DE8420715U1 - Schleuse einer Zweikammerhochvakuumanlage - Google Patents

Schleuse einer Zweikammerhochvakuumanlage

Info

Publication number
DE8420715U1
DE8420715U1 DE19848420715 DE8420715U DE8420715U1 DE 8420715 U1 DE8420715 U1 DE 8420715U1 DE 19848420715 DE19848420715 DE 19848420715 DE 8420715 U DE8420715 U DE 8420715U DE 8420715 U1 DE8420715 U1 DE 8420715U1
Authority
DE
Germany
Prior art keywords
chamber
lock
flange ring
high vacuum
vacuum system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE19848420715
Other languages
German (de)
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to DE19848420715 priority Critical patent/DE8420715U1/de
Publication of DE8420715U1 publication Critical patent/DE8420715U1/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
DE19848420715 1984-07-11 1984-07-11 Schleuse einer Zweikammerhochvakuumanlage Expired DE8420715U1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19848420715 DE8420715U1 (de) 1984-07-11 1984-07-11 Schleuse einer Zweikammerhochvakuumanlage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19848420715 DE8420715U1 (de) 1984-07-11 1984-07-11 Schleuse einer Zweikammerhochvakuumanlage

Publications (1)

Publication Number Publication Date
DE8420715U1 true DE8420715U1 (de) 1987-08-20

Family

ID=6768743

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19848420715 Expired DE8420715U1 (de) 1984-07-11 1984-07-11 Schleuse einer Zweikammerhochvakuumanlage

Country Status (1)

Country Link
DE (1) DE8420715U1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4408947A1 (de) * 1994-03-16 1995-09-21 Balzers Hochvakuum Vakuumbehandlungsanlage und Ventilanordnung

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4408947A1 (de) * 1994-03-16 1995-09-21 Balzers Hochvakuum Vakuumbehandlungsanlage und Ventilanordnung
US5571331A (en) * 1994-03-16 1996-11-05 Balzers Aktiengesellschaft Vacuum treatment apparatus
CH688043A5 (de) * 1994-03-16 1997-04-30 Balzers Hochvakuum Vakuumbehandlungsanlage und Ventilanordnung.

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