DE69936672D1 - Kühlkörper und seine Herstellung - Google Patents

Kühlkörper und seine Herstellung

Info

Publication number
DE69936672D1
DE69936672D1 DE69936672T DE69936672T DE69936672D1 DE 69936672 D1 DE69936672 D1 DE 69936672D1 DE 69936672 T DE69936672 T DE 69936672T DE 69936672 T DE69936672 T DE 69936672T DE 69936672 D1 DE69936672 D1 DE 69936672D1
Authority
DE
Germany
Prior art keywords
manufacture
heat sink
sink
heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69936672T
Other languages
English (en)
Other versions
DE69936672T2 (de
Inventor
Yoshiyuki Yamamoto
Hirohisa Saito
Takahiro Imai
Kiichi Meguro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Publication of DE69936672D1 publication Critical patent/DE69936672D1/de
Application granted granted Critical
Publication of DE69936672T2 publication Critical patent/DE69936672T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
    • H01L23/3736—Metallic materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4814—Conductive parts
    • H01L21/4871—Bases, plates or heatsinks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/12—Mountings, e.g. non-detachable insulating substrates
    • H01L23/14—Mountings, e.g. non-detachable insulating substrates characterised by the material or its electrical properties
    • H01L23/142—Metallic substrates having insulating layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
    • H01L23/3732—Diamonds
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/495—Lead-frames or other flat leads
    • H01L23/49541—Geometry of the lead-frame
    • H01L23/49562—Geometry of the lead-frame for devices being provided for in H01L29/00
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/14—Integrated circuits
    • H01L2924/141—Analog devices
    • H01L2924/1423—Monolithic Microwave Integrated Circuit [MMIC]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y10T428/24967—Absolute thicknesses specified
    • Y10T428/24975—No layer or component greater than 5 mils thick
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249961—With gradual property change within a component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249967—Inorganic matrix in void-containing component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249987—With nonvoid component of specified composition
    • Y10T428/249988—Of about the same composition as, and adjacent to, the void-containing component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249987—With nonvoid component of specified composition
    • Y10T428/24999—Inorganic
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31678—Of metal

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
DE1999636672 1998-01-16 1999-01-15 Kühlkörper und seine Herstellung Expired - Lifetime DE69936672T2 (de)

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
JP623898 1998-01-16
JP623898 1998-01-16
JP23018798 1998-07-31
JP23019498 1998-07-31
JP23019498 1998-07-31
JP23018798 1998-07-31
JP21668398 1998-07-31
JP21668398 1998-07-31
JP37639598 1998-12-22
JP37639598A JP4623774B2 (ja) 1998-01-16 1998-12-22 ヒートシンクおよびその製造方法

Publications (2)

Publication Number Publication Date
DE69936672D1 true DE69936672D1 (de) 2007-09-13
DE69936672T2 DE69936672T2 (de) 2008-04-30

Family

ID=27518688

Family Applications (2)

Application Number Title Priority Date Filing Date
DE1999636672 Expired - Lifetime DE69936672T2 (de) 1998-01-16 1999-01-15 Kühlkörper und seine Herstellung
DE69943006T Expired - Lifetime DE69943006D1 (de) 1998-01-16 1999-01-15 Kühlkörper

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE69943006T Expired - Lifetime DE69943006D1 (de) 1998-01-16 1999-01-15 Kühlkörper

Country Status (4)

