DE69900771T2 - Monolithischer Siliziumsensor für Augendruckmessung und Herstellungsverfahren - Google Patents

Monolithischer Siliziumsensor für Augendruckmessung und Herstellungsverfahren

Info

Publication number
DE69900771T2
DE69900771T2 DE69900771T DE69900771T DE69900771T2 DE 69900771 T2 DE69900771 T2 DE 69900771T2 DE 69900771 T DE69900771 T DE 69900771T DE 69900771 T DE69900771 T DE 69900771T DE 69900771 T2 DE69900771 T2 DE 69900771T2
Authority
DE
Germany
Prior art keywords
pressure measurement
manufacturing processes
silicon sensor
eye pressure
monolithic silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69900771T
Other languages
English (en)
Other versions
DE69900771D1 (de
Inventor
Tariq M Haniff
Martin Lim
Yongli Huang
Kevin Montegrande
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sitek Inc
Original Assignee
Sitek Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sitek Inc filed Critical Sitek Inc
Publication of DE69900771D1 publication Critical patent/DE69900771D1/de
Application granted granted Critical
Publication of DE69900771T2 publication Critical patent/DE69900771T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B3/00—Apparatus for testing the eyes; Instruments for examining the eyes
    • A61B3/10—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions
    • A61B3/16—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions for measuring intraocular pressure, e.g. tonometers
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
    • A61B2562/02—Details of sensors specially adapted for in-vivo measurements
    • A61B2562/028—Microscale sensors, e.g. electromechanical sensors [MEMS]
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/0002—Remote monitoring of patients using telemetry, e.g. transmission of vital signals via a communication network
    • A61B5/0031—Implanted circuitry

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Medical Informatics (AREA)
  • Biophysics (AREA)
  • Ophthalmology & Optometry (AREA)
  • Engineering & Computer Science (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Physics & Mathematics (AREA)
  • Molecular Biology (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Measuring Fluid Pressure (AREA)
DE69900771T 1998-09-01 1999-08-23 Monolithischer Siliziumsensor für Augendruckmessung und Herstellungsverfahren Expired - Fee Related DE69900771T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/145,150 US6010461A (en) 1998-09-01 1998-09-01 Monolithic silicon intra-ocular pressure sensor and method therefor

Publications (2)

Publication Number Publication Date
DE69900771D1 DE69900771D1 (de) 2002-02-28
DE69900771T2 true DE69900771T2 (de) 2002-08-14

Family

ID=22511812

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69900771T Expired - Fee Related DE69900771T2 (de) 1998-09-01 1999-08-23 Monolithischer Siliziumsensor für Augendruckmessung und Herstellungsverfahren

Country Status (4)

Country Link
US (1) US6010461A (de)
EP (1) EP0988826B1 (de)
CA (1) CA2281301C (de)
DE (1) DE69900771T2 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6740058B2 (en) * 2001-06-08 2004-05-25 Wisconsin Alumni Research Foundation Surgical tool with integrated pressure and flow sensors
US7770436B2 (en) * 2001-10-31 2010-08-10 Rheosense, Inc. Micro rheometer for measuring flow viscosity and elasticity for micron sample volumes
US6685302B2 (en) 2001-10-31 2004-02-03 Hewlett-Packard Development Company, L.P. Flextensional transducer and method of forming a flextensional transducer
US20050159660A1 (en) * 2002-05-31 2005-07-21 Valentino Montegrande Intraocular pressure sensor
US20070123767A1 (en) * 2002-05-31 2007-05-31 Valentino Montegrande Intraocular pressure sensor and method of use
US6883903B2 (en) * 2003-01-21 2005-04-26 Martha A. Truninger Flextensional transducer and method of forming flextensional transducer
WO2005053775A1 (fr) * 2003-11-27 2005-06-16 Commissariat A L'energie Atomique Microdispositif de diagnostic et de therapie in vivo
US20050182312A1 (en) * 2004-02-12 2005-08-18 Medtronic Xomed, Inc. Contact tonometer using MEMS technology
US20070170528A1 (en) 2006-01-20 2007-07-26 Aaron Partridge Wafer encapsulated microelectromechanical structure and method of manufacturing same
US8197418B2 (en) * 2007-06-08 2012-06-12 Cornell University Microprobes
FR2919486B1 (fr) * 2007-07-31 2009-10-02 Captomed Entpr Unipersonnelle Capteur de pression auto-etalonnable.
JP5337813B2 (ja) * 2007-12-03 2013-11-06 コロ テクノロジーズ インコーポレイテッド デュアルモード動作マイクロマシン超音波トランスデューサ
CN105784547B (zh) 2010-04-26 2019-11-05 电流感应器公司 便携式粘度计
WO2012098160A1 (en) * 2011-01-18 2012-07-26 Imec Disposable protection for micro-engineered devices
US9561321B2 (en) 2011-12-08 2017-02-07 Alcon Research, Ltd. Selectively moveable valve elements for aspiration and irrigation circuits
US9101444B2 (en) * 2012-01-12 2015-08-11 Innfocus, Inc. Method, surgical kit and device for treating glaucoma
US10219696B2 (en) 2013-03-07 2019-03-05 The Board Of Trustees Of The Leland Stanford Junior University Implantable pressure sensors for telemetric measurements through bodily tissues
WO2014137840A1 (en) 2013-03-07 2014-09-12 The Board Of Trustees Of The Leland Stanford Junior University Implantable micro-fluidic device for monitoring of intra-ocular pressure
US9549850B2 (en) 2013-04-26 2017-01-24 Novartis Ag Partial venting system for occlusion surge mitigation
JP2017510822A (ja) 2014-04-11 2017-04-13 レオセンス，インコーポレイテッド 粘度計及びその使用方法
EP3209237A4 (de) 2014-10-24 2018-06-06 Covidien LP Zugangsports mit sensoren für chirurgisches robotersystem
US9549851B2 (en) 2015-01-28 2017-01-24 Novartis Ag Surgical hand piece with integrated pressure sensor
EP3277158B1 (de) 2015-03-31 2024-05-08 California Institute of Technology Biokompatible verpackung für langfristig implantierbare sensoren und elektronik
CN110520031B (zh) 2017-05-12 2023-02-21 加州理工学院 可植入腔室外压力传感器
US11701504B2 (en) 2020-01-17 2023-07-18 California Institute Of Technology Implantable intracranial pressure sensor

