DE69931370T2 - Verfahren zur Herstellung eines aufgehängten Elements für elektrische Verbindungen zwischen zwei Teilen eines Micromechanismus, welche relativ zueinander beweglich sind - Google Patents

Verfahren zur Herstellung eines aufgehängten Elements für elektrische Verbindungen zwischen zwei Teilen eines Micromechanismus, welche relativ zueinander beweglich sind Download PDF

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Publication number
DE69931370T2
DE69931370T2 DE69931370T DE69931370T DE69931370T2 DE 69931370 T2 DE69931370 T2 DE 69931370T2 DE 69931370 T DE69931370 T DE 69931370T DE 69931370 T DE69931370 T DE 69931370T DE 69931370 T2 DE69931370 T2 DE 69931370T2
Authority
DE
Germany
Prior art keywords
thin film
layer
electrical connection
micromechanism
connection elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69931370T
Other languages
German (de)
English (en)
Other versions
DE69931370D1 (de
Inventor
Bruno Murari
Benedetto Vigna
Ubaldo Mastromatteo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics SRL
Original Assignee
STMicroelectronics SRL
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STMicroelectronics SRL filed Critical STMicroelectronics SRL
Application granted granted Critical
Publication of DE69931370D1 publication Critical patent/DE69931370D1/de
Publication of DE69931370T2 publication Critical patent/DE69931370T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/22—Apparatus or processes for the manufacture of optical heads, e.g. assembly
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/52—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with simultaneous movement of head and record carrier, e.g. rotation of head
    • G11B5/53—Disposition or mounting of heads on rotating support
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/122—Flying-type heads, e.g. analogous to Winchester type in magnetic recording
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
    • Y10T29/49032—Fabricating head structure or component thereof
    • Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
    • Y10T29/49041—Fabricating head structure or component thereof including measuring or testing with significant slider/housing shaping or treating

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Micromachines (AREA)
  • Moving Of The Head To Find And Align With The Track (AREA)
DE69931370T 1999-10-01 1999-10-01 Verfahren zur Herstellung eines aufgehängten Elements für elektrische Verbindungen zwischen zwei Teilen eines Micromechanismus, welche relativ zueinander beweglich sind Expired - Lifetime DE69931370T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP99830620A EP1089261B1 (fr) 1999-10-01 1999-10-01 Une méthode de production d'éléments suspendus pour des connections électriques entre deux portions d'un micro-mécanisme qui peuvent bouger d'une façon relative l'un vis-à-vis de l'autre

Publications (2)

Publication Number Publication Date
DE69931370D1 DE69931370D1 (de) 2006-06-22
DE69931370T2 true DE69931370T2 (de) 2007-02-01

Family

ID=8243608

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69931370T Expired - Lifetime DE69931370T2 (de) 1999-10-01 1999-10-01 Verfahren zur Herstellung eines aufgehängten Elements für elektrische Verbindungen zwischen zwei Teilen eines Micromechanismus, welche relativ zueinander beweglich sind

Country Status (4)

Country Link
US (1) US6779247B1 (fr)
EP (1) EP1089261B1 (fr)
JP (1) JP3515503B2 (fr)
DE (1) DE69931370T2 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010043980A1 (de) * 2010-11-16 2011-09-01 Robert Bosch Gmbh Sensor und Verfahren zur Herstellung eines Sensors
DE102021210723A1 (de) 2021-09-27 2023-03-30 Robert Bosch Gesellschaft mit beschränkter Haftung Vorrichtung, insbesondere mikrofluidische Vorrichtung, mit einer Siegelfolie und Verfahren zur Herstellung

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7149060B2 (en) * 2002-10-01 2006-12-12 Magnecomp Corporation Actuation device and method for high density hard disk drive head
FR2864341B1 (fr) * 2003-12-19 2006-03-24 Commissariat Energie Atomique Microcomposant a cavite hermetique comportant un bouchon et procede de fabrication d'un tel microcomposant
JP5403862B2 (ja) * 2006-11-28 2014-01-29 チェイル インダストリーズ インコーポレイテッド 微細金属パターンの製造方法
DE102008011972B4 (de) * 2008-02-29 2010-05-12 Bayer Technology Services Gmbh Vorrichtung zur selbstjustierenden Montage und Halterung von Mikrokanalplatten in Mikrosystemen
US8085508B2 (en) 2008-03-28 2011-12-27 Hitachi Global Storage Technologies Netherlands B.V. System, method and apparatus for flexure-integrated microactuator
KR20140110563A (ko) * 2013-03-08 2014-09-17 삼성디스플레이 주식회사 표시 장치 및 그 제조 방법

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5028983A (en) * 1988-10-28 1991-07-02 International Business Machines Corporation Multilevel integrated circuit packaging structures
US5025346A (en) * 1989-02-17 1991-06-18 Regents Of The University Of California Laterally driven resonant microstructures
JP3140223B2 (ja) 1992-11-11 2001-03-05 キヤノン株式会社 マイクロアクチュエータおよびその作製方法
US5378583A (en) 1992-12-22 1995-01-03 Wisconsin Alumni Research Foundation Formation of microstructures using a preformed photoresist sheet
KR0129105B1 (ko) * 1993-01-08 1998-04-18 월리엄 티. 엘리스 종방향 기록을 위한 일체형 트랜스듀서-서스펜션 어셈블리의 제조 방법
US5523619A (en) * 1993-11-03 1996-06-04 International Business Machines Corporation High density memory structure
JPH07167885A (ja) 1993-12-13 1995-07-04 Omron Corp 半導体加速度センサ及びその製造方法、ならびに当該半導体加速度センサによる加速度検出方式
JP3182301B2 (ja) 1994-11-07 2001-07-03 キヤノン株式会社 マイクロ構造体及びその形成法
US5686697A (en) * 1995-01-06 1997-11-11 Metatech Corporation Electrical circuit suspension system
US5822856A (en) * 1996-06-28 1998-10-20 International Business Machines Corporation Manufacturing circuit board assemblies having filled vias
US5820771A (en) 1996-09-12 1998-10-13 Xerox Corporation Method and materials, including polybenzoxazole, for fabricating an ink-jet printhead
US5738799A (en) 1996-09-12 1998-04-14 Xerox Corporation Method and materials for fabricating an ink-jet printhead
EP0913921B1 (fr) * 1997-10-29 2006-05-03 STMicroelectronics S.r.l. Procédé de fabrication de microactionneur à semiconducteur, en particulier pour tête de lecture/écriture de disque dur, et le microactionneur ainsi obtenu
EP1055281A4 (fr) * 1998-01-13 2003-06-11 Iolon Inc Microrupteur optique a micro-organe de commande electrostatique et son procede d'utilisation

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010043980A1 (de) * 2010-11-16 2011-09-01 Robert Bosch Gmbh Sensor und Verfahren zur Herstellung eines Sensors
DE102021210723A1 (de) 2021-09-27 2023-03-30 Robert Bosch Gesellschaft mit beschränkter Haftung Vorrichtung, insbesondere mikrofluidische Vorrichtung, mit einer Siegelfolie und Verfahren zur Herstellung

Also Published As

Publication number Publication date
US6779247B1 (en) 2004-08-24
DE69931370D1 (de) 2006-06-22
EP1089261A1 (fr) 2001-04-04
EP1089261B1 (fr) 2006-05-17
JP3515503B2 (ja) 2004-04-05
JP2001150397A (ja) 2001-06-05

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