DE DE1519879A patent/DE1519879C3/de not_active Expired
-
1966
- 1966-08-24 BE BE685925D patent/BE685925A/xx unknown
- 1966-08-30 GB GB38719/66A patent/GB1084930A/en not_active Expired
-
1969
- 1969-06-12 US US840105A patent/US3563810A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
BE650386A (de) | 1965-01-11 |
GB1084930A (en) | 1967-09-27 |
DE1519879C3 (de) | 1974-05-09 |
US3563810A (en) | 1971-02-16 |
DE1519879B2 (de) | 1973-08-16 |
DE1519879A1 (de) | 1970-02-26 |
DE1719021B1 (de) | 1969-09-11 |
GB1012998A (en) | 1965-12-15 |
BE685925A (de) | 1967-02-24 |
CH407959A (de) | 1966-02-28 |
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