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4023562A (en) * 1975-09-02 1977-05-17 Case Western Reserve University Miniature pressure transducer for medical use and assembly method
US4166269A (en) * 1978-03-06 1979-08-28 Signetics Corporation Temperature compensated piezoresistive transducer
US4722350A (en) * 1984-09-21 1988-02-02 Armeniades C D Ophthalmic instrument for measuring intraocular fluid pressure
NL8502543A (nl) * 1985-09-17 1987-04-16 Sentron V O F Langwerpig drukgevoelig element, vervaardigd uit halfgeleidermateriaal.
US4874500A (en) * 1987-07-15 1989-10-17 Sri International Microelectrochemical sensor and sensor array
US4922913A (en) * 1987-11-12 1990-05-08 Waters Jr George E Intraocular pressure sensor
US5062302A (en) * 1988-04-29 1991-11-05 Schlumberger Industries, Inc. Laminated semiconductor sensor with overpressure protection
US4870964A (en) * 1988-06-16 1989-10-03 Paul F. Bailey, Jr. Opthalmic surgical device and method with image data reflected off of the eye
US4993143A (en) * 1989-03-06 1991-02-19 Delco Electronics Corporation Method of making a semiconductive structure useful as a pressure sensor
US5189777A (en) * 1990-12-07 1993-03-02 Wisconsin Alumni Research Foundation Method of producing micromachined differential pressure transducers
ES2146709T3 (es) * 1991-08-21 2000-08-16 Smith & Nephew Inc Sistema de control de fluidos.
DE4309207C2 (de) * 1993-03-22 1996-07-11 Texas Instruments Deutschland Halbleitervorrichtung mit einem piezoresistiven Drucksensor
US5668319A (en) * 1994-02-07 1997-09-16 The Regents Of The University Of California Micromachined accelerometer
US5711302A (en) * 1994-03-03 1998-01-27 Merit Medical Systems, Inc. Disposable transducer with digital processing and readout
US5591139A (en) * 1994-06-06 1997-01-07 The Regents Of The University Of California IC-processed microneedles
JP3679143B2 (ja) * 1994-06-30 2005-08-03 株式会社ニデック 灌流吸引装置
EP0702221A3 (de) * 1994-09-14 1997-05-21 Delco Electronics Corp Auf einem Chip integrierter Sensor
DE4438201C2 (de) * 1994-10-26 1997-01-30 Gerhard Heinrich Dr In Steeger Gerät zur langzeitigen Normalisierung des Kammerwasserabflusses aus dem menschlichen Auge
US5701905A (en) * 1995-11-13 1997-12-30 Localmed, Inc. Guide catheter with sensing element
US5879572A (en) * 1996-11-19 1999-03-09 Delco Electronics Corporation Method of protecting silicon wafers during wet chemical etching

Also Published As

Publication number Publication date
CA2281301C (en) 2003-11-11
EP0988826B1 (de) 2002-01-09
CA2281301A1 (en) 2000-03-01
US6010461A (en) 2000-01-04
EP0988826A1 (de) 2000-03-29
DE69900771D1 (de) 2002-02-28

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee