DE9101392U1 - Interferometrisches Laser-Wegmeßsystem - Google Patents

Interferometrisches Laser-Wegmeßsystem

Info

Publication number
DE9101392U1
DE9101392U1 DE9101392U DE9101392U DE9101392U1 DE 9101392 U1 DE9101392 U1 DE 9101392U1 DE 9101392 U DE9101392 U DE 9101392U DE 9101392 U DE9101392 U DE 9101392U DE 9101392 U1 DE9101392 U1 DE 9101392U1
Authority
DE
Germany
Prior art keywords
interferometer
measuring
measuring system
beam path
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE9101392U
Other languages
German (de)
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss Jena GmbH filed Critical Carl Zeiss Jena GmbH
Priority to DE9101392U priority Critical patent/DE9101392U1/de
Publication of DE9101392U1 publication Critical patent/DE9101392U1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0011—Arrangements for eliminating or compensation of measuring errors due to temperature or weight
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/60—Reference interferometer, i.e. additional interferometer not interacting with object

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
DE9101392U 1991-02-07 1991-02-07 Interferometrisches Laser-Wegmeßsystem Expired - Lifetime DE9101392U1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE9101392U DE9101392U1 (de) 1991-02-07 1991-02-07 Interferometrisches Laser-Wegmeßsystem

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE9101392U DE9101392U1 (de) 1991-02-07 1991-02-07 Interferometrisches Laser-Wegmeßsystem

Publications (1)

Publication Number Publication Date
DE9101392U1 true DE9101392U1 (de) 1991-04-25

Family

ID=6864064

Family Applications (1)

Application Number Title Priority Date Filing Date
DE9101392U Expired - Lifetime DE9101392U1 (de) 1991-02-07 1991-02-07 Interferometrisches Laser-Wegmeßsystem

Country Status (1)

Country Link
DE (1) DE9101392U1 (US20100268047A1-20101021-C00003.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9421542B2 (en) 2010-03-25 2016-08-23 Endress+Hauser Conducta Gmbh+Co. Kg System for treating liquids

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9421542B2 (en) 2010-03-25 2016-08-23 Endress+Hauser Conducta Gmbh+Co. Kg System for treating liquids

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