DEH0025641MA - - Google Patents

Info

Publication number

DEH0025641MA

DEH0025641MA DEH0025641MA DE H0025641M A DEH0025641M A DE H0025641MA DE H0025641M A DEH0025641M A DE H0025641MA

Authority

DE

Germany

Prior art keywords

scale

optical

sensor according

mirror

prisms

Prior art date

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Active

Links

• Espacenet
• Global Dossier
• DPMA
• Discuss

• 230000003287 optical effect Effects 0.000 claims description 16
• 238000005259 measurement Methods 0.000 claims description 10
• 238000003384 imaging method Methods 0.000 claims description 9
• 239000000523 sample Substances 0.000 claims description 4
• 238000013507 mapping Methods 0.000 claims description 3
• 238000013519 translation Methods 0.000 description 4
• 238000006073 displacement reaction Methods 0.000 description 2
• 239000011521 glass Substances 0.000 description 2
• 230000005540 biological transmission Effects 0.000 description 1
• 230000015572 biosynthetic process Effects 0.000 description 1
• 238000013461 design Methods 0.000 description 1
• 238000013508 migration Methods 0.000 description 1
• 230000005012 migration Effects 0.000 description 1
• 230000005855 radiation Effects 0.000 description 1