DE69925804D1 - Kompensator/Phasenverzögerer für die einstellbare Ausrichtung des Strahls - Google Patents

Kompensator/Phasenverzögerer für die einstellbare Ausrichtung des Strahls

Info

Publication number
DE69925804D1
DE69925804D1 DE69925804T DE69925804T DE69925804D1 DE 69925804 D1 DE69925804 D1 DE 69925804D1 DE 69925804 T DE69925804 T DE 69925804T DE 69925804 T DE69925804 T DE 69925804T DE 69925804 D1 DE69925804 D1 DE 69925804D1
Authority
DE
Germany
Prior art keywords
compensator
phase retarder
adjustable alignment
alignment
adjustable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69925804T
Other languages
English (en)
Other versions
DE69925804T2 (de
Inventor
Craig M Hertzinger
Blaine D Johs
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JA Woollam Co Inc
Original Assignee
JA Woollam Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JA Woollam Co Inc filed Critical JA Woollam Co Inc
Publication of DE69925804D1 publication Critical patent/DE69925804D1/de
Application granted granted Critical
Publication of DE69925804T2 publication Critical patent/DE69925804T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/447—Polarisation spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J4/00—Measuring polarisation of light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J2003/2866—Markers; Calibrating of scan

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Telescopes (AREA)
  • Spectrometry And Color Measurement (AREA)
DE69925804T 1999-02-08 1999-08-19 Kompensator/Phasenverzögerer für die einstellbare Ausrichtung des Strahls Expired - Lifetime DE69925804T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US246888 1999-02-08
US09/246,888 US6084675A (en) 1995-09-20 1999-02-08 Adjustable beam alignment compensator/retarder with application in spectroscopic ellipsometer and polarimeter systems

Publications (2)

Publication Number Publication Date
DE69925804D1 true DE69925804D1 (de) 2005-07-21
DE69925804T2 DE69925804T2 (de) 2006-05-11

Family

ID=22932671

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69925804T Expired - Lifetime DE69925804T2 (de) 1999-02-08 1999-08-19 Kompensator/Phasenverzögerer für die einstellbare Ausrichtung des Strahls

Country Status (3)

Country Link
US (1) US6084675A (de)
EP (1) EP1026495B1 (de)
DE (1) DE69925804T2 (de)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6353477B1 (en) * 1992-09-18 2002-03-05 J. A. Woollam Co. Inc. Regression calibrated spectroscopic rotating compensator ellipsometer system with pseudo-achromatic retarder system
US6483586B1 (en) 1995-09-20 2002-11-19 J. A. Woollam Co. Inc. Beam splitting analyzer means in rotating compensator ellipsometer
US7633625B1 (en) 1995-09-20 2009-12-15 J.A. Woollam Co., Inc. Spectroscopic ellipsometer and polarimeter systems
US7215424B1 (en) 1998-03-03 2007-05-08 J.A. Woollam Co., Inc. Broadband ellipsometer or polarimeter system including at least one multiple element lens
US7518725B1 (en) 1995-09-20 2009-04-14 J.A. Woollam Co., Inc. Temperature controlled lens
US7616319B1 (en) 1995-09-20 2009-11-10 James D. Welch Spectroscopic ellipsometer and polarimeter systems
US7304737B1 (en) 1995-09-20 2007-12-04 J.A. Woollam Co., Inc Rotating or rotatable compensator system providing aberation corrected electromagnetic raadiation to a spot on a sample at multiple angles of a incidence
US7336361B1 (en) 1995-09-20 2008-02-26 J.A. Woollam Co., Inc. Spectroscopic ellipsometer and polarimeter systems
US6822738B1 (en) 1995-09-20 2004-11-23 J.A. Woollam Co. Inc. Spectroscopic rotating compensator ellipsometer system with pseudo-achromatic retarder system
US7158231B1 (en) 1995-09-20 2007-01-02 J.A. Woollam Co., Inc. Spectroscopic ellipsometer and polarimeter systems
US7193710B1 (en) 1995-09-20 2007-03-20 J.A. Woollam Co., Inc. Rotating or rotatable compensator spectroscopic ellipsometer system including multiple element lenses
US7075650B1 (en) * 1995-09-20 2006-07-11 J.A. Woollam Co. Inc. Discrete polarization state spectroscopic ellipsometer system and method of use
US7075649B1 (en) 1995-09-20 2006-07-11 J.A. Woollam Co. Discrete polarization state rotatable compensator spectroscopic ellipsometer system, and method of calibration
US7245376B2 (en) * 1995-09-20 2007-07-17 J. A. Woollam Co., Inc. Combined spatial filter and relay systems in rotating compensator ellipsometer/polarimeter
US8023724B2 (en) * 1999-07-22 2011-09-20 Photon-X, Inc. Apparatus and method of information extraction from electromagnetic energy based upon multi-characteristic spatial geometry processing
US6535286B1 (en) * 2000-03-21 2003-03-18 J.A. Woollam Co. Inc. Positionable multiple detector system for spectrophotomer, ellipsometer, polarimeter and systems, and methodology of use
US6982789B1 (en) 2000-03-21 2006-01-03 J.A. Woollam Co. Inc. Monochromator system and applications thereof
US7345762B1 (en) 2000-05-30 2008-03-18 J.A. Woollam Co., Inc. Control of beam spot size in ellipsometer and the like systems
US7535566B1 (en) 2000-09-05 2009-05-19 J.A. Woollam Co., Inc. Beam chromatic shifting and directing means
US6795184B1 (en) * 2001-04-06 2004-09-21 J.A. Woollam Co., Inc Odd bounce image rotation system in ellipsometer systems
JP3652296B2 (ja) * 2001-10-26 2005-05-25 キヤノン株式会社 光学装置
US7196783B2 (en) 2002-11-15 2007-03-27 Accurate Machining, Inc. Optical fiber bundle utilizing electromagnetic radiation feedback
US7342661B2 (en) * 2004-12-03 2008-03-11 Therma-Wave, Inc. Method for noise improvement in ellipsometers
US7265839B1 (en) 2005-04-02 2007-09-04 J.A. Woollam Co., Inc. Horizontal attenuated total reflection system
US7920264B1 (en) 2005-04-02 2011-04-05 J.A. Woollam Co., Inc. Horizontal attenuated total reflection system
US7450231B2 (en) * 2005-11-04 2008-11-11 J.A. Woollam Co., Inc. Deviation angle self compensating substantially achromatic retarder
US7460230B2 (en) * 2005-11-04 2008-12-02 J.A. Woollam Co., Inc. Deviation angle self compensating substantially achromatic retarder
US8462341B2 (en) 2005-11-04 2013-06-11 J.A. Woollam Co., Inc. Mounting for deviation angle self compensating substantially achromatic retarder
US8416408B1 (en) 2009-02-27 2013-04-09 J.A. Woollam Co., Inc. Terahertz-infrared ellipsometer system, and method of use
US8488119B2 (en) 2009-02-27 2013-07-16 J.A. Woollam Co., Inc. Terahertz-infrared ellipsometer system, and method of use
US8934096B2 (en) 2009-02-27 2015-01-13 University Of Nebraska Board Of Regents Terahertz-infrared ellipsometer system, and method of use
US8169611B2 (en) 2009-02-27 2012-05-01 University Of Nebraska Board Of Regents Terahertz-infrared ellipsometer system, and method of use
US8736838B2 (en) 2009-02-27 2014-05-27 J.A. Woollam Co., Inc. Terahertz ellipsometer system, and method of use
US8564777B1 (en) 2010-08-16 2013-10-22 J.A. Woollam Co., Inc. System and method for compensating detector non-idealities

