DE8315211U1 - Mit Mikrowellen gespeiste elektrodenlose Lampe - Google Patents
Mit Mikrowellen gespeiste elektrodenlose LampeInfo
- Publication number
- DE8315211U1 DE8315211U1 DE19838315211 DE8315211U DE8315211U1 DE 8315211 U1 DE8315211 U1 DE 8315211U1 DE 19838315211 DE19838315211 DE 19838315211 DE 8315211 U DE8315211 U DE 8315211U DE 8315211 U1 DE8315211 U1 DE 8315211U1
- Authority
- DE
- Germany
- Prior art keywords
- envelope
- lamp according
- chamber
- microwave
- lamp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005855 radiation Effects 0.000 claims description 25
- 230000008878 coupling Effects 0.000 claims description 16
- 238000010168 coupling process Methods 0.000 claims description 16
- 238000005859 coupling reaction Methods 0.000 claims description 16
- 238000001816 cooling Methods 0.000 claims description 14
- 239000000112 cooling gas Substances 0.000 claims description 8
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims description 7
- 229910052753 mercury Inorganic materials 0.000 claims description 7
- 244000309464 bull Species 0.000 claims description 6
- 239000002344 surface layer Substances 0.000 claims description 4
- 230000004927 fusion Effects 0.000 claims description 2
- 239000007789 gas Substances 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 238000000206 photolithography Methods 0.000 description 10
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 238000001228 spectrum Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000003595 spectral effect Effects 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- RCTYPNKXASFOBE-UHFFFAOYSA-M chloromercury Chemical compound [Hg]Cl RCTYPNKXASFOBE-UHFFFAOYSA-M 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- VSQYNPJPULBZKU-UHFFFAOYSA-N mercury xenon Chemical compound [Xe].[Hg] VSQYNPJPULBZKU-UHFFFAOYSA-N 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910052756 noble gas Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/044—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by a separate microwave unit
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Discharge Lamps And Accessories Thereof (AREA)
- Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)
- Non-Portable Lighting Devices Or Systems Thereof (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US06/381,482 US4507587A (en) | 1982-05-24 | 1982-05-24 | Microwave generated electrodeless lamp for producing bright output |
| US06/381,481 US4485332A (en) | 1982-05-24 | 1982-05-24 | Method & apparatus for cooling electrodeless lamps |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE8315211U1 true DE8315211U1 (de) | 1986-11-20 |
Family
ID=27009406
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19838315211 Expired DE8315211U1 (de) | 1982-05-24 | 1983-05-24 | Mit Mikrowellen gespeiste elektrodenlose Lampe |
| DE19833318795 Ceased DE3318795A1 (de) | 1982-05-24 | 1983-05-24 | Mit mikrowellen gespeiste elektrodenlose lampe |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19833318795 Ceased DE3318795A1 (de) | 1982-05-24 | 1983-05-24 | Mit mikrowellen gespeiste elektrodenlose lampe |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPH0349102A (ja) |
| DE (2) | DE8315211U1 (ja) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3823766A1 (de) * | 1987-07-15 | 1989-01-26 | Fusion Systems Corp | Verfahren und vorrichtung zum aendern der emissionseigenschaften einer elektrodenlosen lampe |
| DE3920649A1 (de) * | 1988-06-24 | 1990-01-04 | Fusion Systems Corp | Verfahren und vorrichtung zur vergleichsmaessigung der temperaturverteilung von lampen fuer elektrodenlose leuchten |
| US5334913A (en) * | 1993-01-13 | 1994-08-02 | Fusion Systems Corporation | Microwave powered lamp having a non-conductive reflector within the microwave cavity |
| KR20010012617A (ko) * | 1998-03-16 | 2001-02-26 | 마츠시타 덴끼 산교 가부시키가이샤 | 무전극 방전에너지 공급장치 및 무전극 방전램프장치 |
| US6737809B2 (en) * | 2000-07-31 | 2004-05-18 | Luxim Corporation | Plasma lamp with dielectric waveguide |
| DE10231258A1 (de) * | 2002-07-11 | 2004-01-22 | Philips Intellectual Property & Standards Gmbh | Entladungslampe mit Kühleinrichtung |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA1024246A (en) * | 1973-08-22 | 1978-01-10 | Donald M. Spero | Apparatus and method for generating radiation |
| US4042850A (en) * | 1976-03-17 | 1977-08-16 | Fusion Systems Corporation | Microwave generated radiation apparatus |
| US4532427A (en) * | 1982-03-29 | 1985-07-30 | Fusion Systems Corp. | Method and apparatus for performing deep UV photolithography |
-
1983
- 1983-05-24 DE DE19838315211 patent/DE8315211U1/de not_active Expired
- 1983-05-24 DE DE19833318795 patent/DE3318795A1/de not_active Ceased
-
1990
- 1990-06-25 JP JP2164346A patent/JPH0349102A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0361282B2 (ja) | 1991-09-19 |
| JPH0349102A (ja) | 1991-03-01 |
| DE3318795A1 (de) | 1983-12-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE3323637C2 (de) | Anordnung zum Betrieb einer langgestreckten elektrodenlosen Lampe | |
| DE2439961C2 (de) | Plasmalichtquelle | |
| DE3935058C2 (ja) | ||
| DE3311249C2 (de) | Fotolithografievorrichtung mit einer im fernen UV emittierenden Lichtquelle | |
| DE3626922A1 (de) | Mit mikrowellen gespeiste elektrodenlose lichtquelle | |
| DE2711278C2 (de) | Einrichtung zum wirksamen Ankoppeln von Mikrowellenenergie an eine Last | |
| DE69125499T2 (de) | Hochleistungslampe | |
| EP0371304B1 (de) | Hochleistungsstrahler | |
| DE2622993A1 (de) | Uv-lampen-anordnung | |
| DE2941269A1 (de) | Elektrodenlose lampe | |
| DE7228091U (de) | Ionenquelle mit hochfrequenz-hohlraumresonator | |
| DE2809957A1 (de) | Elektrodenlose fluoreszenzlampe mit reflektierendem ueberzug | |
| DE69905456T2 (de) | Mikrowellen-plasmalichtquelle | |
| DE3045450C2 (ja) | ||
| DE69329032T2 (de) | Elektrodenlose lampe mit drehender birne | |
| EP0517929B1 (de) | Bestrahlungseinrichtung mit einem Hochleistungsstrahler | |
| DE3913519C2 (de) | UV-Aushärtesystem für optische Fasern | |
| DE4302465C1 (de) | Vorrichtung zum Erzeugen einer dielektrisch behinderten Entladung | |
| DE3336473C2 (ja) | ||
| CH666776A5 (de) | Strahlungsquelle fuer optische geraete, insbesondere fuer fotolithografische abbildungssysteme. | |
| DE8315211U1 (de) | Mit Mikrowellen gespeiste elektrodenlose Lampe | |
| DE60037158T2 (de) | Vorrichtung mit einer kalten distalen Stelle einer Niederdruckquecksilberdampfentladungslampe | |
| DE4100462A1 (de) | Mikrowellenentladungs-lichtquellenvorrichtung | |
| DE2659859A1 (de) | Vorrichtung zur aufrechterhaltung einer elektrischen entladung | |
| DE2656949C2 (de) | Leuchtstofflampe |