DE69911218D1 - Kapazitive auswerteschaltung mit zwei ausgängen - Google Patents

Kapazitive auswerteschaltung mit zwei ausgängen

Info

Publication number
DE69911218D1
DE69911218D1 DE69911218T DE69911218T DE69911218D1 DE 69911218 D1 DE69911218 D1 DE 69911218D1 DE 69911218 T DE69911218 T DE 69911218T DE 69911218 T DE69911218 T DE 69911218T DE 69911218 D1 DE69911218 D1 DE 69911218D1
Authority
DE
Germany
Prior art keywords
outputs
capacitive evaluation
capacitive
evaluation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69911218T
Other languages
English (en)
Inventor
We H Ko
Qiang Wang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Goodyear Tire and Rubber Co
Original Assignee
Goodyear Tire and Rubber Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Goodyear Tire and Rubber Co filed Critical Goodyear Tire and Rubber Co
Application granted granted Critical
Publication of DE69911218D1 publication Critical patent/DE69911218D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2417—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying separation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L17/00—Devices or apparatus for measuring tyre pressure or the pressure in other inflated bodies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
    • G01L9/125—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor with temperature compensating means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Manipulation Of Pulses (AREA)
  • Amplifiers (AREA)
DE69911218T 1998-07-07 1999-07-07 Kapazitive auswerteschaltung mit zwei ausgängen Expired - Lifetime DE69911218D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US9190998P 1998-07-07 1998-07-07
PCT/US1999/015270 WO2000002014A1 (en) 1998-07-07 1999-07-07 Dual output capacitance interface circuit

Publications (1)

Publication Number Publication Date
DE69911218D1 true DE69911218D1 (de) 2003-10-16

Family

ID=22230253

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69908129T Expired - Lifetime DE69908129D1 (de) 1998-07-07 1999-07-07 Verfahren zur herstellung eines kapazitiven sensors
DE69911218T Expired - Lifetime DE69911218D1 (de) 1998-07-07 1999-07-07 Kapazitive auswerteschaltung mit zwei ausgängen

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69908129T Expired - Lifetime DE69908129D1 (de) 1998-07-07 1999-07-07 Verfahren zur herstellung eines kapazitiven sensors

Country Status (5)

Country Link
US (2) US6452427B1 (de)
EP (3) EP1101079B1 (de)
AU (2) AU4971799A (de)
DE (2) DE69908129D1 (de)
WO (2) WO2000002014A1 (de)