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US548495A (en) * 1895-10-22 Ernst abbe
US2447828A (en) * 1945-02-17 1948-08-24 Polaroid Corp Light-polarizing prism
US3514182A (en) * 1967-11-06 1970-05-26 Ibm Light focus shifting system
US3817624A (en) * 1971-11-30 1974-06-18 J Martin Apparatus for establishing a line in the same plane as a reference line
US4053232A (en) * 1973-06-25 1977-10-11 International Business Machines Corporation Rotating-compensator ellipsometer
SU995051A1 (ru) * 1981-10-08 1983-02-07 Государственный Ордена Октябрьской Революции Научно-Исследовательский И Проектный Институт Редкометаллической Промышленности "Гиредмет" Четвертьволновое устройство
DE3206040A1 (de) * 1982-02-19 1983-09-01 Siemens AG, 1000 Berlin und 8000 München Reflexionsfreier optischer polarisator mit einem prisma
US4668086A (en) * 1985-05-20 1987-05-26 Salomon Redner Stress and strain measuring apparatus and method
US5016980A (en) * 1985-11-12 1991-05-21 Waldron Robert D Systems for deviating and (optionally) converging radiation
US5329357A (en) * 1986-03-06 1994-07-12 Sopra-Societe De Production Et De Recherches Appliquees Spectroscopic ellipsometry apparatus including an optical fiber
US4917461A (en) * 1989-01-11 1990-04-17 Goldstein Dennis H Achromatic infrared retarder
FR2674708B1 (fr) * 1991-03-29 1997-01-24 Thomson Csf Filtre transverse electrique a fonctionnement optique.
US5521706A (en) * 1992-09-18 1996-05-28 J. A. Woollam Co. Inc. System and method for compensating polarization-dependent sensitivity of dispersive optics in a rotating analyzer ellipsometer system
US5504582A (en) * 1992-09-18 1996-04-02 J. A. Woollam Co. Inc. System and method for compensating polarization-dependent sensitivity of dispersive optics in a rotating analyzer ellipsometer system
US5373359A (en) * 1992-09-18 1994-12-13 J. A. Woollam Co. Ellipsometer
US5412473A (en) * 1993-07-16 1995-05-02 Therma-Wave, Inc. Multiple angle spectroscopic analyzer utilizing interferometric and ellipsometric devices
US5581350A (en) * 1995-06-06 1996-12-03 Tencor Instruments Method and system for calibrating an ellipsometer

Also Published As

Publication number Publication date
EP1026495A3 (de) 2003-12-17
EP1026495B1 (de) 2005-06-15
EP1026495A2 (de) 2000-08-09
US6084675A (en) 2000-07-04
DE69925804T2 (de) 2006-05-11

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