DE69902933T2 - Herstellung einer silicon wellenleiterstruktur - Google Patents
Herstellung einer silicon wellenleiterstrukturInfo
- Publication number
- DE69902933T2 DE69902933T2 DE69902933T DE69902933T DE69902933T2 DE 69902933 T2 DE69902933 T2 DE 69902933T2 DE 69902933 T DE69902933 T DE 69902933T DE 69902933 T DE69902933 T DE 69902933T DE 69902933 T2 DE69902933 T2 DE 69902933T2
- Authority
- DE
- Germany
- Prior art keywords
- production
- lead structure
- wave lead
- silicon wave
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title 1
- 229910052710 silicon Inorganic materials 0.000 title 1
- 239000010703 silicon Substances 0.000 title 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/126—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind using polarisation effects
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
- G02F1/025—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction in an optical waveguide structure
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB9823313A GB2343293B (en) | 1998-10-23 | 1998-10-23 | Manufacture of a silicon waveguide structure |
PCT/GB1999/001643 WO2000025156A1 (en) | 1998-10-23 | 1999-05-25 | Manufacture of a silicon waveguide structure |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69902933D1 DE69902933D1 (de) | 2002-10-17 |
DE69902933T2 true DE69902933T2 (de) | 2003-05-28 |
Family
ID=10841234
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69902933T Expired - Fee Related DE69902933T2 (de) | 1998-10-23 | 1999-05-25 | Herstellung einer silicon wellenleiterstruktur |
Country Status (7)
Country | Link |
---|---|
US (1) | US6063299A (de) |
EP (1) | EP1123522B1 (de) |
JP (1) | JP2003524793A (de) |
AU (1) | AU3949199A (de) |
DE (1) | DE69902933T2 (de) |
GB (1) | GB2343293B (de) |
WO (1) | WO2000025156A1 (de) |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2318647B (en) * | 1997-08-30 | 1998-09-09 | Bookham Technology Ltd | Integrated optical polariser |
KR100277695B1 (ko) * | 1998-09-12 | 2001-02-01 | 정선종 | 에스 오 아이 광도파로를 이용한 하이브리드 광집적회로용 기판 제조방법 |
GB2344933B (en) * | 1998-12-14 | 2001-08-29 | Bookham Technology Ltd | Process for making optical waveguides |
JP2002014242A (ja) * | 2000-06-28 | 2002-01-18 | Oki Electric Ind Co Ltd | 光導波路装置 |
US6525864B1 (en) | 2000-07-20 | 2003-02-25 | Nayna Networks, Inc. | Integrated mirror array and circuit device |
FR2812405B1 (fr) * | 2000-07-27 | 2003-06-20 | Centre Nat Rech Scient | Systeme d'interconnexion optique pour circuit integre realise sur un substrat soi |
WO2002069004A2 (en) * | 2001-02-22 | 2002-09-06 | Bookham Technology Plc | Semiconductor optical waveguide device |
US6526187B1 (en) | 2001-05-17 | 2003-02-25 | Optronx, Inc. | Polarization control apparatus and associated method |
US6603889B2 (en) | 2001-05-17 | 2003-08-05 | Optronx, Inc. | Optical deflector apparatus and associated method |
US6690844B2 (en) | 2001-05-17 | 2004-02-10 | Optronx, Inc. | Optical fiber apparatus and associated method |
US6912330B2 (en) | 2001-05-17 | 2005-06-28 | Sioptical Inc. | Integrated optical/electronic circuits and associated methods of simultaneous generation thereof |
US6493502B1 (en) | 2001-05-17 | 2002-12-10 | Optronx, Inc. | Dynamic gain equalizer method and associated apparatus |
US6646747B2 (en) | 2001-05-17 | 2003-11-11 | Sioptical, Inc. | Interferometer apparatus and associated method |
US6771851B1 (en) | 2001-06-19 | 2004-08-03 | Nayna Networks | Fast switching method for a micro-mirror device for optical switching applications |
US20040020896A1 (en) * | 2002-02-15 | 2004-02-05 | Lockheed Martin Corporation | Tapered optical fiber for fiber to waveguide interconnection |
JP3890046B2 (ja) * | 2002-10-07 | 2007-03-07 | 日本電信電話株式会社 | 平面回路型光学素子の製造方法 |
US7118682B2 (en) * | 2003-03-28 | 2006-10-10 | Sioptical, Inc. | Low loss SOI/CMOS compatible silicon waveguide and method of making the same |
