DE887382C - Vacuum-tight metal leadthrough through ceramics - Google Patents
Vacuum-tight metal leadthrough through ceramicsInfo
- Publication number
- DE887382C DE887382C DEL5199D DEL0005199D DE887382C DE 887382 C DE887382 C DE 887382C DE L5199 D DEL5199 D DE L5199D DE L0005199 D DEL0005199 D DE L0005199D DE 887382 C DE887382 C DE 887382C
- Authority
- DE
- Germany
- Prior art keywords
- ceramic
- vacuum
- ceramics
- tight metal
- porous
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
- C04B37/02—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles
- C04B37/021—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles in a direct manner, e.g. direct copper bonding [DCB]
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
- C04B37/02—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles
- C04B37/023—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used
- C04B37/025—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used consisting of glass or ceramic material
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/14—Conductive material dispersed in non-conductive inorganic material
- H01B1/16—Conductive material dispersed in non-conductive inorganic material the conductive material comprising metals or alloys
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
- C04B2237/10—Glass interlayers, e.g. frit or flux
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/40—Metallic
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/76—Forming laminates or joined articles comprising at least one member in the form other than a sheet or disc, e.g. two tubes or a tube and a sheet or disc
- C04B2237/765—Forming laminates or joined articles comprising at least one member in the form other than a sheet or disc, e.g. two tubes or a tube and a sheet or disc at least one member being a tube
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/84—Joining of a first substrate with a second substrate at least partially inside the first substrate, where the bonding area is at the inside of the first substrate, e.g. one tube inside another tube
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/88—Joining of two substrates, where a substantial part of the joining material is present outside of the joint, leading to an outside joining of the joint
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Dispersion Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Connections Arranged To Contact A Plurality Of Conductors (AREA)
Description
Es ist bekannt, Metallteile in homogene Keramikstücke so einzuschmelzen, daß eine für Hochvakuumzwecke geeignete Stromdurchführung entsteht. Hierunter fallen auch die sogenannten Metallhautdurchführungen, die besonders in der Hochfrequenztechnik, vorzugsweise im Kurz-Wellengebiet, als konzentrische Durchführungen Bedeutung- erlangt haben. Bei einer solchen Durchführung wird beispielsweise für den einen von den üblicherweise vorhandenen zwei Leitern ein Metallrohr oder ein an den Oberflächen. metallisiertes Keramikrohr verwendet, während der Mittelleiter entweder aus massivem Metall oder ebenfalls aus metallisierter massiver Keramik besteht. In das Rohr wird dann ein Keramikrohr so eingelegt, daß es Träger für den Mittelleiter ist. Dieser Keramikring stellt einen Zwischenboden des Rohres dar, welches selbst, wie ebenfalls bekannt, in die Öffnung eines Keramikteiles, beispielsweise in Platten- oder Topfform, eingesetzt wird. Die vakuumdichte Verbindung sämtlicher Teile erfolgt durch An- oder Aufschmelzen eines geeigneten Glasflusses.It is known to melt metal parts into homogeneous ceramic pieces in such a way that that a current feedthrough suitable for high vacuum purposes is created. Fall under this also the so-called metal skin feedthroughs, which are particularly useful in high-frequency technology, preferably in the short-wave area, as concentric feedthroughs to have. In such an implementation, for example, for one of the Usually two conductors present a metal pipe or one on the surfaces. metallized ceramic tube is used, while the center conductor is either solid Metal or also made of metallized solid ceramic. In the pipe it will Then a ceramic tube is inserted so that it is the carrier for the center conductor. This Ceramic ring represents an intermediate bottom of the tube, which itself, as well known, in the opening of a ceramic part, for example in plate or pot shape, is used. The vacuum-tight connection of all parts is made by connecting or melting a suitable glass flux.
Keramikteile, die bisher für derartige Konstruktionsteile verwendet wurden, sind allgemein als homogen anzusprechen und haben infolge ihrer für thermische Zwecke vorteilhaften Zusammensetzung auch eine sehr große Dielektrizitätskonstante, die wesentlich über dem Wert 5 liegt, sowie infolge der großen Wärmeausdehnung eine geringe Temperaturwechselbeständigkeit.Ceramic parts previously used for such structural parts are generally to be addressed as homogeneous and, as a result, have for thermal For the purpose of advantageous composition also a very large dielectric constant, which is significantly above the value 5, as well as a due to the large thermal expansion low resistance to temperature changes.
