DE69940993D1 - Thermischer Detektor mit Verstärkung durch bolometrischen Effekt - Google Patents

Thermischer Detektor mit Verstärkung durch bolometrischen Effekt

Info

Publication number
DE69940993D1
DE69940993D1 DE69940993T DE69940993T DE69940993D1 DE 69940993 D1 DE69940993 D1 DE 69940993D1 DE 69940993 T DE69940993 T DE 69940993T DE 69940993 T DE69940993 T DE 69940993T DE 69940993 D1 DE69940993 D1 DE 69940993D1
Authority
DE
Germany
Prior art keywords
bolometric
amplification
thermal detector
detector
thermal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69940993T
Other languages
English (en)
Inventor
Jean-Louis Ouvrier-Buffet
Jean-Jacques Yon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Application granted granted Critical
Publication of DE69940993D1 publication Critical patent/DE69940993D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Radiation Pyrometers (AREA)
DE69940993T 1998-07-06 1999-07-02 Thermischer Detektor mit Verstärkung durch bolometrischen Effekt Expired - Lifetime DE69940993D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9808613A FR2780784B1 (fr) 1998-07-06 1998-07-06 Detecteur thermique a amplification par effet bolometrique

Publications (1)

Publication Number Publication Date
DE69940993D1 true DE69940993D1 (de) 2009-07-30

Family

ID=9528295

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69940993T Expired - Lifetime DE69940993D1 (de) 1998-07-06 1999-07-02 Thermischer Detektor mit Verstärkung durch bolometrischen Effekt

Country Status (4)

