DE974076C - Process for the production of protective layers on surface mirrors - Google Patents

Process for the production of protective layers on surface mirrors

Info

Publication number
DE974076C
DE974076C DEH4229D DEH0004229D DE974076C DE 974076 C DE974076 C DE 974076C DE H4229 D DEH4229 D DE H4229D DE H0004229 D DEH0004229 D DE H0004229D DE 974076 C DE974076 C DE 974076C
Authority
DE
Germany
Prior art keywords
oxygen
production
protective layers
protected
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DEH4229D
Other languages
German (de)
Inventor
Georg Dr Hass
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to DEH4229D priority Critical patent/DE974076C/en
Application granted granted Critical
Publication of DE974076C publication Critical patent/DE974076C/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/10—Glass or silica
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5846—Reactive treatment
    • C23C14/5853—Oxidation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Optical Elements Other Than Lenses (AREA)

Description

Verfahren zur Herstellung von Schutzschichten auf Oberflächenspiegeln An anderer Stelle ist ein Verfahren beschrieben, das zur Herstellung von- gegen chemische oder mechanische Einwirkungen beständigen Oberflächenspiegeln dient und bei dessen Durchführung auf einer hochreflektierenden Metallschicht eine schützende Schicht aufgebracht wird, welche Silizium und Sauerstoff in annähernd gleichen atomaren Verhältnissen enthält. Diese Si O-Schicht zeigt gute Haftfestigkeit, Härte und Korrosionsbeständigkeit. Hierbei wird das Si O durch Reduktion bei hoher Temperatur aus sauerstoffhaltigen Silizium-Verbindungen im dampfförmigen Zustand hergestellt und auf dem zu schützenden Oberflächenspiegel niedergeschlagen. Die mechanischen und chemischen Eigenschaften der Si O-Schutzschicht lassen sich nun noch weiter verbessern, wenn gemäß der vorliegenden Erfindung in folgender Weise vorgegangen wird: Sauerstoffhaltige Silizium-Verbindungen werden unter Zusatz von reduzierenden Stoffen bei erhöhter Temperatur reduziert und so ein Dampf von SiO erzeugt. Durch Abkühlung wird dieser Dampf in den festen Aggregatzustand übergeführt, und man erhält einen Körper, welcher Si und O in annähernd gleichen atomaren Verhältnissen enthält.Process for the production of protective layers on surface mirrors Elsewhere, a process is described that is used for the production of- against surface mirror resistant to chemical or mechanical effects is used and when it is carried out on a highly reflective metal layer, a protective one Layer is applied, which silicon and oxygen in approximately equal atomic Contains proportions. This Si O layer shows good adhesive strength, hardness and corrosion resistance. Here, the Si O is converted from oxygen-containing ones by reduction at high temperature Silicon compounds are made in the vapor state and on the to be protected Surface mirror downcast. The mechanical and chemical properties the SiO protective layer can now be improved even further if according to the present invention Invention is proceeded in the following way: Oxygen-containing silicon compounds are reduced with the addition of reducing substances at elevated temperature thus generating a vapor of SiO. By cooling, this steam becomes solid Physical state transferred, and you get a body, which Si and O in approximately contains the same atomic proportions.

Bei der Bedampfung der zu schützenden Oberflächenspiegel wird nun nicht wie bisher beispielsweise von einem Gemisch von Si 02 und Si ausgegangen, sondern man geht von dem auf die vorher geschilderte Weise erhaltenen Si O aus. Dieses wird z. B. in einem Schiffchen im Hochvakuum erhitzt, und der entstehende sehr reine Si0-Dampf schlägt sich auf dem Spiegel als Schutzschicht nieder.When the surface mirror to be protected is vaporized not assumed as before, for example, a mixture of Si 02 and Si, but the starting point is the Si O obtained in the manner described above. This will z. B. heated in a boat in a high vacuum, and the resulting very pure SiO vapor is deposited on the mirror as a protective layer.

Die so erhaltenen Schutzschichten zeigen besonders gute Haftfestigkeit, und auch die an sich schon sehr bedeutende Härte der bisherigen Schichten erfährt ebenfalls noch eine Steigerung.The protective layers obtained in this way show particularly good adhesive strength, and also experiences the already very significant hardness of the previous layers also an increase.

Claims (1)

PATENTANSPRUCH: Verfahren zur Herstellung von gegen chemische und mechanische Einwirkungen beständigen Schutzschichten durch Erzeugen einer Silizium und Sauerstoff in annähernd gleichen atomaren Verhältnissen enthaltenden Verbindung auf dem zu schützenden Oberflächenspiegel und anschließender Oxydation zu Siliziumdioxyd, dadurch gekennzeichnet, daß ein Silizium und Sauerstoff in annähernd gleichen atomaren Verhältnissen enthaltender Stoff im festen Aggregatzustand (Si O) verdampft und dessen Dampf auf der zu schützenden Fläche niedergeschlagen wird, wobei das Si O in an sich bekannter Weise durch Reduktion von sauerstoffhaltigen Siliziumverbindungen bei erhöhter Temperatur und Abkühlung des dabei entstehenden Dampfes bis zum festen Aggregatzustand erhalten wird. In Betracht gezogene Druckschriften: Zt. f. anorgan. Chemie, Bd. a45 (r94o), Heft r, S. r bis 7; A n g e r e r, »Technische Kunstgriffe bei physikalischen Untersuchungen«, i936, S.64. PATENT CLAIM: Process for the production of protective layers resistant to chemical and mechanical effects by generating a compound containing silicon and oxygen in approximately the same atomic proportions on the surface to be protected and subsequent oxidation to silicon dioxide, characterized in that a silicon and oxygen in approximately the same atomic proportions containing substance evaporates in the solid state of aggregation (Si O) and its vapor is deposited on the surface to be protected, the Si O being obtained in a manner known per se by reducing oxygen-containing silicon compounds at elevated temperature and cooling the resulting vapor to a solid state of aggregation . Considered publications: Zt. F. Inorganic. Chemie, Vol. A45 (r94o), Heft r, pp. R to 7; Another, "Technical Tricks in Physical Investigations," 1936, p.64.
DEH4229D 1943-06-13 1943-06-13 Process for the production of protective layers on surface mirrors Expired DE974076C (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DEH4229D DE974076C (en) 1943-06-13 1943-06-13 Process for the production of protective layers on surface mirrors

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEH4229D DE974076C (en) 1943-06-13 1943-06-13 Process for the production of protective layers on surface mirrors

Publications (1)

Publication Number Publication Date
DE974076C true DE974076C (en) 1960-09-01

Family

ID=7143896

Family Applications (1)

Application Number Title Priority Date Filing Date
DEH4229D Expired DE974076C (en) 1943-06-13 1943-06-13 Process for the production of protective layers on surface mirrors

Country Status (1)

Country Link
DE (1) DE974076C (en)

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

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