JP4195992B2 (ja) * | 2003-08-26 | 2008-12-17 | パナソニック電工株式会社 | スポットサイズ変換器の製造方法 |
US7672558B2 (en) * | 2004-01-12 | 2010-03-02 | Honeywell International, Inc. | Silicon optical device |
US7016587B2 (en) * | 2004-01-20 | 2006-03-21 | Xerox Corporation | Low loss silicon waveguide and method of fabrication thereof |
US20060133754A1 (en) * | 2004-12-21 | 2006-06-22 | Vipulkumar Patel | Ultra low-loss CMOS compatible silicon waveguides |
CN100406934C (zh) * | 2005-08-04 | 2008-07-30 | 浙江大学 | 一种深刻蚀二氧化硅脊型波导及其制备工艺 |
US20070101927A1 (en) * | 2005-11-10 | 2007-05-10 | Honeywell International Inc. | Silicon based optical waveguide structures and methods of manufacture |
US7362443B2 (en) | 2005-11-17 | 2008-04-22 | Honeywell International Inc. | Optical gyro with free space resonator and method for sensing inertial rotation rate |
US7463360B2 (en) * | 2006-04-18 | 2008-12-09 | Honeywell International Inc. | Optical resonator gyro with integrated external cavity beam generator |
US20070274655A1 (en) * | 2006-04-26 | 2007-11-29 | Honeywell International Inc. | Low-loss optical device structure |
US7454102B2 (en) | 2006-04-26 | 2008-11-18 | Honeywell International Inc. | Optical coupling structure |
US7535576B2 (en) * | 2006-05-15 | 2009-05-19 | Honeywell International, Inc. | Integrated optical rotation sensor and method for sensing rotation rate |
US8148265B2 (en) * | 2008-08-29 | 2012-04-03 | Bae Systems Information And Electronic Systems Integration Inc. | Two-step hardmask fabrication methodology for silicon waveguides |
JP5161152B2 (ja) * | 2009-05-25 | 2013-03-13 | 日本電信電話株式会社 | 可変光減衰器の作製方法 |
US8995800B2 (en) | 2012-07-06 | 2015-03-31 | Teledyne Scientific & Imaging, Llc | Method of fabricating silicon waveguides with embedded active circuitry |
WO2019226679A1 (en) | 2018-05-22 | 2019-11-28 | Fluxus, Inc. | Fabrication of waveguide structures |
CN115547814B (zh) * | 2022-11-25 | 2023-03-28 | 杭州光智元科技有限公司 | 半导体结构及其制造方法、芯片 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4787691A (en) * | 1987-03-26 | 1988-11-29 | The United States Of America As Represented By The Secretary Of The Air Force | Electro-optical silicon devices |
FR2625333B1 (fr) * | 1987-12-24 | 1993-09-10 | Commissariat Energie Atomique | Procede de fabrication de microguides de lumiere a faibles pertes de propagation optique par depot de multicouches |
US4997246A (en) * | 1989-12-21 | 1991-03-05 | International Business Machines Corporation | Silicon-based rib waveguide optical modulator |
US5143577A (en) * | 1991-02-08 | 1992-09-01 | Hoechst Celanese Corporation | Smooth-wall polymeric channel and rib waveguides exhibiting low optical loss |
JPH0728007A (ja) * | 1993-07-09 | 1995-01-31 | Nec Corp | 導波路型光デバイス |
DE69315359T2 (de) * | 1993-09-21 | 1998-06-10 | Bookham Technology Ltd | Elektro-optische vorrichtung |
GB2318647B (en) * | 1997-08-30 | 1998-09-09 | Bookham Technology Ltd | Integrated optical polariser |
-
1998
- 1998-10-23 GB GB9823313A patent/GB2343293B/en not_active Revoked
-
1999
- 1999-01-13 US US09/229,424 patent/US6063299A/en not_active Expired - Fee Related
- 1999-05-25 EP EP99922400A patent/EP1123522B1/de not_active Expired - Lifetime
- 1999-05-25 WO PCT/GB1999/001643 patent/WO2000025156A1/en active IP Right Grant
- 1999-05-25 DE DE69902933T patent/DE69902933T2/de not_active Expired - Fee Related
- 1999-05-25 AU AU39491/99A patent/AU3949199A/en not_active Abandoned
- 1999-05-25 JP JP2000578679A patent/JP2003524793A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
WO2000025156A1 (en) | 2000-05-04 |
DE69902933D1 (de) | 2002-10-17 |
US6063299A (en) | 2000-05-16 |
EP1123522B1 (de) | 2002-09-11 |
AU3949199A (en) | 2000-05-15 |
GB2343293A (en) | 2000-05-03 |
JP2003524793A (ja) | 2003-08-19 |
EP1123522A1 (de) | 2001-08-16 |
GB2343293B (en) | 2003-05-14 |
GB9823313D0 (en) | 1998-12-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |