DE1867491U - HIGH VACUUM TIGHT ELECTRODE ENTRY. - Google Patents

Description

. E LEYBOLO ⁵ S WAGHfOLOER -

Koin-Bayentai, Bonner Str. 504 DA nPfl ')') "' 7 4 A

Γ · Λ _ν υ0 3 LL! ^k d I. l> Our file 4820

High vacuum tight electrode leadthrough

The innovation concerns a highly vacuum-tight electrode leadthrough, in which in a disk-shaped insulating body made of vitreous or ceramic material several electrodes are inserted in a vacuum-tight manner.

One- or two-pole electrode bushings are known, which are used as insulating material contain vitreous or ceramic materials. An example of a design with glass-like insulating material is the vacuum-tight pressure glass seal.

Usually, multi-pole electrode feedthroughs, such as those required in particular for the construction of built-in measuring systems in high vacuum technology, are required are compiled by arranging the appropriate number of single-pole bushings in a flange. To produce such There are essentially two possibilities for multipole bushings.

One possibility is given, for example, that the required in the oven Number of individual feed-throughs in the holes provided in a flange is melted down. However, scaling and warping of the Do not avoid the flange, so that you are forced to use the flange with the Reworking sensitive electrodes, which is not only uneconomical, but. which can also lead to damage to the electrodes. Another method is to use prepared, i.e., fcu already melted into ring-like components Bushings welded into the prepared flange holes. However, this leads to a large number of individual weld seams with an increased risk the leak.

In addition, both construction principles are very expensive in terms of space,

In a further known embodiment, a pressed glass plate is used as the implementation provided with multiple electrodes. With this version, however, no

- 2 185o -

Measurements at high temperatures, e.g. iönisatiönsmähometeressurigenj during the bakeout can be made because the pressed glass plate at high temperatures the individual electrodes are no longer sufficiently isolated from each other »

The innovation specifies a highly vacuum-tight electrode lead-through, in which the difficulties mentioned are avoided. The characteristic the novel implementation is seen in the fact that a disk-shaped " ger insulating body made of vitreous or ceramic material, in which several Electrodes are used in a vacuum-tight manner, with one edge zone of a metallic Pipe section is inextricably connected in a vacuum-tight manner, and that in this insulating body In addition to directly inserted electrodes, a metallic shielding tube is provided, one end face of which is provided with an electrode carrier made of insulating material is connected to another electrode in a vacuum-tight manner * This is the shielding tube inserted in the same way as the electrodes »

It is advantageous to have such insulating bodies which have any number of electrodes can contain, both directly with a glass flask and with the interposition of the metallic pipe section with a mounting flange · can connect «, The metallic shielding tube is advantageous in such cases; in which for measurements a specially protected electrode is required »

In an essential embodiment of the innovation, the electrode carrier is also tubular and in the area of its one end face with the shielding tube and in the area of its other end face with the electrode to be passed through in a non-detachable manner. A ceramic electrode carrier is particularly advantageous. ”Ionization manometer measuring systems with electrode feedthroughs according to this design can also be baked out during the measurement. The isolation of the shielded electrode allows even at elevated temperatures, as are usual in the baking of the vacuum apparatus, for example, 400-450 ⁰ C, the measurement of low currents, because the ceramic retains its high insulation resist stand and the new shape is a long Isolationsweg . When using the new implementation

for ionization manometer measuring systems ^ i.e. for the measurement of pressures as well below 10 "Torr, the heat-out fairness of the components becomes more important, and It is of course advantageous if the heating process is also measured can be followed «

In the drawings, exemplary embodiments of the novel arrangement are schematic shown. Show it;

1 shows an arrangement of an insulating body in a flange, with FIG Another shielded electrode is melted into the insulator,

FIG. 2 shows another arrangement in which the shielded electrode is insulated from the shield by an electrode carrier made of ceramic material _a

x.Zbv. recognizes in Fig. 1 an insulating body 13, which is inserted in the area of one end face of a pipe section 12 in a vacuum-tight manner. The pipe section 12 is in the area of the other end face with a. Flange 11 welded. Electrodes 14, IE and 16 lead through the insulating body 13, the electrode 16 being surrounded by a metallic shielding tube 17 which is likewise fused in. The electrode 16 and the shielding tube 17 are insulated from one another by a tubular glass body 18.

In Fig. 2 can be seen in accordance with Fig. 1, a flange 21 with a pipe section 22, an insulating body 23 with electrodes 24, 25 and 26. The electrode. 26th is surrounded by a shielding tube 27. In this embodiment, the Electrode 26 and shielding tube 27 are insulated from one another by a ceramic body 28. The ceramic body 28 is additionally protected against contamination by a cap 29 »

Claims (2)

■ <r P.A. 069 227 * 31. 1.62 - 4 i S-CΆ U T 1. High vacuum-tight electrode leadthrough in which in a disk-shaped Insulating body made of vitreous or ceramic material, a plurality of electrodes inserted in a vacuum-tight manner are characterized in that the disk-shaped insulating body is connected in a vacuum-tight manner to one edge zone of a metallic pipe section, and that in this insulating body In addition to directly inserted electrodes, a metallic shielding tube is provided, one end face of which is provided with an electrode carrier made of insulating material is connected vacuum-tight to another electrode, 2. Electrode bushing according to claim 1, characterized in that the electrode carrier is also tubular and in the area '. one end face is connected to the shielding tube and in the area of its other end face to the electrode to be passed through in a vacuum-tight, non-detachable manner, C. Electrode leadthrough according to claim 1, since by ch g e.k e η η indicates that the electrode carrier is made of ceramic »