Families Citing this family (100)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6922134B1 (en) 1998-04-14 2005-07-26 The Goodyear Tire Rubber Company Programmable trimmer for transponder
US7260371B1 (en) 1998-04-14 2007-08-21 The Goodyear Tire & Rubber Company Programmable modulation index for transponder
ATE252225T1 (de) * 1998-12-15 2003-11-15 Fraunhofer Ges Forschung Verfahren zum erzeugen eines mikro- elektromechanischen elements
WO2001044000A1 (en) 1999-05-17 2001-06-21 The Goodyear Tire & Rubber Company Relaxation oscillator for transponder
US6369712B2 (en) 1999-05-17 2002-04-09 The Goodyear Tire & Rubber Company Response adjustable temperature sensor for transponder
US6980084B1 (en) 1999-05-17 2005-12-27 The Goodyear Tire & Rubber Company Power-on reset for transponder
US6995672B1 (en) * 1999-05-17 2006-02-07 The Goodyear Tire & Rubber Co. Relaxation oscillator for transponder
DE69912855T2 (de) 1999-05-17 2004-08-26 The Goodyear Tire & Rubber Co., Akron Rf transponder mit einer einschalt-rücksetzschaltung und verfahren zum steuern des betriebs eines transponders dieser art
US6658928B1 (en) 1999-12-14 2003-12-09 The Goodyear Tire & Rubber Company Method of monitoring pressure in a pneumatic tire
US6775632B1 (en) 1999-12-14 2004-08-10 The Goodyear Tire & Rubber Company Calibration of a transponders for a tire pressure monitoring system
US6860153B2 (en) * 2000-02-22 2005-03-01 Simon Fraser University Gas pressure sensor based on short-distance heat conduction and method for fabricating same
EP1259976A2 (de) * 2000-02-23 2002-11-27 National Center for Scientific Research Demokritos Institute of Microelectronics Kapazitive druckempfindliche vorrichtungen und ihre herstellung
ITTO20010086A1 (it) * 2001-01-30 2002-07-30 St Microelectronics Srl Procedimento per sigillare e connettere parti di microsistemi elettromeccanici, fluidi, ottici e dispositivo cosi' ottenuto.
US7047814B2 (en) * 2001-07-17 2006-05-23 Redwood Microsystems, Inc. Micro-electromechanical sensor
JP4890689B2 (ja) * 2001-07-24 2012-03-07 オリンパス株式会社 三次元構造体の製造方法及び揺動体の製造方法
FR2829292B1 (fr) * 2001-08-31 2004-09-10 Atmel Grenoble Sa Procede de fabrication de capteur d'image couleur avec substrat de support soude plot sur plot
US6933537B2 (en) * 2001-09-28 2005-08-23 Osram Opto Semiconductors Gmbh Sealing for OLED devices
US7312785B2 (en) 2001-10-22 2007-12-25 Apple Inc. Method and apparatus for accelerated scrolling
US7345671B2 (en) 2001-10-22 2008-03-18 Apple Inc. Method and apparatus for use of rotational user inputs
FI114825B (fi) 2002-02-13 2004-12-31 Vti Technologies Oy Menetelmä kapasitiivisen anturin lämpötilariippuvuuden pienentämiseksi sekä kapasitiivinen anturirakenne
US7333092B2 (en) 2002-02-25 2008-02-19 Apple Computer, Inc. Touch pad for handheld device
US6958255B2 (en) 2002-08-08 2005-10-25 The Board Of Trustees Of The Leland Stanford Junior University Micromachined ultrasonic transducers and method of fabrication
US6828802B2 (en) * 2002-08-16 2004-12-07 Rosemount Inc. Pressure measurement device including a capacitive sensor in an amplifier feedback path
WO2005019785A2 (en) * 2003-08-11 2005-03-03 Analog Devices, Inc. Capacitive sensor
US20070152977A1 (en) 2005-12-30 2007-07-05 Apple Computer, Inc. Illuminated touchpad
US7499040B2 (en) 2003-08-18 2009-03-03 Apple Inc. Movable touch pad with added functionality
GB2406381B (en) * 2003-09-27 2005-10-12 Future Technology Sensors
US8059099B2 (en) 2006-06-02 2011-11-15 Apple Inc. Techniques for interactive input to portable electronic devices
US7495659B2 (en) 2003-11-25 2009-02-24 Apple Inc. Touch pad for handheld device
JP4052263B2 (ja) * 2004-03-04 2008-02-27 株式会社デンソー 圧力センサ
KR100603199B1 (ko) * 2004-06-08 2006-07-24 삼성전자주식회사 온도데이터를 송신하는 무선인증용태그 및 그 방법
