DE69937853D1 - Treiberschaltung für einen Winkelgeschwindigkeitssensor - Google Patents

Treiberschaltung für einen Winkelgeschwindigkeitssensor

Info

Publication number
DE69937853D1
DE69937853D1 DE69937853T DE69937853T DE69937853D1 DE 69937853 D1 DE69937853 D1 DE 69937853D1 DE 69937853 T DE69937853 T DE 69937853T DE 69937853 T DE69937853 T DE 69937853T DE 69937853 D1 DE69937853 D1 DE 69937853D1
Authority
DE
Germany
Prior art keywords
angular velocity
driver circuit
velocity sensor
sensor
driver
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69937853T
Other languages
English (en)
Other versions
DE69937853T2 (de
Inventor
Toshihiko Ichinose
Takeshi Uemura
Jiro Terada
Masami Tamura
Kiyohito Nakazawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Application granted granted Critical
Publication of DE69937853D1 publication Critical patent/DE69937853D1/de
Publication of DE69937853T2 publication Critical patent/DE69937853T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
DE69937853T 1998-03-31 1999-03-30 Treiberschaltung für einen Winkelgeschwindigkeitssensor Expired - Lifetime DE69937853T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP8572998 1998-03-31
JP08572998A JP3932661B2 (ja) 1998-03-31 1998-03-31 角速度センサ駆動回路

Publications (2)

Publication Number Publication Date
DE69937853D1 true DE69937853D1 (de) 2008-02-14
DE69937853T2 DE69937853T2 (de) 2008-05-21

Family

ID=13866944

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69937853T Expired - Lifetime DE69937853T2 (de) 1998-03-31 1999-03-30 Treiberschaltung für einen Winkelgeschwindigkeitssensor

Country Status (4)

Country Link
US (1) US6220094B1 (de)
EP (1) EP0947803B1 (de)
JP (1) JP3932661B2 (de)
DE (1) DE69937853T2 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6732586B2 (en) * 1995-05-30 2004-05-11 Matsushita Electric Industrial Co., Ltd. Angular velocity sensor
JP2000088578A (ja) * 1998-09-10 2000-03-31 Matsushita Electric Ind Co Ltd 角速度センサ
JP4075152B2 (ja) * 1998-09-16 2008-04-16 松下電器産業株式会社 角速度センサ
JP4449110B2 (ja) * 1999-08-18 2010-04-14 パナソニック株式会社 角速度センサ
JP3520821B2 (ja) * 1999-10-29 2004-04-19 株式会社村田製作所 振動ジャイロ用自己診断回路
US6520833B1 (en) * 2000-06-30 2003-02-18 Lam Research Corporation Oscillating fixed abrasive CMP system and methods for implementing the same
US6439978B1 (en) * 2000-09-07 2002-08-27 Oliver Design, Inc. Substrate polishing system using roll-to-roll fixed abrasive
US6585338B2 (en) 2000-12-22 2003-07-01 Honeywell International Inc. Quick start resonant circuit control
US6972619B2 (en) * 2002-12-17 2005-12-06 Matsushita Electric Industrial Co., Ltd. Amplifier with a gain proportional to power source voltage
JP3956877B2 (ja) * 2003-03-18 2007-08-08 株式会社デンソー センサ用温度補正装置およびセンサの温度補正方法
JP2005227214A (ja) * 2004-02-16 2005-08-25 Matsushita Electric Ind Co Ltd 角速度センサ及びそれを用いた自動車
US7190237B2 (en) * 2004-05-27 2007-03-13 Continental Automotive, Inc. Open-loop start-up method for a resonating device
KR100924066B1 (ko) * 2004-09-09 2009-10-27 가부시키가이샤 무라타 세이사쿠쇼 진동형 관성력 센서
JP2006162276A (ja) * 2004-12-02 2006-06-22 Denso Corp 物理量センサ
JP2006349409A (ja) * 2005-06-14 2006-12-28 Denso Corp 静電駆動・容量検出型のジャイロセンサのセンサ回路
JP5458462B2 (ja) * 2005-10-11 2014-04-02 パナソニック株式会社 振動型慣性力検知センサ
JP5040117B2 (ja) * 2006-02-17 2012-10-03 セイコーエプソン株式会社 発振回路、物理量トランスデューサ及び振動ジャイロセンサ
JP4696996B2 (ja) * 2006-03-27 2011-06-08 パナソニック株式会社 慣性力センサ
US20100077856A1 (en) * 2008-02-15 2010-04-01 Honeywell International, Inc. Start time of gyro assembly
JP5344955B2 (ja) * 2009-02-27 2013-11-20 シチズンホールディングス株式会社 固体振動子発振回路およびこれを用いた物理量センサ
EP2336717B1 (de) * 2009-12-21 2012-09-19 STMicroelectronics Srl Mikroelektromechanische Vorrichtung mit Schwingungsmasse und Verfahren zur Steuerung einer mikroelektromechanischen Vorrichtung mit Schwingungsmasse
CN102753937B (zh) 2010-02-17 2016-03-02 株式会社村田制作所 振动型惯性力传感器
US9091539B2 (en) * 2011-06-10 2015-07-28 Honeywell International Inc. Gyroscope dynamic motor amplitude compensation for enhanced rate estimation during startup
US9823074B2 (en) * 2012-08-08 2017-11-21 Nxp Usa, Inc. Micro-electro-mechanical system drive-mode oscillator module and method therefor
WO2015004872A1 (ja) * 2013-07-12 2015-01-15 パナソニックＩｐマネジメント株式会社 駆動装置、物理量検出装置及び電子機器

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4956618A (en) * 1989-04-07 1990-09-11 Vlsi Technology, Inc. Start-up circuit for low power MOS crystal oscillator
ATE143489T1 (de) * 1991-03-12 1996-10-15 New Sd Inc Stimmgabelinertialsensor mit einem ende und verfahren
JPH0933262A (ja) * 1995-07-25 1997-02-07 Nikon Corp 励振駆動回路及び方法並びにこれを用いた圧電振動角速度計
US5942686A (en) * 1994-09-15 1999-08-24 Bei Electronics, Inc. Ratiometric transducer and method
US5534826A (en) * 1994-10-24 1996-07-09 At&T Corp. Oscillator with increased reliability start up
WO1996038712A1 (fr) * 1995-05-30 1996-12-05 Matsushita Electric Industrial Co., Ltd. Capteur de vitesse angulaire
JP3536497B2 (ja) * 1995-12-21 2004-06-07 株式会社デンソー 振動型角速度検出装置

Also Published As

Publication number Publication date
DE69937853T2 (de) 2008-05-21
EP0947803A2 (de) 1999-10-06
US6220094B1 (en) 2001-04-24
EP0947803A3 (de) 2000-11-29
JP3932661B2 (ja) 2007-06-20
EP0947803B1 (de) 2008-01-02
JPH11281368A (ja) 1999-10-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: PANASONIC CORP., KADOMA, OSAKA, JP

8320 Willingness to grant licences declared (paragraph 23)