DE69835157T2 - Reihenelektroden-anodisierung - Google Patents
Reihenelektroden-anodisierung Download PDFInfo
- Publication number
- DE69835157T2 DE69835157T2 DE69835157T DE69835157T DE69835157T2 DE 69835157 T2 DE69835157 T2 DE 69835157T2 DE 69835157 T DE69835157 T DE 69835157T DE 69835157 T DE69835157 T DE 69835157T DE 69835157 T2 DE69835157 T2 DE 69835157T2
- Authority
- DE
- Germany
- Prior art keywords
- row electrode
- present
- electrode
- field emission
- row
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007743 anodising Methods 0.000 title description 2
- 238000000034 method Methods 0.000 claims description 53
- 238000002048 anodisation reaction Methods 0.000 claims description 28
- 238000000151 deposition Methods 0.000 claims description 16
- 229910052751 metal Inorganic materials 0.000 claims description 16
- 239000002184 metal Substances 0.000 claims description 16
- 230000008021 deposition Effects 0.000 claims description 13
- 230000001681 protective effect Effects 0.000 claims description 2
- 229910052715 tantalum Inorganic materials 0.000 description 23
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 22
- 229910052782 aluminium Inorganic materials 0.000 description 18
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 17
- 238000004519 manufacturing process Methods 0.000 description 13
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 12
- 230000000873 masking effect Effects 0.000 description 10
- 239000004020 conductor Substances 0.000 description 9
- 238000000576 coating method Methods 0.000 description 7
- 239000011248 coating agent Substances 0.000 description 6
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 230000007797 corrosion Effects 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 230000035558 fertility Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000003518 caustics Substances 0.000 description 1
- 239000011195 cermet Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 238000013507 mapping Methods 0.000 description 1
- 239000012811 non-conductive material Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/30—Cold cathodes, e.g. field-emissive cathode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/14—Manufacture of electrodes or electrode systems of non-emitting electrodes
- H01J9/148—Manufacture of electrodes or electrode systems of non-emitting electrodes of electron emission flat panels, e.g. gate electrodes, focusing electrodes or anode electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
- H01J29/467—Control electrodes for flat display tubes, e.g. of the type covered by group H01J31/123
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/02—Electron guns
- H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
- H01J3/022—Electron guns using a field emission, photo emission, or secondary emission electron source with microengineered cathode, e.g. Spindt-type
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
- Electrodes For Cathode-Ray Tubes (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US08/940,706 US6149792A (en) | 1997-09-30 | 1997-09-30 | Row electrode anodization |
| US940706 | 1997-09-30 | ||
| PCT/US1998/018278 WO1999017324A1 (en) | 1997-09-30 | 1998-09-03 | Row electrode anodization |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69835157D1 DE69835157D1 (de) | 2006-08-17 |
| DE69835157T2 true DE69835157T2 (de) | 2007-05-31 |
Family
ID=25475289
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69835157T Expired - Lifetime DE69835157T2 (de) | 1997-09-30 | 1998-09-03 | Reihenelektroden-anodisierung |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US6149792A (enExample) |
| EP (1) | EP1019935B1 (enExample) |
| JP (1) | JP4330795B2 (enExample) |
| KR (1) | KR20010030590A (enExample) |
| DE (1) | DE69835157T2 (enExample) |
| WO (1) | WO1999017324A1 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6433473B1 (en) * | 1998-10-29 | 2002-08-13 | Candescent Intellectual Property Services, Inc. | Row electrode anodization |
| TW502282B (en) * | 2001-06-01 | 2002-09-11 | Delta Optoelectronics Inc | Manufacture method of emitter of field emission display |
| TWI278887B (en) * | 2003-09-02 | 2007-04-11 | Ind Tech Res Inst | Substrate for field emission display |
| US9300036B2 (en) | 2013-06-07 | 2016-03-29 | Apple Inc. | Radio-frequency transparent window |
| US9985345B2 (en) | 2015-04-10 | 2018-05-29 | Apple Inc. | Methods for electrically isolating areas of a metal body |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0364964B1 (en) * | 1988-10-17 | 1996-03-27 | Matsushita Electric Industrial Co., Ltd. | Field emission cathodes |
| EP0434001B1 (en) * | 1989-12-19 | 1996-04-03 | Matsushita Electric Industrial Co., Ltd. | Electron emission device and method of manufacturing the same |
| US5075591A (en) * | 1990-07-13 | 1991-12-24 | Coloray Display Corporation | Matrix addressing arrangement for a flat panel display with field emission cathodes |
| US5203731A (en) * | 1990-07-18 | 1993-04-20 | International Business Machines Corporation | Process and structure of an integrated vacuum microelectronic device |
| JP2720662B2 (ja) * | 1991-09-30 | 1998-03-04 | 双葉電子工業株式会社 | 電界放出素子及びその製造方法 |
| EP0623944B1 (en) * | 1993-05-05 | 1997-07-02 | AT&T Corp. | Flat panel display apparatus, and method of making same |
| KR970004885B1 (ko) * | 1993-05-12 | 1997-04-08 | 삼성전자 주식회사 | 평판표시장치 및 그 제조방법 |
| US5518805A (en) * | 1994-04-28 | 1996-05-21 | Xerox Corporation | Hillock-free multilayer metal lines for high performance thin film structures |
| US5591352A (en) * | 1995-04-27 | 1997-01-07 | Industrial Technology Research Institute | High resolution cold cathode field emission display method |
| US5731216A (en) * | 1996-03-27 | 1998-03-24 | Image Quest Technologies, Inc. | Method of making an active matrix display incorporating an improved TFT |
-
1997
- 1997-09-30 US US08/940,706 patent/US6149792A/en not_active Expired - Lifetime
-
1998
- 1998-09-03 JP JP2000514297A patent/JP4330795B2/ja not_active Expired - Fee Related
- 1998-09-03 WO PCT/US1998/018278 patent/WO1999017324A1/en not_active Ceased
- 1998-09-03 EP EP98942358A patent/EP1019935B1/en not_active Expired - Lifetime
- 1998-09-03 DE DE69835157T patent/DE69835157T2/de not_active Expired - Lifetime
- 1998-09-03 KR KR1020007002629A patent/KR20010030590A/ko not_active Ceased
- 1998-10-29 US US09/183,540 patent/US5942841A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| EP1019935A1 (en) | 2000-07-19 |
| US5942841A (en) | 1999-08-24 |
| DE69835157D1 (de) | 2006-08-17 |
| US6149792A (en) | 2000-11-21 |
| EP1019935B1 (en) | 2006-07-05 |
| WO1999017324A1 (en) | 1999-04-08 |
| JP2001518683A (ja) | 2001-10-16 |
| JP4330795B2 (ja) | 2009-09-16 |
| EP1019935A4 (en) | 2004-04-07 |
| KR20010030590A (ko) | 2001-04-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition | ||
| 8327 | Change in the person/name/address of the patent owner |
Owner name: CANON K.K., TOKYO, JP |
|
| 8328 | Change in the person/name/address of the agent |
Representative=s name: BOEHMERT & BOEHMERT, 28209 BREMEN |