US7347099B2 (en) * 2004-07-16 2008-03-25 Rosemount Inc. Pressure transducer with external heater
JP2008511045A (ja) 2004-08-16 2008-04-10 フィンガーワークス・インコーポレーテッド タッチセンス装置の空間分解能を向上させる方法
US7560788B2 (en) * 2004-09-20 2009-07-14 General Electric Company Microelectromechanical system pressure sensor and method for making and using
US7121145B2 (en) * 2004-10-18 2006-10-17 Silverbrook Research Pty Ltd Capacitative pressure sensor
US7037746B1 (en) * 2004-12-27 2006-05-02 General Electric Company Capacitive micromachined ultrasound transducer fabricated with epitaxial silicon membrane
US20070013014A1 (en) * 2005-05-03 2007-01-18 Shuwen Guo High temperature resistant solid state pressure sensor
US7628309B1 (en) 2005-05-03 2009-12-08 Rosemount Aerospace Inc. Transient liquid phase eutectic bonding
US7538401B2 (en) 2005-05-03 2009-05-26 Rosemount Aerospace Inc. Transducer for use in harsh environments
US7400042B2 (en) * 2005-05-03 2008-07-15 Rosemount Aerospace Inc. Substrate with adhesive bonding metallization with diffusion barrier
US20060276008A1 (en) * 2005-06-02 2006-12-07 Vesa-Pekka Lempinen Thinning
US7622782B2 (en) * 2005-08-24 2009-11-24 General Electric Company Pressure sensors and methods of making the same
JP4535046B2 (ja) * 2006-08-22 2010-09-01 ヤマハ株式会社 静電容量センサ及びその製造方法
US7679033B2 (en) * 2005-09-29 2010-03-16 Rosemount Inc. Process field device temperature control
US7880729B2 (en) 2005-10-11 2011-02-01 Apple Inc. Center button isolation ring
US20070144247A1 (en) * 2005-12-23 2007-06-28 Seesink Peter H Multiple function stable sensor circuitry
US20070152983A1 (en) 2005-12-30 2007-07-05 Apple Computer, Inc. Touch pad with symbols based on mode
EP1860418A1 (de) * 2006-05-23 2007-11-28 Sensirion AG Verfahren zur Herstellung eines Drucksensors unter Verwendung von SOI-Wafern
EP2275793A1 (de) * 2006-05-23 2011-01-19 Sensirion Holding AG Drucksensor mit einer Kammer und Herstellungsverfahren dafür
US7493823B2 (en) * 2006-06-16 2009-02-24 Honeywell International Inc. Pressure transducer with differential amplifier
US8022935B2 (en) 2006-07-06 2011-09-20 Apple Inc. Capacitance sensing electrode with integrated I/O mechanism
US8743060B2 (en) 2006-07-06 2014-06-03 Apple Inc. Mutual capacitance touch sensing device
US9360967B2 (en) * 2006-07-06 2016-06-07 Apple Inc. Mutual capacitance touch sensing device
US7448277B2 (en) * 2006-08-31 2008-11-11 Evigia Systems, Inc. Capacitive pressure sensor and method therefor
US7795553B2 (en) 2006-09-11 2010-09-14 Apple Inc. Hybrid button
US8274479B2 (en) 2006-10-11 2012-09-25 Apple Inc. Gimballed scroll wheel
US8482530B2 (en) 2006-11-13 2013-07-09 Apple Inc. Method of capacitively sensing finger position
TWI317812B (en) * 2006-12-22 2009-12-01 Delta Electronics Inc Capacitance acceleration sensing structure
US20090015269A1 (en) * 2007-07-13 2009-01-15 Pinto Gino A Stray Capacitance Compensation for a Capacitive Sensor
US8683378B2 (en) 2007-09-04 2014-03-25 Apple Inc. Scrolling techniques for user interfaces
US7910843B2 (en) 2007-09-04 2011-03-22 Apple Inc. Compact input device
US8416198B2 (en) 2007-12-03 2013-04-09 Apple Inc. Multi-dimensional scroll wheel
US8125461B2 (en) 2008-01-11 2012-02-28 Apple Inc. Dynamic input graphic display
US8820133B2 (en) 2008-02-01 2014-09-02 Apple Inc. Co-extruded materials and methods
US9454256B2 (en) 2008-03-14 2016-09-27 Apple Inc. Sensor configurations of an input device that are switchable based on mode
JP5374077B2 (ja) 2008-06-16 2013-12-25 ローム株式会社 Ｍｅｍｓセンサ
EP2159558A1 (de) * 2008-08-28 2010-03-03 Sensirion AG Verfahren zur Herstellung eines integrierten Drucksensors
US7782133B2 (en) * 2008-09-03 2010-08-24 Infineon Technologies Ag Power amplifier with output power control