Country Link
US (1) US6316770B1 (de)
EP (1) EP0971219B1 (de)
DE (1) DE69940993D1 (de)
FR (1) FR2780784B1 (de)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AUPQ897600A0 (en) * 2000-07-25 2000-08-17 Liddiard, Kevin Active or self-biasing micro-bolometer infrared detector
JP3929705B2 (ja) * 2001-02-05 2007-06-13 ユーディナデバイス株式会社 半導体装置及びチップキャリア
US6777681B1 (en) 2001-04-25 2004-08-17 Raytheon Company Infrared detector with amorphous silicon detector elements, and a method of making it
US7075079B2 (en) * 2001-06-27 2006-07-11 Wood Roland A Sensor for dual wavelength bands
EP1535301A4 (de) * 2002-08-20 2009-11-25 Lockheed Corp Antennengekoppelter mikrobolometer
FR2845157B1 (fr) * 2002-10-01 2004-11-05 Commissariat Energie Atomique Detecteur bolometrique a antenne comportant un interrupteur et dispositif d'imagerie le comportant.
US7132655B2 (en) * 2002-12-02 2006-11-07 Raytheon Company Passive millimeter wave sensor using high temperature superconducting leads
US20040136434A1 (en) * 2003-01-13 2004-07-15 Langley Lawrence W. Laminated heat flux indicating device
FR2855609B1 (fr) * 2003-05-26 2005-07-01 Commissariat Energie Atomique Dispositif de detection bolometrique a antenne, a cavite optimisee, pour ondes electromagnetiques millimetriques ou submillimetriques, et procede de fabrication de ce dispositif
US7306967B1 (en) 2003-05-28 2007-12-11 Adsem, Inc. Method of forming high temperature thermistors
US7180064B2 (en) * 2003-07-24 2007-02-20 Delphi Technologies, Inc. Infrared sensor package
US7292132B1 (en) * 2003-12-17 2007-11-06 Adsem, Inc. NTC thermistor probe
US7812705B1 (en) 2003-12-17 2010-10-12 Adsem, Inc. High temperature thermistor probe
US7446314B2 (en) * 2005-09-30 2008-11-04 Lawrence Livermore National Security, Llc Superconducting gamma and fast-neutron spectrometers with high energy resolution
US7462831B2 (en) * 2006-01-26 2008-12-09 L-3 Communications Corporation Systems and methods for bonding
US7655909B2 (en) * 2006-01-26 2010-02-02 L-3 Communications Corporation Infrared detector elements and methods of forming same
US7459686B2 (en) * 2006-01-26 2008-12-02 L-3 Communications Corporation Systems and methods for integrating focal plane arrays
US7755048B2 (en) * 2006-05-30 2010-07-13 Ying Hsu Large format thermoelectric infrared detector and method of fabrication
US7501626B2 (en) * 2006-06-02 2009-03-10 Honeywell International Inc. Micromechanical thermal sensor
CN100380587C (zh) * 2006-07-31 2008-04-09 西安工业大学 具有自支撑的非晶硅热成像探测器微结构的制作方法
US7718965B1 (en) 2006-08-03 2010-05-18 L-3 Communications Corporation Microbolometer infrared detector elements and methods for forming same
US8153980B1 (en) 2006-11-30 2012-04-10 L-3 Communications Corp. Color correction for radiation detectors
US7898498B2 (en) * 2008-03-20 2011-03-01 Honeywell International Inc. Transducer for high-frequency antenna coupling and related apparatus and method
EP2172754A1 (de) * 2008-10-06 2010-04-07 Sensirion AG Infrarotsensor mit rückseitigem Infrarotfilter
US8451176B2 (en) * 2009-06-11 2013-05-28 Honeywell International Inc. Method for achieving intrinsic safety compliance in wireless devices using isolated overlapping grounds and related apparatus
JP5636787B2 (ja) * 2010-07-26 2014-12-10 セイコーエプソン株式会社 熱型光検出器、熱型光検出装置及び電子機器
US8765514B1 (en) 2010-11-12 2014-07-01 L-3 Communications Corp. Transitioned film growth for conductive semiconductor materials
CN102564601A (zh) * 2010-12-22 2012-07-11 精工爱普生株式会社 热式光检测装置、电子设备、热式光检测器及其制造方法
TWI439679B (zh) * 2011-08-03 2014-06-01 Univ Nat Chiao Tung 電校式輻射計
EP2909591B1 (de) * 2012-10-17 2023-06-21 Robert Bosch GmbH Bolometer mit mehrlagiger folie
US9257587B2 (en) * 2012-12-21 2016-02-09 Robert Bosch Gmbh Suspension and absorber structure for bolometer
KR20150030078A (ko) * 2013-09-11 2015-03-19 엘에스산전 주식회사 태양광 인버터
US20150107644A1 (en) * 2013-10-17 2015-04-23 UltraSolar Technology, Inc. Photovoltaic (pv) efficiency using high frequency electric pulses
US20150108851A1 (en) * 2013-10-19 2015-04-23 UltraSolar Technology, Inc. Photovoltaic systems with shaped high frequency electric pulses
US20150241281A1 (en) * 2014-02-27 2015-08-27 International Business Machines Corporation Bolometer device for sensing electromagnetic radiation
US11967801B2 (en) * 2018-04-18 2024-04-23 Nanopro Ab Semiconductor devices for lasing applications and methods of manufacturing such devices
US10727161B2 (en) * 2018-08-06 2020-07-28 Texas Instruments Incorporated Thermal and stress isolation for precision circuit
TWI724708B (zh) 2019-12-24 2021-04-11 財團法人工業技術研究院 具有阻擋元件的微機電紅外光感測裝置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2865202A (en) * 1954-04-23 1958-12-23 Gulton Ind Inc Device for measuring and detecting thermal energy
JPS5979128A (ja) * 1982-10-27 1984-05-08 Horiba Ltd 光輻射線パワ−測定装置
GB2207501A (en) * 1987-07-31 1989-02-01 Philips Electronic Associated Radiation detector arrangements and methods using resistors with high positive temperature coefficients
EP0354369B1 (de) * 1988-08-12 1995-07-26 Texas Instruments Incorporated Infrarot-Detektor
IL104669A0 (en) * 1993-02-09 1993-08-18 Technion Res & Dev Foundation Bolometer array
FR2735574B1 (fr) 1995-06-15 1997-07-18 Commissariat Energie Atomique Dispositif de detection bolometrique pour ondes millimetriques et submillimetriques et procede de fabrication de ce dispositif
JPH0979128A (ja) 1995-09-13 1997-03-25 Shin Yoneda 等加圧差動流体機関
FR2752299B1 (fr) 1996-08-08 1998-09-11 Commissariat Energie Atomique Detecteur infrarouge et procede de fabication de celui-ci

Also Published As

Publication number Publication date
EP0971219A1 (de) 2000-01-12
EP0971219B1 (de) 2009-06-17
US6316770B1 (en) 2001-11-13
FR2780784A1 (fr) 2000-01-07
FR2780784B1 (fr) 2000-08-11

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Legal Events

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8364 No opposition during term of opposition