Country Link
US (2) US6361857B1 (de)
EP (2) EP0930649B1 (de)
JP (1) JP4623774B2 (de)
DE (2) DE69936672T2 (de)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10039596C2 (de) * 2000-08-12 2003-03-27 Omg Ag & Co Kg Geträgerte Metallmembran, Verfahren zu ihrer Herstellung und Verwendung
US6749931B1 (en) * 2000-11-01 2004-06-15 P1 Diamond, Inc. Diamond foam material and method for forming same
US6815052B2 (en) 2000-12-01 2004-11-09 P1 Diamond, Inc. Filled diamond foam material and method for forming same
JP4815065B2 (ja) * 2001-05-30 2011-11-16 株式会社トクヤマ ヒートシンク及びその製造方法
EP2428590B1 (de) * 2001-11-09 2018-08-15 Sumitomo Electric Industries, Ltd. Gesinterter Diamant mit hoher Wärmeleitfähigkeit und Verfahren zu seiner Herstellung sowie Wärmesenken, bei denen er verwendet wird
US7173334B2 (en) * 2002-10-11 2007-02-06 Chien-Min Sung Diamond composite heat spreader and associated methods
US20060113546A1 (en) * 2002-10-11 2006-06-01 Chien-Min Sung Diamond composite heat spreaders having low thermal mismatch stress and associated methods
AU2003284065A1 (en) 2002-10-11 2005-05-05 Chien-Min Sung Carbonaceous heat spreader and associated methods
US20050189647A1 (en) * 2002-10-11 2005-09-01 Chien-Min Sung Carbonaceous composite heat spreader and associated methods
US7332402B2 (en) * 2002-10-18 2008-02-19 Finisar Corporation Method for optically trimming electronic components
US7866343B2 (en) 2002-12-18 2011-01-11 Masco Corporation Of Indiana Faucet
US8220489B2 (en) 2002-12-18 2012-07-17 Vapor Technologies Inc. Faucet with wear-resistant valve component
US8555921B2 (en) 2002-12-18 2013-10-15 Vapor Technologies Inc. Faucet component with coating
US7866342B2 (en) 2002-12-18 2011-01-11 Vapor Technologies, Inc. Valve component for faucet
GB2404009B (en) * 2003-07-17 2005-06-15 Enfis Ltd Cooling method and apparatus
US7019394B2 (en) * 2003-09-30 2006-03-28 Intel Corporation Circuit package and method of plating the same
WO2007141851A1 (ja) * 2006-06-07 2007-12-13 Fujitsu Limited 半導体パッケージ及び電子装置
US8028771B2 (en) 2007-02-06 2011-10-04 Smith International, Inc. Polycrystalline diamond constructions having improved thermal stability
US7942219B2 (en) 2007-03-21 2011-05-17 Smith International, Inc. Polycrystalline diamond constructions having improved thermal stability
US20080298021A1 (en) * 2007-05-31 2008-12-04 Ali Ihab A Notebook computer with hybrid diamond heat spreader
US7791188B2 (en) 2007-06-18 2010-09-07 Chien-Min Sung Heat spreader having single layer of diamond particles and associated methods
US9297211B2 (en) 2007-12-17 2016-03-29 Smith International, Inc. Polycrystalline diamond construction with controlled gradient metal content
US20100012389A1 (en) * 2008-07-17 2010-01-21 Smith International, Inc. Methods of forming polycrystalline diamond cutters
JP5484111B2 (ja) * 2010-02-08 2014-05-07 株式会社アライドマテリアル 半導体素子搭載部材とその製造方法ならびに半導体装置
US9006086B2 (en) 2010-09-21 2015-04-14 Chien-Min Sung Stress regulated semiconductor devices and associated methods
CN103221180A (zh) 2010-09-21 2013-07-24 铼钻科技股份有限公司 具有基本平坦颗粒尖端的超研磨工具及其相关方法
US8778784B2 (en) 2010-09-21 2014-07-15 Ritedia Corporation Stress regulated semiconductor devices and associated methods
US20120288698A1 (en) * 2011-03-23 2012-11-15 Advanced Diamond Technology, Inc Method of fabrication, device structure and submount comprising diamond on metal substrate for thermal dissipation
KR101252669B1 (ko) * 2012-07-02 2013-04-09 한국과학기술연구원 다이아몬드 고속성장방법 및 장치
US12065357B2 (en) * 2015-02-09 2024-08-20 Saeed Alhassan Alkhazraji Process for manufacturing a pure porous 3D diamond
US10494713B2 (en) * 2015-04-16 2019-12-03 Ii-Vi Incorporated Method of forming an optically-finished thin diamond film, diamond substrate, or diamond window of high aspect ratio
US10692685B2 (en) 2016-06-30 2020-06-23 General Electric Company Multi-layer X-ray source target
US10475619B2 (en) 2016-06-30 2019-11-12 General Electric Company Multilayer X-ray source target
US11070023B2 (en) * 2017-12-19 2021-07-20 Panasonic Intellectual Property Management Co., Ltd. Diamond-coated composite heat sinks for high-power laser systems