US8816967B2 (en) 2008-09-25 2014-08-26 Apple Inc. Capacitive sensor having electrodes arranged on the substrate and the flex circuit
JP2010098518A (ja) * 2008-10-16 2010-04-30 Rohm Co Ltd Ｍｅｍｓセンサの製造方法およびｍｅｍｓセンサ
US8519722B1 (en) * 2008-10-22 2013-08-27 Cypress Semiconductor Corporation Method and apparatus for testing projected capacitance matrices and determining the location and types of faults
US8395590B2 (en) 2008-12-17 2013-03-12 Apple Inc. Integrated contact switch and touch sensor elements
US8024978B2 (en) * 2009-01-21 2011-09-27 Honeywell International Inc. Media isolated pressure transducer having boss comprising single metal diaphragm
JP5458981B2 (ja) 2009-03-24 2014-04-02 カシオ計算機株式会社 マルチバンドアンテナ及び電子機器
US9354751B2 (en) 2009-05-15 2016-05-31 Apple Inc. Input device with optimized capacitive sensing
WO2010148398A2 (en) * 2009-06-19 2010-12-23 The Regents Of The University Of Michigan A thin-film device and method of fabricating the same
US8872771B2 (en) 2009-07-07 2014-10-28 Apple Inc. Touch sensing device having conductive nodes
US8656772B2 (en) 2010-03-22 2014-02-25 Honeywell International Inc. Flow sensor with pressure output signal
US8490495B2 (en) * 2010-05-05 2013-07-23 Consensic, Inc. Capacitive pressure sensor with vertical electrical feedthroughs and method to make the same
US8316717B2 (en) * 2010-06-29 2012-11-27 Rogue Valley Microdevices, Inc. Wireless self-powered monolithic integrated capacitive sensor and method of manufacture
US8616065B2 (en) 2010-11-24 2013-12-31 Honeywell International Inc. Pressure sensor
US8695417B2 (en) 2011-01-31 2014-04-15 Honeywell International Inc. Flow sensor with enhanced flow range capability
JP5896665B2 (ja) * 2011-09-20 2016-03-30 キヤノン株式会社 電気機械変換装置の製造方法
US9003897B2 (en) 2012-05-10 2015-04-14 Honeywell International Inc. Temperature compensated force sensor
US9052217B2 (en) 2012-11-09 2015-06-09 Honeywell International Inc. Variable scale sensor
EP2871456B1 (de) 2013-11-06 2018-10-10 Invensense, Inc. Drucksensor und Herstellungsmethode für einen Drucksensor
EP2871455B1 (de) 2013-11-06 2020-03-04 Invensense, Inc. Drucksensor
DE102014108748A1 (de) * 2014-06-23 2015-12-24 Endress + Hauser Gmbh + Co. Kg Kapazitiver Differenzdrucksensor und Verfahren zu seiner Herstellung
US9567204B2 (en) * 2014-08-29 2017-02-14 Taiwan Semiconductor Manufacturing Co., Ltd. Microelectrochemical systems (MEMS) device having a seal layer arranged over or lining a hole in fluid communication with a cavity of the MEMS device
US10131540B2 (en) 2015-03-12 2018-11-20 Taiwan Semiconductor Manufacturing Co., Ltd. Structure and method to mitigate soldering offset for wafer-level chip scale package (WLCSP) applications
EP3614115A1 (de) 2015-04-02 2020-02-26 InvenSense, Inc. Drucksensor
US20170256432A1 (en) * 2016-03-03 2017-09-07 Nexperia B.V. Overmolded chip scale package
FR3051084B1 (fr) * 2016-05-04 2019-08-02 Stmicroelectronics (Rousset) Sas Generateur de nombres d'oscillations
FR3051085B1 (fr) 2016-05-04 2020-02-14 Stmicroelectronics (Rousset) Sas Structure de multiplexeur
FR3051086B1 (fr) 2016-05-04 2019-07-26 Stmicroelectronics (Rousset) Sas Circuit de comptage d'impulsions
US10083883B2 (en) * 2016-06-20 2018-09-25 Applied Materials, Inc. Wafer processing equipment having capacitive micro sensors
US11225409B2 (en) 2018-09-17 2022-01-18 Invensense, Inc. Sensor with integrated heater
DE212019000447U1 (de) 2019-01-16 2021-10-12 Murata Manufacturing Co., Ltd. Siliziumsubstrat mit einen Hohlraum sowie Hohlraum-SOI-Substrat, welches das Siliziumsubstrat umfasst
WO2020236661A1 (en) 2019-05-17 2020-11-26 Invensense, Inc. A pressure sensor with improve hermeticity
CN110510572B (zh) * 2019-08-30 2022-06-10 西安电子科技大学 一种电容式压力传感器及其制作方法

