JPS642244A - Electron shower device for ion implanter - Google Patents

Electron shower device for ion implanter

Info

Publication number
JPS642244A
JPS642244A JP62156709A JP15670987A JPS642244A JP S642244 A JPS642244 A JP S642244A JP 62156709 A JP62156709 A JP 62156709A JP 15670987 A JP15670987 A JP 15670987A JP S642244 A JPS642244 A JP S642244A
Authority
JP
Japan
Prior art keywords
ring
shaped
cathode
named
repeller
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62156709A
Other languages
Japanese (ja)
Other versions
JPH012244A (en
JPH0782831B2 (en
Inventor
Osamu Tsukagoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP62156709A priority Critical patent/JPH0782831B2/en
Publication of JPH012244A publication Critical patent/JPH012244A/en
Publication of JPS642244A publication Critical patent/JPS642244A/en
Publication of JPH0782831B2 publication Critical patent/JPH0782831B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE: To supply low energy electrons properly along ion beam by dividing a ring-shaped filament cathode into two or more in electrical terms.
CONSTITUTION: Existing electron gun 1 of hollow type includes a ring-shaped filament cathode 4, a pair of ring-shaped Wehnelt electrodes 5 arranged coaxially at the inside i.e., at the front face of this cathode 4, a pair of ring- shaped drawout electrodes 6, and a repeller 7 with channel-shaped profile surrounding the named members 4W6. The cathode 4 is divided into two or more in electrical terms, while the repeller 7 consists of a back cylindrical portion 7a and two ring-shaped disc portions 7b, 7c extending inwards radially at the ends of the former named portion 7a, wherein this one 7a is disconnected electrically from the later named portions 7b, 7c and separate voltages are impressed on them. This allows leading of low energy electrons to a water along ion beam 2.
COPYRIGHT: (C)1989,JPO&Japio
JP62156709A 1987-06-25 1987-06-25 Electronic shower device for ion implanter Expired - Lifetime JPH0782831B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62156709A JPH0782831B2 (en) 1987-06-25 1987-06-25 Electronic shower device for ion implanter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62156709A JPH0782831B2 (en) 1987-06-25 1987-06-25 Electronic shower device for ion implanter

Publications (3)

Publication Number Publication Date
JPH012244A JPH012244A (en) 1989-01-06
JPS642244A true JPS642244A (en) 1989-01-06
JPH0782831B2 JPH0782831B2 (en) 1995-09-06

Family

ID=15633621

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62156709A Expired - Lifetime JPH0782831B2 (en) 1987-06-25 1987-06-25 Electronic shower device for ion implanter

Country Status (1)

Country Link
JP (1) JPH0782831B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103839739A (en) * 2012-11-26 2014-06-04 上海联影医疗科技有限公司 Cathode electron source

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103839739A (en) * 2012-11-26 2014-06-04 上海联影医疗科技有限公司 Cathode electron source

Also Published As

Publication number Publication date
JPH0782831B2 (en) 1995-09-06

Similar Documents

Publication Publication Date Title
JPS5516321A (en) Electrostatic radiant type electronic gun
GB982669A (en) Improvements in or relating to electron beam generators
JPS642244A (en) Electron shower device for ion implanter
GB2034924B (en) Setting the cathode heating current of an electron beam machine
GB1357469A (en) Electron-beam generators for transit-time electron discharge tubes
JPS5774948A (en) Electron gun
JPS57162247A (en) Cathode-ray tube
JPS5760658A (en) Cathode ray tube for light source
JPS643941A (en) Ion source
JPS55151738A (en) Electron gun
JPS524163A (en) Electric field radiation cathode
JPS57210551A (en) Triple-pole type ion pump
JPS53137660A (en) Electron gun
JPS56132736A (en) Electron gun
JPS52155959A (en) Electron gun for cathode ray tube
JPS5569941A (en) Electron source for display unit
JPS5648042A (en) X-ray tube
JPS553105A (en) Electron gun
ZA835319B (en) Plasma cathode electron beam generating system
JPS5611332A (en) Hot-cathode ionization vacuum gauge
JPS5340214A (en) Convergence unit of inline gun color cathode-ray tube
JPS57189445A (en) Electron-gun power source
JPS5414154A (en) Electron gun
JPS5574045A (en) Electron gun device for cathode-ray tube
JPS5269092A (en) Electron beam emitter