DE8706731U1 - - Google Patents

Info

Publication number
DE8706731U1
DE8706731U1 DE8706731U DE8706731U DE8706731U1 DE 8706731 U1 DE8706731 U1 DE 8706731U1 DE 8706731 U DE8706731 U DE 8706731U DE 8706731 U DE8706731 U DE 8706731U DE 8706731 U1 DE8706731 U1 DE 8706731U1
Authority
DE
Germany
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8706731U
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik Industrial Metrology Germany GmbH
Original Assignee
Hommelwerke GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hommelwerke GmbH filed Critical Hommelwerke GmbH
Priority to DE8706731U priority Critical patent/DE8706731U1/de
Publication of DE8706731U1 publication Critical patent/DE8706731U1/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/60—Reference interferometer, i.e. additional interferometer not interacting with object
DE8706731U 1987-05-11 1987-05-11 Expired DE8706731U1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE8706731U DE8706731U1 (de) 1987-05-11 1987-05-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE8706731U DE8706731U1 (de) 1987-05-11 1987-05-11

Publications (1)

Publication Number Publication Date
DE8706731U1 true DE8706731U1 (de) 1988-09-15

Family

ID=6807890

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8706731U Expired DE8706731U1 (de) 1987-05-11 1987-05-11

Country Status (1)

Country Link
DE (1) DE8706731U1 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0416459A2 (de) * 1989-09-02 1991-03-13 Societe Anonyme Des Etablissements Pierre Roch Elektronische Auswertschaltung für ein Laser-Interferometer
EP0646767A2 (de) * 1993-10-05 1995-04-05 Renishaw plc Interferometrisches Entfernungsmessgerät

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0416459A2 (de) * 1989-09-02 1991-03-13 Societe Anonyme Des Etablissements Pierre Roch Elektronische Auswertschaltung für ein Laser-Interferometer
EP0416459A3 (en) * 1989-09-02 1992-02-05 Societe Anonyme Des Etablissements Pierre Roch Electronic evaluation circuit for a laser interferometer
EP0646767A2 (de) * 1993-10-05 1995-04-05 Renishaw plc Interferometrisches Entfernungsmessgerät
EP0646767A3 (de) * 1993-10-05 1996-01-03 Renishaw Plc Interferometrisches Entfernungsmessgerät.

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