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3288656A (en) 1961-07-26 1966-11-29 Nippon Electric Co Semiconductor device
US3993939A (en) 1975-01-07 1976-11-23 The Bendix Corporation Pressure variable capacitor
US4104595A (en) 1976-12-27 1978-08-01 Borg-Warner Corporation Signal translating circuit for variable area capacitive pressure transducer
US4446447A (en) 1980-12-22 1984-05-01 Ford Motor Company Circuit for converting pressure variation to frequency variation
US4392382A (en) 1981-03-09 1983-07-12 Motorola Inc. Linearized electronic capacitive pressure transducer
US4517622A (en) * 1983-08-29 1985-05-14 United Technologies Corporation Capacitive pressure transducer signal conditioning circuit
US4720623A (en) * 1986-05-01 1988-01-19 E. I. Du Pont De Nemours And Company Power control device for a resistance heater in an oven
US4820971A (en) * 1986-05-29 1989-04-11 Ko Wen Hsiung Precision impedance variation measurement circuit
GB8718637D0 (en) * 1987-08-06 1987-09-09 Spectrol Reliance Ltd Sealing electrical feedthrough
DE9102748U1 (de) * 1991-01-14 1991-07-04 Ploechinger, Heinz, Dipl.-Ing., 8130 Starnberg, De
US5295395A (en) * 1991-02-07 1994-03-22 Hocker G Benjamin Diaphragm-based-sensors
US5225783A (en) 1991-02-18 1993-07-06 Mitsubishi Denki Kabushiki Kaisha Dielectric constant detection apparatus for fuel
FR2701564B1 (fr) * 1993-02-12 1995-05-19 Suisse Electronique Microtech Capteur de mesure de pression absolue de type capacitif et procédé de fabrication d'une pluralité de tels capteurs.
FI93059C (fi) * 1993-07-07 1995-02-10 Vaisala Oy Kapasitiivinen paineanturirakenne ja menetelmä sen valmistamiseksi
US5349864A (en) * 1993-07-07 1994-09-27 Kavlico Corporation System for comparing a reference signal with a filtered signal to detect pressure discontinuity
DE4329591C2 (de) 1993-09-02 2002-05-08 Bayerische Motoren Werke Ag Vorrichtung zur Überwachung des Luftdrucks eines Reifens bei Kraftfahrzeugen
DE69409257T2 (de) * 1993-12-13 1998-09-10 Honeywell Inc Integrierte silizium-vakuum-mikropackung für infrarot-geräte
US5453628A (en) * 1994-10-12 1995-09-26 Kobe Steel Usa, Inc. Microelectronic diamond capacitive transducer
US5528452A (en) 1994-11-22 1996-06-18 Case Western Reserve University Capacitive absolute pressure sensor
US5736430A (en) * 1995-06-07 1998-04-07 Ssi Technologies, Inc. Transducer having a silicon diaphragm and method for forming same
US5600072A (en) * 1995-06-23 1997-02-04 Motorola, Inc. Capacitive pressure sensor and method for making the same
US5596144A (en) * 1995-08-04 1997-01-21 Delco Electronics Corporation Piezoresistive force rebalance accelerometer
US5721162A (en) * 1995-11-03 1998-02-24 Delco Electronics Corporation All-silicon monolithic motion sensor with integrated conditioning circuit
US5798556A (en) * 1996-03-25 1998-08-25 Motorola, Inc. Sensor and method of fabrication
US5706565A (en) * 1996-09-03 1998-01-13 Delco Electronics Corporation Method for making an all-silicon capacitive pressure sensor
US5936164A (en) * 1997-08-27 1999-08-10 Delco Electronics Corporation All-silicon capacitive pressure sensor
US5932809A (en) * 1998-02-17 1999-08-03 Delco Electronics Corporation Sensor with silicon strain gage
US6109113A (en) * 1998-06-11 2000-08-29 Delco Electronics Corp. Silicon micromachined capacitive pressure sensor and method of manufacture
US6074891A (en) * 1998-06-16 2000-06-13 Delphi Technologies, Inc. Process for verifying a hermetic seal and semiconductor device therefor
US6150681A (en) * 1998-07-24 2000-11-21 Silicon Microstructures, Inc. Monolithic flow sensor and pressure sensor

