DE69937170D1 - Elektronenquelle mit geätztem und geformtem Extraktionsgitter - Google Patents

Elektronenquelle mit geätztem und geformtem Extraktionsgitter

Info

Publication number
DE69937170D1
DE69937170D1 DE69937170T DE69937170T DE69937170D1 DE 69937170 D1 DE69937170 D1 DE 69937170D1 DE 69937170 T DE69937170 T DE 69937170T DE 69937170 T DE69937170 T DE 69937170T DE 69937170 D1 DE69937170 D1 DE 69937170D1
Authority
DE
Germany
Prior art keywords
electron source
etched
extraction grid
shaped extraction
cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69937170T
Other languages
English (en)
Other versions
DE69937170T2 (de
Inventor
John Stuart Beeteson
John Ulrich Knickerbocker
Andrew Ramsay Knox
Anthony Cyril Lowe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE69937170D1 publication Critical patent/DE69937170D1/de
Publication of DE69937170T2 publication Critical patent/DE69937170T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/46—Control electrodes, e.g. grid; Auxiliary electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/58—Arrangements for focusing or reflecting ray or beam
    • H01J29/64—Magnetic lenses
    • H01J29/68—Magnetic lenses using permanent magnets only
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/02—Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
    • H01J29/028—Mounting or supporting arrangements for flat panel cathode ray tubes, e.g. spacers particularly relating to electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/467—Control electrodes for flat display tubes, e.g. of the type covered by group H01J31/123
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00—Electron emission display panels, e.g. field emission display panels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00—Electron emission display panels, e.g. field emission display panels
    • H01J2329/86—Vessels
    • H01J2329/8625—Spacing members
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00—Electron emission display panels, e.g. field emission display panels
    • H01J2329/86—Vessels
    • H01J2329/8625—Spacing members
    • H01J2329/863—Spacing members characterised by the form or structure

Landscapes

  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
  • Cold Cathode And The Manufacture (AREA)
DE69937170T 1998-07-16 1999-07-01 Elektronenquelle mit geätztem und geformtem Extraktionsgitter Expired - Lifetime DE69937170T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US116403 1998-07-16
US09/116,403 US6376983B1 (en) 1998-07-16 1998-07-16 Etched and formed extractor grid

Publications (2)

Publication Number Publication Date
DE69937170D1 true DE69937170D1 (de) 2007-11-08
DE69937170T2 DE69937170T2 (de) 2008-06-26

Family

ID=22366985

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69937170T Expired - Lifetime DE69937170T2 (de) 1998-07-16 1999-07-01 Elektronenquelle mit geätztem und geformtem Extraktionsgitter

Country Status (6)

Country Link
US (1) US6376983B1 (de)
EP (1) EP0973185B1 (de)
JP (1) JP3431861B2 (de)
KR (1) KR100318035B1 (de)
AT (1) ATE374431T1 (de)
DE (1) DE69937170T2 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4692348B2 (ja) * 2006-03-27 2011-06-01 パナソニック電工株式会社 放電プラズマ生成補助装置
US8513619B1 (en) 2012-05-10 2013-08-20 Kla-Tencor Corporation Non-planar extractor structure for electron source

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4719388A (en) 1985-08-13 1988-01-12 Source Technology Corporation Flat electron control device utilizing a uniform space-charge cloud of free electrons as a virtual cathode
US5892323A (en) 1993-03-08 1999-04-06 International Business Machines Corporation Structure and method of making field emission displays
GB9415892D0 (en) * 1994-08-05 1994-09-28 Central Research Lab Ltd A self-aligned gate field emitter device and methods for producing the same
US5759078A (en) * 1995-05-30 1998-06-02 Texas Instruments Incorporated Field emission device with close-packed microtip array
GB2304981A (en) 1995-08-25 1997-03-26 Ibm Electron source eg for a display
GB2317987A (en) * 1996-10-04 1998-04-08 Ibm Display devices
GB2333642A (en) * 1998-01-21 1999-07-28 Ibm Photo-cathode electron source having an extractor grid

Also Published As

Publication number Publication date
EP0973185B1 (de) 2007-09-26
DE69937170T2 (de) 2008-06-26
JP3431861B2 (ja) 2003-07-28
ATE374431T1 (de) 2007-10-15
EP0973185A3 (de) 2006-09-06
EP0973185A2 (de) 2000-01-19
KR100318035B1 (ko) 2001-12-22
US6376983B1 (en) 2002-04-23
JP2000040477A (ja) 2000-02-08
KR20000011289A (ko) 2000-02-25

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Legal Events

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8320 Willingness to grant licences declared (paragraph 23)
8364 No opposition during term of opposition