DE69840515D1 - Hochspannungsschutzanordnung für einen integrierten MOS-Leistungstransistor - Google Patents

Hochspannungsschutzanordnung für einen integrierten MOS-Leistungstransistor

Info

Publication number
DE69840515D1
DE69840515D1 DE69840515T DE69840515T DE69840515D1 DE 69840515 D1 DE69840515 D1 DE 69840515D1 DE 69840515 T DE69840515 T DE 69840515T DE 69840515 T DE69840515 T DE 69840515T DE 69840515 D1 DE69840515 D1 DE 69840515D1
Authority
DE
Germany
Prior art keywords
high voltage
power transistor
voltage protection
protection arrangement
mos power
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69840515T
Other languages
English (en)
Inventor
Jean Barret
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics SA
Original Assignee
STMicroelectronics SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STMicroelectronics SA filed Critical STMicroelectronics SA
Application granted granted Critical
Publication of DE69840515D1 publication Critical patent/DE69840515D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76Unipolar devices, e.g. field effect transistors
    • H01L29/772Field effect transistors
    • H01L29/78Field effect transistors with field effect produced by an insulated gate
    • H01L29/7801DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
    • H01L29/7802Vertical DMOS transistors, i.e. VDMOS transistors
    • H01L29/7803Vertical DMOS transistors, i.e. VDMOS transistors structurally associated with at least one other device
    • H01L29/7808Vertical DMOS transistors, i.e. VDMOS transistors structurally associated with at least one other device the other device being a breakdown diode, e.g. Zener diode
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
    • H01L27/0203Particular design considerations for integrated circuits
    • H01L27/0248Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
    • H01L27/0251Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices
    • H01L27/0255Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices using diodes as protective elements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76Unipolar devices, e.g. field effect transistors
    • H01L29/772Field effect transistors
    • H01L29/78Field effect transistors with field effect produced by an insulated gate
    • H01L29/7801DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
    • H01L29/7802Vertical DMOS transistors, i.e. VDMOS transistors
    • H01L29/7803Vertical DMOS transistors, i.e. VDMOS transistors structurally associated with at least one other device
DE69840515T 1997-05-28 1998-05-22 Hochspannungsschutzanordnung für einen integrierten MOS-Leistungstransistor Expired - Fee Related DE69840515D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9706823A FR2764136B1 (fr) 1997-05-28 1997-05-28 Protection contre des surtensions d'un transistor mos de puissance integre

Publications (1)

Publication Number Publication Date
DE69840515D1 true DE69840515D1 (de) 2009-03-19

Family

ID=9507538

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69840515T Expired - Fee Related DE69840515D1 (de) 1997-05-28 1998-05-22 Hochspannungsschutzanordnung für einen integrierten MOS-Leistungstransistor

Country Status (5)

Country Link
US (1) US6054740A (de)
EP (1) EP0881682B1 (de)
JP (1) JP2940547B2 (de)
DE (1) DE69840515D1 (de)
FR (1) FR2764136B1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4501178B2 (ja) * 1999-07-26 2010-07-14 株式会社デンソー 半導体装置のための保護装置
US6329691B1 (en) * 1999-12-13 2001-12-11 Tower Semiconductor Ltd. Device for protection of sensitive gate dielectrics of advanced non-volatile memory devices from damage due to plasma charging
US6417544B1 (en) 2001-06-11 2002-07-09 Chartered Semiconductor Manufacturing Ltd. Diode-like plasma induced damage protection structure
US7262468B2 (en) * 2001-12-28 2007-08-28 Texas Instruments Incorporated Method and system for reducing charge damage in silicon-on-insulator technology
JP2006148886A (ja) 2004-10-27 2006-06-08 Stmicroelectronics Sa パワートランジスタの保護
DE102005019709A1 (de) 2005-04-28 2006-11-02 Robert Bosch Gmbh Endstufe mit Zenerspannungs-Symmetrierung
DE102005051004A1 (de) * 2005-10-25 2007-04-26 Robert Bosch Gmbh Temperaturkompensation bei Endstufen
DE102012111061A1 (de) * 2012-11-16 2014-05-22 Phoenix Contact Gmbh & Co. Kg Schutzschaltung für einen Stromwandler und Stromwandler mit einer Schutzschaltung
US10110216B1 (en) * 2017-06-30 2018-10-23 Dialog Semiconductor (Uk) Limited Over voltage protection of a transistor device

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0465878A (ja) * 1990-07-06 1992-03-02 Fuji Electric Co Ltd 半導体装置
FR2698486B1 (fr) * 1992-11-24 1995-03-10 Sgs Thomson Microelectronics Structure de protection contre les surtensions directes pour composant semiconducteur vertical.
EP0622849B1 (de) * 1993-04-28 1999-09-22 Co.Ri.M.Me. Consorzio Per La Ricerca Sulla Microelettronica Nel Mezzogiorno Monolithisch integrierte Struktur einer elektronischen Vorrichtung mit einer bestimmten unidirektionalen Konduktionsschwellenspannung
FR2734113B1 (fr) * 1995-05-12 1997-07-25 Sgs Thomson Microelectronics Composant de protection complet de circuit d'interface de lignes d'abonnes
AU6388796A (en) * 1995-09-11 1997-04-01 Analog Devices, Inc. Electrostatic discharge protection network and method
US5739998A (en) * 1996-07-12 1998-04-14 Kabushiki Kaisha Toshiba Protective circuit and semiconductor integrated circuit incorporating protective circuit

Also Published As

Publication number Publication date
US6054740A (en) 2000-04-25
JPH10335664A (ja) 1998-12-18
FR2764136A1 (fr) 1998-12-04
EP0881682A1 (de) 1998-12-02
EP0881682B1 (de) 2009-01-28
FR2764136B1 (fr) 1999-08-13
JP2940547B2 (ja) 1999-08-25

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee