DE69840575D1 - Optischer wellenleiter mit mikrospiegel, sein herstellungsverfahren, und optischer signalprozessor - Google Patents

Optischer wellenleiter mit mikrospiegel, sein herstellungsverfahren, und optischer signalprozessor

Info

Publication number
DE69840575D1
DE69840575D1 DE69840575T DE69840575T DE69840575D1 DE 69840575 D1 DE69840575 D1 DE 69840575D1 DE 69840575 T DE69840575 T DE 69840575T DE 69840575 T DE69840575 T DE 69840575T DE 69840575 D1 DE69840575 D1 DE 69840575D1
Authority
DE
Germany
Prior art keywords
optical
microscope
manufacturing
signaling processor
optical waveguide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69840575T
Other languages
English (en)
Inventor
Mitsumasa Koyanagi
Yasuhiro Kuwana
Yutaka Honda
Nobuo Miyadera
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Showa Denko Materials Co ltd
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Application granted granted Critical
Publication of DE69840575D1 publication Critical patent/DE69840575D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02—Optical fibres with cladding with or without a coating
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4246—Bidirectionally operating package structures
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12104—Mirror; Reflectors or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)
DE69840575T 1997-10-01 1998-10-01 Optischer wellenleiter mit mikrospiegel, sein herstellungsverfahren, und optischer signalprozessor Expired - Lifetime DE69840575D1 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP26900297 1997-10-01
JP26900197 1997-10-01
JP1612298 1998-01-28
PCT/JP1998/004433 WO1999017143A1 (fr) 1997-10-01 1998-10-01 Guide d'ondes optiques avec micromiroir, son procede de fabrication et unite de traitement d'informations optiques

Publications (1)

Publication Number Publication Date
DE69840575D1 true DE69840575D1 (de) 2009-04-02

Family

ID=27281259

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69840575T Expired - Lifetime DE69840575D1 (de) 1997-10-01 1998-10-01 Optischer wellenleiter mit mikrospiegel, sein herstellungsverfahren, und optischer signalprozessor

Country Status (6)

Country Link
EP (1) EP1020749B1 (de)
KR (1) KR100460388B1 (de)
CN (1) CN1208650C (de)
AU (1) AU9281498A (de)
DE (1) DE69840575D1 (de)
WO (1) WO1999017143A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003050329A (ja) * 2001-08-06 2003-02-21 Toppan Printing Co Ltd 光・電気配線基板及びその製造方法並びに実装基板
JP3833132B2 (ja) 2002-03-25 2006-10-11 キヤノン株式会社 光導波装置の製造方法
JP2007114374A (ja) * 2005-10-19 2007-05-10 Hitachi Cable Ltd 光導波路素子及び多連光導波路素子
CN104199262B (zh) * 2014-08-08 2018-04-27 珠海赛纳打印科技股份有限公司 挡纸机构、进纸部、图像形成设备及进纸方法
CN105974744A (zh) * 2016-05-25 2016-09-28 淮阴工学院 一种基于聚甲基苯基硅烷/聚甲基丙烯酸苄酯共聚物光波导的微反射镜制作方法
CN111326533B (zh) * 2018-12-14 2023-01-13 上海新微技术研发中心有限公司 一种波导集成型光电探测器及其制作方法
CN110673261B (zh) 2019-09-06 2021-01-22 上海大学 基于紫外灰阶光刻制备光波导球形凹面镜的方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59101217U (ja) * 1982-12-27 1984-07-07 日本板硝子株式会社 光分配ダクト
JPH02108023A (ja) * 1988-10-17 1990-04-19 Semiconductor Energy Lab Co Ltd 液晶電気光学装置
US5170448A (en) * 1992-01-06 1992-12-08 Motorola, Inc. Optical waveguide apparatus and method for partially collecting light
JP2986140B2 (ja) * 1993-12-24 1999-12-06 日本電気株式会社 マルチチップモジュール
JP3064224B2 (ja) * 1995-11-27 2000-07-12 松下電工株式会社 照明装置

Also Published As

Publication number Publication date
CN1208650C (zh) 2005-06-29
CN1272182A (zh) 2000-11-01
KR20010030678A (ko) 2001-04-16
KR100460388B1 (ko) 2004-12-08
EP1020749A1 (de) 2000-07-19
AU9281498A (en) 1999-04-23
WO1999017143A1 (fr) 1999-04-08
EP1020749A4 (de) 2001-04-11
EP1020749B1 (de) 2009-02-18

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Legal Events

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