Also Published As

Publication number Publication date
AU5215099A (en) 2000-01-24
WO2000002028A1 (en) 2000-01-13
WO2000002014A1 (en) 2000-01-13
EP1101079B1 (de) 2003-09-10
AU4971799A (en) 2000-01-24
EP1093571A1 (de) 2001-04-25
US6452427B1 (en) 2002-09-17
EP1271121A2 (de) 2003-01-02
EP1093571B1 (de) 2003-05-21
EP1101079A1 (de) 2001-05-23
US6465271B1 (en) 2002-10-15
DE69908129D1 (de) 2003-06-26
EP1271121A3 (de) 2003-05-02

Similar Documents

Publication Publication Date Title
DE69911218D1 (de) Kapazitive auswerteschaltung mit zwei ausgängen
DE69921712D1 (de) Kapazitiver Abstandssensor
DE69817536T8 (de) Uhrwerk mit kapazitiver detektionsvorrichtung
PT1104239E (pt) Herbicidas com aminofenilsulfonilureias acilatadas
DE59808346D1 (de) Behälter mit zwei Aufnahmeräumen
DE69942503D1 (de) Polymer-verarbeitungszusatz mit verbesserter stabilität
DE69903644D1 (de) Etiketten mit weicher berührungseigenschaft
DE69926763D1 (de) Airbag mit umlenkwand
ID27776A (id) Bahan dengan efek antidepresan
DE69934940D1 (de) Vermessungsinstrument mit Lot
DE69925063D1 (de) Tastatur mit Rückbeleuchtungsanzeige
DE59915218D1 (de) Korotron mit Gegenelektrode
DE69915212D1 (de) Kapazitive Wegmesseinrichtung
DE59908126D1 (de) Geldkassettenanordnung mit sensor
DE59903124D1 (de) Pumpenanordnung mit zwei hydropumpen
DE60022128D1 (de) Frequenzadaptiver Herzschrittmacher mit zwei Sensoren
DE19782275T1 (de) Magnetoresistiver Sensor mit verbesserter Stabilität
FI990553A (fi) Mittausjärjestely
DE50001580D1 (de) Integrierter schaltkreis mit zumindest zwei taktsystemen
DE69909200D1 (de) Feststellung von sichtbaren Unterschieden zwischen zwei Bildern
DE69826382D1 (de) Kombinationswaage mit zuverlässiger Kombinationsberechnung
DE69941245D1 (de) Kapazitiver sensor
DE59910240D1 (de) Kapazitiver Sensor
DE59811007D1 (de) Elektronischer signalgeber mit auswerteschaltung
DE69835607D1 (de) System mit zwei armen

Legal Events

Date Code Title Description
8332 No legal effect for de