DE9013672U1 - Stator für eine Turbomolekularvakuumpumpe - Google Patents

Stator für eine Turbomolekularvakuumpumpe

Info

Publication number
DE9013672U1
DE9013672U1 DE9013672U DE9013672U DE9013672U1 DE 9013672 U1 DE9013672 U1 DE 9013672U1 DE 9013672 U DE9013672 U DE 9013672U DE 9013672 U DE9013672 U DE 9013672U DE 9013672 U1 DE9013672 U1 DE 9013672U1
Authority
DE
Germany
Prior art keywords
stator
spacer rings
stator according
edges
ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE9013672U
Other languages
German (de)
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Priority to DE9013672U priority Critical patent/DE9013672U1/de
Publication of DE9013672U1 publication Critical patent/DE9013672U1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
DE9013672U 1990-09-29 1990-09-29 Stator für eine Turbomolekularvakuumpumpe Expired - Lifetime DE9013672U1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE9013672U DE9013672U1 (de) 1990-09-29 1990-09-29 Stator für eine Turbomolekularvakuumpumpe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE9013672U DE9013672U1 (de) 1990-09-29 1990-09-29 Stator für eine Turbomolekularvakuumpumpe

Publications (1)

Publication Number Publication Date
DE9013672U1 true DE9013672U1 (de) 1992-01-30

Family

ID=6857954

Family Applications (1)

Application Number Title Priority Date Filing Date
DE9013672U Expired - Lifetime DE9013672U1 (de) 1990-09-29 1990-09-29 Stator für eine Turbomolekularvakuumpumpe

Country Status (1)

Country Link
DE (1) DE9013672U1 (ru)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE29717764U1 (de) * 1997-10-06 1997-11-20 Leybold Vakuum GmbH, 50968 Köln Stator für eine Turbomolekularvakuumpumpe
DE202011109517U1 (de) * 2011-12-23 2013-03-25 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
DE102014100207A1 (de) * 2014-01-09 2015-07-09 Pfeiffer Vacuum Gmbh Statorscheibe
WO2018029446A1 (en) * 2016-08-08 2018-02-15 Edwards Limited Vacuum pump

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH529297A (fr) * 1970-04-01 1972-10-15 Moteurs D Aviat Et Commissaria Pompe à vide turbomoléculaire à axe vertical
DE2549700A1 (de) * 1975-05-06 1976-11-18 Edoardo Rava Verbesserung an turbomolekular-pumpen

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH529297A (fr) * 1970-04-01 1972-10-15 Moteurs D Aviat Et Commissaria Pompe à vide turbomoléculaire à axe vertical
DE2549700A1 (de) * 1975-05-06 1976-11-18 Edoardo Rava Verbesserung an turbomolekular-pumpen

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE29717764U1 (de) * 1997-10-06 1997-11-20 Leybold Vakuum GmbH, 50968 Köln Stator für eine Turbomolekularvakuumpumpe
DE202011109517U1 (de) * 2011-12-23 2013-03-25 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
EP2607706A2 (de) 2011-12-23 2013-06-26 Oerlikon Leybold Vacuum GmbH Vakuumpumpe
DE102014100207A1 (de) * 2014-01-09 2015-07-09 Pfeiffer Vacuum Gmbh Statorscheibe
EP2894348A1 (de) * 2014-01-09 2015-07-15 Pfeiffer Vacuum Gmbh Statorscheibe
DE102014100207B4 (de) 2014-01-09 2020-07-09 Pfeiffer Vacuum Gmbh Statorscheibe
WO2018029446A1 (en) * 2016-08-08 2018-02-15 Edwards Limited Vacuum pump
US10844864B2 (en) 2016-08-08 2020-11-24 Edwards Limited Vacuum pump

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