DE69836938D1 - Apparat zum Erfassung von Verschiebungsinformation - Google Patents

Apparat zum Erfassung von Verschiebungsinformation

Info

Publication number
DE69836938D1
DE69836938D1 DE69836938T DE69836938T DE69836938D1 DE 69836938 D1 DE69836938 D1 DE 69836938D1 DE 69836938 T DE69836938 T DE 69836938T DE 69836938 T DE69836938 T DE 69836938T DE 69836938 D1 DE69836938 D1 DE 69836938D1
Authority
DE
Germany
Prior art keywords
displacement information
detecting displacement
detecting
information
displacement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69836938T
Other languages
English (en)
Other versions
DE69836938T2 (de
DE69836938T3 (de
Inventor
Manabu Takayama
Masahiko Igaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=26506142&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69836938(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE69836938D1 publication Critical patent/DE69836938D1/de
Publication of DE69836938T2 publication Critical patent/DE69836938T2/de
Publication of DE69836938T3 publication Critical patent/DE69836938T3/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
DE69836938T 1997-06-30 1998-06-29 Apparat zum Erfassung von Verschiebungsinformation Expired - Lifetime DE69836938T3 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP19052097 1997-06-30
JP19052097 1997-06-30
JP19052197 1997-06-30
JP19052197 1997-06-30
EP98111971A EP0889303B2 (de) 1997-06-30 1998-06-29 Apparat zum Erfassung von Verschiebungsinformation

Publications (3)

Publication Number Publication Date
DE69836938D1 true DE69836938D1 (de) 2007-03-15
DE69836938T2 DE69836938T2 (de) 2007-11-08
DE69836938T3 DE69836938T3 (de) 2013-02-14

Family

ID=26506142

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69836938T Expired - Lifetime DE69836938T3 (de) 1997-06-30 1998-06-29 Apparat zum Erfassung von Verschiebungsinformation

Country Status (5)

Country Link
US (1) US6654128B2 (de)
EP (1) EP0889303B2 (de)
KR (1) KR100274131B1 (de)
DE (1) DE69836938T3 (de)
SG (1) SG75127A1 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19956912A1 (de) * 1999-11-26 2001-08-09 Heidenhain Gmbh Dr Johannes Winkelmeßsystem und Winkelmeßverfahren zur berührungslosen Winkelmessung
JP4280447B2 (ja) * 2001-02-20 2009-06-17 キヤノン株式会社 反射スケールおよびそれを用いた変位検出装置
US7196320B1 (en) 2005-03-14 2007-03-27 Robert Rickenbach Fiber optic encoder for position sensing
US7714272B2 (en) * 2006-09-28 2010-05-11 Stanley Electric Co., Ltd. Optical absolute rotary encoder
US7566863B2 (en) * 2006-10-16 2009-07-28 Chang Christopher C Optical encoder with diffractive encoder member
JP4827019B2 (ja) * 2007-02-14 2011-11-30 コニカミノルタオプト株式会社 光学素子及び光ピックアップ装置
US20080203283A1 (en) * 2007-02-23 2008-08-28 Yee Loong Chin Optical encoder with detector lens
US7561280B2 (en) * 2007-03-15 2009-07-14 Agilent Technologies, Inc. Displacement measurement sensor head and system having measurement sub-beams comprising zeroth order and first order diffraction components
US7545507B2 (en) * 2007-03-15 2009-06-09 Agilent Technologies, Inc. Displacement measurement system
DE102007028943A1 (de) * 2007-06-22 2008-12-24 Dr. Johannes Heidenhain Gmbh Abtasteinheit für eine optische Positionsmesseinrichtung
JP5344180B2 (ja) * 2008-02-08 2013-11-20 株式会社ニコン 位置計測システム及び位置計測方法、移動体装置、移動体駆動方法、露光装置及び露光方法、パターン形成装置、並びにデバイス製造方法
US7924433B2 (en) * 2008-09-08 2011-04-12 Agilent Technologies, Inc. Displacement measurement system and method of use
JP5706861B2 (ja) * 2011-10-21 2015-04-22 キヤノン株式会社 検出器、検出方法、インプリント装置及び物品製造方法
TWI648520B (zh) 2016-10-21 2019-01-21 財團法人工業技術研究院 光學編碼裝置
TWI680648B (zh) 2018-12-26 2019-12-21 財團法人工業技術研究院 編碼盤、檢光器、光學絕對式旋轉編碼器及編碼值輸出、偵錯與除錯的方法
TWI716246B (zh) 2019-12-31 2021-01-11 財團法人工業技術研究院 光學編碼器
CN113701640B (zh) * 2020-09-17 2023-01-20 中国科学院上海光学精密机械研究所 一种三轴光栅尺