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4233344A (en) * 1978-07-20 1980-11-11 Learonal, Inc. Method of improving the adhesion of electroless metal deposits employing colloidal copper activator
JPS5921032A (ja) * 1982-07-26 1984-02-02 Sumitomo Electric Ind Ltd 半導体装置用基板
JPS5946050A (ja) * 1982-09-09 1984-03-15 Narumi China Corp 半導体用セラミツクパツケ−ジ
US5299214A (en) 1991-07-01 1994-03-29 Sumitomo Electric Industries, Ltd. Heat radiating component and semiconductor device provided with the same
JPH05326767A (ja) 1992-03-19 1993-12-10 Sumitomo Electric Ind Ltd 放熱基板
US5309457A (en) * 1992-12-22 1994-05-03 Minch Richard B Micro-heatpipe cooled laser diode array
US5349602A (en) * 1993-03-15 1994-09-20 Sdl, Inc. Broad-area MOPA device with leaky waveguide beam expander
US5886407A (en) * 1993-04-14 1999-03-23 Frank J. Polese Heat-dissipating package for microcircuit devices
US5324987A (en) 1993-04-14 1994-06-28 General Electric Company Electronic apparatus with improved thermal expansion match
US5413751A (en) * 1993-04-14 1995-05-09 Frank J. Polese Method for making heat-dissipating elements for micro-electronic devices
EP0717125A1 (de) 1994-12-15 1996-06-19 General Electric Company Bindung von Diamant mit einem Substrat
WO1997005757A1 (en) * 1995-07-31 1997-02-13 Crystalline Materials Corporation Diamond electronic packages featuring bonded metal
US6114048A (en) * 1998-09-04 2000-09-05 Brush Wellman, Inc. Functionally graded metal substrates and process for making same

Also Published As

Publication number Publication date
EP0930649B1 (de) 2007-08-01
US6361857B1 (en) 2002-03-26
JP2000106413A (ja) 2000-04-11
US6641861B2 (en) 2003-11-04
EP1424729B1 (de) 2010-12-01
EP1424729A2 (de) 2004-06-02
JP4623774B2 (ja) 2011-02-02
EP1424729A3 (de) 2005-06-01
EP0930649A2 (de) 1999-07-21
EP0930649A3 (de) 2000-08-23
DE69943006D1 (de) 2011-01-13
DE69936672T2 (de) 2008-04-30
US20020037412A1 (en) 2002-03-28

Similar Documents

Publication Publication Date Title
DE69936672D1 (de) Kühlkörper und seine Herstellung
DE60039103D1 (de) Aerogelsubstrat und seine herstellung
DE69634813D1 (de) Halbleiter und seine Herstellung
DE69731028D1 (de) Halbleitersubstrat und seine Herstellung
DE69803465D1 (de) Kühlkörper
DE69926493D1 (de) Kühleinrichtung und kühlverfahren
DE69838448D1 (de) Mehrphasiges aggregat enthaltend kohlenstoff und seine herstellung
DE60004899D1 (de) SiC-C/C Verbundwerkstoff und seine Verwendungen
DE69929456D1 (de) Nahfeldabtastkopf und herstellungsverfahren
DE60032247D1 (de) Fluorchemisches oligomer und seine verwendung
NO20004212L (no) Kjølesystem
DE60019578D1 (de) Polyolefin und die herstellung davon
DE69812042D1 (de) Drahtsäge und herstellung derselben
DE69943406D1 (de) Abstandsmesser und kamera
DE60239896D1 (de) Velourskunstleder und seine herstellung
DE60015004D1 (de) Russ, seine Herstellung und Verwendungen
NO20004213D0 (no) Kjølesystem
DE69928233D1 (de) Durchflussaufnehmer und wandler
DE60128647D1 (de) Sigec halbleiterkristall und seine herstellung
DE69915998D1 (de) Wärmetauscherkern und dessen Herstellung
DE69916694D1 (de) 2-Hydroxy-5-methyl-hexan-3-on und 3-hydroxy-5-methyl-hexan-2-on
DE69937090D1 (de) Halbleiterträger, seine Herstellung, Aufbau und dessen Herstellung
DE59802228D1 (de) Metall-keramisches konstruktionselement - sein aufbau und seine herstellung
DE50115516D1 (de) Alkalimetallfluorzinkat und seine herstellung
DE19882085D2 (de) Kühl- und Heizkern

Legal Events

Date Code Title Description
8364 No opposition during term of opposition