DE69906867D1 - Plamaverfahren zur Herstellung von Oberflächenschichten - Google Patents
Plamaverfahren zur Herstellung von OberflächenschichtenInfo
- Publication number
- DE69906867D1 DE69906867D1 DE69906867T DE69906867T DE69906867D1 DE 69906867 D1 DE69906867 D1 DE 69906867D1 DE 69906867 T DE69906867 T DE 69906867T DE 69906867 T DE69906867 T DE 69906867T DE 69906867 D1 DE69906867 D1 DE 69906867D1
- Authority
- DE
- Germany
- Prior art keywords
- plama
- production
- voltage
- surface layers
- amplitude
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/515—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using pulsed discharges
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
BE9800387 | 1998-05-20 | ||
BE9800387A BE1011927A3 (nl) | 1998-05-20 | 1998-05-20 | Plasmamethode voor de afzetting van deklagen. |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69906867D1 true DE69906867D1 (de) | 2003-05-22 |
DE69906867T2 DE69906867T2 (de) | 2004-04-01 |
Family
ID=3891260
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69906867T Expired - Lifetime DE69906867T2 (de) | 1998-05-20 | 1999-05-12 | Plamaverfahren zur Herstellung von Oberflächenschichten |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0962550B1 (de) |
AT (1) | ATE237702T1 (de) |
BE (1) | BE1011927A3 (de) |
DE (1) | DE69906867T2 (de) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20010044027A1 (en) * | 1999-12-30 | 2001-11-22 | Anderson Jerrel Charles | Diamond-like carbon coating on glass for added hardness and abrasion resistance |
DE10018143C5 (de) † | 2000-04-12 | 2012-09-06 | Oerlikon Trading Ag, Trübbach | DLC-Schichtsystem sowie Verfahren und Vorrichtung zur Herstellung eines derartigen Schichtsystems |
JP4755262B2 (ja) * | 2009-01-28 | 2011-08-24 | 株式会社神戸製鋼所 | ダイヤモンドライクカーボン膜の製造方法 |
GB2476004B (en) * | 2011-02-23 | 2011-12-28 | Portal Medical Ltd | Medicament Dispenser Device |
JP2015509136A (ja) | 2011-12-05 | 2015-03-26 | ソルヴェイ(ソシエテ アノニム) | 無機粒子の表面のための大気プラズマの使用及び有機フッ素含有表面改質を含む無機粒子 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5587207A (en) * | 1994-11-14 | 1996-12-24 | Gorokhovsky; Vladimir I. | Arc assisted CVD coating and sintering method |
DE19513614C1 (de) * | 1995-04-10 | 1996-10-02 | Fraunhofer Ges Forschung | Verfahren zur Abscheidung von Kohlenstoffschichten, Kohlenstoffschichten auf Substraten und deren Verwendung |
-
1998
- 1998-05-20 BE BE9800387A patent/BE1011927A3/nl not_active IP Right Cessation
-
1999
- 1999-05-12 AT AT99870102T patent/ATE237702T1/de not_active IP Right Cessation
- 1999-05-12 DE DE69906867T patent/DE69906867T2/de not_active Expired - Lifetime
- 1999-05-12 EP EP99870102A patent/EP0962550B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0962550A1 (de) | 1999-12-08 |
DE69906867T2 (de) | 2004-04-01 |
EP0962550B1 (de) | 2003-04-16 |
ATE237702T1 (de) | 2003-05-15 |
BE1011927A3 (nl) | 2000-03-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8332 | No legal effect for de | ||
8370 | Indication related to discontinuation of the patent is to be deleted | ||
8364 | No opposition during term of opposition |