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1673978B1 (de) † 1967-03-22 1972-03-09 Olympus Optical Co Photoelektrische messanordnung zum bestimmen der gegenseitigen verlagerung zweier objekte
DE2451688C2 (de) † 1974-10-31 1976-08-05 Orenstein & Koppel Ag Antrieb fuer Drehgestelle
DE2451668A1 (de) * 1974-10-31 1976-05-06 Leitz Ernst Gmbh Anordnung zur geometrischen trennung von lichtfluessen in abbildungssystemen
US4180704A (en) 1978-06-28 1979-12-25 International Business Machines Corporation Detection circuit for a bi-directional, self-imaging grating detector
JPH0778433B2 (ja) * 1988-07-19 1995-08-23 キヤノン株式会社 ロータリーエンコーダ
US5035507A (en) 1988-12-21 1991-07-30 Mitutoyo Corporation Grating-interference type displacement meter apparatus
DE3905730C2 (de) † 1989-02-24 1995-06-14 Heidenhain Gmbh Dr Johannes Positionsmeßeinrichtung
DE4004835A1 (de) 1989-11-02 1991-05-08 Heidenhain Gmbh Dr Johannes Positionsmesseinrichtung
DE4006365A1 (de) 1990-03-01 1991-10-17 Heidenhain Gmbh Dr Johannes Positionsmesseinrichtung
US5124548A (en) * 1990-05-03 1992-06-23 Canon Kabushiki Kaisha Encoder for detecting relative displacement having first and second scales and a light receiving device
US5104225A (en) 1991-01-25 1992-04-14 Mitutoyo Corporation Position detector and method of measuring position
JPH05256666A (ja) 1992-03-13 1993-10-05 Canon Inc ロータリーエンコーダー
JP3254737B2 (ja) 1992-06-17 2002-02-12 キヤノン株式会社 エンコーダー
JP3227206B2 (ja) 1992-06-30 2001-11-12 キヤノン株式会社 光学式エンコーダ
JP3170902B2 (ja) 1992-09-30 2001-05-28 キヤノン株式会社 信号処理方法及びそれを用いたエンコーダ

Also Published As

Publication number Publication date
EP0889303B2 (de) 2012-10-17
US20020085210A1 (en) 2002-07-04
KR100274131B1 (ko) 2001-01-15
EP0889303A3 (de) 2000-10-04
DE69836938T2 (de) 2007-11-08
US6654128B2 (en) 2003-11-25
EP0889303A2 (de) 1999-01-07
SG75127A1 (en) 2000-09-19
DE69836938T3 (de) 2013-02-14
KR19990007470A (ko) 1999-01-25
EP0889303B1 (de) 2007-01-24

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Legal Events

Date Code Title Description
8381 Inventor (new situation)

Inventor name: TAKAYAMA, MANABU, TOKYO, JP

Inventor name: IGAKI, C/O CANON KABUSHIKI KAISHA, MASAHIKO, T, JP

8363 Opposition against the patent
R102 Epo decision maintaining patent in amended form now final

Ref document number: 889303

Country of ref document: EP

Effective date: 20121017