Derartige konzentrische Durchführungen stellen physikalisch einen elektrischen Kondensator dar, bei dem die als Träger und Vakuumverschluß vorhandene Keramik teilweise das Dielektrikum bildet. Daher ist eine solche Durchführung, besonders für Röhren, die im Gebiet der Kurzwellen und Ultrawellen verwendet werden sollen, nicht geeignet, da durch die konzentrische Durchführung die ganze vorhandene Hochfrequenzenerge= kapazitiv - verschluckt werden kann und .somit nicht nach außen wirksam wird. Die geringe Temperaturwechselbeständigkeit macht die Verwendung derartiger Keramikteile bei Glasverschmelzungen' schwierig.-Um diesen Übelstand zu beseitigen, und- eine -Durchführung mit wesentlich geringerer schädlicher Kapazität zu erhalten, wird erfindungsgemäß vorgeschlagen, als Dielektrikum ein keramisches Material zu verwenden, dessen Dielektrizitätskonstante wesentlich unter dem Wert 5 liegt. Durch die Anwendung eines solchen keramischen Materials zwischen den Stromleitern bzw. im elektrischen Feld wird die schädliche Kapazität weitest- !, gehend herabgesetzt. Hierzu ist besonders eine Keramik geeignet, -die ein poröses Gefüge besitzt. Zur Erzielung der Vakuumdichtheit kann die poröse Keramik im Bedarfsfall glasiert werden.Such concentric feedthroughs are physically one electrical capacitor, in which the existing as a carrier and vacuum seal Ceramic partially forms the dielectric. Therefore, such an implementation is special for tubes that are to be used in the field of shortwave and ultrawave, not suitable because the concentric implementation means that all of the high-frequency energy available = capacitive - can be swallowed and so does not have an effect on the outside. the The use of such ceramic parts makes them less resistant to temperature changes with glass fusions' difficult.-To remedy this problem, and- a -To get implementation with much less harmful capacity proposed according to the invention to use a ceramic material as the dielectric, whose dielectric constant is significantly below the value 5. Through the application such a ceramic material between the conductors or in the electrical Field, the harmful capacity is reduced as much as possible! This is special a ceramic suitable that has a porous structure. To achieve vacuum tightness the porous ceramic can be glazed if necessary.
Es sind keramische. Massen bekannt, bei denen durch eine große Zahl von Lufteinschüssen eine poröse Struktur erzielt worden ist und die, hervorgerufen durch die geringere Menge an eigentlicher Keramikmasse, eine wesentlich geringere Dielektrizitätskonstante aufweisen. Infolge der Porösität sind diese Massen wesentlich elastischer als homogene; die (Empfindlichkeit gegen schroffe Temperaturwechsel ist somit geringer. Im allgemeinen ist diese Masse infolge der Porösität nicht vollkommen vakuumdicht; dieser Mangel läßt sich, wie bereits angegeben, leicht durch eine geeignete, möglichst dünne Glasur beheben. Diese Glasur ist im allgemeinen ein Glasfluß, dessen Dielektrizitätskonstante verhältnismäßig klein ist. Wenn weiterhin durch geeignete an sich bekannte Maßnahmen dafür gesorgt wird, daß die Glasur möglichst wenig in die poröse Masse eindringt, so sind Dielektrizitätskonstanten wesentlich kleiner als $ unschwer- °zu erreichen. Auf die thermische Empfindlichkeit hat die Glasur praktisch keinen Einfluß. Unter Verwendung derartiger poröser keramischer Massen, -je nach Bedarf- glasiert oder unglasiert, hergestellte elektrische Durchführungen für Hochfrequenzströme stellen demzufolge besonders im Gebiet der Kurzwellen und Ultrakurzwellen eine wesentliche Verbesserung der bisherigen Anordnung dar.They are ceramic. Known to the masses by whom by large numbers a porous structure has been achieved by air inclusions and that caused due to the smaller amount of actual ceramic mass, a much smaller one Have dielectric constant. Due to the porosity, these masses are essential more elastic than homogeneous; the (sensitivity to abrupt changes in temperature is therefore lower. In general, this mass is not perfect due to the porosity vacuum tight; As already stated, this deficiency can easily be remedied by a suitable, Fix the thinnest possible glaze. This glaze is generally a glass flux, its Dielectric constant is relatively small. If continued by appropriate measures known per se ensure that the glaze as little as possible in If the porous mass penetrates, the dielectric constants are much smaller than $ easy to achieve- °. The glaze has a thermal sensitivity practically no influence. Using such porous ceramic masses, -depending on requirements- glazed or unglazed, manufactured electrical feedthroughs for high frequency currents are therefore particularly in the area of short waves and Ultra-short waves represent a significant improvement of the previous arrangement.
Die Abbildung zeigt ein Ausführungsbeispiel einer derartigen konzentrischen Durchführung. Als Außenleiter wird ein Metallrohr i verwendet, 2 ist die poröse Keramik, die zur Abstandshalterung des aus massivem Metall bestehenden Innenleiters 3 dient. Die den keramischen Teile bedeckende Glasur, die gleichzeitig zum' vakuumdichten Verbinden -der einzelnen -Teile dient, ist mit 4. bezeichnet. _ ,The figure shows an embodiment of such a concentric Execution. A metal tube i is used as the outer conductor, 2 is the porous one Ceramic, which is used to hold the spacing of the solid metal inner conductor 3 serves. The glaze covering the ceramic parts, which is also used to 'vacuum seal Connect the individual parts is denoted by 4. _,
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DEL5199D DE887382C (en) | 1942-07-10 | 1942-07-10 | Vacuum-tight metal leadthrough through ceramics |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DEL5199D DE887382C (en) | 1942-07-10 | 1942-07-10 | Vacuum-tight metal leadthrough through ceramics |
Publications (1)
Publication Number | Publication Date |
---|---|
DE887382C true DE887382C (en) | 1953-08-24 |
Family
ID=7256740
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DEL5199D Expired DE887382C (en) | 1942-07-10 | 1942-07-10 | Vacuum-tight metal leadthrough through ceramics |
Country Status (1)
Country | Link |
---|---|
DE (1) | DE887382C (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1091241B (en) * | 1955-10-25 | 1960-10-20 | Siemens Ag | Circuit arrangement for operating a controllable electrical discharge vessel |
-
1942
- 1942-07-10 DE DEL5199D patent/DE887382C/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1091241B (en) * | 1955-10-25 | 1960-10-20 | Siemens Ag | Circuit arrangement for operating a controllable electrical discharge vessel |
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